Related Manuals for Omega FMA 5400
Summary of Contents for Omega FMA 5400
- Page 1 User’ s Guide Shop online at www.omega.com e-mail: info@omega.com FMA 5400/FMA 5500 Mass Flow Controllers...
- Page 2 Toll Free in United Kingdom: 0800-488-48 FAX: +44 (0)161 777 6622 e-mail: sales@omega.co.uk It is the policy of OMEGA to comply with all worldwide safety and EMC/EMI regulations that apply. OMEGA is constantly pursuing certification of its products to the European New Approach Directives.
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Page 3: Table Of Contents
TABLE OF CONTENTS 1. UNPACKING THE FMA 5400/5500 MASS FLOW CONTROLLER.... 1.1 Inspect Package for External Damage..........1.2 Unpack the Mass Flow Controller............1.3 Returning Merchandise for Repair............. 2. INSTALLATION..............2.1 Primary Gas Connections..............2.2 Electrical Connections..............2.2.1 Valve Control Configuration.......... - Page 4 7.2.4.1 Disable Solenoid Valve in FMA 5400/5500 Series Max. Flow FMA 10, 50 and 100 L/min....7.2.4.2 Open Motorized Valve in FMA 5400/5500 Series Max. Flow 200, 500 and 1000 L/min...... 7.2.5 Connections and Initial Warm Up........7.2.6 ZERO Adjustment............
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Page 5: Unpacking The Fma 5400/5500 Mass Flow Controller
MASS FLOW CONTROLLER Inspect Package for External Damage Your FMA 5400/5500 Mass Flow Controller was carefully packed in a sturdy card- board carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of exter- nal damage to the package contact the shipping company immediately. -
Page 6: Installation
Should there be need for a different orientation of the meter, re-calibration may be nec- essary. It is also preferable to install the FMA 5400/5500 transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts. - Page 7 Disconnect the power to the unit, remove the faulty condition, and recon- nect the power. The fuse will reset once the faculty condition has been removed. Use of the FMA 5400/5500 flow transducer in a manner other than that specified in this ®...
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Page 8: Valve Control Configuration
2.2.2 Remote LCD Readouts FMA 5400/5500 Mass Flow Controllers are available with optional remote reading LCD displays supplied with a three foot long wire to accommodate most applica- tions. This configuration includes the upper block element which serves as the LCD readout mounting. -
Page 9: Panel Mounting Readouts
An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass-molecular based flow rates. FMA 5400/5500 Mass Flow Controller Series Max. Flow 10, 50 and 100 L/min also incorporate a proportionating solenoid valve and Series Max. Flow 200, 500 and 1000 L/min a motorized valve. -
Page 10: Specifications
SPECIFICATIONS FLOW MEDIUM: Please note that FMA 5400/5500 Mass Flow Controllers are designed to work with clean gases only. Never try to meter or control flow rates of liquids. CALIBRATIONS: Supplied at Standard Conditions (14.7 psia and 70 F), or Normal Conditions (0 C and 1.01 bar abs) unless otherwise requested or stated. - Page 11 LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”, 0.5 inch high characters. On FMA 5400/5500 aluminum or stainless steel models the LCD display is built into the upper block element and may be tilted over 90 degrees for optimal viewing comfort.
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Page 12: Ce Compliance
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the FMA 5400/5500 transducer 15-pin “D” connector. CE Compliance FMA 5400/5500 Mass Flow Controllers are in compliance with CE test stan- dards stated below: EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992. -
Page 13: Operating Instructions
15-pin “D” connector. Use a power supply that is between +12 and +15 VDC with at least 800 mA current capacity (or optionally, for models FMA 5400/5500 10, 50 and 100 L/min only, +24 VDC 650 mA). Allow the Mass Flow Controller to warm-up for at least 15 minutes. -
Page 14: Flow Signal Output Readings
For example if the motorized valve was left in the OPEN purge position after dis- connecting power from the FMA 5400/5500 it will be in the OPEN position. It is the customers responsibility to provide a solution to shut down the flow in case of a power outage. -
Page 15: Valve Off Control (Open Collector Npn Compatible)
For REMOTE control of the FMA 5400/5500, an analog reference signal must be supplied. On pin [11] of the FMA 5400/5500 transducer is a regulated and con- stant +5VDC output signal. This signal may be used in conjunction with a local setpoint potentiometer for flow setting. -
Page 16: Valve Test/Purge
At times, it may be necessary to purge the flow system with a neutralizing gas such as pure dry nitrogen. The FMA 5400/5500 transducer is capable of a full open con- dition for the valve, regardless of setpoint conditions. Connecting the OPEN (PURGE) pin (pin [4] on 15-pin “D”... -
Page 17: Flow Path Cleaning
Remove debris carefully using tweezers and blowing low pressure clean air or Nitrogen from the inlet side. ® If the flow path is not unclogged, please return meter to OMEGA for servicing. Do not attempt to disassemble the sensor. Disassembly will invali date calibration. - Page 18 Set the FMA 5400/5500 into PURGE mode (see Figure 2-1), and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valve is to remove the plastic cap on top of the valve, and turning the set screw counterclockwise until it stops.
