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KLA Tencor Manuals
Laboratory Equipment
P-16+
User manual
KLA Tencor P-16+ User Manual
Profiler p1x / px
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Contents
Table of Contents
Bookmarks
Table of Contents
Table of Contents
Chapter 1 Introduction & Safety
Instrument Overview
Safety
Introduction
Safety Symbols and Related Keywords
Lockout/Tagout Procedure
Stage and Head Movement Hazards
Figure 1.1 Power Cord Plug Lockout/Tagout
Chapter 2 Basic Skills
Overview
Ergonomic Considerations
Powering U P the Profiler
Introduction
Power up Procedure
Logging into Profiler Security
Figure 2.1 Logon Dialog
Starting the Profiler Application
Introduction
Profiler Start-Up Procedure
Figure 2.2 Program Icons
Figure 2.3 Profiler Catalog Screen
Avigating Etween Rogram Evel Creens
N Avigating B Etween P Rogram L Evel S Creens
Navigation Procedure
Exiting the Profiler Application
Introduction
Profiler Exit Procedure
Figure 2.4 Profiler Configuration Screen
Clearing a Status Bar Message
Introduction
Clearing a Status Bar Message Procedure
Rotecting the Tylus Rm Ssembly
System Provisions for Stylus Protection
Potential Stylus Damage During Scans
Table 2.2 Stylus Arm Assembly Protection
Figure 2.6 Contact Scan Stylus Tip
Loading a Sample
Figure 2.7 Scan Recipe Window in the Catalog Screen
L Oading a Ample
Figure 2.8 XY View Screen
Adjusting the Video Image
Introduction
Video Image Adjustment Procedure
Figure 2.9 Video Control Dialog Box
Sing Ile Ame Onventions
Introduction
Naming and Saving Files
Saving Video Images
Naming and Saving Video Images Procedure
Table 2.3 Special Characters Allowed for Naming Purposes
Using File Name Convention
Exporting Data Graphs
Introduction
Figure 2.10 Export File Formats in Drop-Down Menu
Figure 2.11 Catalog Screen - Database File Manager Icon
Figure 2.12 Data Catalog Screen for Export of Data or Recipes
Exporting Data from the Database File Manager
Table 2.4 Graphics Export Dialog Features
Figure 2.14 Data Catalog Screen for Export of Data or Recipes
Chapter 3 Scan Recipes
Ntroduction
Accessing the Scan Recipe Catalog Screen
Scan
Figure 3.1 Catalog Sequence Recipe Screen
Recipe Catalog Screen
S Can R Ecipe C Atalog S Creen C Omponents
Screen Tools
Figure 3.3 Title Bar for Catalog Screen
Table 3.1 GEM Status Display
Figure 3.4 Menu Bar for Scan Recipe Screen
Table 3.2 Edit Menu Options Description
Table 3.3 File Menu Options Description
Table 3.4 Sample Menu Options Description
Table 3.5 Vacuum Menu Options Description
Table 3.6 Host Menu Options Description (Only Available with GEM/SECS Option)
Table 3.7 Diagnostics Menu Options Description
Table 3.8 Loadport Menu Options Description
Table 3.9 Task Menu Options Description
Figure 3.5 Toolbar Icons
Table 3.10 Toolbar for the Scan Recipe Catalog Screen
Catalog Screen Access Buttons
Table 3.11 Catalog Screen Access Buttons
Figure 3.6 Scan Recipe Information in the List Window
List Window
Figure 3.7 Tool Bar Buttons
Table 3.12 Scan Recipe List Window Function Access Buttons
System Status Message
Creating and Editing a Scan Recipe
Figure 3.8 System Status Message Field
Accessing the Scan Recipe Editor
Recipe Editor for 2D and 3D Scans
Figure 3.10 3D Parameters in the Information Display Window
Figure 3.9 Recipe Editor for a 2D UNTITLED Recipe
Scan Parameter Definition Window
Figure 3.11 2D Scan Category Parameters
Figure 3.12 X Scan Size (MM)
Figure 3.13 Scan Trace Comparison - Large Vs. Small Stylus Radius
Figure 3.14 Data Collection When Using a Large Radius Stylus
Figure 3.15 Data Collection When Using a Small Radius Stylus
Table 3.13 Show Position Options
Figure 3.17 Teach Scan Length, from the 2D Scan Teach Button
Table 3.14 3D Scan Parameters Summary
Figure 3.18 3D Scan Parameters
Figure 3.19 Traces - Scan Perimeter with Traces
Table 3.15 Show Position Options
Figure 3.20 Scan Time - Scan Parameters Definition
Figure 3.21 Stylus Parameters (2D and 3D)
Table 3.16 Stylus Force Ranges for the Different Head Configurations
Table 3.17 Range and Resolution Scan Parameters for the Microhead V LF Head
Table 3.18 Range and Resolution Scan Parameters for the Microhead V SR Head
Table 3.19 Range and Resolution Scan Parameters for the Microhead V XR Head
Figure 3.22 Vertical Ranging - Profile Types
Table 3.20 Profile Types
Feature Detection (Only for 2D Scans)
Figure 3.23 Feature Detection - Recipe Editor
Figure 3.24 Feature Detection Point Locations on a Step
Table 3.21 Feature Detection Descriptions (See Figure 3.24 and Figure 3.25.)
