Varian sentorr Instruction Manual page 33

Gauge controller
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Substance
Formula
Acetaldehyde
C
H
O
2
4
Acetone
(CH
)
CO
3
2
Acetylene
C
H
2
2
Air
Ammonia
NH
3
Amylene:
·
·
C
H
ISO
ISO
5
10
·
·
cyclo
C
H
CY
5
10
Argon
Ar
Benzene
C
H
6
6
Benzoic Acid
C
H
COOH
6
5
Bromine
Br
Bromomethane
CH
Br
3
Butane:
·
·
n
n
C
H
4
10
·
·
C
H
ISO
ISO
4
10
Cadmium
Cd
Carbon Dioxide
CO
2
Appendix
Gas Correction Factor Table
Relative Ionization Gauge
Gas Correction Factor
2.6
3.6
4.0
3.6
1.9
2.0
1.0
0.98
1.3
1.2
1.3
5.9
5.8
1.3
1.1
1.2
0.9
5.9
5.8
5.7
5.9
6.0
5.5
3.8
3.7
4.9
4.7
4.6
4.9
2.3
3.4
1.4
1.4
1.5
1.5
1.4
A-2
Substance
Formula
Carbon Disulfide
CS
2
Carbon Monoxide
CO
Carbon Tetrachloride
CCI
4
Cesium
Cs
Chlorine
CI
2
Chlorobenzene
C
H
Cl
6
5
Chloroethane
C
H
Cl
2
5
Chloroform
CHCl
3
Chloromethane
CH
Cl
3
Cyanogen
(CN)
2
Cyclohexylene
C
H
6
12
Deuterium
D
2
Dichlorodifloromethane CCI
F
2
Dichloromethane
CH
Cl
2
Dinitrobenzene
C
H
(NO
6
4
·
o
·
m
·
p
Ethane
C
H
2
6
Ethanol
C
H
OH
2
5
Ethyl Acetate
CH
COOC
3
Relative Ionization Gauge
Gas Correction Factor
5.0
4.7
4.8
1.05
1.05
1.1
6.0
6.3
4.3
2.0
4.8
0.68
2.6
1.6
7.0
4.0
4.7
4.8
4.8
2.6
3.2
3.1
2.8
3.6
2.7
7.9
6.4
0.35
0.38
2.7
2
4.1
3.7
2
)
2
2
7.8
7.8
7.6
2.6
2.8
2.5
3.6
2.9
H
5.0
2
5

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