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Summary of Contents for Energetiq LDLS EQ-99-FC
- Page 1 Model EQ-99-FC ™ LDLS Laser-Driven Light Source Operation and Maintenance Manual Revision 2 March 2012 Part Number DOC-5716 Energetiq Ex. 2060, page 1 - IPR2015-01375...
- Page 2 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
- Page 3 Safety of laser products - Part 1: Equipment classification and requirements in accordance with the provisions of 2006/95/EC EU Low Voltage Directive 2004/108/EC EU Electromagnetic Compatability Directive. Signed, Paul Blackborow, CEO Date at Woburn, Massachusetts USA Energetiq Ex. 2060, page 3 - IPR2015-01375...
- Page 4 Energetiq Ex. 2060, page 4 - IPR2015-01375...
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Page 5: Table Of Contents
Description General Specifications System Description Power Supply Controller Lamp House Chapter 3 Installation Unpacking Connections Installation Procedure Chapter 4 Operation Starting Stopping Chapter 5 Maintenance Fiber Cleaning Process Fault Indicators Troubleshooting Lamp Replacement Energetiq Ex. 2060, page 5 - IPR2015-01375... - Page 6 Energetiq Ex. 2060, page 6 - IPR2015-01375...
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Page 7: General Information
Personnel in vicinity of operating source should wear protective eyewear, clothing, and gloves. Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 7 - IPR2015-01375... - Page 8 Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99-FC. For any problems encountered during operation, please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to open the Power Supply Controller or Lamp House enclosure of the EQ-99-FC.
- Page 9 Lamp House ensures that the direct laser beam can not exit the unit. The EQ-99-FC laser product is designated as Class 1 during all normal operation. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 9 - IPR2015-01375...
- Page 10 The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if any problems with the equipment are suspected. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 10 - IPR2015-01375...
- Page 11 Certification label – states that the equipment has been tested and verified to meet the standards indicated. Non-interlocked housing label – notifies of a potential hazard when covers are removed. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 11 - IPR2015-01375...
- Page 12 1. Bulb is not properly installed into the Lamp House enclosure 2. The laser fiber is not properly connected to the Lamp House enclosure 3. An external interlock is open EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 12 - IPR2015-01375...
- Page 13 The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 13 - IPR2015-01375...
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Page 14: Description
Connection to DC power is required for operation. Connection to nitrogen purge gas is optional, but recommended for best performance. See Chapter 3 for connection details. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 14 - IPR2015-01375... -
Page 15: Specifications
• Power Supply Controller: 113 x 111 x 299 mm (4.4 x 4.4 x 11.8 in) Weight • Lamp House: 0.7 kg (1.5 lbs) • Power Supply Controller: 1.4 kg (3.0 lbs) EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 15 - IPR2015-01375... - Page 16 • Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible) • Installation Category II • Indoor use only Transport • Temperature: -5–95°C • Relative Humidity: non-condensing, 95% max. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 16 - IPR2015-01375...
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Page 17: System Description
(on rear panel) Lamp House Signal Connector Power Supply Controller Power Input Connector Armored Laser Fiber I/O Interface Connector Optical Lamp Output House Figure 3: EQ-99-FC Lamp System EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 17 - IPR2015-01375... -
Page 18: Power Supply Controller
One of the following has occurred in the Lamp House module: Control Cable not connected properly Lamphouse internal termperature too high Laser fiber not correctly connected Bulb not correctly installed Ignition Failure Table 2: Status Indicator LED Functions EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 18 - IPR2015-01375... -
Page 19: Lamp House
Provides access to control and status signals. See Chapter 3 for pin assignments and functions. This is the only operator interface to the EQ-99-FC – there are no local controls. Energetiq offers the EQ-99-RC Remote Control Module which connects to the Input/Output connector and provides a means of local control. - Page 20 Optical fiber output cable SMA Output Connector Signal Connector (to Controller) Lamp mounting flange Laser ON Indicator Laser Input Purge Gas (SMA-type) Port Figure 4: Lamp House Assembly EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 20 - IPR2015-01375...
- Page 21 Provides broadband optical output using a standard SMA connector. Energetiq recommends the use of an Energetiq-supplied fiber for the broadband output. These fibers are able to withstand the very high power density of deep UV radiation that is generated by the EQ-99-FC, thus giving best longevity and performance.