Detection Variables - Feature Detection - Recipe Editor
Figure 3.26
Figure 3.27
Scan Trace (Red) with First Derivative (Dark Blue) Overlaid on the same Graph
Figure 3.28 Filters Parameters - Noise Filter Menu
Filters and Cursors
Figure 3.29 Cursor Parameters - Recipe Editor
Analysis Screen with Trace in Need of Leveling
Figure 3.30
Figure 3.31 Cursor Boundary Setting on Unleveled Trace
Figure 3.32
Measurement Cursor on Level Trace
Setting Measurement Cursors
Cursor Parameters - Recipe Editor
Figure 3.34
Figure 3.35
Measurement Cursors - Relative to Feature Detection
Figure 3.36 Median Filter Application in Glitch Removal
Figure 3.37 2D and 3D Median Filter Options
Figure 3.38 y Lead Screw Filter Application
Filters Cursors Menu for a 3D Recipe
Figure 3.39 3D Measurement Cursor Box
Figure 3.40 Recipe Editor - Choosing 3D Cursors
Figure 3.41
General Parameters
Recipe Screen with Unit Output Dialog Box
Unit Output
Figure 3.42 General Parameters - Recipe Editor
Table 3.22 2D General Parameters
Roughness and Waviness Parameters
Table 3.23 3D General Parameters
Figure 3.43 Waviness Vs. Roughness
Figure 3.44 Roughness/Waviness Filter Analysis
Figure 3.45 Recipe Editor Showing 2D and 3D Roughness/Waviness Parameters
Table 3.24 2D Roughness Parameters
Table 3.25 2D Waviness Parameters
Figure 3.46 3D Roughness Parameters
Table 3.26 3D Roughness Parameters
Bearing Ratio and Cutting Depth
Figure 3.47 Bearing Ration and Cutting Depth Parameters
Figure 3.48 2D Bearing Ratio
Figure 3.49 Depth for 2D Bearing Ratio
Figure 3.50 Cutting Depth
Figure 3.51 Bearing Ratio and Cutting Depth Parameters
High Spot Count and Peak Count
Figure 3.52 High Spot Count
Figure 3.53 Peak Count
Figure 3.54 2D Peak Count (PC)
Histogram Leveling and Depth Analysis
Figure 3.55 Histogram Leveling Parameters
Figure 3.56
Figure 3.57 Multiple Bins (Mode) Used to Define a Plane
Histograms of Scans a and B
Figure 3.58 Flat Surface Scan of a Single Object
Figure 3.59 most Populous Plane Trace Variation
Histogram Depth
Figure 3.60 Histogram of a Scan
Cmp Analysis
Introduction
Figure 3.61 Histogram Depth
Figure 3.62 CMP Analysis - Lines or Array
Figure 3.63 CMP Analysis - PADS
Arrays
Figure 3.64 Sample Array
Figure 3.65 er and CR
Lines
Figure 3.66 Sample Array of Lines
Pads
Figure 3.67 Sample Pad
Figure 3.67
Feature Find
Figure 3.68 Feature Find Parameter Definition
Table 3.27 Feature Find Recipe Parameters
Search For: Trench / Line
Figure 3.69 Trench / Line Features
Figure 3.70 Trench / Line Scan
Search for Model Feature
Figure 3.71 Edge of an Array of 5 ΜM Lines
Figure 3.73 Model Feature Scan
Or Bottom to Top
Scan Size (ΜM)
Search Patterns: Center Outward, Top to Bottom
Traces
Sampling (Hz)
Scan Speed (ΜM/S)
Y Spacing (ΜM)
Failure Option: Save Search Data, Skip Current Scan, or Scan at Center
Scan Offset from Center (ΜM)
Feature Characteristics: Feature down or Feature up
Feature Depth / Height (Nm)
Figure 3.74 5ΜM Lines Measurement Pattern
Width (ΜM)
Model
