Kla tencor P-16+ Wafer Surface Profiler Manuals

Table of Contents

5

Chapter 1 Introduction & Safety

25

Instrument Overview
25
Safety
25

Chapter 2 Basic Skills

31

Chapter 3 Scan Recipes

49

Ntroduction
49
Accessing the Scan Recipe Catalog Screen
50
Scan
50
Creating and Editing a Scan Recipe
60
Histogram Depth
124
Figure 3.60 Histogram of a Scan
124
Cmp Analysis
125
- Introduction
  125
- Figure 3.61 Histogram Depth
  125
- Figure 3.62 CMP Analysis - Lines or Array
  126
- Figure 3.63 CMP Analysis - PADS
  127
- Arrays
  128
- Figure 3.64 Sample Array
  128
- Figure 3.65 er and CR
  129
- Lines
  130
- Figure 3.66 Sample Array of Lines
  130
- Pads
  131
- Figure 3.67 Sample Pad
  131
- Figure 3.67
  131
Feature Find
132
- Figure 3.68 Feature Find Parameter Definition
  133
- Table 3.27 Feature Find Recipe Parameters
  133
- Search For: Trench / Line
  134
- Figure 3.69 Trench / Line Features
  135
- Figure 3.70 Trench / Line Scan
  136
- Search for Model Feature
  136
- Figure 3.71 Edge of an Array of 5 ΜM Lines
  137
- Figure 3.73 Model Feature Scan
  138
- Or Bottom to Top
  139
- Scan Size (ΜM)
  139
- Search Patterns: Center Outward, Top to Bottom
  139
- Traces
  139
- Sampling (Hz)
  140
- Scan Speed (ΜM/S)
  140
- Y Spacing (ΜM)
  140
- Failure Option: Save Search Data, Skip Current Scan, or Scan at Center
  141
- Scan Offset from Center (ΜM)
  141
- Feature Characteristics: Feature down or Feature up
  142
- Feature Depth / Height (Nm)
  142
- Figure 3.74 5ΜM Lines Measurement Pattern
  142
- Width (ΜM)
  142
- Model
  143
- Figure 3.75 Feature Find Definition for Model Feature
  144
- Matching Methods: Edge Base or Depth Base
  144
- Figure 3.76 Dual Damascene Example for Model Feature Using Depth Based Matching
  145
- Matching Scores
  145
- Diagnostic Options
  146
- Reference Point (ΜM)
  146
- Table 3.28 Diagnostic Options
  147
- Table 3.29 Standard - Diagnostic Options
  147
- Table 3.30 Linearity Calibration Only - Diagnostic Options
  147
- Entering Comments
  148
- Figure 3.77 Recipe Information Dialog Box
  148

Chapter 4 XY View Screen

149

Ntroduction
149
Starting the Xy V Iew
149
- Procedure
  149
- XY View Window Features
  149
- Figure 4.1 XY View Screen
  149
- Table 4.1 View Menu Description
  151
- Table 4.2 die Grid Menu
  152
- Figure 4.2 Move Extents Dialog Box
  153
- Figure 4.3 Move to Position Dialog Box
  153
- Table 4.3 Move Menu
  153
- Table 4.4 Direction Menu
  154
- Table 4.5 Actions Menu
  155
- Table 4.6 Sample Menu
  155
- Table 4.7 Vacuum Menu
  155
- Figure 4.4 Distance Dialog Box
  156
- Table 4.8 Stylus Menu
  156
- Table 4.9 XY View Window Tool Bar Buttons
  156
Setting the Magnification
157
- Introduction
  157
- Changing the Magnification
  158
- Resetting the Zoom to "0.00
  158
- Saving the Current Zoom Position
  158
- Figure 4.5 View Menu and the Stage and Zoom Coordinate Field
  158
Focusing the View
159
- Introduction
  159
- Focus the Optics - Top- or Side-View
  159
- Save Zoom Position Dialog Box
  159
- Figure 4.6
  159
- P-16+ Microhead Measurement Head
  160
- Figure 4.7
  160
Positioning the Scan Site
161
- Introduction
  161
- Focusing the Optics (Dual-View Optics)
  161
- Figure 4.8
  161
- Figure 4.9 Coordinate System of the KLA-Tencor Profiler Stage
  162
- Figure 4.10 XY View Screen Tool Bar
  163
- Table 4.10 Locating a Scan Site
  163
Using die Grid Navigation (Optional Feature , P-16+ Only )
164
Aligning the Sample
177
- Introduction
  177
- Procedure
  177
- Figure 4.24 Setting Alignment Angle
  178
- Figure 4.25 Move Menu
  179