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Page 22: Installation
Use care when unpacking to avoid damaging the armored fiber optic cable. If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-99-FC Lamp House or Power Supply Controller unit. - Page 23 20 psig (0.14 MPa). With a 20 psig inlet pressure, the EQ-99-FC will consume approximately 1 slm of flow. There is no return fitting for the purge nitrogen. The purge flow normally escapes within the Lamp House enclosure, and then to atmosphere. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 23 - IPR2015-01375...
- Page 24 An internally-threaded SM1 adapter is provided for connection of optical hardware. See Figure 5 below for mechanical layout of the Lamp House. Figure 5: Lamp House mechanical layout EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 24 - IPR2015-01375...
- Page 25 EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 25 - IPR2015-01375...
- Page 26 50mA maximum, referenced to digital common DIGITAL COMMON 6,7,8,9 Galvanically isolated from system RESERVED 10, 11 Do not connect RESERVED 14,15 Do not connect Table 3: I/O Connector Pin Assignments EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 26 - IPR2015-01375...
- Page 27 Pins 11, 12, 13 0.1uF Load Outputs Pins 1, 2, 3, 4 User 5VDC supply 5V Return Pins 6, 7, 8, 9 Figure 7: Remote Interface Schematic EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 27 - IPR2015-01375...
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Page 28: Installation Procedure
This is done to minimize the possibility of debris or particles contaminating the end of the laser fiber. Energetiq strongly recommends leaving the laser fiber connected, unless it is necessary to disconnect it for installation or routing of the laser fiber. If the laser fiber must be disconnected, apply SMA caps immediately to both ends, and follow directions on inspection and cleaning of the laser fiber described in Chapter 5. - Page 29 Install the supplied 15-pin cable from the Power Supply Controller to the EQ-99-RC. 10. Connect 12VDC input power source to the Power Supply Controller. The system is now ready to operate. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 29 - IPR2015-01375...
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Page 30: Operation
To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp will not be used for some time, the 12VDC supply can be turned off. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 30 - IPR2015-01375... - Page 31 To minimize wear on the ignition components, it is best to avoid frequently starting and stopping the lamp. It is recommended to run the lamp continuously if long off-periods are not required. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 31 - IPR2015-01375...
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Page 32: Maintenance
Fiber Cleaning Basics: • The LDLS laser fiber connector is carefully inspected and is clean prior to shipment. Energetiq strongly recommends leaving the laser fiber connected, unless necessary for installation or routing of the laser fiber. • Leave Laser Fiber SMA connected whenever possible. - Page 33 Install Laser SMA Install Laser SMA Install Laser SMA Install Laser SMA Install Laser SMA Install Laser SMA Connector Connector Connector Connector Connector Connector Figure 8: Fiber Cleaning Process Flowchart EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 33 - IPR2015-01375...
- Page 34 Fiber Inspection Tools Figure 9: Thorlabs FS-200 Handheld Fiber Inspection Scope Figure 10: Westover FVD-2400 Benchtop USB/PC Operated Fiber Viewer EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 34 - IPR2015-01375...
- Page 35 2. Dust Off (or similar clean, compressed air) 3. Cletop (www.cletop.com) Cletop Type A SMA cleaner with Blue tape 14100500 Box of 6 Replacement Blue Tape Reels 14100700 4. Lint Free Wipe with Isopropyl Alcohol EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 35 - IPR2015-01375...
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Page 36: Troubleshooting
Laser Overtemp Laser SMA Not (>66C) Connected Laser Current Failed Ignition Regulation Error Safety Diagnostic Lamp Head Laser Temperature Overtemp > 85C Regulation Error Plasma Extinguished (after ignition) EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 36 - IPR2015-01375... - Page 37 If all of the interlocks are OK and either the lamp or controller interlock faults will not clear, please contact the factory. Condition: Lamp fails to ignite after several tries. Action Contact Energetiq. EQ99 Operation Manual Rev. 2 Energetiq Ex. 2060, page 37 - IPR2015-01375...
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Page 38: Lamp Replacement
EQ-99-FC. Replace the output fiber with a new one to determine if the original performance is restored. All fibers will degrade over time, although fibers supplied by Energetiq have been designed for the EQ-99-FC. Lamp Replacement Contact Energetiq if a bad lamp is suspected. - Page 39 Energetiq Ex. 2060, page 39 - IPR2015-01375...
- Page 40 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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