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Omega FMA 5400A User Manual

Mass flow controllers
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User' s Guide
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e-mail: info@omega.com
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FMA 5400A/FMA 5500A
Mass Flow Controllers

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  • Page 1 User’ s Guide Shop online at omega.com e-mail: info@omega.com For latest product manuals: omegamanual.info FMA 5400A/FMA 5500A Mass Flow Controllers...
  • Page 2 Approach Directives. OMEGA will add the CE mark to every appropriate device upon certification. The information contained in this document is believed to be correct, but OMEGA accepts no liability for any errors it contains, and reserves the right to alter specifications without notice.

  • Page 3: Table Of Contents

    6.2.2 Valve Maintenance for FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min......7. CALIBRATION PROCEDURES............ 7.1 Flow Calibration................... 7.2 Calibration of FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min.................. 7.2.1 Connections and Initial Warm Up........7.2.2 Zero Adjustment.............
  • Page 4 7.2.4.1 Disable Solenoid Valve in FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min......7.2.5 Connections and Initial Warm Up........7.2.6 ZERO Adjustment............7.2.7 25% Flow Adjustment Using R33 Potentiometer.... 7.2.8 10% Flow Adjustment............. 7.2.9 25% Flow Adjustment (using R52 potentiometer)..
  • Page 5 7.4.3 Change Decimal Point............. 8. TROUBLESHOOTING............. 8.1 Common Conditions................8.2 General Troubleshooting Guide............8.3 FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min Valve Related Troubleshooting............8.4 Technical Assistance................. 9. CALIBRATION CONVERSIONS FROM REFERENCE GASES....APPENDIX 1 COMPONENT DIAGRAM..........

  • Page 6: Unpacking The Fma 5400A/5500A Mass Flow Controller

    UNPACKING THE FMA 5400A/5500A MASS FLOW CONTROLLER Inspect Package for External Damage CAUTION: Some of the IC devices used in the FMA 5400A/5500A are Electro Static Discharge (ESD) sensitive and may be damaged by improper handling. When wiring the interface connector, adjusting or...

  • Page 7: Installation

    Should there be need for a different orientation of the meter, re-calibration may be nec- essary. It is also preferable to install the FMA 5400A/5500A transducer in a sta- ble environment, free of frequent and sudden temperature changes, high mois- ture, and drafts.
  • Page 8 The operating power input is supplied via the 15-pin “D” connector located at the side of the flow transducer enclosure. On FMA 5400A/5500A's purchased without an LCD readout, a readout panel meter, digital multimeter, or other equivalent device is required to facilitate visual flow readings.
  • Page 9 10 & 11 +5 Vdc CONTROL SOURCE FIGURE 2-1 FMA 5400A/5500A 15-PIN “D” CONNECTOR CONFIGURATION *Do not connect +24 Vdc power supply unless your FMA 5400A/5500A controller was ordered and configured for 24 Vdc CAUTION: BEFORE CONNECTING THE POWER SUPPLY CHECK...

  • Page 10: Valve Control Configuration

    CAUTION: Fuse will not protect controller if power supply voltage exceeds maximum voltage specified for a particular model. Use of the FMA 5400A/5500A flow transducer in a manner other than that specified in this ® manual or in writing from OMEGA , may impair the protection provided by the equipment.

  • Page 11: Remote Lcd Readouts

    [3 meters] are available on request. 2.2.3 Panel Mounting Readouts Another option for the FMA 5400A/5500A Mass Flow Controller is the Panel Mounting Remote Readout. In this configuration the LCD readout is supplied with a three foot long extension wire, and no aluminum housing around the LCD.

  • Page 12: Principle Of Operation

    An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass-molecular based flow rates. FMA 5400A/5500A Mass Flow Controller Series Max. Flow 10, 50 and 100 L/min also incorporate a proportionating solenoid valve and Series Max. Flow 200, 500 and 1000 L/min a motorized valve.
  • Page 13 25% to 100% of full scale flow. MAX GAS PRESSURE: 1000 psig (69 bars) FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min; 500 psig (34.5 bars) Series Max. Flow 200, 500 & 1000 L/min. Optimum pressure is 20 psig (1.4 bars).
  • Page 14 FMA Series Max. Flow 1000 L/min: 3/4" FNPT ports. Optional: 3/4" compression fittings. LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”, 0.5 inch high characters. On FMA 5400A/5500A aluminum or stainless steel models the LCD display is built into the...

  • Page 15: Ce Compliance

    TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the FMA 5400A/5500A transducer 15-pin “D” connector. CE Compliance FMA 5400A/5500A Mass Flow Controllers are in compliance with CE test stan- dards stated below: EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992.

  • Page 16: Operating Instructions

    Allow the Mass Flow Controller to warm-up for at least 15 minutes. During initial powering of the FMA 5400A/5500A transducer, the flow output sig- nal will be indicating a higher than usual output. This is indication that the FMA 5400A/5500A transducer has not yet attained it's minimum operating tempera- ture.

