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Summary of Contents for Energetiq EQ-99-FC
- Page 1 Model EQ-99-FC ™ LDLS Laser-Driven Light Source Operation and Maintenance Manual Revision 4 August 2011 Part Number DOC-5425...
- Page 2 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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Page 3: Declaration Of Conformity
Declaration of Conformity We, the manufacturers Energetiq Technology Inc. 7 Constitution Way Woburn, Massachusetts USA hereby declare that the product family LDLS™ Laser-Driven Light Source Model EQ-99 High Brightness Broadband Light Source is in conformity with the requirements of the following standards... -
Page 5: Table Of Contents
TABLE OF CONTENTS Chapter 1..............................1 General Information........................... 1 Safety............................... 1 Chapter 2..............................7 Description ............................7 General ............................7 Specifications..........................7 System Description ........................9 Power Supply Controller......................10 Lamp House..........................12 Chapter 3..............................15 Installation............................15 Unpacking............................ 15 Connections.......................... -
Page 7: Chapter 1
CAUTION The EQ-99-FC emits dangerous levels of UV radiation. Even short exposures to skin or eyes may cause burns. Ensure that only authorized personnel are in the vicinity of source during operation. - Page 8 General Precautions The EQ-99-FC should only be operated with a fiber connected to the broadband output and connected using an SMA connector. Operation without an SMA terminated fiber in place will result in hazardous broadband radiation. The far end of the output fiber should be terminated into a closed beam tube.
- Page 9 SMA connector is removed from the Lamp House enclosure. The optical configuration of the Lamp House ensures that the direct laser beam can not exit the unit. The EQ-99-FC laser product is designated as Class 1 during all normal operation.
- Page 10 Class 1 is the lowest hazard level classification. Certification label – states that the equipment has been tested and verified to meet the standards indicated. Non-interlocked housing label – notifies of a potential hazard when covers are removed. EQ-99-FC Operation Manual Rev. 4...
- Page 11 Warning Label Figure 1: Safety label locations Safety Interlocks The EQ-99-FC is equipped with interlocks to prevent operation of the device when the following conditions are present 1. Bulb is not installed into the Lamp House enclosure 2. The laser fiber is not connected to the Lamp House enclosure 3.
- Page 12 The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases. EQ-99-FC Operation Manual Rev. 4...
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Page 13: Chapter 2
DESCRIPTION General The EQ-99-FC is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface insures ease of use. - Page 14 • Power Supply Controller: 2.2 kg (5.0 lbs) Utility Requirements • Electrical: 24VDC, 125W • Cooling: natural convection and internal fan, no auxiliary cooling necessary • Purge gas (optional): clean dry nitrogen, 20 psig (0.14 MPa) supply pressure EQ-99-FC Operation Manual Rev. 4...
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Page 15: System Description
• Relative Humidity: non-condensing, 95% max. System Description As shown in Figure 3 the EQ-99-FC system consists of a Power Supply Controller unit, Lamp House, laser fiber optic cable, and Lamp House signal cable (not shown). Power and I/O interface connections (also not shown) are provided by the remote control unit or the user. -
Page 16: Power Supply Controller
The Power Supply Controller contains: • IR Diode Laser • Laser power supply • Thermo-electric cooler for laser • Permanently attached, armored laser fiber optic cable • Control electronics • Status indicator LEDs • Interface connectors EQ-99-FC Operation Manual Rev. 4... - Page 17 Provides access to control and status signals. See Chapter 3 for pin assignments and functions. This is the only operator interface to the EQ-99-FC – there are no local controls. Energetiq offers the EQ-99-RC Remote Control Module which connects to the Input/Output connector and provides a means of local control.
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Page 18: Lamp House
Lamp House Signal Connector (mini D sub – 9-pin) Provides various power and control signals to/from the Lamp House module. No other connector or cable may be used with the EQ-99-FC other than the one supplied. Armored Laser Fiber The laser light is delivered from the Power Supply Controller to the Lamp House via a fiber optic cable with armored protection. - Page 19 Provides broadband optical output using a standard SMA connector. Energetiq recommends the use of an Energetiq-supplied fiber for the broadband output. These fibers are able to withstand the very high power density of deep UV radiation that is generated by the EQ-99-FC, thus giving best longevity and performance.
