Energetiq LDLS EQ-99X-FC Operation And Maintenance Manual
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Energetiq LDLS EQ-99X-FC Operation And Maintenance Manual

Laser-driven light source
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Model EQ-99X-FC
™
LDLS
Laser-Driven Light Source
Operation and Maintenance Manual
Revision 3
April 2018
Part Number DOC-6522

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Summary of Contents for Energetiq LDLS EQ-99X-FC

  • Page 1 Model EQ-99X-FC ™ LDLS Laser-Driven Light Source Operation and Maintenance Manual Revision 3 April 2018 Part Number DOC-6522...
  • Page 2 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
  • Page 3 Declaration of Conformity...

  • Page 4: Table Of Contents

    Table of Contents Chapter 1 ................................ 1 General Information ........................... 1 Safety ............................... 1 Chapter 2 ................................ 8 Description ............................8 General ............................8 System Description ........................11 Power Supply Controller ......................12 Lamp House ..........................14 Installation............................16 Unpacking ............................ 16 Connections ..........................

  • Page 5: Chapter 1

    Chapter 1 GENERAL INFORMATION Safety WARNING This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure to the direct or reflected output beam. Make certain that the appropriate output beam shields and optics are in place prior to energizing the unit. All interlocks must be satisfied prior to operation;...
  • Page 6 Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99X-FC. For any problems encountered during operation, please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to open the Power Supply Controller or Lamp House enclosure of the EQ-99X-FC.
  • Page 7 The EQ-99X-FC utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and possible injury from flying fragments can occur if the lamp is mishandled. Do not open the enclosure of either the Lamp House enclosure or the Power Supply Controller.
  • Page 8 Lamp House or Power Supply Controller enclosure. The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if any problems with the equipment are suspected. EQ99X-FC Operation Manual DOC-6522 Rev. 3...
  • Page 9 Labels and Safety Notification The following safety labels appear on the product. Figure 1 shows the location of each label on the EQ-99X-FC system. Output Connector Warning Label – indicates hazardous levels of broadband light are present. Unit should only be operated with an output fiber installed to the EQ-99X-FC and the far end of the fiber terminated so that the output beam remains enclosed.
  • Page 10 Figure 1: Safety Label Locations Non-interlocked Housing Label Manufacturer’s Certification Explanatory Label Label Identification label Non-Interlocked Housing Label Manufacturer’s ID Label UV Hazard Output Connector Warning Label Warning Label Safety Interlocks The EQ-99X-FC is equipped with interlocks to prevent operation of the device when any of the following conditions are present: 1.
  • Page 11 The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases. DOC-6522 Rev. 3 EQ-99X-FC Operation Manual...

  • Page 12: Chapter 2

    Chapter 2 DESCRIPTION General The EQ-99X-FC is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use.
  • Page 13 Specifications Optical Performance  Typical output spectrum: see Figure 2. Figure 2: Typical Output Spectrum EQ-99X-FC Spectral Power Fiber Output 230um Energetiq Fiber, 1m long 1000 Measured Estimated Wavelength (nm) Physical Specifications Dimensions (H x W x D)  Lamp House: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in) ...
  • Page 14 Utility Requirements  Electrical: 12VDC, 140W  Cooling: natural convection and internal fan, no auxiliary cooling necessary  Purge gas (optional): clean dry nitrogen, filtered to 5um 20 psig (0.14 MPa) supply pressure Remote Interface Digital Inputs  Type: Optocoupler LED ...

  • Page 15: System Description

    System Description As shown in Figure 3 the EQ-99X-FC system consists of a Power Supply Controller unit, Lamp House, laser fiber optic cable, and Lamp House signal cable (not shown). Power and I/O interface connections (also not shown) are provided by the user. The following sections provide descriptions of the system components and controls, and gives an overview of their functions.

  • Page 16: Power Supply Controller

    Power Supply Controller The Power Supply Controller contains:  IR Diode Laser  Laser power supply  Thermo-electric cooler for laser  Permanently attached, armored laser fiber optic cable  Control electronics  Status indicator LEDs  Interface connectors External features (refer to Figure 3): Status Indicator LEDs These five LEDs indicate the system status.
  • Page 17 Provides access to control and status signals. See Chapter 3 for pin assignments and functions. This is the only operator interface to the EQ-99X-FC – there are no local controls. Energetiq offers the EQ-99-RC Remote Control Module which connects to the Input/Output connector and provides a means of local control.

  • Page 18: Lamp House

    Lamp House The Lamp House assembly contains:  Lamp  Igniter  IR pumping optics  Output window  Laser ON indicator  Interface connectors Optical fiber output cable Lamp mounting flange FC Output Connector Purge Gas Signal Connector Port (to Controller) Laser ON Indicator...
  • Page 19 Provides broadband optical output using a standard FC connector. Energetiq recommends the use of an Energetiq-supplied fiber for the broadband output. These fibers are able to withstand the very high power density of deep UV radiation that is generated by the EQ-99X- FC, thus giving best longevity and performance.

