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Ulvac CRTM-6000G Instruction Manual
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Ulvac CRTM-6000G Instruction Manual

Crystal oscillation type deposition controller
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No. SK00-8144-SI-011-03
August 08, 2017
Crystal Oscillation Type Deposition Controller
CRTM-6000G
Instruction Manual
Before using this product,be sure to read this Instruction manual.
Keep this manual with care to use any time.
ULVAC, Inc.
Components Division
2500 Hagisono, Chigasaki, Kanagawa, 253-8543 Japan
http://www.ulvac.co.jp/eng/

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  • Page 1 No. SK00-8144-SI-011-03 August 08, 2017 Crystal Oscillation Type Deposition Controller CRTM-6000G Instruction Manual Before using this product,be sure to read this Instruction manual. Keep this manual with care to use any time. ULVAC, Inc. Components Division 2500 Hagisono, Chigasaki, Kanagawa, 253-8543 Japan...
  • Page 2 Before using this product Thank you very much for your purchase of an ULVAC product. Upon receipt of this instrument, make sure it is the correct model ordered and that it has not been damaged during transport. Read this manual before installing, operating, inspecting, or maintaining the product and △...
  • Page 3 Caution Use in this state can immediately turn the power switch off and unplug the power plug. result in fire or electric shock. Contact your local ULVAC representative or the Components Division of ULVAC, Inc. for repair. Power Off △...
  • Page 4 Air Vents △ Do not obstruct the air vents on the controller. Notice...
  • Page 5 Table of Contents SPECIFICATIONS ........................1 1.1. CRTM-6000G S ....................1 PECIFICATIONS 1.1.1. General Specifications ..................... 1 1.1.2. Performance Specifications....................1 1.1.3. Accessories List (Standard Configuration) ..............2 1.2....................3 ENSOR PECIFICATIONS 1.2.1. Sensor Types ........................4 1.3. & W ..................
  • Page 6 Ziegler-Nichols Transient Response Method ................48 4.6.1.2. Ziegler-Nichols Critical Sensitivity Method ................. 49 4.6.2. Control with the CRTM-6000G ..................49 4.6.3. Actually Determining Parameters with the CRTM-6000G ......... 50 4.6.3.1. Transient Response Method ..................... 50 4.6.3.2. Critical Sensitivity Method ......................50 4.7.
  • Page 7 RS-232C Test ..........................67 6.1.1.6. Memory Initialization ........................67 6.1.1.7. Setting the Unit System ......................68 6.1.1.8. Locking Parameters ........................68 6.2. ULVAC S ..................... 69 ENSOR AINTENANCE WARRANTY ..........................70 REFERENCES ......................... 71 8.1. , Z-RATIO) ................71 ATERIALS...
  • Page 8 8.7.1. European Union RoHS ....................81 8.7.2. China RoHS ........................81 8.8......................82 XTERNAL IMENSIONS 8.9........................83 NQUIRY HEET...
  • Page 9 Specifications 1.1. CRTM-6000G Specifications 1.1.1. General Specifications Table 1-1 General Specifications Dimensions 240W x 99H x 350D mm Weight 3.6 kg Power requirements 85 to 230 VAC, 50 or 60 Hz Power consumption 30 W max. Operating environment Temperature: 5 to 40 ° C...
  • Page 10 1.1.3. Accessories List (Standard Configuration) Table 1-3 Item Spec. Quantity Power supply cable Connector (25-pin D-sub/female) Connector (9-pin D-sub/male) Outside-vacuum cable (BNC-BNC 4 m) Operations manual (CD) Power Supply Cable Use Restriction Notice △ The included power supply cable is only approved for domestic use. Do not export and use abroad.
  • Page 11 Operating temperature range 0 to 80 ° C Measurement: 150 ° C max. Baking: If an ULVAC deposition sensor is regenerated and used, you may not be able to conduct a Notice △ stable deposition. Oxidation Warning Notice △...
