Zeiss Crossbeam 350 Manuals

Manuals and User Guides for Zeiss Crossbeam 350. We have 1 Zeiss Crossbeam 350 manual available for free PDF download: Instruction Manual

Zeiss Crossbeam 350 Instruction Manual (126 pages)

Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

Brand: Zeiss | Category: Microscope | Size: 13.11 MB

Table of Contents
3
Glossary
6
General Information
8
Text Conventions and Link Types
9
Explanation on Warnings and Additional Information
9
Further Applicable Documents
10
Contact
11
Safety
12
Intended Use
12
Safety Procedures
13
Safe Operation Conditions
13
Requirements for Personnel
13
Preventive Maintenance
14
Safe Handling of Spare Parts
14
Prevention of Hazards
14
Biological Hazards
14
Burn Hazards
14
Chemical Hazards
14
Electrical Hazards
15
High Pressure Hazards
15
Magnetic Field Hazards
15
Mechanical Hazards
16
Radiation Hazards
16
Suffocation Hazards
16
Safety Equipment
17
Protective Cover Panels
17
Main Switch
18
Emergency off (EMO) Option
18
Locking Devices
19
Lockout/Tagout Equipment
20
Safety Labels
20
Product and Functional Description
24
System Overview
24
Main Components
26
Vacuum System
26
Electron Optical Column | Gemini I
30
Ion-Sculptor Focused Ion Beam (FIB) Column (Optional)
32
Detectors
34
Specimen Stage
39
Dual Joystick
40
Optional Components and Accessories
41
Optional Detectors
41
Control Panel
50
Software Description
52
Smartsem
52
Smartsem User Interface
52
Graphical Control Elements
53
User Access Levels and User Privileges
54
Smartsem Program Suite
55
Smartfib
57
Smartfib User Interface
57
Graphical Control Elements
58
Smartfib Program Suite
58
Installation
60
Operation
61
Starting the System
61
Energizing the Microscope
61
Starting the Microscope
62
Starting Smartsem
62
Obtaining a First Image
64
Preparing the Specimen Holder
65
Loading the Specimen Chamber
66
Locating the Specimen
68
Switching on the Gun
69
Switching on the EHT
70
Acquiring an Image
70
Optimizing the Image
72
Saving the Image
74
Modifying Gun Parameters
74
Selecting the Gun Mode
74
Measuring the Probe Current
75
Changing the Extractor Voltage
76
Working with Different Aperture Configurations and Beam Modes
76
Determining the Installed Aperture Configuration | Gemini I Column
76
Selecting the Aperture
77
Selecting the Column Mode
77
Finding Appropriate Detector Settings
78
Selecting a Detector
78
Setting up the Inlens SE Detector
78
Setting up the SE Detector
79
Setting up the VPSE Detector
80
Setting up the Esb Detector
81
Setting up the SESI Detector
82
Setting up the Absd/Bsd Detector
83
Setting up the Astem/Stem Detector
85
Setting up the CL Detector
88
Working with Variable Pressure
88
Changing to VP Mode
89
Returning to HV Mode
89
Shutting down the System
90
Finishing the Work Session
90
Energizing the Microscope
91
Performing a Lockout/Tagout
91
Performing an Emergency Shutdown
92
Maintenance and Repair
93
Maintenance Work
93
Maintenance Intervals
93
Change of Consumables and Chemicals
94
Troubleshooting
95
Overview
95
Overall System
98
Checking the CAN Communication
98
Chamber
98
Initializing the Stage
98
Defining the Post Initialization Position of the Stage
99
Changing the Joystick TV Angle
99
Replacing the Chamber Door Seal
100
Resetting the Touch Alarm
100
Checking the Water Flow and Temperature
101
Column
101
Baking out the Gun Head
101
Calibrating the Probe Current
102
Power Circuit
103
Checking the Position of the Circuit Breakers
103
Detectors
103
Lubricating the Rod
103
Focused Ion Beam
104
Checking the Lifetime of the Ion Source
104
Regenerating the Ion Source by Heating
105
Manually Finding a New Extractor Value
105
Shutdown and Disposal
107
Putting the Microscope out of Operation
107
Transport and Storage
107
Disposal
109
Disposing of Solid Waste (Consumables)
109
Disposing of the Microscope
109
Technical Data and Conformity
110
Product Specification
110
Installation Requirements
114
Layout and Connections
117
System Layout
118
Declaration of Conformity
120
Parts and Tools
121
Consumables
121
Spare Parts
121
Tools and Accessories
122
Index
123

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