Sigma SQM-160 User Manual page 16

Deposition rate/thickness monitor
Table of Contents

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Chapter 2
Program
Display
Description
TIMEBASE
Time required to take a single
measurement
SIM MODE
Simulates sensors.
FRQ DISP
Toggles between Rate/Thickness
and Frequency Displays
RATE RES
Display resolution of Rate
RATEFILT
Number of readings averaged for
rate calculations
BAUDRATE
Serial Baud Rate to PC
ETCH
Sets mode to negative rate for
etching applications
System Parameters Menu
- TIMEBASE
- SIM MODE
- FRQ DISP
- RATE RES
Prev
- RATEFILT
- BAUDRATE
- ETCH
- xTOOLING
- FMIN/MAX
- R/T BNDS
Operation
Sub-Menu
- xTLTOOL1
- xTLTOOL2
- xTLTOOL3
.
.
- xTLTOOL6
- FREQ MIN
- FREQ MAX
- RATE MIN
- RATE MAX
- THICKMIN
Range
Default
0.15 – 2.00
0.25
On/Off
Off
On/Off
Off
Hi/Low
Low
1 – 20
8
2.4 – 19.2
19.2
On/Off
Off
Units
sec
kbps
2-5

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