Chapter 5 View Scan Window

181

Screen Unction
181
Screen Unction
189
3D View Scan Screen During a Single Scan
189
- D S Creen F Unction
  189
- Figure 5.6
  189
- 3D Scan Information Field
  190
- Figure 5.7 3D View Scan Screen During a Scan Sequence
  190
- Figure 5.8 3D Scan Window - Scan Information Field
  190
- 3D Scan Window - Scan Information Field
  191
- 3D View Scan Screen Tool Bar
  191
- Figure 5.9
  191
- Scan Information Field - 3D Sequence Recipe Column
  191
- 3D View Scan Screen Menu Bar
  192
- Figure 5.10 View Scan Screen Menu Bar
  192
- Table 5.13 3D View Scan Screen - File Menu
  192
- Table 5.14 3D View Scan Screen - Trace Menu
  192
- Table 5.15 3D View Scan Screen - Image Menu
  192
- Table 5.16 3D View Scan Screen - Scan Menu
  193
- Table 5.17 3D View Scan Screen - Sequence Menu
  193
- Table 5.18 3D View Scan Screen - Pan Menu
  193
- Video Image
  193
- Figure 5.11 Top View Image of the 3D Scan in Progress
  194
- Real Time Scan Window
  194
- Wafer Image Display
  194
- Scan Site Image Display
  195
Abortinga Scan
195
- Figure 5.12 Sequence Scan Screen with die Measurement Site Map
  195
- Introduction
  197
- Figure 6.1 Sequence Editor Screen
  198
- S Tarting the S Equence E Ditor a Pplication
  198
- Figure 6.2
  199
- Sequence Recipe Catalog Screen
  199
- Figure 6.3 Scan Sequence Catalog
  200
- Figure 6.4
  201
- Sequence Editor for NEW Recipe with Pattern Recognition
  201
- Figure 6.5 Options Section in the Sequence Editor (Optional Feature, P-16+ Only)
  202
- Figure 6.6
  203
- Figure 6.6 die Grid Menu
  203
- Load die Grid Dialog Box
  203
- Figure 6.8 Sequence Editor
  204
- Figure 6.9 Sequence Editor
  204
- Figure 6.10
  205
- Pattern Rec. Deskew Teach: Site 1 Screen
  205
- Deskew Options Dialog Box
  206
- Figure 6.11 Deskew Options Dialog Box
  206
- Figure 6.12
  207
- Figure 6.12 Data Options
  207
- Figure 6.13
  208
- Sequence Editor Set up for New Recipe
  208
- Figure 6.14 Sequence Editor - Teach Scan Location
  209
- Figure 6.15
  210
- Teach Location for First Recipe Scan
  210
- Figure 6.16 Sequence Editor
  211
- Figure 6.17 Sequence Editor with die Grid Menu
  212
- Figure 6.18 XY View with Sequence Scan Sites
  213
- Figure 6.19 Sequence Editor Message Box
  213
- Figure 6.20 Sequence Editor with New Scan Sites
  214
- S Equence E Ditor W Indow F Eatures
  215
- Table 6.1 Sequence Editor Window Buttons
  215
- Table 6.2 Sequence List Buttons
  216
- Table 6.3 Options Buttons
  216
- Table 6.4 Site Buttons
  217
- Figure 6.21
  218
- Sequence Editor - Sequence Menu
  218
- Sequence Information Dialog Box
  218