  • Page 12 1.2.1. Sensor Types Table 1-6 Sensor Types CRTS-0 No cooling water pipe or flange. Only the sensor head. CRTS-0 Water cooling jacket which the CRTS-0 can be inserted in. water cooling jacket ⌀ 4 water cooling pipe, with UFC flange. CRTS-4 UFC070 CRTS-4 ⌀...
  • Page 13 Figure 1-4 CRTS-4, 6 Type with UFC070 Flange Figure 1-5 CRTS-4U, 6U Type (Bakeable) with UFC070 Flange Figure 1-6 Multi-sensor CRTS-12NS Sensor Head Figure 1-7 Multi-sensor CRTS-M6 Sensor Head...
  • Page 14 This cable cannot be used with bakeable types such as CRTS-4U or 6U. The length is 0.15 m. Figure 1-10 Auxiliary Cable 1.3.3. External Cable A double-ended BNC cable to connect the CRTM-6000G and oscillator. Select the length from 4 m, 8 m, 12 m, or 16 m. Figure 1-11 External Cable...
  • Page 15 1.3.4. Oscillator Control Cable The cable to connect the CRTM-6000G and the OSC-12DG oscillator. This cable cannot be used when using OSC-12BG. Figure 1-12 Oscillator Control Cable...
  • Page 16 1.4. External View Figure 1-13 CRTM-6000G External View (Front) Figure 1-14 CRTM-6000G External View (Rear)
  • Page 17 2. Installation in a System 2.1. Power Supply Wiring Use the included power supply cable for the connection to an AC power line. The socket end of the cable has a 3-pin plug with a GND terminal. Always ground the controller. 2.2.
  • Page 18 2.4. Installing & Wiring the Sensor The repeatability of the correlation between the monitored film thickness and substrate film thickness is considerably affected by the installation position of the sensor head. The distribution of the deposition source changes according to the quantity of deposition material, therefore install the sensor head in a position within 30 degrees of being directly above the deposition source.
  • Page 19 2.5. DIP Switch Settings Configure the controller settings using the DIP switches on the rear of the unit. The controller settings are enabled when the power is turned on. Restart the controller when settings are changed. If an invalid setting is configured, that setting becomes the factory default value. Switch No.
  • Page 20 3. How to Use 3.1. Key Operations The function of the keys on the front operation panel are as follows. Numeric keys [1] to [0] and [.]: Use to enter parameter values and select menus/items. Moves the cursor during menu/item selection. ↑...
  • Page 21 Run programs which control deposition and configure operation settings. 3. MAINTENANCE: Displays/configures the status of the CRTM-6000G. Mainly used for maintenance. Directly select an item by pressing the 1-3 key or select by moving the cursor to that item using the ↑ ↓...
  • Page 22 3.3. DATA DISPLAY Screen Proc ess Program LAYER Executing/Standby Deposition Program Time from Deposition Start ＬＡＹＥＲ ０１ ＰＲＯＧＲＡＭ ０１ ００ ：０ １．０９ ８０．０ ０．１９２ nm ／ｓ ％ μm ＲＩＳＥ １ ００ ：０５ （１）５．０００ＭＨＺ １２．３％ Error Display Line Alarm Display Line １...
  • Page 23 PROGRAM corresponding to the DEPOSITION PROGRAM number listed here. • DIGITAL INPUT (See 3.4.5 DIGITAL INPUT ) The operating status of the CRTM-6000G can be allocated as desired to the 12 digital inputs. • DIGITAL OUTPUT (See 3.4.6 DIGITAL OUTPUT ) The operating status of the CRTM-6000G can be allocated as desired to the 12 digital outputs.