  • Page 20: Installation

    Use care when unpacking to avoid damaging the armored fiber optic cable. If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-99X-FC Lamp House or Power Supply Controller unit.
  • Page 21 Electrical Power The EQ-99X-FC requires 12VDC at 11.7A minimum (140W rating). Power consumption is approximately 100W during normal operation. Power can be provided using the optional PS00018 12VDC power supply. Alternatively, power can be provided directly via a customer provided 12VDC power supply. The connector on the EQ-99 is a latching connector.
  • Page 22 Optical Interface The lamp window accommodates a light output of 0.47 NA. A pair of pins and a 6-32 threaded hole are available for mounting. An internally-threaded SM1 adapter is provided for connection of optical hardware. See Figure 5 below for mechanical layout of the Lamp House.
  • Page 23 DOC-6522 Rev. 3 EQ-99X-FC Operation Manual...
  • Page 24 Signal Connections The EQ-99X-FC is controlled through the remote I/O connector. Table 3 gives the pin assignments and functions for this interface. Connect to the user’s control system using a suitable cable. Mating connector is a standard high-density 15-pin d- sub male (for example, Amp part no.
  • Page 25 Description Pin # Details Commands (Inputs) LAMP OPERATE OPERATE REQUEST, apply +5V (referenced to digital common) to initiate ignition EXTERNAL INTERLOCK EXTERNAL INTERLOCK, apply +5V (referenced to digital common) to close interlock and allow operation Status Indicators (Outputs) LAMP ON Pulled to digital common when ON LASER ON Pulled to digital common when ON...
  • Page 26 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Inputs solid-state switch Pins 11, 12, 13 0.1uF Outputs Load Pins 1, 2, 3, 4 5V Return Pins 6, 7, 8, 9 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Inputs solid-state switch...

  • Page 27: Installation Procedure

    This is done to minimize the possibility of debris or particles contaminating the end of the laser fiber. Energetiq strongly recommends leaving the laser fiber connected, unless it is necessary to disconnect it for installation or routing of the laser fiber.
  • Page 28 8. Connect user’s control system to the I/O interface connector per Table 3 and Figure 9. Alternately, if using the EQ-99-RC Remote Control Module, place it on a clean rigid surface. Install the supplied 15-pin cable from the Power Supply Controller to the EQ-99-RC.

  • Page 29: Chapter 4

    This is very unusual. However, if this occurs, turn the OPERATE switch to the OFF position (down) and begin at Step 1 again. If this occurs multiple times, contact Energetiq service. Stopping To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp will not be used for some time, the 12VDC supply can be turned off.
  • Page 30 To minimize wear on the ignition components, it is best to avoid frequently starting and stopping the lamp. It is recommended to run the lamp continuously if long off-periods are not required. EQ99X-FC Operation Manual DOC-6522 Rev. 3...

  • Page 31: Chapter 5

    Fiber Cleaning Basics:  The LDLS laser fiber connector is carefully inspected and is clean prior to shipment. Energetiq strongly recommends leaving the laser fiber connected, unless necessary for installation or routing of the laser fiber.  Operating the LDLS with a contaminated fiber introduces the risk of decreased performance or damage to the unit.
  • Page 32 Fiber Inspection and Cleaning Process CAUTION Disconnect power from the EQ-99 Power Supply Controller unit before performing fiber inspection. Start Inspect Fiber Inspect Fiber Blow off Ferrule Inspect Fiber and Nut threads with N2 or CDA 1. Blow off the fiber end face with N2 Clean Fiber...
  • Page 33 Westover Digital inspection scopes. This custom adapter allows the scope to be used with the EQ-99 laser fiber and integral interlock ring. The custom adapter may not be compatible with other fiber inspection equipment. The following fiber inspection equipment can be purchased from Energetiq: Energetiq Part Number Description...
  • Page 34 Examples of Fiber Images Fiber Core Area Fiber Cladding Figure 12: Fiber End Images Fiber Cleaning Tools 1. Clean Dry Air or Pressurized Nitrogen 2. Dust Off (or similar clean, compressed air) 3. QbE Cleaning Platform (www.chemtronics.com/qbe-cleaning-platform-3) 4. Isopropyl Alcohol To clean with the QbE Cleaning Platform, gently press the fiber end face into the cleaning cloth or wipe, rotate in place several times, then reduce pressure and drag the fiber 1-2 cm across the cleaning cloth or wipe.
  • Page 35 Troubleshooting Fault Indicator Block Diagram: Laser On Lamp Fault Controller Fault De-Asserted 150 sec Lamp On Asserted after Operate Asserted De-Asserted Command (pin 3 on remote) (pin 4 on remote) (pin 1 on remote) (pin 2 on remote) Signal Available on User Interface Internal Logic That Generates Signal External Control Cable Not...
  • Page 36  If all of the interlocks are OK and either the lamp or controller interlock faults will not clear, please contact the factory. Condition: Lamp fails to ignite after several tries. Action Contact Energetiq. EQ99X-FC Operation Manual DOC-6522 Rev. 3...

  • Page 37: Lamp Replacement

    EQ-99X-FC. Replace the output fiber with a new one to determine if the original performance is restored. All fibers will degrade over time, although fibers supplied by Energetiq have been designed for the EQ-99X-FC. Lamp Replacement Contact Energetiq if a bad lamp is suspected.

  • Page 38: Revision Control

    Appendix A REVISION CONTROL Version Number Modified By Modifications Made Date Modified Rev. 3 M. Steinberg Updated CE Mark, Logo, Page March 2018 footer format, Fiber Cleaning Procedure, added Appendix A EQ99X-FC Operation Manual DOC-6522 Rev. 3...
  • Page 39 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

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