Taking A Pre-Stress Scan; Taking A Post-Stress Scan; Analyzing Stress Scan Results - KLA Tencor P-16+ User Manual

Stress (Optional feature) - Creating Stress Data
End: (Manual) Load Wafer
Procedure
9-10
6. From the Sample menu, choose
under the stylus.
7. Leave the Stress screen open for the next procedure.

Taking a Pre-Stress Scan

In order to create stress data that is accurate and usable, the following must be
observed:
The same wafer must be used for the pre- and post-stress scans.
The wafer must be positioned in exactly the same place on the stage for both
pre- and post-stress scans. This is accomplished through the use of a stress
precision locator.
The pre- and post-stress scans must be performed using the same recipe.

Taking a Post-Stress Scan

Use the same procedure detailed in Taking a Single Pre-Stress Scan. Be sure to name
the scan in such a way that it can be distinguished clearly from other scans in regards
to pre- or post-stress, substrate, and any other pertinent information.
The scan should:
Have the same recipe as the pre-stress scan.
Be made with the wafer placed on the stress locator.
Be made with wafer in the same orientation on the locator as in the pre-stress
scan.

Analyzing Stress Scan Results

Stress analysis is accomplished through the comparison of a pre-stress scan and a
post-stress scan. The analysis is not saved, but is instead generated each time the
calculations are performed from the original pre and post stress scan data.
Viewing Stress Scan Results
The data can be reviewed by opening a data set. The screen displayed is similar to the
scan data analysis screen described earlier in this manual. All data manipulations
performed are temporary. It cannot be saved. Leveling is done automatically as part of
the stress algorithm, and no additional leveling can be applied.
Stress Scan Analysis Procedure
Analysis can be made by comparing a pre-stress single trace with a post-stress single
trace of the same wafer at the same location using the same stress recipe.
Select the pre-stress scan from the stress scan data catalog and click
1.
pre.
1. Repeat step 1, except choose the post-stress scan and click
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KLA-Tencor P-16+ / P-6 User's Guide
. This moves the sample stage back
Manual Load
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set
set post
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3/13/09