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Page 19: Calibration Procedures
NOTE: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this section, will void any calibration warranty applicable. Flow Calibration OMEGA ® Engineering Flow Calibration Laboratory offers professional calibration support for Mass Flow Meter and Controllers, using precision calibrators under strictly controlled conditions. -
Page 20: Calibration Of Fma 5400/5500 Mass Flow Controllers
Connections and Initial Warm Up At the 15-pin “D” connector of the FMA 5400/5500 transducer, connect the multi- meter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) - (see Figure 2-1). -
Page 21: Span Adjustment
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE: ✓ Occluded or contaminated sensor tube. ✓ Leaking condition in the FMA 5400/5500 transducer or the gas line and fittings. ✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table. ✓... -
Page 22: Connections And Initial Warm Up
7.2.5 Connections and Initial Warm Up Connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1). If calibration to a new flow range or different gas is being performed, it may be necessary to remove any jumpers at J1A, J1B, and J1C before beginning lin- earizing procedure. -
Page 23: 75% Flow Adjustment
7.2.12 Full Scale Flow Adjustment Fully open the flow regulator upstream of the FMA 5400/5500. Increase the inlet pressure to 20 psig (25 psig for FMA Series Max. Flow 100 L/min). Apply a +5.00 VDC (100% full scale flow) setpoint reference. Using the calibrator check the flow rate. -
Page 24: 50% Flow Adjustment
LCD Display Scaling It may be desirable to re-scale the output reading on the LCD readout supplied with certain FMA 5400/5500 transducers. Re-calibration for a new flow range or different engineering units are two examples of when this may be necessary. -
Page 25: 7.2.17.2 Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA sig- nal at the 15-pin “D” connector, set the flow rate on the FMA 5400/5500 to full scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiome- ter [R3] on the LCD printed circuit board to desired full scale flow reading. -
Page 26: Troubleshooting Guide
Troubleshooting Guide INDICATION LIKELY REASON REMEDY lack of reading power supply off check connection of power supply or output fuse blown disconnect transducer from power supply; remove the shorting condition or check polarities; fuse resets automatically filter screen flush clean or disassemble to obstructed at inlet remove impediments or replace occluded sensor tube... - Page 27 (relative to the sensor tube) FMA 5400/5500 incorrect valve adjustment re-adjust valve (section 7.2.4) does not work in open position pc board defect...
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Page 28: Technical Assistance
For best results it is recommended that instruments are returned to the factory for servicing. See section 1.3 for return procedures. Technical Assistance ® OMEGA Engineering will provide technical assistance over the phone to quali- fied repair personnel. Please call our Flow Department at 800-872-9436 Ext. 2298. -
Page 29: Appendix 1 Component Diagram
APPENDIX 1 COMPONENTS DIAGRAM FMA 5400/5500 METERING PC BOARD (TOP SIDE) - Page 30 COMPONENTS DIAGRAM METERING PC BOARD (BOTTOM SIDE)
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Page 31: Gas Factor Table ("K" Factors)
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Acetylene C... - Page 32 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Deuterium D 1.00 1.722 1.799 Diborane B .4357 .508 1.235 Dibromodifluoromethane CBr .1947 9.362 Dichlorodifluoromethane (Freon-12) CCl .3538 .1432 5.395 Dichlofluoromethane (Freon-21) CHCl .4252 .140 4.592 Dichloromethylsilane (CH SiCl .2522 .1882 5.758 Dichlorosilane SiH...
- Page 33 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] 1.000 .0861 3.610 Hydrogen Bromide HBr 1.000 .1912 1.627 Hydrogen Chloride HCl .764 .3171 1.206 Hydrogen Cyanide HCN .9998 .3479 .893 Hydrogen Fluoride HF .9987 .0545 5.707 Hydrogen Iodide HI Hydrogen Selenide H .7893 .1025...
- Page 34 K FACTOR Density ACTUAL GAS Relative to N [Cal/g] [g/I] Phosphorous Oxychloride POCl .1324 6.843 Phosphorous Pentafluoride PH .3021 .1610 5.620 Phosphorous Trichloride PCl .1250 6.127 Propane C .399 1.967 Propylene C .366 1.877 Silane SiH .5982 .3189 1.433 Silicon Tetrachloride SiCl .284 .1270 7.580...
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Page 35: Appendix 3 Dimensional Drawings
2.38 0.95 DIMENSIONS: INCH [mm] SERIES MAX. FLOW 10 L/min MASS FLOW CONTROLLER NOTE: OMEGA ® reserves the right to change designs and dimensions at its sole discretion at any time ® without notice. For certified dimensions please contact OMEGA... - Page 36 FOR HIGH FLOW MASS FLOW CONTROLLER ONLY DIMENSIONS: INCH [mm] SERIES MAX FLOW 15 - 100 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.
- Page 37 August 15, 2012 thread size = 8-32 UNC-2B SERIES MAX FLOW 500 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.
- Page 38 (76,2 mm) 1/4-20 UNC-2B 6.80 (172,7 mm) SERIES MAX FLOW 1000 L/min MASS FLOW CONTROLLER NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact OMEGA.
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Page 39: Warranty
Department will issue an Authorized Return (AR) number immediately upon phone or written request. Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser, including but not limited to mishandling, improper interfacing, operation outside of design limits, improper repair, or unauthorized modification. - Page 40 Where Do I Find Everything I Need for Process Measurement and Control? OMEGA… Of Course! Shop online at www.omega.com TEMPERATURE R Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies R Wire: Thermocouple, RTD & Thermistor R Calibrators & Ice Point References R Recorders, Controllers &...
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