Figure 10.15 Angular Data Image In Apex Software - KLA Tencor P-16+ User Manual

3D Stress (optional Feature, P-16+ only) - KLA-Tencor P-16+ / P-6 User's Guide

Figure 10.15 Angular Data Image in Apex Software

From the Save As window shown in Figure 10.16, select the file type XML -
KLA-Tencor P-16+ Discs. Once the Save button is selected, the system will save two
files having the same name and different file extensions, .XML and .MAP.
10-16 KLA-Tencor Confidential 0142530-000 AB
3/13/09