  • Page 24 3.4.1. SYSTEM PARAMETER ＳＹＳＴＥＭ ＰＡＲＡＭＥＴＥＲ １． ＷＨＥＮ ＸＴＡＬ ＦＡＩＬ ２． ＢＡＵＤ ＲＡＴＥ ３． ＴＥＳＴ ＭＯＤＥ ４． ＭＯＮＩＴＯＲ ＭＯＤＥ ５． ＣＯＭＭＵＮＩＣＡＴＩＯＮ ＭＯＤＥ ６． ＳＥＮＳＯＲ ＣＨＡＮＧＥ ００ Figure 3-6 SYSTEM PARAMETER Screen Configure the operation during a crystal failure and communications settings on the SYSTEM PARAMETER screen.
  • Page 25 3.4.2. DEPOSITION PROGRAM When MONITOR MODE is set to 2: NO on the SYSTEM PARAMETER screen, the program is executed while performing feedback control. All parameters on the program screen in Figure 3-7 can be configured. For the description of each parameter, see Table 3-6 Parameters when using as a Controller (page 26).
  • Page 26 ＤＥＰＯＳＩＴＩＯＮ ＰＲＯＧＲＡＭ Ｎｏ．０１ ６／６ ＴＩＭＥＲ ００：００ ＲＡＴＥ ＬＯＳＳ ０.０ ％ ＨＥＡＲＴＨ Ｎｏ． ０１ ＳＥＮＳＯＲ Ｎｏ． １ ＲＡＴＥ ＦＵＬＬ ＳＣＡＬＥ １０．００ｎｍ／ｓ ＴＨＫ ＦＵＬＬ ＳＣＡＬＬ １．００ μｍ ＥＮＴＥＲ（００：００-９９：５９） Figure 3-7 DEPOSITION PROGRAM Screen * SI unit system or Å can be selected with MAINTENANCE-7 UNIT. ("6.1.1.7 Setting the Unit System") 3.4.3.
  • Page 27 3.4.4. PROCESS PROGRAM When PROCESS is selected with DIP switch bit 7 (see 2.5 DIP Switch Settings), PROCESS PROGRAM No. is displayed on the PROCESS PROGRAM screen. To configure, move the cursor key to No. on the right side of PROCESS PROGRAM and enter the PROCESS number you wish to execute. The currently displayed number becomes the active PROCESS number.
  • Page 28 3.4.4.2. BCD MODE When BCD is selected with the DIP switch, the LAYER count is 1 (LAYER1 of the active PROCESS number). The number of DEPOSITION PROGRAMS that can be set by the PROCESS PROGRAM is up to 99, but the number of DEPOSITION PROGRAMS that can be set by external I/O's BCD input is 1 to 15. When starting from external I/O's BCD input, input the START signal from external I/O in a state performing BCD input.
  • Page 29 3.4.5. DIGITAL INPUT There are a total of 12 digital inputs and the functions that can be assigned to each input number are programmable (Figure 3-10). Assign a signal by moving the cursor to the line of the port number and entering the numeric value from the function list at the right.
  • Page 30 About edge and level input DIGITAL INPUT on the CTRM-6000G views the status of the input circuit at a measurement interval of every 125 ms. For edge input the rise and fall of the signal is significant and for level input the presence of the signal at that time is significant.
  • Page 31 3.4.6. DIGITAL OUTPUT There are a total of 12 digital outputs and functions can be assigned to each output (PORT) number. Configure those corresponding functions on the screen in Figure 3-12. There is momentary output from DIGITAL OUTPUT when the power is turned on, but this is not a malfunction.
  • Page 32 3.4.7. ANALOG OUTPUT Analog output is programmable. Select from 3 types, POWER/RATE/THK, and select the corresponding sensor number from 0, 1, 2. 1 and 2 indicate those sensor numbers but 0 is the currently selected sensor number. Single sensor: Specify the sensor number and deposit the film. Set 1 or 2, do not set 0. Dual sensor: Treat the other sensor as a spare.
  • Page 33 3.5. Using as a Monitor If measuring film thickness or deposition rate is sufficient without controlling the deposition source, you can easily use the controller as a monitor by setting it to monitor mode. Analog output becomes 0 V. DEPOSITION PROGRAM No. 1 parameters are always used as monitor mode parameters. To set monitor mode, select 1:YES for MONITOR MODE on the SYSTEM PARAMETER screen in Figure 3-14.
