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Industrial Equipment
AUTO 306
Instruction manual
Edwards AUTO 306 Instruction Manual
Vacuum coater
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Instruction manual
(24 pages)
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Contents
Table of Contents
Bookmarks
Table of Contents
Table of Contents
Introduction
Scope and Definitions
Overview of the AUTO 306
Safety
Safety Features of the AUTO 306
Safety Hazards
Introduction
Dangerous Materials
Cleaning Solutions
Oils, Greases and Vapour Pump Fluid
Temperature Hazards
Vacuum Hazards
Electrical Hazards
Intense Light
RF Radiation
Liquid Spillage
Use of the Controls
On/Off Switch and Lamp
AUTO 306 Controller
Overview
Use of the Process Selector Buttons
AUTO 306 Controller
AUTO 306 Controls
Controller Menus
Rotatilt Controller
Cryodrive Compressor (AUTO 306 with Cryopumping System Only)
EXC Controller (AUTO 306 with Turbomolecular Pumping System Only)
Cryodrive Compressor Controls
General Operation
Start-Up
Fill the Liquid Nitrogen Trap (if Necessary)
Start the AUTO 306
Fill the Liquid Nitrogen Trap (if Necessary)
Load the Chamber
Cycle or Process Operation
Unload the Chamber
Summary of Operation Flowchart
Shut down the AUTO 306
Shut down between Operation
Shut down for Storage
Restart after Electrical Supply Failure
Status and Error Messages
Operating Techniques
Introduction
Evaporation from a Filament Holder or Turret Source
Sputter Coating
Electron Microscopy Coating and Cleaning
Introduction
Carbon Support Films and Replicas
Shadow Casting
Aperture Cleaning
Advanced Controller Operation
Introduction
Controller Menus
Normal Display
AUTO 306 Controller Menus
MODE SELECT Menu
SYSTEM ID Menu Option
SET POINTS Menu
Controller Setpoints
Change Pressure Stores
Change Time Stores
MONITOR SYSTEM Menu Option
RELAY /INPUT Menu Option
PRESSURE UNITS Menu Option
PENNING CONTROL Menu Option
DISPLAY TYPE Menu Option
PASSWORD CONTROL Menu Option
Password Levels
Set Passwords and Enable/Disable Passwords
Use of the Process Relays
Examples of Controller Menu Usage
Select Diagnostic Display
Sequence Run
Set Points
Pressure Units
Monitor System
Change Pressure Store 14 (from Manual Mode)
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Instruction Manual
AUTO
306
Vacuum Coater
Volume 2- Operating Instructions
~EDWARDS
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: +44 (0) 1293 528844
Fax: +44 (0) 1293 533453
http://www.edwards.boc.com
E090-02-860
Issue E
r.h
r.h
66
1993
1996
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