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Ulvac MBDI-H1 Series Instruction Manual

Cryo heater controller
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Cryo Heater Controller
MBDI-H1 Series
Instruction Manual
MBDI-H1N
MBDI-H1S
Export Control Policy
We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.
D/N.MFMBDH1E, 2018DR05
ULVAC CRYOGENICS INCORPORATED

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Summary of Contents for Ulvac MBDI-H1 Series

  • Page 1 Cryo Heater Controller MBDI-H1 Series Instruction Manual MBDI-H1N MBDI-H1S Export Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when exporting or reexporting our products. D/N.MFMBDH1E, 2018DR05...
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 10 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 11 Cryo Heater controller MBDI-H1 series Instruction Manual TABLE OF CONTENTS １． Features and Types ..............1 １．１ Features ..............1 １．２ Types .................2 ２． Specifications ................3 ３． Part names and Descriptions ..........5 ４． Connector specification and DIP switch specifications ..6 ４．１ Connector specifications ..........6 ４．２...
  • Page 12 2 MBDI-H1S external dimensions drawing ·········· 29 3 MBDI-H1N,MBDI-H1S electric wiring diagram · 30 TABLE Table 3-1 MBDI-H1 series Part names and Fuctions ······················· 5 4-1 Connectable plug types and Descriptions of pins ·············· 6 4-2 Descriptions of I/F connector pin····································· 7 4-3 Descriptions of DIP switch ·············································...
  • Page 13 MBDI-H1 series has product name on the front of its body. Be sure that the product is exact specifications of your order. Please inform us product name and serial number when you inquire us about the product.
  • Page 14 Table of Contents This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 15 Power output (DC24V) for Cryo Meter MBS-C. The types of MBDI-H1 series are shown in figure 1-2. If Cryopump has sensor for over heat protection (optional), it is able to connect MBDI-H1 series to Cryo Meter MBS-C and UCI Cryopump with DIPswitches.
  • Page 16 Cryo Heater Controller MBDI-H1 series Instruction Manual １．２ Types MBDI‐H1 Power (DC24V) output for MBS-C* N = Without * S = With* Figure 1-2 MBDI-H1 series types ULVAC CRYOGENICS INCORPORATED...
  • Page 17 Cryo Heater controller MBDI-H1 series Instruction Manual ２．Specifications ○ Dimensions ......240mm(W) × 100mm(H) × 300mm(D) (Refer to the external dimensions for the details) ○ Weight ........Approx. 3.0kg ○ Power Source ......Shingle-phase AC100V±10% 50Hz/60Hz Capacity of circuit protector：5A （Note: including power consumption）...
  • Page 18 Cryo Heater Controller MBDI-H1 series Instruction Manual ○ Display ....1st TEMP 4 digits Display range： 45K～350K Display accuracy：350K～123K ±0.5%FS 123K～73K ±3%FS <73K Out of K Thermocouple accuracy range Note: excluding reference junction compensation accuracy Reference junction compensation accuracy ：...
  • Page 19 H E A T E R H E A T E R ULVAC CRYOGENICS ４ ５ ６ ４ ５ ６ ※MBDI-H1S is same as below. Table 3-1 MBDI-H1 series Part names and Functions Name Function ① POWER It lights when Power（AC100V） activated. ② ７-segment display...
  • Page 20 Cryo Heater Controller MBDI-H1 series Instruction Manual ４．Connector specification and DIP switch specifications ４．1 Connector specifications ４ ６ ５ ２ ３ ＨＥＡＴＥＲ ＨＥＡＴＥＲ TC-IN TC-OUT ANA-IN ANA-OUT PU SH PUS H OH-IN ＦＵＳＥ 3Ａ ＦＵＳＥ 3Ａ POWER OUT Ｉ／Ｆ OH-IN 警...
  • Page 21 Cryo Heater controller MBDI-H1 series Instruction Manual Table 4-2 Descriptions of I/F connector pin Signal Pin No. Signal Name Description Contact Input Common (N24) 2～5 N．C． Keep these connector pins unconnected. HEATER ON 1st Inner heater at 1 stage is ON when the signal is ON.
