MKS 390 Series Manuals

Manuals and User Guides for MKS 390 Series. We have 1 MKS 390 Series manual available for free PDF download: Instruction Manual

MKS 390 Series Instruction Manual (100 pages)

Granville-Phillips Series 390 Micro-Ion ATM, Four-Sensor Combination Vacuum Gauge Module with RS-485 Interface and Analog Output

Brand: MKS | Category: Control Unit | Size: 1 MB

Table of Contents
5
About These Instructions
5
Caution and Warning Statements
5
Before You Begin
5
Operation Overview
5
Definitions of Terms
5
Calibration
6
Micro-Ion Gauge off
6
Chapter 1 Before You Begin

9
- About These Instructions
  9
- Caution and Warning Statements
  9
- System Grounding
  10
- Implosion / Explosion
  10
- Operation
  11
- Reading and Following Instructions
  11
- Definitions of Terms
  12
- Customer Service
  12
  - Atmospheric Pressure
    12
Chapter 2 Installation

13
- Module Components
  13
- Pressure Relief Devices
  13
  - Installation
    13
- Installation Procedure
  14
  - Step 1 Locate the Module
    14
  - Step 2 Attach Module to Vacuum Chamber
    16
    
    VCR Type Fitting
    16
    
    KF Flange
    16
    
    Conflat Flange
    16
  - Step 3 Assemble and Connect Wiring
    17
    
    Connecting Cable
    17
    
    Power Supply Wiring
    17
    
    Gauge/Degas Wiring
    17
    
    Wiring Terminals
    17
    
    Chassis Ground
    19
  - Step 4 Calibrate Module at Atmospheric Pressure
    20
- Eliminating Radio Frequency Interference
  20
Chapter 3 Operation Overview

21
- Analog Operation
  21
- RS-485 Operation
  21
- Automatic Filament Selection
  23
Chapter 4 Analog Operation

25
- Output Functions
  25
- Preparing to Operate the Module
  25
- Operational Tasks
  25
- LED Status Indicator
  26
- Reading Pressure
  27
- Micro-Ion Gauge off
  30
- Micro-Ion Gauge Degas
  30
- Calibration
  31
  - Atmospheric Pressure Calibration
    32
  - Vacuum Pressure Calibration
    32
- RS-485 Operation
  33
- Pressure Output and Relay Functions
  33
- Preparing to Operate the Module
  33
Chapter 5 RS-485 Operation

33
Chapter 6 Optional Display

69
- Display Capabilities
  69
  - Vacuum Pressure Display
    69
  - Differential Pressure Display
    69
- Display Resolution
  70
- Error Conditions
  70
Chapter 7 Maintenance

73
- Customer Service
  73
  - Maintenance
    73
- Troubleshooting
  74
  - Precautions
    74
  - Symptoms, Causes, and Solutions
    75
  - Error Responses
    76
- Micro-Ion Gauge Continuity Test
  77
- Replacing the Gauge Assembly
  79
- Returning a Micro-Ion Module for Service
  79
Appendix A Specifications & Compliance

81
- Absolute Pressure for N or Air
  81
Appendix B Theory of Operation

89
- Micro-Ion Gauge, Conductron Sensor, and Pressure Diaphragm Sensors
  89
- Index
  93
  - Customer Service
    100

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MKS 390 Series Manuals

MKS 390 Series Instruction Manual (100 pages)

Table of Contents

Chapter 1 Before You Begin

Chapter 2 Installation

Chapter 3 Operation Overview

Chapter 4 Analog Operation

Chapter 5 RS-485 Operation

Chapter 6 Optional Display

Chapter 7 Maintenance

Appendix A Specifications & Compliance

Appendix B Theory of Operation

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