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Birck
N anotechnology
C enter
A lpha-‐Step
I Q
S urface
P rofiler
This
i nstruction
c overs
s etup
a nd
u se
o f
t he
K LA-‐Tencor
A lpha-‐Step
I Q
( ASIQ)
p rofilometer.
1.
SAFETY
C AUTIONS
The
A SIQ
i s
a
r elatively
r isk-‐free
t ool
f or
o perator,
w ith
n o
o bvious
p ersonal
s afety
h azards.
T hat
s aid,
t he
operator
c an
s till
d amage
t he
i nstrument
i n
s everal
w ays.
D O
N OT
p lace,
r emove,
o r
m ove
s amples
w hile
t he
stylus
t ip
i s
d own.
T his
m ay
d amage
t he
s tylus
t ip.
A lso,
a djust
t he
s tage
p osition
( x,y)
u sing
t he
c ontrol
k nobs
and
n ot
y our
h ands.
2.
EQUIPMENT
Stage
C ontrol
LOCATION: Cleanroom, L-Bay
T able
o f
C ontents
1. Safety
C autions
Pg.
1
2. Equipment
3. Definitions
4. Operating
G uide
Pg.
3
5. Troubleshooting
Pg.
4
Sample
P latform
F igure
1 :
A SIQ
C omponents
EFFECTIVE: 02/23/15
Pg.
1
Pg.
2
User
I nterface
C omputer,
U SB
( Under
T able)
CONTACT: srinehar@purdue.edu
C amera
Z oom
C ontrol
PAGE: 1 of 4
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Summary of Contents for KLA Tencor Alpha-Step IQ
- Page 1 Birck N anotechnology C enter A lpha-‐Step I Q S urface P rofiler ...
- Page 2 Birck N anotechnology C enter A lpha-‐Step I Q S urface P rofiler ...
- Page 3 Birck N anotechnology C enter A lpha-‐Step I Q S urface P rofiler ...
- Page 4 Birck N anotechnology C enter A lpha-‐Step I Q S urface P rofiler ...
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