  • Page 34 If you with to deposit a film with a programmed procedure while controlling the deposition source, you must use the CRTM-6000G program functions. To use of the method of using the CRTM-6000G as this controller, please understand about the deposition sequence which the controller can perform. The deposition sequence is explained in detail in "4.8 Deposition Sequence".
  • Page 35 PROGRAM. SHUTTER Time to open the sensor shutter during intermittent 00:00 - 99:59 min:sec OPEN TIME measurement. SHUTTER Time to close the sensor shutter during intermittent 00:00 - 99:59 min:sec CLOSE measurement. TIME STABILITY Stability while the shutter is open. If 0 is entered, the 0.0 - 99.9 shutter opens or closes according to the time setting.
  • Page 36 When using DIGITAL INPUT, a +12V to +24V DC power supply is required. Notice △ Connector Connection/Disconnection Warning Caution △ Connecting or disconnecting a live (energized) connector may damage the CRTM-6000G or connected devices. Turn off the power on the CTRM-6000G and all devices before connecting or disconnecting.
  • Page 37 4.1.2. DIGITAL INPUT Connections The DIGITAL INPUT internal circuit is shown in Figure 4-2. All DIGITAL INPUTS are photocoupler insulated. The +COM terminal is the photocoupler power supply. Figure 4-3 shows an example relay circuit. A switch is connection in this example, but a relay, open collector, etc., can be used instead. DIGITAL INPUT +COM DIGITAL INPUT Photocoupler...
  • Page 38 Figure 4-4 DIGITAL OUTPUT Output Circuit Coution Output Current/Voltage Warning △ If an output in excess of the rating is connected, the CRTM-6000G may be damaged. Notice Use a shielded multi-core cable for wiring. For shielding, use the metal connector on △...
  • Page 39 △ Connecting or disconnecting a live (energized) connector may damage the CRTM-6000G or connected devices. Turn off the power on the CTRM-6000G and all devices before connecting or disconnecting. Use a shielded multi-core cable for wiring. For shielding, use the metal connector on the Notice △...
  • Page 40 △ Connecting or disconnecting a live (energized) connector may damage the CRTM-6000G or connected devices. Turn off the power on the CTRM-6000G and all devices before connecting or disconnecting. Use a shielded multi-core cable for wiring. For shielding, use the metal connector on the Notice △...
  • Page 41 RS-232C can be used to receive instructions from an external device or to send the status of the CRTM-6000G or instructions to an external device. 4.2.1. Settings Communications conditions on the CRTM-6000G are listed below. Baud rate 38400/19200/9600/2400 bps Start bits...
  • Page 42 △ Connecting or disconnecting a live (energized) connector may damage the CRTM-6000G or connected devices. Turn off the power on the CTRM-6000G and all devices before connecting or disconnecting. Use a shielded multi-core cable for wiring. For shielding, use the metal connector on the Notice △...
  • Page 43 4.2.3.1. Get Version Command: C0 PC send format: C0 ↓ (3 characters) Command format String length Send C0 ↓ Reply R0 ⃞ CRTM-6000G ⃞ VX.XX ↓ 4.2.3.2. Set/Get SYSTEM PARAMETER Command: C1 -1: Set -2: Get Command format String length Send C1-1:n ⃞...
  • Page 44 4.2.3.3. Set/Get DEPOSITION PROGRAM Command: C2 -1: Set -2: Get Command format String length Send Variable C2-1:mm ⃞ nn ⃞ pp ↓ Reply R2-1:OK/NG ↓ Send C2-2:mm ⃞ nn ↓ Reply R2-2:pp/ng ↓ Variable/8 mm:PROGRAM No.(=01-99) See the table below for nn and pp. Extra zeros of the integer or decimal portion can be omitted in decimal figure parameters.
