Table of Contents
Introduction
Applicable Standards
Applicable SEMI Standards
Safety Precautions
Precautions for Safe Use
Precautions for Correct Use
Reading this Manual
Table of Contents
SECTION 1 Product Outline
What Is a CIDRW System
Features
System Configuration
Component Names and Functions
Flowchart for Getting Started
SECTION 2 Installation and Connections/Wiring
Installation
Connections and Wiring
SECTION 3 Preparing for Communications
Setting the Communications Conditions for Amplifier Units
Communications Test
SECTION 4 Reading from/Writing to ID Tags
Command/Response Format
SECTION 5 Browser Interface
Browser Operation Windows
Window Configuration
INTRODUCTION
Table of Contents
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31
32
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CIDRW System
User's Manual
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