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Related Manuals for Varian 919-1115
Summary of Contents for Varian 919-1115
- Page 1 MANUALE DI ISTRUZIONI VacIon Plus 20 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI (GB) INSTRUCTION MANUAL Model 919-1115 Model 919-1125 Model 919-1145 Model 919-1146 Model 919-1114 Model 919-1124 Model 919-1144 87-900-106-01(B) APRIL 2006...
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Page 5: Table Of Contents
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCTIONS FOR USE....................7 TECHNICAL INFORMATION ....................9 DESCRIPTION OF THE VACION PUMP ..................9 TECHNICAL SPECIFICATION ......................9 OUTLINE DRAWING ........................12 STRAY MAGNETIC FIELD ......................13 VACION PLUS PUMP INSTALLATION..................14 Inspection procedure ......................14 Visual inspection ........................14 Vacuum evaluation ......................14... -
Page 6: Istruzioni Per L'uso
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritie- ne sollevata da eventuali responsabilità dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. - Page 7 Il funzionamento delle pompe è ottimizzato solo con l’uso delle 6. La pressione nella pompa può anche essere calcolata leg- apposite unità di controllo Varian (Dual, MidiVac o MiniVac). gendo la corrente e convertendo la lettura in pressione tra- mite l’apposito diagramma pressione-corrente illustrato nell’appendice “Technical Information”...
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Page 8: Gebrauchsanleitung
ALLGEMEINE HINWEISE Dieses Gerät ist für den professionellen Gebrauch bestimmt. Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzdokumentationen genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mi- ßachtung der nationalen Bestimmungen übernimmt Firma Vari-... - Page 9 Funktionsweise des Dual. Wenn die Stromaufnah- Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der me der Pumpe ein bestimmtes Ausmaß erreicht, ändert die Pumpen ist nur bei Verwendung von Varian Steuereinheiten Steuereinheit die ausgangsseitige Hochspannung auf einen gewährleistet.
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Page 10: Mode D'emploi
Il est conseillé à l’utilisateur de lire attentivement cette notice d’instructions ainsi que toute autre indication sup- plémentaire fournie par Varian avant d’utiliser l’appareil. Varian décline toute responsabilité en cas de non respect total ou par- tiel des instructions fournies, d’opérations non autorisées, d’utilisation impropre par du personnel non formé... - Page 11 INSTRUCTIONS D’UTILISATION Le fonctionnement de la pompe n'est optimisé que si celle-ci Si une telle augmentation devait être enregistrée, l’unité est utilisée avec l'une des unités de contrôle Varian spécifiques de contrôle s’éteindrait automatiquement. (Dual, MidiVac ou MiniVac). La pression de la pompe peut également être calculée en relevant le courant et en convertissant la lecture en pres- sion à...
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Page 12: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 13 The safety specifications agreement using the pump is guaran- The steps on the pressure – current charts are a characteristic teed using the Varian controller only. of the Dual step voltage operation. When the current drawn by the VacIon pump reaches the specified values, the controller The VacIon Plus pump can be installed in any position.
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Page 14: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE VACION PUMP The Varian VacIon Plus 20 pumps are ion pumps and are available in three types: • StarCell • Noble Diode • Diode They operate in the pressure range from 10 below 10 Torr (mbar). Virtually all gases and va- pors can be pumped successfully with the ion Fig. - Page 15 TECHNICAL INFORMATION The pumping speed of a newly regenerated (i.e. Consequently, pumps can operate for extended baked) sputter ion pump decreases during opera- periods of time at low pressures in the non- tion until it reaches a stabilized level known as saturated state, if they are properly conditioned.
- Page 16 TECHNICAL INFORMATION VACION PLUS 20 NOBLE DIODE Fig. 6 - Pumping speed vs pressure for Nitrogen Fig. 7 - Pumping speed vs pressure for Argon Fig. 8 - Pressure vs current diagram 87-900-106-01(B)
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Page 17: Outline Drawing
TECHNICAL INFORMATION VACION PLUS 20 DIODE Fig. 9 - Pumping speed vs pressure for Nitrogen Fig. 10 - Pressure vs current diagram OUTLINE DRAWING The following figure shows the outline drawing for the VacIon Plus pump. Fig. 11 - VacIon Plus pump outline drawing 87-900-106-01(B) -
Page 18: Stray Magnetic Field
TECHNICAL INFORMATION STRAY MAGNETIC FIELD Curves of stray magnetic field strength along the centre line of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs. 13, 14 and 15. Fig. -
Page 19: Vacion Plus Pump Installation
TECHNICAL INFORMATION − If the pump is free of leaks and is at a low VACION PLUS PUMP INSTALLATION pressure, the pressure indication shall within 10 minutes fall to or below the 10 Torr Inspection procedure (mbar) range as the volume of gas is VacIon Plus pumps are evacuated, baked out, pumped. -
Page 20: Inlet Flange Connection
TECHNICAL INFORMATION Fig. 16 - Typical installation INLET FLANGE CONNECTION WARNING! The pump should be mounted allowing a sufficient The pinch-off seal is extremely sharp. Be careful clearance for installation and removal of the high when opening. Watch your fingers. voltage connector. -
Page 21: Control Unit Connection
P/N 929-0705, when used with the tion, a stud mounting kit is available (see Fig. 17). Varian MidiVac and DUAL control units, allows the For ordering information refer to the “VacIon Plus operation of the “High Voltage Cable Safety Inter- pump replacement parts and accessories”... -
Page 22: Heater Replacement
Torr (mbar) or less is recom- 2. Leave the pump control unit on and monitor the mended. A turbo-molecular roughing pump is pressure. Varian recommends that current dur- recommended. ing bake not exceed 10 mA; if this value is ex- 2. -
Page 23: Maintenance
800 volts and increase of life time expiry or premature failure of the pump, to full voltage as the pump starts operating. please contact your nearest Varian sales/service The current will start at several milliamps and office for repair. -
Page 24: Leakage Current Check
TECHNICAL INFORMATION Leakage current check High-potting If the pump current reading is to be used as pres- A constant pump current when no vacuum leak sure measurement, check the pump leakage cur- exists is often caused by field emission currents rents as follows: which prevent the use of the pump current as a UHV pressure indicator. -
Page 25: Pump Troubleshooting
TECHNICAL INFORMATION PUMP TROUBLESHOOTING SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDURE 1) – Slow starting Starting vacuum pressure too high. Reduce pressure to 10 Torr rec- ommended 10 Torr minimum. 2) – Slow starting (more than 30 Air leaks which limit pressure to Leak check the vacuum system minutes). -
Page 26: Vacion Plus Pump Replacement Parts And Accessories
Copper gasket for 1 1/3" CF feedthrough FG-0133-CI flange (10-pack, individually sealed) Nut and bolt set for 1 1/3" CF feedthrough FB-0133-C flange, 8-32x3/4 (25-pack) For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Cata- logue. 87-900-106-01(B) -
Page 27: Vacion Plus Pump Controller
230 Vac with single output 929-5003 230 Vac with double output 929-5007 MiniVac MiniVac 120 Vac 929-0191 220 Vac 929-0290 24 Vdc 929-0196 MiniLink 120 Vac 929-0300 220 Vac 929-0301 Please refer to the Varian Vacuum Catalogue to choose the correct controller. 87-900-106-01(B) - Page 28 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 29 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 30 Toll Free # 1 (800) 882 7426 Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com China Mexico Varian Technologies - Beijing Varian, S. de R.L. de C.V. Rm 1648 Central Tower South Wing Concepcion Beistegui No 109 China Beijing Junefield Plaza Col Del Valle No.