  • Page 22 ４．２ DIP switch specifications DIP switches There are two types of MBDI-H1 series DIP switch: Previous Model and New Model. Previous Model: Push a lever UP to turn ON. The color of the levers is yellow. (Previous models were sold until April, 2011.) N e w M o d e l : Push a lever DOWN to turn ON.
  • Page 23 （See figure 4-1） Figure 4-1 Photograph: Overheat protection for HEATER CAUTION When the specifications of compressor which will be connected to MBDI-H1 series has been decided, DIP switch will be set before shipment. Do not make unnecessary change. Please contact us when the setting needs to be changed.
  • Page 24 A Connector for POWER OUT comes only with MBDI-H1S, does Not comes with MBDI-H1N. If you purchase MBDI-H1 series as UCI System, you can specify optional cables. Optional cables are shown in table 5-2. Refer to chapter 7 for wiring operation. Note that the accessories in table 5-1 will be subjects to be changed if you specify optional cables.
  • Page 25 2nd OH If you need same wiring of existing MBS regarding to Input and Output, please specify the cable for MBS. At the time of purchasing MBDI-H1 series as UCI System, please contact our customer service for cables can be used.
  • Page 26 Please see panel cut dimensions of figure 6-1 below, and machine the mounting hole on your cabinet panel. Insert MBDI-H1 series from the front panel into the interior of the mounting hole completely, and fix it with four M4 screws.
  • Page 27 Cryo Heater controller MBDI-H1 series Instruction Manual ７．Wiring After installing MBDI-H1 series into the panel, wiring should be done referring to figure 7-1、 7-2 for MBDI-H1N, figure 7-3, 7-2 for MBDI-H1S. The customer who purchased optional cables should operate wiring referring to figure 7-4, 7-5. Note that wiring must be done in accordance with following instructions.
  • Page 28 AC power line. Especially analog signal line of MBS-C must be in separate conduit from other equipments or AC power lines or control lines for other equipments. Otherwise, MBDI-H1 series operation will be interfered. If separate conduits cannot be supplied, keep enough distance (generally 300mm or more) between different wirings.
  • Page 29 Cryo Heater controller MBDI-H1 series Instruction Manual User's System ＭＢＤＩ－Ｈ１Ｎ ＣＲＹＯＰＵＭＰ １ ＡＣ１００Ｖ ＭＢＳ－Ｃ ２ ＳＯＵＲＣＥ ５０Ｈｚ／６０Ｈｚ Ｋ( ＣＡ) Compensation lead wire for K Thermocouple( with shield) ３ １ｓｔ Ａ Ａ Ｋ（ＣＡ） ＡＷＧ＃２４ ｏｒ ０．３ｍｍ ｍａｘ． ２ ＴＣ－ＩＮ Ｂ Ｂ...
  • Page 30 Cryo Heater Controller MBDI-H1 series Instruction Manual User's System ＭＢＤＩ－Ｈ１Ｓ ＣＲＹＯＰＵＭＰ １ ＡＣ１００Ｖ ＭＢＳ－Ｃ ２ ＳＯＵＲＣＥ ５０Ｈｚ／６０Ｈｚ Ｋ ( Ｃ Ａ ) Compensation lead wire for K Thermocouple( with shield) ３ １ｓｔ Ａ Ａ Ｋ（ＣＡ） ＡＷＧ＃２４ ｏｒ ０．３ｍｍ ｍａｘ． ２...
  • Page 31 Cryo Heater controller MBDI-H1 series Instruction Manual ＣＲＹＯ ＰＵＭＰ K Thermocouple for overheat protection ＣＲＹＯ ＭＥＴＥＲ ＭＢＳ－Ｃ １ｓｔ，２ｎｄ RED ON > 280K ORG ON 20K-280K （ＯＰＴＩＯＮ） GRN ON < RED FL CRYO T/C DISCONNECTION ① ③ ④ ⑤ ② ＳＹＳＴＥＭ...
