Hitachi CMP5000WXJ Service Manual page 10

2.1.3 UNDER LAYER SECTION (2)
4
UNDER LAYER SECTION (2) PARTS LIST
Mark No. Description
NSP 1 ADR CONNECT A Assy
NSP 2 ADR CONNECT B Assy
NSP 3 ADR CONNECT C Assy
NSP 4 ADR CONNECT D Assy
NSP* 5 BRIDGE A Assy
10
10
11
9
2
1 5
7
3
9
11
10
Part No.
AWZ6626
AWZ6627
AWZ6628
AWZ6629
AWZ6620
10
5 or 6
3 6 4
2 8
7 or 8
10
Mark No. Description
NSP* 6 BRIDGE B Assy
NSP* 7 BRIDGE C Assy
NSP* 8 BRIDGE D Assy
NSP* 9 RESONANCE Assy
NSP* 10 Screw
NSP* 11 Screw
Upper side
1
Part No.
AWZ6621
AWZ6622
AWZ6623
AWZ6630
ABA1301
VBB30P100FNI