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Ulvac UK-2 Instruction Manual

Auto regeneration controller
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AUTO REGENERATION CONTROLLER
 
 
 
We recommend that ALL UCI customers be sure to
follow all rules and regulations such as Foreign
Exchange and Foreign Trade Law when exporting or
reexporting UCI products.
D/N.MFUK200E, 2018JE05
Model UK-2
Instruction Manual
Export Control Policy
ULVAC CRYOGENICS INCORPORATED
 
 

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Summary of Contents for Ulvac UK-2

  • Page 1 AUTO REGENERATION CONTROLLER Model UK-2   Instruction Manual         Export Control Policy We recommend that ALL UCI customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when exporting or reexporting UCI products.
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MZIW001E,2010.01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 10 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 11: Table Of Contents

    Auto Regeneration Controller UK-2 Instruction Manual TABLE OF CONTENTS Section 1   Featrures･･････････････････････････････････････1 Section 2    Specifications･･････････････････････････････････ 2 Section 3    Part Names and Descriptions････････････････････ 4 3.1 Front Panel Description･････････････････････ 4 3.2 Rear Panel Description･･････････････････････ 6 Section 4    DIP Switch Specifications････････････････････････11 Section 5 ...
  • Page 12 5-2 Optional Cables･･････････････････････････････････ 13 9-1 Parameter factory Setting････････････････････････ 27 10-1 Troubleshooting List (Error descriptions and corrective actions)･･････････ 29 10-2 Troubleshooting List (other errors) ･･･････････････ 30 Ⅱ           ULVAC CRYOGENICS INCORPORATED                   ...
  • Page 13 Auto Regeneration Controller Model UK-2 Instruction Manual Features Regeneration controller UK-2 enables automatic cryopump regeneration in combination with devices listed below. Code Name Note CRYO METER MBS-C PIRANI GAUGE (WP-01) & G-TRAN（SP-1） N2 IN VALVE N2 OUT VALVE PR UNIT ATM ...

  • Page 14: Section 2    Specifications

    Specifications 240mm(W) × 100mm(H) × 300mm(D) ○Dimensions (See Appendix 1 UK-2 Dimensional Drawing for detail.) ○Weight          Approx. 3.0kg ○ Input power    SOURCE INPUT：Single phase AC100〜220V ±10% 50Hz/60Hz                   (AC100V when using INNER HEATER) BAND HEATER：Single phase AC200〜220V ±10% 50Hz/60Hz...
  • Page 15 Auto Regeneration Controller Model UK-2 Instruction Manual ○ Communication RS I/F RS-485 (RS-232C can be specified as optional) ○ Insulation Resistance DC 500V  20MΩ or more ○ Withstand Voltage Between power source terminal and earth terminal：     AC 1000V/min ...

  • Page 16: Section 3    Part Names And Descriptions

    Auto Regeneration Controller Model UK-2 Instruction Manual Part Names and Descriptions 3.1 Front panel Description     １ ２ ３ ４     HEATER START BAND HTR N2 PURGE INN HTR   READY WARM UP N2 IN UK-2 ROUGHING N2 OUT  ...
  • Page 17 Auto Regeneration Controller Model UK-2 Instruction Manual Continued from previous page Name Description HEATER START N2 PURGE Operatio WARM UP Step ROUGHING Displays each operational step Display ③ （See Fig. 8-1, 8-2, and 8-3.） BUILD UP COOL DOWN 20K(2ND) HIGH VAC OK...

  • Page 18: Rear Panel Description

    Auto Regeneration Controller Model UK-2 Instruction Manual 3.2 Rear Panel Description     ５ ６ １１ １２ １３ １０ RS I/F SENSOR INPUT 1 2 34 5 67 8 HEATER SYSTEM I/F COMP I/F VALVE SOURCE INPUT HEATER POWER SOURCE POWER  ...

  • Page 19: Connectable Plugs And Pin Descriptions

    ⑬  RS I/F Standard UK-2 is equipped with RS-485. (RS-232C can be specified as optional) Refer to Table 3-5.     UK-2 cable connectable plugs and pin descriptions are shown in Table 3-3.     Table 3-3 Connectable Plugs and Pin Descriptions...
  • Page 20 Auto Regeneration Controller Model UK-2 Instruction Manual Continued from previous page Name Type of connectable plug Pin No. Description COMP ON (Relay contact output AC240V MAX 2A) COMP ON (Relay contact output AC240V ⑧ COMP I/F 17JE-13090-02(D8B) （DDK） MAX 2A)

  • Page 21: System I/F Connection Pin Descriptions

    ※ when cryopump is in operation. HEATER ON ANS L level ※ when HEATER is ON. L level when UK-2 is in normal operation. ※ Changes to   H level when alarm has been activated.  ALARM Logic can be changed with Dip SW (No.6).