  • Page 45 LIMIT XX.X 0.0 - 99.9 POWER STOP XX.X 0.0 - 99.9 POWER POWER STOP MM:SS 00:00 - 99:59 TIME TIMER MM:SS 00:00 - 99:59 SHUTTER OPEN TIME MM:SS 00:00 - 99:59 SHUTTER CLOSE TIME MM:SS 00:00 - 99:59 STABILITY XX.X 0.0 - 99.9 RATE LOSS XX.X...
  • Page 46 4.2.3.4. Set/Get PROCESS PROGRAM Command: C3 -1: Set -2: Get Command format String length Send C3-1:nn ⃞ m1 ⃞ m2 ⃞ m3 ⃞ m4 ⃞ m5 ↓ Reply R3-1:OK/NG ↓ Send C3-2:nn ↓ Reply R3-2:m1 ⃞ m2 ⃞ m3 ⃞ m4 ⃞ m5/NG ↓ 20/8 Sets/gets the contents of the currently selected active PROCESS PROGRAM No.
  • Page 47 4.2.3.6. Get DIGITAL INPUT PORT Command: C4 Command format String length Send C4 ↓ Reply R4:abcdefghijkl ↓ For a through h below, displayed as 1 when there is input, 0 where there is no input. a: INPUT1 b: INPUT2 c: INPUT3 d: INPUT4 e: INPUT5 f: INPUT6...
  • Page 48 4.2.3.7. Set/Get DIGITAL OUTPUT PORT Command: C5 -1: Set -2: Get Command format String length Send C5-1:nn ⃞ pp ↓ Reply R5-1:OK/NG ↓ Send C5-2:nn ↓ Reply R5-2:pp/NG ↓ nn is the port number. See the list below for pp. For signal descriptions, see "3.4.6 DIGITAL OUTPUT" and "8.3 CRTM Status &...
  • Page 49 4.2.3.8. Set/Get ANALOG OUTPUT PORT Since the analog output settings have become programmable, this command differs from that on the CRTM-6000. For the pp value, specify 1 or 2 corresponding to the sensor type you wish to use when the sensor type is a single sensor.
  • Page 50 Example: C7 ↓ R7:01 01 12.05 38.5 2.051 4.899712 ↓ Unit System Notice △ The data units are the same as those displayed with DATA DISPLAY. 4.2.3.10. Remote Command Command: C8 Command format String length Send C8:n ↓ Reply R8:OK/NG ↓ The content of n is listed below START STOP...
  • Page 51 4.2.3.12. Get Status Command: CA Command String length Send CA ↓ Reply RA:S ⃞ PP ⃞ mm:ss/NG ↓ 14/6 The content of S is listed below. Description RESET READY ABORT The content of PP is listed below. Description Description READY or RESET RATE1 RISE1 RATE RAMP2...
  • Page 52 Add an appropriate name and click OK. Figure 4-11, the connect to screen is displayed. Select the same transmission speed as the CRTM-6000G BAUD RATE and set flow control to "None". (Figure 4-12) If HyperTerminal is running, open the properties (Figure 4-13) and click ASCII setup.
  • Page 53 Figure 4-11 Connect To Setup Screen Figure 4-12 COM Port Properties Screen (1)
  • Page 54 Figure 4-13 Connection Setting "test" Properties Screen Figure 4-14 ASCII Setup 4.3.3. Communications In the HyperTerminal console, enter C0 and press the ENTER key to display the CRTM version information. For the other commands, see 4.2.3 Commands.
  • Page 55 4.4. Finding TOOLING When 100% is entered in TOOLING, the film thickness on the quartz plate is displayed as it is. When there is a difference between the film thickness on the quartz plate and that on the deposition target (substrate or film) such as when the installation location of the sensor head is far from the target, it can be corrected with TOOLING.
  • Page 56 Set each parameter as given in Table 4-4, where T is the time before settling and L the dead time in Figure 4-16. Control action 0.9 · T/L 3.3 · L 1.2 · T/L 2 · L 0.5 · L *CRTM-6000G performs PI control. Table 4-4 Transient Response Method Adjustment Conditions...