  • Page 17: Flow Signal Output Readings

    5400A/5500A are shown on the flow transducer's front label. Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are available at the appropriate pins of the 15-pin “D” connector at the side of the FMA 5400A/5500A transducer (see Figure 2-1).

  • Page 18: Setpoint Reference Signal

    For REMOTE control of the FMA 5400A/5500A, an analog reference signal must be supplied. On pin [11] of the FMA 5400A/5500A transducer is a regulated and constant +5VDC output signal. This signal may be used in conjunction with a local setpoint potentiometer for flow setting.

  • Page 19: Valve Off Control (Open Collector Npn Compatible)

    At times, it may be necessary to purge the flow system with a neutralizing gas such as pure dry nitrogen. The FMA 5400A/5500A transducer is capable of a full open condition for the valve, regardless of setpoint conditions. Connecting the OPEN (PURGE) pin (pin [4] on 15-pin “D”...

  • Page 20: Maintenance

    RF or magnetic interference. If periodic calibrations are required they should be performed by qualified per- sonnel and calibrating instruments, as described in section (7). It is recommend- ed that units are returned to OMEGA ® for repair service and calibration.

  • Page 21: Valve Maintenance For Fma 5400A/5500A

    If alcohol is used for cleaning, allow time for drying before re-assembling. Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming the RFE. Be sure that no dust has collected on the O-ring seal. NOTE: Over tightening will deform and render the RFE defective. It is advisable that at least one calibration point be checked after re installing the inlet fitting - see section (7).
  • Page 22 Set the FMA 5400A/5500A into PURGE mode (see Figure 2-1), and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valve is to remove the plastic cap on top of the valve, and turning the set screw counterclockwise until it stops.

  • Page 23: Series Max. Flow 10, 50 And 100 L/Min

    NOTE: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this section, will void any calibration warranty applicable. Flow Calibration OMEGA ® Engineering Flow Calibration Laboratory offers professional calibration support for Mass Flow Meter and Controllers, using precision calibrators under strictly controlled conditions.

  • Page 24: Calibration Of Fma 5400A/5500A Series Max. Flow

    R40 100% R39 75% R38 50% FIGURE 7-1 FMA 5400A/5500A SERIES MAX. FLOW 10, 50, 100 L/MIN CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF FMA 5400A/5500A ) Calibration of FMA 5400A/5500A Series Max. Flow 10, 50, 100 L/min Mass Flow Controllers All adjustments in this section are made from the outside of the meter, there is no need to disassemble any part of the instrument.

  • Page 25: Zero Adjustment

    LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE: ✓ Occluded or contaminated sensor tube. ✓ Leaking condition in the FMA 5400A/5500A transducer or the gas line and fittings. ✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table. ✓...

  • Page 26: Connections And Initial Warm Up

    7.2.5 Connections and Initial Warm Up Connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1). If calibration to a new flow range or different gas is being performed, it may be necessary to remove any jumpers at J1A, J1B, J1C and J1D before beginning lin- earizing procedure.

  • Page 27: 10% Flow Adjustment

    2 - 3 5 - 6 8 - 9 11 - 12 FIGURE 7-2 FMA 5400A/5500A SERIES MAX. FLOW 10, 50, 100 L/min CALIBRATION POTENTIOMETER AND JUMPERS 7.2.8 10% Flow Adjustment Using the flow regulator, adjust the flow rate to 10% of full scale flow according to the calibrator.

  • Page 28: Valve Adjustment

    7.2.14 Close Loop Full Scale Flow Adjustment Fully open the flow regulator upstream of the FMA 5400A/5500A. Increase the inlet pressure to 20 psig (25 psig for FMA Series Max. Flow 100 L/min). Apply a +5.00 VDC (100% full scale flow) setpoint reference. Using the calibrator check the flow rate.

  • Page 29: Close Loop 50% Flow Adjustment

    All adjustments in this section are made from the outside of the meter, there is no need to disassemble any part of the instrument. FMA 5400A/5500A Mass Flow Controllers may be field recalibrated/checked for the same range they were orig- inally factory calibrated for.

  • Page 30: Connections And Initial Warm Up

    SPAN (25%) R40 100% R39 75% R38 50% FIGURE 7-3 FMA 5400A/5500A SERIES MAX. FLOW 200, 500 AND 1000 L/MIN CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF FMA 5400A/5500A) 7.3.1 Connections and Initial Warm Up At the 15-pin “D” connector of the FMA 5400A/5500A transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 Vdc (or pins [9] and [14] for 4 to 20 mA) - (see Figure 2-1).

  • Page 31: Linearity Adjustment

    LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE: ✓ Occluded or contaminated sensor tube. ✓ Leaking condition in the FMA 5400A/5500A transducer or the gas line and fittings. ✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table. ✓...

  • Page 32: 50% Flow Adjustment

    Series Max. Flow 200, 500 and 1000 L/min Discontinue the PURGE mode (set valve for the Auto position). DO NOT adjust the motorized valve for FMA 5400A/5500A Series Max. Flow 200, 500 and 1000 L/min. The motorized valve for these models has been pre-adjusted at the factory.

