User Manuals: Brooks GP200 Mass Flow Controller

User Manuals: Brooks GP200 Mass Flow Controller

Manuals and User Guides for Brooks GP200 Mass Flow Controller. We have 1 Brooks GP200 Mass Flow Controller manual available for free PDF download: Supplemental Manual

Brooks GP200 Supplemental Manual

Brooks GP200 Supplemental Manual (56 pages)

Metal Sealed Pressure-Based Mass Flow Controllers

Brand: Brooks | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
2
Section 1 Introduction
4
Purpose
4
Scope
4
Section 2 Background
6
Topology
6
Communication Parameters
6
Message Format
7
Section 3 Message Protocol Details
9
Query for MAC ID
9
Digital Mode Selection
11
Query Present Control Mode
12
Freeze Follow
14
New Setpoint
15
Ramp Time
16
Filtered Setpoint
19
Indicated Flow
21
Valve Drive Current
23
Query for Calibration Instance (Process Gas) Selection
26
Query for Available Calibration Instance
28
Auto Zero Enable/Disable
30
Requested Zero Enable
31
Query for Requested Zero Status
32
Query for Sensor Current Zero
34
Query for Sensor Reference Zero
36
Set Sensor Reference Zero
38
Set Default Control Mode
39
Query Default Control Mode
40
Query for Inlet Pressure
42
3.22. Query for Temperature
44
Section 4 Software Design Requirement
46
Normal Transaction Scenarios
46
Read Transaction Scenario
46
Write Transaction Scenario
47
Abnormal Transaction Scenarios
47
Read Transaction Scenario
47
Packet Error
47
Read Error
48
Write Transaction Scenario
49
Packet Error
49
Write Error
49
Protocol Timing
50
Message Sequence between Master Controller and a MFC Slave Controller
51
MFC New Setpoint Conversion
52
Sensor Zero Filter
52
Requested Zero
53
Auto Zero
53
Calibration Instances
54
Analog / Digital Mode
54
Appendix: Tool - Device Communication
55

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