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Energetiq LDLS EQ-77 Operation Manual

Laser-driven light source
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Model EQ-77
™
LDLS
Laser-Driven Light Source
Operation Manual
Revision 3
April 2016
Part Number DOC-7070

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Summary of Contents for Energetiq LDLS EQ-77

  • Page 1 Model EQ-77 ™ LDLS Laser-Driven Light Source Operation Manual Revision 3 April 2016 Part Number DOC-7070...
  • Page 2 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

  • Page 3: Declaration Of Conformity

    Fax +1 (781) 939-0769 E-mail: support@energetiq.com http://www.energetiq.com Declaration of Conformity We, the manufacturers Energetiq Technology Inc. 7 Constitution Way Woburn, Massachusetts USA hereby declare that the product family LDLS™ Laser-Driven Light Source Model EQ-77 High Brightness Broadband Light Source is in conformity with the requirements of the following standards...

  • Page 5: Table Of Contents

    TABLE OF CONTENTS   Chapter 1 ..............................1   General Information ....................1   Safety ............................... 1   Chapter 2 ..............................7   Description ........................7   General ............................7   Specifications ..........................8   System Description ........................10   Power Supply Controller ......................

  • Page 7: Chapter 1

    C h a p t e r 1 GENERAL INFORMATION Safety WARNING This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure to the direct or reflected output beam. Make certain that the appropriate output beam shields and optics are in place prior to energizing the unit.
  • Page 8 There are no user-serviceable parts inside the EQ-77. For any problems encountered during operation, please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to open the Power Supply Controller or Lamp House enclosure of the EQ-77.
  • Page 9 The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if any problems with the equipment are suspected. US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK GB2450045 EQ-77 Operation Manual Rev.
  • Page 10 Labels and Safety Notification The following safety labels appear on the product. Figure 1 shows the location of each label on the EQ-77 system. UV Hazard warning label – indicates hazardous levels of UV light are present. Manufacturer’s identification label – gives the manufacturer’s name and address, and the model, serial number, and date of manufacture of the equipment.
  • Page 11 Non-interlocked Explanatory Certification Housing Label Label Label Manufacturer’s UV Hazard Identification label Warning Label Figure 1: Safety Label Locations Safety Interlocks The EQ-77 is equipped with interlocks to prevent operation of the device when any of the following conditions are present: 1.
  • Page 12 EQ-77 Operation Manual Rev. 3...

  • Page 13: Chapter 2

    C h a p t e r 2 DESCRIPTION General The EQ-77 is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use.

  • Page 14: Specifications

    Specifications Optical Performance  Typical output spectrum: see Figure 2. Relative EQ-77 Spectral Radiant Flux (Typical) 200 250 300 350 400 450 500 550 600 650 700 750 800 850 Wavelength (nm) Figure 2: Typical Output Spectrum Physical Specifications Dimensions (H x W x D) ...
  • Page 15 Utility Requirements  Electrical: 100 – 240 V~, 50/60 Hz, 350 W  Purge gas: clean dry nitrogen, filtered to 5um, 20 psig (0.14 MPa) supply pressure – Fittings: 4mm push-to-connect  Cooling water: >= 1 liter/minute, 18 – 30 °C, 100 psig (0.69 MPa) max. inlet pressure –...

  • Page 16: System Description

    Environmental Requirements Operating  Ambient temperature: 15–35°C  Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C, decreasing linearly to 50% max. at 35°C.  Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible)  Installation Category II ...

  • Page 17: Power Supply Controller

    Optical Output Purge gas inlet/outlet (opposite side) fittings Power Input RS-485 Power Supply Retroreflector Connector Connector Controller assembly Lamp House Lamp House Control Status I/O Interface Lamp House Connector Indicators Connector Control Connector Water inlet/outlet fittings Figure 3: EQ-77 Lamp System Power Supply Controller The Power Supply Controller contains: ...
  • Page 18 Provides access to control and status signals. See Chapter 3 for pin assignments and functions. This is the only operator interface to the EQ-77 – there are no local controls. Energetiq offers the EQ-99-RC Remote Control Module which connects to the Input/Output connector of the EQ-77 or EQ-99 and provides a means of local control.

  • Page 19: Lamp House

    Power Input Connector This is an IEC 320 inlet connector for AC power input. See Chapter 3 for detailed information. Lamp House Control Connector (21-pin mixed D-sub) Provides various power and control signals to/from the Lamp House module. No other connector or cable may be used with the EQ-77 other than the one supplied.
  • Page 20 Lamp Nitrogen Purge Window Inlet (opposite side) Retroreflector Assembly Nitrogen Purge Outlet Laser ON Indicator Cooling Water Inlet Control Connector (to Controller) Cooling Water Outlet Figure 4: Lamp House Assembly External features (refer to Figure 4): Lamp Windows The lamp windows at the optical output provide protection from the high pressure bulb inside the Lamp House.
  • Page 21 Laser On Indicator This LED is illuminated when the laser is ON. Control Connector (21-pin mixed D-sub) Provides various power and control signals to/from the Power Supply Controller. No other connector or cable may be used with the EQ-77 other than the one supplied. EQ-77 Operation Manual Rev.
  • Page 22 EQ-77 Operation Manual Rev. 3...