  • Page 33: Full Scale Flow Adjustment

    7.3.12 Full Scale Flow Adjustment Fully open the flow regulator upstream of the FMA 5400A/5500A. Increase the inlet pressure to 20 psig. Apply a +5.00 Vdc (100% full scale flow) setpoint reference. Using the calibrator check the flow rate. If necessary, adjust R33 to match the desired full scale flow rate.

  • Page 34: Adjust Scaling

    Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA sig- nal at the 15-pin “D” connector, set the flow rate on the FMA 5400A/5500A to full scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiome- ter [R3] on the LCD printed circuit board to desired full scale flow reading.

  • Page 35: General Troubleshooting Guide

    (section 8.3.3) FMA 5400A/5500A Series Max Flow 10, 50, 100 L/min valve adjustment wrong flow reading inadequate gas pressure apply appropriate gas pressure...
  • Page 36 “no flow” condition or gas leak locate and repair with valve closed FMA 5400A/5500A Series Max re-adjust valve (section valve Flow 10, 50, 100 L/min 8.3.1 below) adjustment wrong gas metered is not the same as calibration off...

  • Page 37: Valve Related Troubleshooting

    FMA 5400A/5500A Series Max. Flow 10, 50 and 100 L/min Valve Related Troubleshooting 8.3.1 INDICATION: LIKELY REASON: REMEDY: With “no flow Valve is out of 1.
  • Page 38 LIKELY REASON: REMEDY: Differential pressure Valve 1. Make sure differential pressure across across the compression the FMA 5400A/5500A is within FMA 5400A/5500A spring is over specification. controller is within adjusted and PID 2. Install control set point to 100% F.S.
  • Page 39 8.3.3 INDICATION: LIKELY REASON: REMEDY: Differential pressure Valve 1. Make sure differential pressure across across the compression the FMA 5400A/5500A is within FMA 5400A/5500A spring is over specification. controller is within adjusted and 2. Adjust control set point to 100% F.S.

  • Page 40: Technical Assistance

    For best results it is recommended that instruments are returned to the factory for servicing. See section 1.3 for return procedures. Technical Assistance OMEGA ® Engineering will provide technical assistance over the phone to quali- fied repair personnel. Please call our Flow Department at 800-872-9436 Ext.

  • Page 41: Appendix 1 Component Diagram

    APPENDIX 1 COMPONENTS DIAGRAM FMA 5400A/5500A SERIES MAX. FLOW 10, 50 AND 100 L/MIN PC BOARD (TOP SIDE)
  • Page 42 COMPONENTS DIAGRAM FMA 5400A/5500A SERIES MAX. FLOW 10, 50 AND 100 L/MIN PC BOARD (BOTTOM SIDE)

  • Page 43: Gas Factor Table ("K" Factors)

    APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Acetylene C...
  • Page 44 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Deuterium D 1.00 1.722 1.799 Diborane B .4357 .508 1.235 Dibromodifluoromethane CBr .1947 9.362 Dichlorodifluoromethane (Freon-12) CCl .3538 .1432 5.395 Dichlofluoromethane (Freon-21) CHCl .4252 .140 4.592 Dichloromethylsilane (CH SiCl .2522 .1882 5.758 Dichlorosilane SiH...
  • Page 45 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] 1.000 .0861 3.610 Hydrogen Bromide HBr 1.000 .1912 1.627 Hydrogen Chloride HCl .764 .3171 1.206 Hydrogen Cyanide HCN .9998 .3479 .893 Hydrogen Fluoride HF .9987 .0545 5.707 Hydrogen Iodide HI Hydrogen Selenide H .7893 .1025...
  • Page 46 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Phosphorous Oxychloride POCl .1324 6.843 Phosphorous Pentafluoride PH .3021 .1610 5.620 Phosphorous Trichloride PCl .1250 6.127 Propane C .399 1.967 Propylene C .366 1.877 Silane SiH .5982 .3189 1.433 Silicon Tetrachloride SiCl .284 .1270 7.580...

  • Page 47: Appendix 3 Dimensional Drawings

    6-32 UNC - 2B 0.13 2.69 (68.3) SERIES MAX. FLOW 10 L/min MASS FLOW CONTROLLER ® NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time ® without notice. For certified dimensions please contact OMEGA...
  • Page 48 6-32 UNC - 2B 0.09 (26.2) SERIES MAX FLOW 15 - 100 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.
  • Page 49 August 15, 2012 thread size = 8-32 UNC-2B SERIES MAX FLOW 500 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.
  • Page 50 (76,2 mm) 1/4-20 UNC-2B 6.80 (172,7 mm) SERIES MAX FLOW 1000 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.

  • Page 51: Warranty

    In no event shall OMEGA be liable for consequential, incidental or special damages. CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity;...
  • Page 52 Where Do I Find Everything I Need for Process Measurement and Control? OMEGA… Of Course! Shop online at omega.com TEMPERATURE Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies Wire: Thermocouple, RTD & Thermistor Calibrators & Ice Point References Recorders, Controllers & Process Monitors...

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Fma 5500a

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