  • Page 57 Sample value control (digital control) of this can be realized by using the following equation. : Sampling Period Since CRTM-6000G actually performs PI control, the internal calculation equation is as follows, where T = 0. To maintain a constant deposition rate during deposition (RATE CONSTANT), the calculated result is fed back to the deposition source power supply as a voltage signal.
  • Page 58 6. Restart the CRTM-6000G. If the initial overshoot in the RATE CONSTANT phase is excessive, program the RATE RAMP phase by a time several times the hunting period T or reduce LIMIT to restrict the power change rate.
  • Page 59 Once film thickness is found, the deposition rate (RATE value) can be known from the change in time. The ULVAC deposition sensor is for 5 MHz only, but the CRTM-6000G can use either 5 or 6 MHz quartz plates. When a 6 MHz plate is used, set the DIP switch on the rear of the main unit. (See "2.5 DIP Switch Settings") The factory default setting is 5 MHz.
  • Page 60 3. Deposition 4. Deposition source cooling, deposition material feed 5. Remaining heat standby The CRTM-6000G can program a sequence in this order. The order of this sequence cannot be changed. 4.8.1. Standby The system is ready to start deposition. In the case of remaining heat standby, the system has IDLE POWER output.
  • Page 61 4.8.4. Deposition Source Cooling, Deposition Material Feed, Remaining Heat Standby ① ② Cooling can be conducted in two steps. In FALL 1, POWER is lowered to FEED POWER. In step ③ POWER is kept only for the amount of time of FEED TIME. In FALL 2, power is lowered to IDLE POWER.
  • Page 62 4.9. Intermittent Measurement In general, it is normal to measure film thickness throughout deposition at all times, but when forming a thick film the quartz plate may cause an oscillation error before the batch ends. This problem can be resolved by mounting a shutter plate in front of the quartz plate and opening it intermittently for measurement.
  • Page 63 4.10. Shutter Delay When using intermittent measurement, the deposition rate may decrease when the shutter is opened. This is due to a frequency variation caused by thermal impact when the shutter is opened. The original deposition rate is restored after a short time, but if feedback control is conducted at that time, the film quality may be adversely affected.
  • Page 64 4.11. Time Power When a quartz plate causes an oscillation failure during deposition in the RATE CONSTANT phase, this function performs deposition at a constant power with the time remaining until the deposition end condition. Time power is activated when a quartz plate oscillation failure occurs or while switching the multi-sensor. When not using the time power function, program WHEN XTAL FAIL under SYSTEM PARAMETER as ABORT.
  • Page 65 In such a case, the CRTM-6000G outputs a control signal to the oscillator (optional oscillator OSC-12DG) to return to the fundamental oscillation, but if the original state is not restored or if it occurs twice within 30 seconds, "FREQ JUMP"...
  • Page 66 About the High-speed Communications Specification The high-speed communications specification is a specification to shorten transmission response times for CRTM-6000G. Turn on DIP SW #2 on the rear of the controller to change to the high-speed communications specification. At this time, the DATA DISPLAY screen will not be displayed to speed up the transmission response. In its place, "COM"...
  • Page 67 5. Firmware Version Update 5.1. PC & CRTM Connection Connect the PC and CRTM-6000G with a cross cable. See 4.2.2 Connection. 5.2. CRTM Preparation With the power turned off, turn on DIP SW5. When the power is turned on, the controller displays the version upgrade reception screen (Figure 5-1).
  • Page 68 Figure 5-3 File Selection Screen Figure 5-4 CRTM-6000G Flash Tool for Windows Screen (After File Selected) When the program is selected, the screen changes to the one in Figure 5-4 and the start button can be pressed. If a file with a size of 0 bytes or a file with a size of 10,000,000 or more is selected at this time, the Figure 5-5 error message is displayed.