  • Page 32 Cryo Heater Controller MBDI-H1 series Instruction Manual ＣＲＹＯ ＰＵＭＰ K Thermocouple for overheat protection ＣＲＹＯ ＭＥＴＥＲ ＭＢＳ－Ｃ １ｓｔ，２ｎｄ RED ON > 280K ORG ON 20K-280K GRN ON < 20K （ＯＰＴＩＯＮ） RED FL CRYO T/C DISCONNECTION ① ③ ④ ⑤ ②...
  • Page 33 Cryo Heater controller MBDI-H1 series Instruction Manual ８．Operations Table 8-1 Operations Step Operation Status of MBDI-H1 series １ Turn on the power of MBDI-H1 series. POWER LED will light up. And 7 segments display will show temperature on the left side, temperature on the right side.
  • Page 34 Cryo Heater Controller MBDI-H1 series Instruction Manual １ Regeneration start Roughing valve CLOSE Cryopum stop heater OFF ＊3 heater, 2 N2 inlet valve OPEN Band heater Band heater heater ON ＊1 The pressure rise to 40 ～67Pa < 5 minutes...
  • Page 35 Cryo Heater controller MBDI-H1 series Instruction Manual Cool down starts 1st TEMP < Set value at SETPOINT4 1st TEMP < 2nd TEMP < Set value at Set value at SETPOINT4 SETPOINT4 ct TIMER COUNT starts 2nd TEMP < Set value at...
  • Page 36 Cryo Heater Controller MBDI-H1 series Instruction Manual ９．Parameter setting ９．１ Parameter setting method Description In the setting mode, it is used to increase the set value. It is used to move to the parameter setting mode and to fix the value in the setting mode.
  • Page 37 Cryo Heater controller MBDI-H1 series Instruction Manual ９．２ Initial set value Initial factory default value is as follow. Table 9-1 Parameter set value at factory default（Basic setting mode） Initial Setting Set command Description Value range ROOM TEMP（Target value of 1 inner heater control）...
  • Page 38 240 min （U16HSP、U16HSPL） Initial set time is 240 min in case of purchasing only MBDI-H1 series. Therefore, set time value needs to be changed according to your pump. Also note that time for regeneration differs based on the condition of use for your pump. Please change Heater ON Time Set Value in accordance with Heater On Time of your pump.（See figure 9-1）...
  • Page 39 Cryo Heater controller MBDI-H1 series Instruction Manual １０．Troubleshooting Table 10-1 Troubleshooting list（descriptions of error indications） Display Description Possible causes Action outputs Miswiring of heater cable Make sure that the wiring has disconnecting of heater been done correctly. line. Disconnecting or breaking of...
  • Page 40 Regarding failure of Compressor Unit alone and Refrigerator Unit alone, see instruction manuals attached with each product. CAUTION Do NOT remove the cover from MBDI-H1 series. ONLY qualified maintenance personnel can remove the cover from MBDI-H1 series. ULVAC CRYOGENICS INCORPORATED...
  • Page 41 Cryo Heater controller MBDI-H1 series Instruction Manual １１．Disposing of the product and parts CAUTION Ask duly-authorized agent for disposing of industrial waste, and dispose used products at your own risk in accordance with your local Waste Management Low and the PRTR (Pollutant Release and Transfer Resister).
  • Page 42 Cryo Heater Controller MBDI-H1 series Instruction Manual Appended Figure.1 MBDI-H1N external dimensions drawing ULVAC CRYOGENICS INCORPORATED...
  • Page 43 Cryo Heater controller MBDI-H1 series Instruction Manual Appended Figure.2 MBDI-H1S external dimensions drawing ULVAC CRYOGENICS INCORPORATED...
  • Page 44 Cryo Heater Controller MBDI-H1 series Instruction Manual Appended Figure.3 MBDI-H1N，MBDI-H1S electric wiring diagram ULVAC CRYOGENICS INCORPORATED...
  • Page 45 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 46 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 47 Cryo Heater Controller (MBDI-H1 series) Instruction Manual Revision History Date Revision No. Contents 2008-07-22 2008.07 First edition 2009-06-08 2009JE01 “Introduction” has been revised. UCN address has been changed. “SERVICE NETWORK” has been revised. 2012-01-30 2012JA02 P.7 4.2 DIP switch specifications Descriptions and figures of old and new types of DIP switch have been added.
  • Page 48 Revision History This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

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