Figure 5-1
Convectron gauge base
5.4
Convectron gauge
removal and replacement
®
Convectron
ATM Vacuum Gauge Module Instruction Manual
3
2
5
4 1
Table 5-4
Convectron gauge resistance values
Pins
Pins 1 to 2
Pins 2 to 3
Pins 1 to 5
Removing or replacing the Convectron gauge in a
high−voltage environment can cause an electrical
discharge through a gas or plasma, resulting in serious
property damage or personal injury due to electrical
shock or fire.
Vent the vacuum chamber to atmospheric pressure and shut off
power to the module before you remove or replace the
Convectron gauge.
Normal resistance (Ω)
15 to 25 Ω
50 to 60 Ω
175 to 190 Ω
WARNING
Maintenance
67