Figure 3.75 Feature Find Definition for Model Feature
Matching Methods: Edge Base or Depth Base
Figure 3.76 Dual Damascene Example for Model Feature Using Depth Based Matching
Matching Scores
Diagnostic Options
Reference Point (ΜM)
Table 3.28 Diagnostic Options
Table 3.29 Standard - Diagnostic Options
Table 3.30 Linearity Calibration Only - Diagnostic Options
Entering Comments
Figure 3.77 Recipe Information Dialog Box
Chapter 4 XY View Screen
Ntroduction
Starting the Xy V Iew
Procedure
XY View Window Features
Figure 4.1 XY View Screen
Table 4.1 View Menu Description
Table 4.2 die Grid Menu
Figure 4.2 Move Extents Dialog Box
Figure 4.3 Move to Position Dialog Box
Table 4.3 Move Menu
Table 4.4 Direction Menu
Table 4.5 Actions Menu
Table 4.6 Sample Menu
Table 4.7 Vacuum Menu
Figure 4.4 Distance Dialog Box
Table 4.8 Stylus Menu
Table 4.9 XY View Window Tool Bar Buttons
Setting the Magnification
Introduction
Changing the Magnification
Resetting the Zoom to "0.00
Saving the Current Zoom Position
Figure 4.5 View Menu and the Stage and Zoom Coordinate Field
Focusing the View
Introduction
Focus the Optics - Top- or Side-View
Save Zoom Position Dialog Box
Figure 4.6
P-16+ Microhead Measurement Head
Figure 4.7
Positioning the Scan Site
Introduction
Focusing the Optics (Dual-View Optics)
Figure 4.8
Figure 4.9 Coordinate System of the KLA-Tencor Profiler Stage
Figure 4.10 XY View Screen Tool Bar
Table 4.10 Locating a Scan Site
Using die Grid Navigation (Optional Feature , P-16+ Only )
Introduction
Figure 4.11 XY View Screen
Figure 4.12 Teach die Grid Screen with Loaded die Grid
Creating a die Grid
Figure 4.13 Scan Catalog Screen
Figure 4.14 Warning - Automatic Null
Figure 4.15 Teach die Grid Screen
Figure 4.16 Teach die Grid - Teach First Position
Figure 4.17 Teach die Grid - Teach Feature
Figure 4.18 Teach die Grid - Lower Right Corner
Figure 4.19 Teach die Grid - with Feature in Navigation Window
Figure 4.20 Teach die Grid - die Grid Simulation in Navigation Window
Loading a die Grid (Turning on die Grid Navigation) for a Single Scan
Figure 4.21 Sequence Editor with die Grid Menu
Figure 4.22 Load Sequence die Grid
Clearing a die Grid (Turn off die Grid Navigation)
Navigating Across the Wafer Using the die Grid
Enabling the Dropout die Option
Clearing Dropout dies from the Grid
Moving to Partial dies
Figure 4.23 die Grid Menu from the Menu Bar
Displaying Grid Numbers in the die Grid Navigation Window
To Change the Font and Color of the Grid Numbers
Aligning the Sample
Introduction
Procedure
Figure 4.24 Setting Alignment Angle
Figure 4.25 Move Menu
Chapter 5 View Scan Window
Screen Unction
D S Creen F Unction
Figure 5.1 2D Single Scan View Scan Window
2D Scan Information Field
Figure 5.2 2D Scan Window - Scan Information Field
Table 5.1 Scan Screen - Recipe Information Column
Table 5.2 View Scan Screen - 2D Location Information Column
Figure 5.3 2D Scan Window - Scan Information Field
Scan Information Field - 2D Sequence Recipe Column