  • Page 69 Figure 5-8 CRTM-6000G Screen (Receiving Firmware) If the RS-232C cable is not connected or the boot program on the CRTM-6000G is not running (when the power is off or the controller program is running), the tool will not be able to receive the response command, so the "Response command"...
  • Page 70 The CRTM-6000G goes through the Figure 5-9 screen and then changes to Figure 5-10. If the Windows tool screen changes to a screen such as Figure 5-11 then the firmware flashing processing is complete. Return DIP SW #5 on the CRTM-6000G to off and cycle the power. The controller runs with the flashed firmware.
  • Page 71 When the Power is Cut During Transmission If the CRTM-6000G's power is cut during transmission before Figure 5-9, the firmware is not updated. After the transmission completes in particular, if the power is cut during Figure 5-10, the time after the flash memory is erased until the process completes, the CRTM-6000G will not operate normally even when DIP SW5 is turned off.
  • Page 72 6. Troubleshooting Read this section first if you suspect the CRTM-6000G is malfunctioning. If the cause of the problem cannot be located or eliminated, contact your local ULVAC representative or ULVAC, Inc. Notice Power On △ When the power supply is turned off, wait five seconds or more before turning the power on again.
  • Page 73 6.1.1. Testing with TEST MODE TEST MODE is entered by setting MENU → [2](PROGRAM) → [1](SYSTEM PARAMETER) → [4] (TEST MODE) to [1](YES). At this time, TEST is displayed inverted on the DATA DISPLAY screen. TEST MODE is a function for checking I/O operations without performing actual deposition. Pressing START in TEST MODE lowers the virtual frequency and calculates film thickness.
  • Page 74 6.1.1.3. Display Test Conducts a test of the screen display. Displays the internal character data on the entire screen. 6.1.1.4. I/O Test Conducts tests of DIGITAL INPUT/OUTPUT and ANALOG OUTPUT. Select [4]-[1] (DIGITAL INPUT/OUTPUT) on the MAINTENANCE MENU screen to display the screen below. IN: If there is input, the number for that port is displayed as "1".
  • Page 75 The controller's RS-232C communication function can be checked by a loop-back test. The CRTM-6000G sends a string and receives it itself and compares the received data with the sent data. First, turn off the power for safety reasons and so as to not damage the controller. Connect the RS-232C connector located on the rear of the CRTM-6000G, as shown in Figure 6-6.
  • Page 76 6.1.1.7. Setting the Unit System On the CRTM-6000G, the SI unit system is set as the default unit system. µm (film thickness: THK), nm (deposition rate: RATE) Conventional Å (10-10 m) can be selected with MENU – [3](MAINTENANCE) – [7](UNIT).
  • Page 77 6.2. ULVAC Sensor Maintenance Regularly conduct the following inspections on the sensor head. Table 6.1 Sensor Head Maintenance Item Description Quartz plate replacement Replace the quartz plate before the crystal fails if possible. １ Sensor head Check if the head interior is contaminated with deposition ２...
  • Page 78 If damage occurs from the use of this instrument, the warranty cap is the purchase price of the instrument paid by the user. When repair is necessary, it is performed by ULVAC, Inc. within one year after acceptance, and repairs are taken over by ULVAC Techno, Ltd. after one year. In addition, instruments contaminated with harmful...
  • Page 79 8. References 8.1. Materials Table (Density, Z-RATIO) Table 8-1 gives DENSITY and Z-RATIO of representative substances. It should be understood that this table only shows physical properties, please be advised it does not guarantee the quality of deposition or the lifespan of quartz plates. Table 8-1 DENSITY and Z-RATIO of Major Elements Substance Chemical...
  • Page 80 Substance Chemical Melting point Density Z-RATIO symbol [°C] [g/cm Indium Phosphide 1062 4.81 0.849 Iridium 2434 22.42 0.129 Iron 1536 7.86 0.349 Lanthanum 6.15 0.92 Lead 11.342 1.13 Lead Sulphide 1114 7.50 0.566 Lithium 0.534 Lithium Fluoride 2.64 0.774 Lutetium 1652 1.74 1.62...