  • Page 22: Serial Communication Rs I/F

    Auto Regeneration Controller Model UK-2 Instruction Manual Continued from previous page. Type Signal Name Description Choosing MODE SELECT         MODE SELECT#1         Mode1 (FULL REGENE)   ON MODE SELECT#2         Mode2 (WARM UP)  ...

  • Page 23: Section 4    Dip Switch Specifications････････････････････････11

    DIP Switch Specifications ions There are two types of UK-2 DIP switch: Previous Model and New Model. There are two types of UK-2 DIP switch: Previous Model and New Model. Previous Model: Push a lever UP to turn ON. The color of the levers is yellow.

  • Page 24: Accessories

    Auto Regeneration Controller Model UK-2 Instruction Manual Accessories and optional cable If the cable type is not specified by customers, connectors in Table 5-1 will be attached. In this case connection and wiring work need to be performed by customers.

  • Page 25: Optional Cables

    Auto Regeneration Controller Model UK-2 Instruction Manual When the UK-2 has been purchased as a part of the cryopump system, the cable can be specified as optional. Table 5-2 shows the optional cables. Please refer to section 7 for connecting method. When optional cable is specified, the content of accessories in Table 5-1 will be different. ...
  • Page 26 Auto Regeneration Controller Model UK-2 Instruction Manual Continued from previous page  Name Model Appearance Note SYSTEM ⑦ in Table 5-1 UK2-HS40 will not be ⑤ Cable attached. MBS-C Necessary for Compatible GP-HM30 ⑥ MBS-C. Cable          ...

  • Page 27: Section 6    Installation

      Referring to panel cut dimensions of Figure 6-1, machine the mounting holes. Insert UK-2 firmly from the front panel, and then fix it with four screws (M4).   Note that if you cut taps from the panel, locking screw sites need to be M4, or if you fix the product with nuts on back side without cutting taps, locking screw sites need to be φ5.
  • Page 28 Auto Regeneration Controller Model UK-2 Instruction Manual Wiring  After installing UK-2 to the panel, perform wiring referring to Figure 7-1. Purchased optional cables must be connected as shown in Figure 7-2. Observe following warnings and cautions to perform wiring.  ...
  • Page 29 Auto Regeneration Controller Model UK-2 Instruction Manual CAUTION   ● After wiring, ensure to confirm that wiring has been done correctly. If difference signal has been connected, it may result in MBS-C failure. Also, ensure that the input power is within the allowable range.

  • Page 30: Wiring Diagram

    Auto Regeneration Controller Model UK-2 Instruction Manual UK-2 YSTEM CRYO PUMP SOURCE INPUT HEATER   Dip SW 7 HEATER POWER INNER HEATER Cable AC100 2ND HEATER -220V   1ST HEATER   0.75sq-4C DCPS   BAND HEATER   2.0sq-2C   VALVE...

  • Page 31: Optional Cable Wiring

    Auto Regeneration Controller Model UK-2 Instruction Manual ＣＲＹＯ ＰＵＭＰ       Ｈ Ｉ Ｇ Ｆ Ｃ３０Ｖ Ｒ   ＰＷＲ ＳＴＳ １ ＲＤＹ ２ ＲＵＮ ３ ＣＨ１ ４ ５ ６ ７ ８ ＣＯＭ ＲＳＴ (*1)   ＳＵＰＰＬＹ ＰＲＥＳＳＵＲＥ Ａ  ...
  • Page 32 Auto Regeneration Controller Model UK-2 Instruction Manual (※1) The end of the wires of N2 IN VALVE, N2 OUT VALVE, ATM (Atmospheric Sensor), and ROUGH VALVE are not terminated. Follow the instruction below and conduct terminal treatment.   ＜The method of terminal treatment for VALVE and ATM＞...

