MKS MODUCELL 325 Series Manuals

MKS MODUCELL 325 Series Manuals

Manuals and User Guides for MKS MODUCELL 325 Series. We have 1 MKS MODUCELL 325 Series manual available for free PDF download: Instruction Manual

MKS MODUCELL 325 Series Instruction Manual

MKS MODUCELL 325 Series Instruction Manual (38 pages)

Pirani Vacuum Sensor/Transducer

Brand: MKS | Category: Accessories | Size: 1 MB

Table of Contents

Table of Contents
3
Chapter 1 General Information

5
- Receiving Inspection
  5
- International Shipment
  5
- Warranty
  5
- Certification
  5
- Customer Service / Technical Support
  6
- Typical Applications
  6
Chapter 2 Safety

7
- Safety Introduction
  7
- Responsibility
  8
- Grounding Requirements
  9
- High Voltage
  10
- Over Pressure Conditions
  11
- Damage Requiring Service
  12
Chapter 3 Specifications

13
- General Description
  13
- Intended Use
  13
  - Improper Use
    13
- Transportation
  13
- Storage
  13
- Specifications
  14
Chapter 4 Installation

15
- Sensor Location
  15
- Connect the Sensor to the Vacuum System
  15
- Electrical Connections
  17
Chapter 5 Operation

21
Chapter 6 Service & Maintenance

27
- Customer Service / Technical Support
  27
- Service Guidelines
  27
- Damage Requiring Service
  28
- Troubleshooting
  29
- Cleaning the MODUCELL Case and Sensor Tube
  30
  - Venting to Atmosphere
    30
- Testing the Sensor Tube
  30
- Replacing the Sensor Tube
  31
  - Disassemble the MODUCELL
    31
  - Reassemble the MODUCELL
    31
Chapter 7 Index

35

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