P. Energy L150A User And Maintenance Handbook page 15

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CYCLE PAGE
The cycle page is divided in two submenu:
COMMANDS AND TEMPERATURE PLATE
NEXT STEP:This pushbutton force to next recipe step
STEP N°:Info field where is showed the current recipe step
START CYCLE:Automatic start cycle pushbutton
Working parameter concerning the current recipe step.
Parameters are divided into two columns:
1- Real: it corresponds to measuring real value
2- Set: it correspond to the setpoint value expected to have reached
within a set window time. The operator can modify this value but
this modify work only in the actual recipe step and only for the
current lamination cycle. It's not possible to save the new value in
the recipe.
Description of parameters that appears:
Time: time duration of recipe step
Vup: Upper chamber vacuum value
Vdw: Lower chamber vacuum value
Reset Safety: reset the safety Beams, when the button is yellow
This monitoring page shows for each resistance the temperature graph
and the temperature plate settled in the recipe
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USER AND MAINTENANCE HANDBOOK L150A
"COMMAND " PAGE:
"HEATING COMMANDS" PAGE
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