  • Page 23: Chapter 3

    1) I/O cable with 15 pin D- connector at each end If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-77 Lamp House or Power Supply Controller unit.
  • Page 24 Cooling Water Cooling water fittings are 1/4-inch Swagelok female. Coolant flow rate of at least 1 liter/minute is required. Inlet temperature should be between 18°C and 30°C Care must be taken when making connections to avoid damage to the fittings and tubing. Two wrenches must always be used –...
  • Page 25 Table 3 gives the pin assignments and functions for this interface. Connect to the user’s control system using a suitable cable. Mating connector is a standard high-density 15-pin d- sub male (for example, Amp part no. 748364-1 with contacts 1658670-2). Optionally, connect a model EQ-99-RC remote control module to the I/O connector using the supplied cable.
  • Page 26 Description Pin # Details Commands (Inputs) LAMP OPERATE OPERATE REQUEST, apply +5V (referenced to digital common) to initiate start cycle EXTERNAL INTERLOCK EXTERNAL INTERLOCK, apply +5V (referenced to digital common) to close interlock and allow operation. Current draw is 80mA at 5VDC. Status Indicators (Outputs) LAMP ON Pulled to digital common when ON...
  • Page 27 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Input solid-state switch Pin 12 0.1uF Contact or solid-state switch Input Pin 13 Outputs Load Pins 1, 2, 3, 4 5V Return Pins 6, 7, 8, 9 5V Power Pin 5 Isolated 0.1uF 5VDC supply...

  • Page 28: Installation Procedure

    Operating the source without any output target or beam transport is not recommended, and may lead to unsafe operating conditions. Consult Energetiq for applications information and suggested configurations.

  • Page 29: Chapter 4

    This is very unusual. However, if this occurs, turn the OPERATE switch to the OFF position (down) and begin at Step 1 again. If this occurs multiple times, contact Energetiq service Stopping To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp will not be used for some time, the AC supply can be turned off.

  • Page 30: Serial Interface

    EQ-77 is interrupted. Displays a help menu listing the EQ77 firmware v02d (FRM-7117 R005) available commands build date 11/18/15 (c) Energetiq Technology, Inc. operational commands: U/D - raise/lower laser power by 0.5% - Query present laser power - reset laser power to Factory...

  • Page 31: Chapter 5

    C h a p t e r 5 TROUBLESHOOTING Fault Indicator Block Diagram Laser On Lamp Fault Controller Fault De-Asserted 150 sec Lamp On after Operate Asserted Asserted De-Asserted Command (pin 3 on remote) (pin 4 on remote) (pin 1 on remote) (pin 2 on remote) Signal Available on User Interface Internal Logic That Generates Signal...
  • Page 32 OFF position. The unit will not turn on if a fault condition exists.  If all of the interlocks are OK and either the lamp or controller interlock faults will not clear, please contact the factory. Condition: Lamp fails to ignite after several tries. Action Contact Energetiq. EQ-77 Operation Manual Rev. 3...

  • Page 33: Engineering Drawings

    A p p e n d i x A ENGINEERING DRAWINGS The following engineering drawings are included for reference. Drawing number Revision Title OTD-7111 EQ-77 Lamp Housing Outline OTD-6881 EQ-77 Power Supply Assembly EQ-77 Operation Manual Rev. 3...
  • Page 34 EQ-77 Operation Manual Rev. 3...

  • Page 35: Revision History

    THIS DOCUMENT SHALL NOT BE REPRODUCED NOR SHALL THE INFORMATION CONTAINED HEREIN BE USED BY OR REV. DESCRIPTION DATE APPROVED DISCLOSED TO OTHERS EXCEPTAS EXPRESSLY AUTHORIZED IN WRITING BY ENERGETIQ TECHNOLOGY INC. PROTOTYPE RELEASE 6/2/2015 ADDED CROSS-SECTION VIEW SHEET 2 12/15/2015 91.28 70.00 4mm TUBE FITTINGS - PURGE 36.00...
  • Page 36 ENERGETIQ CONFIDENTIAL THIS DOCUMENT SHALL NOT BE REPRODUCED NOR SHALL THE INFORMATION CONTAINED HEREIN BE USED BY OR DISCLOSED TO OTHERS EXCEPTAS EXPRESSLY AUTHORIZED IN WRITING BY ENERGETIQ TECHNOLOGY INC. 25.00 18.00 2.80 30.0° 1.035-40 THREAD (SM1) OUTPUT NUMERICAL APERTURE 60.0°...
  • Page 37 249.64 THE INFORMATION CONTAINED HEREIN BE USED BY OR REV. DESCRIPTION DATE APPROVED DISCLOSED TO OTHERS EXCEPTAS EXPRESSLY AUTHORIZED 9.828 IN WRITING BY ENERGETIQ TECHNOLOGY INC. NEW MOUNTING SCHEME 7/7/2015 ADD REFERENCE TO ALTERNATE MOUNTING METHOD 12/9/2015 131.83 241.30 5.190 9.500...
  • Page 38  ...
  • Page 39 A p p e n d i x B REVISION HISTORY Date Revision Description 17 June 2015 Initial release 15 December 2015 Updated graphics, added RS-485 interface info Added RS-485 port settings, added water fitting 30 March 2016 connection procedure, added water inlet max. pressure spec.
  • Page 40 EQ-77 Operation Manual Rev. 3...
  • Page 42 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

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