MKS 579B Manuals

Manuals and User Guides for MKS 579B. We have 1 MKS 579B manual available for free PDF download: Instruction Manual

MKS 579B Instruction Manual

MKS 579B Instruction Manual (87 pages)

Digital Mass Flow Controller, Digital Mass Flow Meter

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
3
Safety Information
9
- Symbols Used in this Instruction Manual
  9
- Safety Procedures and Precautions
  10
Chapter 1: General Information

13
- Introduction
  13
- Overview of Versions
  13
  - Power Supply and Readout Units
    14
- Profibus Version
  14
- CE and EMC Requirements
  14
- Instruction Manual
  15
  - Contents
    15
  - Conventions
    15
  - Designations and Names
    15
Chapter 2: Shipment

17
- General
  17
  - Unpacking
    17
- Unpacking Checklist
  17
  - Analog Units
    17
  - Profibus Units
    18
  - Label
    19
  - Clean Room Packaging
    19
  - Figure 1: Model Code Label
    19
Chapter 3: Connectors and Control Elements

21
- Analog Units
  21
  - Figure 2: 1579A/B / 579A/B Side View
    21
  - Figure 3: 1579A/B / 579A/B Connector Side
    21
  - Autozero
    22
  - Connector SETUP
    22
  - Figure 4: 1579A/B / 579A/B Gas Inlet Side
    22
  - Potentiometer ZERO
    22
  - RESET Switch
    22
- Electrical Connector
  23
  - 1579A/B / 579A/B, Analog Unit
    23
  - Figure 5: 15-Pol. Connector
    23
- Profibus Units
  24
  - Figure 6: 1579A/B / 579A/B Side View
    24
  - Figure 7: 1579A/B / 579A/B Connector Side
    24
  - Address and Mode Switch A/B
    25
  - Autozero
    25
  - Figure 8: 1579A/B / 579A/B Gas Inlet Side
    25
  - Potentiometer ZERO
    25
  - RESET Switch
    25
  - Status LED STS
    25
- Electrical Connectors
  26
Chapter 4: Operation

29
- General Requirements
  29
  - Environmental
    29
  - Location and Orientation
    30
  - Leak Integrity
    30
  - Pressure Drop Test
    30
- Dimensions
  31
  - Outline Dimensions
    31
  - Figure 11: 1579A/B / 579A/B Dimensions (Side)
    31
  - Mounting Holes
    32
  - Figure 12: Dimensions (Inlet/Outlet Side)
    32
  - Figure 13: Mounting Holes
    32
  - Mounting Plate
    33
- Electrical Connections and Cables
  33
- Finishing the Installation
  34
Chapter 5: Operation (Analog Units)

35
- Start up the Mass Flow Controller/Meter
  35
- Zero Adjust
  36
- Override the Control Valve
  37
- Priority of Commands
  37
Chapter 6: Operation (Profibus Units)

39
- Functions
  39
  - Overview
    39
  - Valve Override
    40
  - Auto Zero
    40
  - Alarm Limits
    40
  - Temperature Measurement
    40
  - Valve Drive Level
    40
  - User Span / Gas Correction
    41
  - User Zero
    41
  - Filter
    41
  - Gas Tables
    41
  - Soft Start Rate
    41
- Start up the Mass Flow Controller
  42
- Zeroing the Flow Controller
  43
- Status LED STS
  44
- Address and Mode Switch A/B
  44
  - Switch Assignment
    44
  - Mode B
    44
  - Figure 15: Address and Mode Switch Map A/B
    44
  - Setting an Address
    45
  - Mode a
    45
  - Zero Modes
    45
- PROFIBUS Protocol
  46
- Data Interface
  46
  - Send Data
    47
  - Small Receive Data
    48
  - Full Receive Data
    49
  - Small Setup
    50
  - Full Setup
    51
  - Small Diagnostics
    53
  - Full Diagnostics
    54
  - Calibration Table
    56
- PROFIBUS Setup
  57
  - GSD Files Usage
    57
Chapter 7: Theory of Operation

59
- Technique of Measurement and Control, Electronics
  59
  - Flow Path
    59
  - Measurement Technique
    59
  - Control Circuitry
    60
- Control Valve
  60
Chapter 8: Gas Correction Factor (GCF)

61
- The Gas Correction Factor (GCF)
  61
Chapter 9: MFC Sizing Guidelines

65
- General
  65
- Determining the Flow Controller Range
  66
  - Configurations for Low or High Differential Pressure
    66
Chapter 10: Maintenance

67
- General
  67
  - Zero Adjustment
    67
  - Checks and Recalibration
    67
  - Profibus Support Kit
    68
- Customer Support
  68
- Troubleshooting
  69
- Table 2: Troubleshooting
  69
Appendix A: Product Specifications

71
- Specifications
  71
- Environmental Specifications
  72
- Electrical Specifications
  72
- Physical Specifications
  73
Appendix B: Model Codes

75
- Model Code
  75
  - Type Number (XXXXA)
    75
  - SEMI Gas Code (YYY)
    76
  - Calibration Gas Flow Rate (ZZZ)
    76
  - Fittings (F)
    76
  - Valve (1)
    77
  - Electrical/Communication Connector (C)
    77
  - Seals (E)
    77
- Ordering Examples
  78
  - To Order a Mass Flow Controller
    78
  - To Order a Mass Flow Meter
    78
Appendix C: Gas Correction Factors

79
Appendix D: Binary Code

83
- Table 3: Binary Code
  83
- MKS Worldwide Calibration & Service Centers
  85

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