Chapter 6 Sequence Recipe and Data

218

Displaying the Sequence Information Dialog Box
218
- Sequence Editor - Mode Menu
  219
Figure 6.23
219
E Diting the O Ptions F Ield in the S Equence E Ditor
219
Table 6.5 Mode Drop-Down Menu Options
220
Set Deskew Mode
220
Figure 6.24 Sequence Editor
221
Figure 6.25 Data Options
221
Table 6.8 Export Options
222
Table 6.9 Print Option
222
Table 6.7 Save and Export Options
222
Figure 6.26 Sequence Editor
223
Teaching the Base Angle (P-16+ Only)
223
R Unning a S Equence
224
Figure 6.27 Queue Editor
225
Figure 6.28 Runtime View with the Sequence Queue
226
Adding Sequence Recipes to the Queue at Runtime
226
- Correlation Scan Sequence
  227
Viewing the Correlation Scan Data
228
Figure 6.30 Correlation Sub-Scan Window
229
Viewing Old Sequence Data
229
Calculating Combined Sequence Statistics
230
Viewing Multi Analysis Results
231
- Figure 6.31
  232
- Sequence Parameter Data Window
  232
- Sequence Summary Options Dialog Box
  232
V Iewing S Equence D Ata
232
Figure 6.32
233
Viewing Sequence Data with the Corresponding Trace, Site-By-Site
233
G Roping with P Attern R Ecognition (P-16+ O Nly )
240
- Figure 6.37 Groping Retry Layers
  241
- Table 6.12 Groping Parameters
  241
- S Aving S Equences
  243
- Analysis Screen with File Menu
  245
- Figure 6.38
  245
- Figure 6.39 Save Data Set Dialog Box
  245

Chapter 7 Analyzing 3D Scan Data

247

Figure 7.1
247
I Ntroduction
247
Scan Catalog Screen with Scan Data Active
247

Chapter 8 APEX 2D/3D - Getting Started

293

Chapter 9 Stress (Optional Feature)

297

Introduction
297
Theory
297
- Stoney Equation
  297
- Figure 9.1 Stress Calculation Regions
  298
- Polynomial Fit
  299
- Least Square Fit
  300
- Figure 9.2 13 Point Least Square Fit Calculation Illustration
  300
The 2D Stress Application Window (P-16+ and P-6)
301
- The Stress Screen Tool Bar
  301
- Table 9.1 Tool Bar Icons
  301
- Stress Recipe Catalog
  302
- Stress Scan Data File Catalog
  302
Creating a Stress Recipe
302
- Number of Stress Points
  302
- Scan Start Position
  302
- Scan Parameters
  303
- Substrate Specification
  303
Creating Stress Data
304
- Load a Wafer on the Stress Locator
  304
- Loading Wafers
  304
- Table 9.2 Elastic Constant of Substrates
  304
- Precision Locator on the Stage (P-16+)
  305
- Taking a Pre-Stress Scan
  306
- Taking a Post-Stress Scan
  306
- Analyzing Stress Scan Results
  306
- Table 9.3 Stress Calculation Results Box Contents
  307

Chapter 10 3D Stress (Optional Feature, P-16+ Only)

309

Chapter 12 Calibrations

355

Chapter 11 System Security

361

Chapter 13 Stylus Change Procedure

377

Chapter 14 Configuration

403

Chapter 15 Preventive Maintenance

425

Chapter 16 Backup and Restore

427

Figure 16.1 Windows Run Function
427
- Figure 16.2 Profiler Backup Command
  428

Appendix A Hazardous Materials

435

Appendix A P Series Profiler - Preparing for Shipment

439

Table B.1 Minimum Parts Required
439
Figure 1.1 P-6 Hook
441

KLA Tencor P-16+ Wafer Surface Profiler Manuals

KLA Tencor P-16+ User Manual (456 pages)

Table of Contents

Chapter 1 Introduction & Safety

Chapter 2 Basic Skills

Chapter 3 Scan Recipes

Chapter 4 XY View Screen

Chapter 5 View Scan Window

Chapter 6 Sequence Recipe and Data

Chapter 7 Analyzing 3D Scan Data

Chapter 8 APEX 2D/3D - Getting Started

Chapter 9 Stress (Optional Feature)

Chapter 10 3D Stress (Optional Feature, P-16+ Only)

Chapter 12 Calibrations

Chapter 11 System Security

Chapter 13 Stylus Change Procedure

Chapter 14 Configuration

Chapter 15 Preventive Maintenance

Chapter 16 Backup and Restore

Appendix A Hazardous Materials

Appendix A P Series Profiler - Preparing for Shipment

Related Products

KLA Tencor Categories