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Energetiq LDLS EQ-1500 Operation Manual

Laser-driven light source
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Model EQ-1500
LDLS™
Laser-Driven Light Source
Operation Manual
Revision 6
March 2013
Part Number DOC-4958

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Troubleshooting

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Summary of Contents for Energetiq LDLS EQ-1500

  • Page 1 Model EQ-1500 LDLS™ Laser-Driven Light Source Operation Manual Revision 6 March 2013 Part Number DOC-4958...
  • Page 2 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
  • Page 3 Declaration of Conformity We, the manufacturers Energetiq Technology Inc. 7 Constitution Way Woburn, Massachusetts USA hereby declare that the product LDLS™ Laser-Driven Light Source Model EQ-1500 Extreme High Brightness Broadband Light Source is in conformity with the requirements of the following standards...

  • Page 5: Table Of Contents

    TABLE OF CONTENTS Chapter 1 ............................... 1   General Information ........................1   Safety............................1   Chapter 2 ............................... 9 Description ............................ 9   General ............................ 9   Specifications .......................... 9   Identification of Controls ....................11   Controller Unit ........................11  ...

  • Page 7: Chapter 1

    C h a p t e r 1 GENERAL INFORMATION Safety WARNING This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure to the direct or reflected output beam. Make certain that the appropriate output beam shields and optics are in place prior to energizing the unit.
  • Page 8 Do not open or attempt to service this unit. Contact Energetiq regarding any problems with the unit. General Precautions The output beam from the EQ-1500 should be blocked when not in use with an electronic shutter or other appropriate beam blocking device.
  • Page 9 There are no user-serviceable parts inside the EQ-1500. For any problems encountered during operation, please refer to the Troubleshooting section of this user manual. If there is a component failure, do not attempt to open the chassis of the EQ-1500. The EQ-1500 utilizes a quartz lamp containing a high-pressure gas fill.
  • Page 10 The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if any problems with the equipment are suspected. Labels and Safety Notification The following safety labels appear on the product.
  • Page 11 Manufacturer’s identification label – gives the manufacturer’s name and address, and the model, serial number, and date of manufacture of the equipment. Explanatory label – states the classification of the laser product. Class 1 is the lowest hazard level classification. Certification label –...
  • Page 12 UV Warning Manufacturer’s ID Label Label Interlocked Functional Interlocked Explanatory Certification Housing Label Earth Symbol Housing Label Label Label Figure 1: Safety label locations Cover Interlocks The EQ-1500 is equipped with cover interlock switches to prevent operation of the source without the lamp unit and controller covers in place.
  • Page 13 The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases. The source is then latched off and will not restart until the interlock is restored and the lamp manually restarted.
  • Page 14 EQ-1500 Operation Manual Rev 6...

  • Page 15: Chapter 2

    C h a p t e r 2 DESCRIPTION General The EQ-1500 is a DUV lamp system for a wide variety of applications. The lamp features high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. The interface is quite simple, but robust enough for any lab or industrial environment.
  • Page 16 0.01 0.001 Wavelength (nm) Figure 2: Typical output spectrum Physical Specifications System Dimensions (H x W x D), Weight  Lamp House 175 x 142 x 218 mm (6.9 x 5.6 x 8.6 in)  Controller 142 x 254 x 419 mm (5.6 x 10.0 x 16.5 in) Weight ...

  • Page 17: Identification Of Controls

    Environmental Requirements Operating  Temperature: 5–40°C  Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C, decreasing linearly to 50% max. at 40°C  Altitude: 2000 m (6562 ft) max.  Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible) ...
  • Page 18 Operation Selector Switch Momentary switch used to start or stop UV light output, or to clear a Fault condition. Status Indicator LEDs Lamp controller Status Functional Description LEDs Color Power Green AC power is applied and power switch is on Controller Interlock OK Green All interlocks in the Lamp Controller are...
  • Page 19 Armored Laser J4 Remote Sensor Interlock Laser Connection Fiber (coiled for Connector Connector to Lamp House storage) Fuse Drawer Power On/Off Switch Cooling Water Connections Power Entry Connector J5 Lamp House Cooling Fan J6 Remote Functional Earth Connector Exhaust Control Connector Terminal Figure 4: Controller rear panel Interlock Connector...
  • Page 20 Armored Laser Fiber Transmits laser energy from the Controller to the Lamp House. Handle the fiber gently and avoid creating sharp bends or kinks in the cable. Minimum bend radius for the cable is 30 mm (1.2 in). See instructions in Chapter 3 under “Installation Procedure” for details on inspecting, cleaning and installing the fiber.