  • Page 81 Substance Chemical Melting point Density Z-RATIO symbol [°C] [g/cm Tantalum 2977 16.6 0.262 Tantalum Pentoxide 1877 0.30 ２ ５ Tellurium 6.25 0.900 Terbium 1357 8.272 0.66 Thallium 11.86 1.55 Thallium Bromo-Iodide TlBr-TlI 7.371 0.939 7.29 0.724 Titanium 1670 0.628 Titanium Dioxide 1825 4.26 0.40...
  • Page 82 8.2. Quartz Plates 8.2.1. Temperature Characteristics The quartz plate used in the sensor has a property where the oscillation frequency changes with a change in temperature. The curve in Figure 8-1 shows the relationship between frequency and temperature. (The vertical axis shows relative values taken in the vicinity of 5 MHz.) 2000 1000...
  • Page 83 On the CRTM-6000G screen display, negative values for film thickness and deposition rate are displayed as 0, so after the shutter opens the film thickness may be 0 for a brief time even though the deposition rate is appearing correctly.
  • Page 84 Next, a concrete example of (c) is listed. Imagine a situation where there is a heat generating power source in the vicinity of the cooling water piping, as shown in the figure below, and it repeatedly turns on/off at regular intervals changing the temperature of the cooling water fed to the sensor.
  • Page 85 Normally, an oscillator that uses a quartz plate is configured with a circuit that oscillates at one of them. For ULVAC 5 MHz quartz plates, the main resonance frequency is 5 MHz and there are large sub-resonance frequencies near 5.2 MHz and 5.5 MHz.
  • Page 86 8.3. CRTM Status & I/O Availability Status THK0 * * * * * * * * * * * * * * * * * * * START * * - STOP * * * * * * * * * * * * * * * - * * * * * * - SOAK3HOLD SKIP...
  • Page 87 ･BAD PROGRAM ･SKIP ･XTAL FAIL ･START ･RESET (when ABORT set) ･ SKIP at intermediate ･CONT ･Not last LAYER end LAYER READY ABORT ･SKIP Figure 8-5 CRTM-6000G State Transition Diagram ABORT RATE LAYER LAYER LAYER RESET READY READY TIME START,CONT SKIP SKIP...
  • Page 88 Advances in electronics are extending the lifespan of electronic components and parts. However, they cannot be used forever. There are parts in the CRTM-6000G which will reach the end of their lifespan during normal use. To use the instrument free from the fear of unexpected trouble, it is necessary to replace these parts regularly.
  • Page 89 8.7. RoHS Compliance 8.7.1. European Union RoHS Table 8-3 EU RoHS Compliance Parts List Hazardous substances or elements Hexavalent Polybrominated Polybrominated Part Name Lead Mercury Cadmium chromium biphenyls diphenyl ether (PBDE) (Pb) (Hg) (Cd) (Cr+) (PBB) ○ ○ ○ ○ ○...
  • Page 90 8.8. External Dimensions Figure 7 Front View Figure 8 Side View * The dimensions of protrusions such as screws are not included.
  • Page 91 TIME-CONSTANT Z-RATIO LIMIT TOOLING FACTOR MAX POWER GAIN FREQUENCY Trouble symptoms (for example, what happened at what time?) Other (information that may be helpful such as the quartz plate is not an ULVAC product, the cable was custom ordered, etc.)
  • Page 92 ULVAC Components Certificate of Contamination This form is the certificate of contamination when requesting repair/inspection of ULVAC components. Complete this form before sending your instrument to ULVAC for repair and submit it to the service center or sales office. In addition, for components used with toxic gases or components contaminated with reaction products, inquire with the service center or sales office before completing this form.
  • Page 93 Revision history Date Revision Comment number 2009/06/01 First edition 2009/08/01 Correction of errors 2017/08/08 Correction of English description Modification of cover page picture Correction of the value of the table 1-2 Modification of the figure 1-2, 1-3 and 1-4...