Table 5.3 View Scan Screen - 2D Location Information Column
2D View Scan Screen Tool Bar
Figure 5.4 Scan Screen - Real Time Trace Window
Real Time Scan Trace Window
2D View Scan Screen Menu Bar
Figure 5.5 2D View Scan Screen Menu Bar
Table 5.4 2D View Scan Window Tool Bar Buttons
Table 5.5 2D View Scan Screen - File Menu
Table 5.6 2D View Scan Screen - View Menu
Table 5.10 2D View Scan Screen - Sequence Menu
Table 5.7 2D View Scan Screen - Image Menu
Table 5.8 2D View Scan Screen - Trace Menu
Table 5.9 2D View Scan Screen - Scan Menu
Table 5.11 2D View Scan Screen - Pan Menu
Screen Unction
3D View Scan Screen During a Single Scan
D S Creen F Unction
Figure 5.6
3D Scan Information Field
Figure 5.7 3D View Scan Screen During a Scan Sequence
Figure 5.8 3D Scan Window - Scan Information Field
3D Scan Window - Scan Information Field
3D View Scan Screen Tool Bar
Figure 5.9
Scan Information Field - 3D Sequence Recipe Column
3D View Scan Screen Menu Bar
Figure 5.10 View Scan Screen Menu Bar
Table 5.13 3D View Scan Screen - File Menu
Table 5.14 3D View Scan Screen - Trace Menu
Table 5.15 3D View Scan Screen - Image Menu
Table 5.16 3D View Scan Screen - Scan Menu
Table 5.17 3D View Scan Screen - Sequence Menu
Table 5.18 3D View Scan Screen - Pan Menu
Video Image
Figure 5.11 Top View Image of the 3D Scan in Progress
Real Time Scan Window
Wafer Image Display
Scan Site Image Display
Abortinga Scan
Figure 5.12 Sequence Scan Screen with die Measurement Site Map
Introduction
Figure 6.1 Sequence Editor Screen
S Tarting the S Equence E Ditor a Pplication
Figure 6.2
Sequence Recipe Catalog Screen
Figure 6.3 Scan Sequence Catalog
Figure 6.4
Sequence Editor for NEW Recipe with Pattern Recognition
Figure 6.5 Options Section in the Sequence Editor (Optional Feature, P-16+ Only)
Figure 6.6
Figure 6.6 die Grid Menu
Load die Grid Dialog Box
Figure 6.8 Sequence Editor
Figure 6.9 Sequence Editor
Figure 6.10
Pattern Rec. Deskew Teach: Site 1 Screen
Deskew Options Dialog Box
Figure 6.11 Deskew Options Dialog Box
Figure 6.12
Figure 6.12 Data Options
Figure 6.13
Sequence Editor Set up for New Recipe
Figure 6.14 Sequence Editor - Teach Scan Location
Figure 6.15
Teach Location for First Recipe Scan
Figure 6.16 Sequence Editor
Figure 6.17 Sequence Editor with die Grid Menu
Figure 6.18 XY View with Sequence Scan Sites
Figure 6.19 Sequence Editor Message Box
Figure 6.20 Sequence Editor with New Scan Sites
S Equence E Ditor W Indow F Eatures
Table 6.1 Sequence Editor Window Buttons
Table 6.2 Sequence List Buttons
Table 6.3 Options Buttons
Table 6.4 Site Buttons
Figure 6.21
Sequence Editor - Sequence Menu
Sequence Information Dialog Box
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Family: Profiler
Software Version 7.31/7.35
P-16+ / P-6
User's Guide
KLA-TENCOR CONFIDENTIAL
Product Line: Profiler P1X / PX
MNL, USER
One Technology Drive., Milpitas, CA 95035
Phone: (408) 875-3000 FAX: (408) 571-2722
Model: P-16+ / P-6
PN- 0142530-000 AB
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