- Page 20 J4 Signal Connector (mini D sub – 9-pin) Provides various power and control signals to/from the Power Supply Controller. No other connector or cable may be used with the EQ-99-FC other than the one supplied. EQ-99-FC Operation Manual Rev. 4...
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Page 21: Chapter 3
1) 230um Output Fiber, 1m long 1) 450um Output Fiber, 1m long If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-99-FC Lamp House or Power Supply Controller unit. - Page 22 Lamp House enclosure, and then to atmosphere. Optical Interface The optical output interface is via a standard SMA connector. The EQ-99-FC output is 0.22NA. Energetiq strongly recommends the use of an Energetiq-supplied fiber for the broadband output. These fibers are able to withstand the very high power density of deep UV radiation that is generated by the EQ-99-FC, thus giving best longevity and performance.
- Page 23 Figure 5: Lamp house mechanical layout EQ-99-FC Operation Manual Rev. 4...
- Page 24 EQ-99-FC Operation Manual Rev. 4...
- Page 25 Signal Connections The EQ-99-FC is controlled through the remote I/O connector. Table 3 gives the pin assignments and functions for this interface. Connect to the user’s control system using a suitable cable. Mating connector is a standard high-density 15-pin d- sub male (for example, Amp part no.
- Page 26 0.1uF 5VDC supply Contact or Inputs solid-state switch Pins 11, 12, 13 0.1uF Load Outputs Pins 1, 2, 3, 4 User 5VDC supply 5V Return Pins 6, 7, 8, 9 Figure 7: Remote Iinterface Schematic EQ-99-FC Operation Manual Rev. 4...
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Page 27: Installation Procedure
Controller (labeled TO LAMP) to the Lamp House (labeled J4). 6. The EQ-99-FC is delivered with the armored laser fiber connected to the lamp house. This is done to minimize the possibility of debris or particles contaminating the end of the laser fiber. - Page 28 The system is now ready to operate. EQ-99-FC Operation Manual Rev. 4...
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Page 29: Chapter 4
The LAMP ON LED will be lit. The duration of the warm up time (20-90 seconds) will depend on the temperature and previous operating condition of the EQ-99-FC. The EQ99 will automatically detect when the unit has reached the optimum conditions for ignition. - Page 30 EQ-99-FC Operation Manual Rev. 4...
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Page 31: Chapter 5
Fiber Cleaning Basics: • The LDLS laser fiber connector is carefully inspected and is clean prior to shipment. Energetiq strongly recommends leaving the laser fiber connected, unless necessary for installation or routing of the laser fiber. • Leave Laser Fiber SMA connected whenever possible. - Page 32 Install Laser SMA Install Laser SMA Install Laser SMA Install Laser SMA Connector Connector Connector Connector Connector Connector Figure 8: Fiber Cleaning Process Flowchart Fiber Inspection Tools Figure 9: Thorlabs FS-200 Handheld Fiber Inspection Scope EQ-99-FC Operation Manual Rev. 4...
- Page 33 Figure 10: Westover FVD-2400 Benchtop USB/PC Operated Fiber Viewer Examples of Fiber Images Figure 11: Fiber End Images EQ-99-FC Operation Manual Rev. 4...
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Page 34: Troubleshooting
Box of 6 Replacement Blue Tape Reels 14100700 4. Lint Free Wipe with Isopropyl Alcohol Troubleshooting See below if any problems are encountered in operating the EQ-99-FC. Condition: Controller Fault and/or Lamp House Fault LED(s) are ON. Action: • Always begin operation of the source by verifying the interlocks. -
Page 35: Lamp Replacement
Lamp Replacement Contact Energetiq if a bad lamp is suspected. EQ-99-FC Operation Manual Rev. 4... - Page 36 EQ-99-FC Operation Manual Rev. 4...
- Page 38 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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