HELIX GRANVILLE-PHILLIPS Convectron ATM Instruction Manual page 73

Table 5-2 Troubleshooting RS–485 error messages
Message from
module Possible causes
DEF SNSR • Convectron gauge is defective.
• Diaphragm pressure sensor is defective.
• Pressure is > 1000 Torr.
• Process gas is a not the gas that the user
anticipated using in the system.
HI ATM V • Atmospheric pressure is > pressure represented
in TS command.
• TO command was sent while atmospheric
pressure < 400 Torr (5.332 mbar, 533.2 Pa)
• Convectron gauge is contaminated.
• Module is too near a gas inlet.
LO ATM V • Atmospheric pressure is < pressure represented
in TS command.
• TO command was sent while atmospheric
pressure was > high limit of measurement range.
• Module is too near pump.
GAIN LIM TS command was sent while atmospheric pressure
was > high limit of measurement range.
HI VAC V Vacuum pressure is > pressure represented in TZ
command.
LO VAC V Vacuum pressure is < pressure represented in TZ
command.
OFST LIM • TZ command was sent while vacuum chamber
pressure was < low limit of measurement range.
• TO command was sent while differential
pressure was outside measurement range.
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Convectron ATM Vacuum Gauge Module Instruction Manual
Solution
• If Convectron gauge or diaphragm pressure
sensor is defective, return module to factory (see
page 70).
• If pressure is higher than 1000 Torr, decrease
pressure.
• If process gas is not the gas that the user
anticipated, adjust relays indicating vacuum
pressure for gas that is being used (see page 56).
• If atmospheric pressure is too high, decrease
pressure, then recalibrate (see page 56).
• If atmospheric pressure is < 400 Torr
(5.332 mbar, 533.2 Pa), increase pressure, then
recalibrate differential pressure sensor zero (see
page 57).
• If Convectron gauge is contaminated, return it to
factory (see pages 68 and 70).
• If module is too close to a gas inlet, relocate
module farther away from inlet (see page 7).
• If atmospheric pressure is too low, increase
atmospheric pressure, then recalibrate
Convectron gauge (see page 56).
• If atmospheric pressure was too low, increase
pressure, then recalibrate differential pressure
sensor zero (see page 57).
• If module is too near pump, relocate module
farther away from pump (see page 7).
Decrease atmospheric pressure, then recalibrate
Convectron gauge (see page 56).
Decrease vacuum chamber pressure, then
recalibrate Convectron gauge (see page 56).
Increase vacuum chamber pressure, then
recalibrate Convectron gauge (see page 56).
• If vacuum chamber pressure < low limit of
measurement range, increase vacuum chamber
pressure, then recalibrate Convectron gauge (see
page 56).
• If differential pressure was outside measurement
range, increase pressure, then recalibrate
differential pressure sensor zero (see page 57).
Maintenance
65