Sigma SQM-160 User Manual page 34

Deposition rate/thickness monitor
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C. I/O Connections
A 15-pin female D-sub connector is included with the instrument to connect digital I/O to
the SQM-160 Relay I/O connector. The figure below shows the solder side pin
assignments for the connector.
Relays are rated for 125VAC or 30VDC, 2A maximum. Inputs can be activated either
by connecting to a switch and shorting to Ground, or they can be driven by a TTL
compatible signal. These are not isolated inputs! The voltage level applied must be
limited to between 0 and +5 volts with respect to Ground.
Pins
1,2
Relay
3,4
Relay
5,6
Relay
7,8
Relay
9
Input
10
Input
11
Input
12
Input
13,14,15
Ground
1
9
Relay I/O Connector Rear View
Type
Crystal Fail Relay, contacts closed when all
enabled sensors have failed.
Timer Setpoint, contacts closed when timer
reaches Zero from its programmed value.
Shutter Relay, contacts closed when shutter
is open.
Thickness Setpoint Relay, contacts close
when thickness value reached.
Zero Timer Input, grounding this pin will zero
the timer.
Zero Thickness Input, grounding this pin will
zero the thickness reading.
Close Shutter Input, grounding this pin will
close the shutter.
Open Shutter Input, grounding this pin will
open the shutter.
8
1 5
Description
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