Ulvac UTM2300A-MI-AFWX Manuals

Manuals and User Guides for Ulvac UTM2300A-MI-AFWX. We have 1 Ulvac UTM2300A-MI-AFWX manual available for free PDF download: Instruction Manual

Ulvac UTM2300A-MI-AFWX Instruction Manual

Ulvac UTM2300A-MI-AFWX Instruction Manual (102 pages)

TURBO MOLECULAR PUMP

Brand: Ulvac | Category: Water Pump | Size: 2.77 MB

Table of Contents

Copyrights and Disclaimers
3
Precautions for Safe Operation
4
Operating Precautions
7
Explanation of Label
9
Location of Label
10
Table of Contents
11
Table of Contents
12
Section 1 OUTLINE and DESCRIPTIONS
15
Outline
16
Descriptions
17
- Outside Drawing of Pump Unit
  17
- Power Cable
  18
- Standard Accessories
  18
- Document List
  19
Section 2 IDENTIFICATION and FUNCTION
21
Pump Main Unit
22
Control Panel
23
External I/F Panel
24
Section 3 CONSTRUCTION and PRINCIPLE
25
Pump Construction
26
Principle of Turbo Molecular Pumping
26
Controller
29
Section 4 SPECIFICATIONS
31
Standard Specifications for Pump Unit
32
The Maximum Allowable Flow Rate
35
Standards Fulfilled
35
Section 5 INSTALLATION
37
Installation
38
Connection of Power Cable
46
Preparation for Operation
48
Interlock for Vacuum System
49
Notes on Transportation
49
Section 6 OPERATION
51
Overview
52
- Introduction : Operation Modes
  52
Startup Preparation
54
Start-Up
56
Shutting down
57
Variable Speed Operation
59
Software Operation
63
Remote-Control Connector
65
- Specification
  65
- Pin Assignment
  66
- Connector
  67
Communication Specifications
68
- Rs-232C
  68
  - Transfer Specifications
    68
  - Connector Specifications
    68
  - Cable
    68
  - Transfer Specifications
    69
  - Connector Specifications
    69
  - Cable
    70
- Connector
  71
Section 7 GAS PURGE
73
Section 8 TURBO MOLECULAR PUMP RECONDITION
75
Recommended Maintenance Intervals
76
Turbo Molecular Pump Decontamination
77
Touch-Down Bearing Replacement
77
Check of the Rotor Blades
77
Power Supply Unit Parts Replacement
78
Turbo Molecular Pump Return Request
79
Vacuum Pressure Rise
84
Abnormal Noise And/Or Vibration
84
Nothing Happens after an Operation Is Made
85
Power Failures
86
- Power Failure Counter-Operation
  87
Alarm Detection Capabilities
88
Warranty Clauses
96
Warranty Items
96
Duration of Guarantee
96
Warrantee Scope
96
Response Procedure
96
Disclaimer
97
Others
97

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