  • Page 33: Connector Pin Assignment Of Valve And Atm

    Auto Regeneration Controller Model UK-2 Instruction Manual (2 ) Insert the crimped pin contact to the connector. （See Figure 7-3 for pin assignment.）       Insert further until it makes a clicking sound. akes a clicking sound. ROUGH VALVE (※1)

  • Page 34: Section 8    Operation

    Auto Regeneration Controller Model UK-2 Instruction Manual Operation   8.1 Remote Operation ①  Turn ON the [REMOTE] signal of SYSTEM I/F. Ensure that key LED on the front panel is lit. REMOTE ②  Determine the [MODE SELECT #1] and [MODE SELECT #2] signals of SYSTEM I/F.

  • Page 35: Mode 1 (Full Regen) Operation Flow Chart

    Auto Regeneration Controller Model UK-2 Instruction Manual １ Mode1 START   【LED STATUS】   ○ROUGHING   ○HEATER START CRYO PUMP STOP Press. < _LP(40Pa)       ○BUILD UP BAND HEATER ON BAND HEATER OFF   N2 IN VALVE OPEN INNER HEATER OFF  ...

  • Page 36: Mode 2 (Warm Up) Operation Flow Chart

    Auto Regeneration Controller Model UK-2 Instruction Manual １ Mode2 START   ○ROUGHING 【LED STATUS】     Press. < _LP(40Pa) ○HEATER START CRYO PUMP STOP     ○BUILD UP   BAND HEATER OFF BAND HEATER ON   INNER HEATER OFF N2 IN VALVE OPEN  ...

  • Page 37: Mode 3 (Cool Down) Operation Flow Chart

    Auto Regeneration Controller Model UK-2 Instruction Manual Mode3 START   【LED STATUS】     ○ROUGHING Press. = ATM     ROUGH PUMP ON     ROUGH VALVE OPEN       Press. < _LP(40Pa)       ROUGH VALVE CLOSE  ...

  • Page 38: Parameter Setting

    Auto Regeneration Controller Model UK-2 Instruction Manual Parameter Setting 9.1 Parameter setting method Description In parameter setting mode, it is used to increase the set value. Hold down the key for 1 second and it will take you to parameter setting mode. In parameter setting mode you can change the set value.

  • Page 39: Factory Setting

    Auto Regeneration Controller Model UK-2 Instruction Manual 9.2 Factory Setting         Table 9-1 shows the default setting of the parameter. Table 9-1 Parameter factory setting Setting Initial Description Command Range Value _2rt 2ND ROOM TEMP (Target value of 2nd heater control) 10〜350 300K...
  • Page 40 Auto Regeneration Controller Model UK-2 Instruction Manual ※   It will not displayed when DIP SW ⑦ is OFF (means inner heater is not used).  ※   Heater maximum energizing time When heater is energized more than the set value, an alarm will be activated.  ...

  • Page 41: Troubleshooting List (Error Descriptions And Corrective Actions)

    Auto Regeneration Controller Model UK-2 Instruction Manual 10. Troubleshooting Table 10-1 Troubleshooting list (Error descriptions and corrective actions) Display Class Description Possible Cause Corrective Action Alarm will be output Miswiring of Check that the wiring has when K thermocouple K thermocouple.

  • Page 42: Troubleshooting List (Other Errors)

    Auto Regeneration Controller Model UK-2 Instruction Manual Continued from previous page. Display Class Description Possible Cause Corrective Action Alarm output from Compressor abnormal. Please refer compressor. compressor manual. When there is no COMP ON ANS (for 5 seconds) during COMP ON, alarm will be activated.
  • Page 43 Auto Regeneration Controller Model UK-2 Instruction Manual CAUTION   Maintenance and repair must be perfprmed only by qualified maintenance personnel. DO NOT remove the cover of the product.  ULVAC CRYOGENICS INCORPORATED...
  • Page 44 Auto Regeneration Controller Model UK-2 Instruction Manual 24.5 BAND HEATER AC 220V 15A MAX Appendix 1 UK-2 External Drawing   ULVAC CRYOGENICS INCORPORATED...
  • Page 45 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 46 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 47 Auto Regeneration Controller UK-2 Instruction Manual Revision History Date Revision No. Contents 2008-04-01 2008.04 First edition (New format) P.1 2.Specifications Correction of the voltage of input power source. P.15/16 The latest Wiring diagram. 2010-04-15 2010AL01 “Introduction” has been revised. “SERVICE NETWORK” has been revised.
  • Page 48 Revision This page intentionally left blank                                       ULVAC CRYOGENICS INCORPORATED...

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