  • Page 21: Lamp House Unit

    Lamp House Unit Exit Aperture Mounting Holes Mounting Holes (on underside) Figure 5: Lamp house unit front panel Exit Aperture The exit aperture is a standard 1-inch threaded lens holder. The exit aperture also includes a high UV transmission quartz window. Do not attempt to remove or otherwise disturb this window.
  • Page 22 Laser On Indicator Nitrogen Purge Inlet J1 Controller Connector Cooling Water Outlet Cooling Water Inlet Laser Fiber Entry Figure 6: Lamp house unit rear panel Laser On Indicator Indicates that the drive laser is on, and laser power is being transmitted to the Lamp House. J1 Controller Connector Interface for power and control signals from the Controller.
  • Page 23 Cooling Water Inlet/Outlet Push-lock tube fittings for the Lamp House cooling water. Laser Fiber Entry Entry point and strain relief for the laser fiber optic cable. The cable is connected inside the Lamp House enclosure using a proprietary SMA-type connector. The EQ-1500 system is shipped with this connection already made.
  • Page 24 EQ-1500 Operation Manual Rev 6...

  • Page 25: Chapter 3

    C h a p t e r 3 INSTALLATION Installation of the EQ-1500 consists of connecting electrical, water, and gas supplies, and connecting the lamp output to the user’s equipment. Unpacking Upon arrival, start by inspecting all parts of the system for completeness and any damage incurred in shipping.
  • Page 26 Cooling Water The EQ-1500 requires 1.9–3.8 lpm (0.5–1 gpm) water at a minimum of 0.14 MPa (20 psi). The temperature must be held at 22 ± 1 degrees C. The pressure drop at 3.8 lpm (1 gpm) through the cold plate is less than 0.07 MPa (10 psi). There are several thermoelectric and direct water-to-water chillers that can satisfy these requirements.
  • Page 27 So first and foremost, the nitrogen purge gas is intended to displace any oxygen in the system’s optical chamber. The optics assembly is in direct contact with this purge gas. UV optics are quite prone to UV photo contamination. Clean and pure nitrogen from either a dewar or research-grade N bottle is recommended.
  • Page 28 EQ-1500 Operation Manual Rev 6...

  • Page 29: Installation Procedure

    Operating the source without any output target or beam transport is not recommended, and may lead to unsafe operating conditions. Consult Energetiq for applications information and suggested configurations. 3. Set up the Lamp House with appropriate ultraviolet safety measures and laser light safety measures in place.
  • Page 30 Fiber installation procedure Step Picture Description 8.1. Using the supplied 1/16” hex driver, remove the screws securing the lamp house cover. Carefully lift the cover straight up. 8.2. CAUTION: The shielded fiber located on the back of the controller has a minimum bend radius of 30mm. Use care not to bend the fiber too tightly.
  • Page 31 8.4a While supporting the end of the fiber, place the strain relief against the side of the lamp house. You will see two ‘fingers’ that lock the strain relief in place from the back side. These will need to slide over the inside surface of the panel.
  • Page 32 Again, use extreme care not to touch the end of the fiber. Carefully slide the fiber into the SMA connector and tighten finger tight. Using care not to pinch any wires, slide the lamp house cover back into place and install the cover screws. The fiber installation is now complete.

  • Page 33: Chapter 4

    C h a p t e r 4 OPERATION Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp system are aware of the potential hazards involved with its operation. It is the responsibility of the user to verify that the lamp is being used safely.

  • Page 34: Remote Mode

    Stopping To shut off the lamp, push the Operation Selector Switch down momentarily to the OFF/RESET position. The lamp can also be shut off by shutting off the main power switch on the rear panel. Opening the interlock chain will also stop the lamp, and the EXTERNAL INTLK OK indicator will go out.
  • Page 35 Digital outputs  Type: open collector to digital ground  Logic: active low (output pin is at <0.8V when output is on)  Maximum voltage: 15 VDC (internal surge protector clamps at 15V)  Maximum load current: 30mA at 5VDC, 12mA at 12VDC ...
  • Page 36 EQ-1500 Operation Manual Rev 6...

  • Page 37: Chapter 5

    Fiber Cleaning Basics:  The LDLS laser fiber connector is carefully inspected and is clean prior to shipment. Energetiq strongly recommends leaving the laser fiber connected, unless necessary for installation or routing of the laser fiber.  Leave Laser Fiber SMA connected whenever possible.
  • Page 38 Start Start Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Clean Fiber Lint Clean Fiber Lint Clean Fiber Clean Fiber Is fiber end Is fiber end Is fiber end Is fiber end Clean Fiber Clean Fiber Is fiber end...
  • Page 39 Figure 11: Westover FVD-2400 Benchtop USB/PC Operated Fiber Viewer Examples of Fiber Images Figure 12: Fiber End Images EQ-1500 Operation Manual Rev 6...

  • Page 40: Troubleshooting

    Fiber Cleaning Tools 1. Clean Dry Air 2. Dust Off (or similar clean, compressed air) 3. Cletop (www.cletop.com) Cletop Type A SMA cleaner with Blue tape 14100500 Box of 6 Replacement Blue Tape Reels 14100700 4. Lint Free Wipe with Isopropyl Alcohol Troubleshooting See below if any problems are encountered in operating the EQ-1500.
  • Page 41 (Operation Selector Switch to Reset) and attempt again. After Ignition (Plasma On):  Attempt again. If a Laser Fault appears immediately, there is a likely a problem with the Laser delivery optics; contact Energetiq. EQ-1500 Operation Manual Rev 6...
  • Page 42 EQ-1500 Operation Manual Rev 6...
  • Page 44 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

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