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Summary of Contents for Edwards WRH gauge
- Page 1 WRH Gauge INSTRUCTION MANUAL D14750880_A Original Instructions...
- Page 2 Product warranty and limit of liability are dealt with in Edwards standard terms and conditions of sale or negotiated contract under which this document is supplied. To use the WRH gauge, refer to the information provided in this manual. Read this manual before you install, operate and maintain the WRH gauge.
- Page 3 CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW The following product WRH gauges: D14750100 WRH – NW25 D14750110 WRH – NW40 D14750120 WRH – DN40CF D14750101 WRH – NW25 Spare sensor D14750111 WRH – NW40 D14750121 WRH –...
- Page 4 Additional Legislation and Compliance Information EU EMC Directive: Class A/B Industrial equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. EU RoHS Directive: Material Exemption Information This product is compliant with no Annex III or IV Exemptions.
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Page 5: Table Of Contents
D14750880_A - Contents Contents Introduction Safety symbols ....................... 7 Safety precautions ......................7 Description Correct use ........................8 Incorrect use ........................8 Orientation ........................8 Delivery content ......................9 Technical data Installation Installation notes ......................12 Vacuum connection ..................... 12 Electrical connection .................... - Page 6 D14750880_A - Contents Cathode Control (752) ..................24 Filament Control (765) ..................24 Gas correction factor (756) ................24 VacuGraphTM Software ....................25 Maintenance and service Error messages and fault finding ................. 26 Page 4...
- Page 7 D14750880_A - List of Figures List of Figures Figure 1: Dimensions ......................11 Figure 2: Pin description ......................14 Figure 3: General arangement ....................16 Figure 4: Manual degas ......................18 Figure 5: Manual readjustment ....................19 Figure 6: Set the address ......................20 Figure 7: VacuGraph™...
- Page 8 D14750880_A - List of Tables List of Tables Table 1: General ........................10 Table 2: Survey of commands ....................21 Page 6...
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Page 9: Introduction
Obey the applicable regulations and the necessary precautions when you handle contaminated parts. A Return of Edwards Equipment Declaration form must be completed and sent with the unit before you return it to Edwards. Give information to others about the applicable safety instructions. -
Page 10: Description
D14750880_A - Description Description The transducer measures absolute pressure in gaseous media in the range of 1000 to 5.0 x 10 mbar. The transducer can be connected to a customer related power supply and evaluation units in compliance with the pin assignment. The analogue output signal of 1.219 V to 8.6 V has a logarithmic dependence on pressure over the whole range. -
Page 11: Delivery Content
D14750880_A - Description Delivery content The package includes: The transducer The protective flange cover The instruction manual The software package Page 9... -
Page 12: Technical Data
D14750880_A - Technical data Technical data Table 1 General Measurement principle Heat conduction Pirani/hot cathode Bayard Alpert depending on gas type Measurement range 1000 to 5.0 x 10 mbar (750 to 5.0 x 10 Torr) Maximum overload 4 bar absolute Accuracy 1000 to 10 mbar: approximately 30% of full reading 10 to 1.0 x 10... -
Page 13: Figure 1 Dimensions
D14750880_A - Technical data Figure 1 Dimensions A. D14750100 B. D14750110 C. D14750120 Page 11... -
Page 14: Installation
D14750880_A - Installation Installation Installation notes Installation location: Indoor For open buildings and operation rooms without air conditioning: Temperature: +5 °C to +60 °C Relative humidity: Maximum 80% up to 30 °C, maximum 50% at 40 °C, non-condensing Air pressure: 860 to 1060 mbar Vacuum connection CAUTION: DAMAGE TO EQUIPMENT... -
Page 15: Electrical Connection
D14750880_A - Installation WARNING: NOT FAIL-SAFE DESIGNED Risk of death. Do not use the gauge for safety critical applications. The gauge is not intended to be fail-safe. CAUTION: DAMAGE TO EQUIPMENT Risk of damage to equipment. Prevent forced twisting or violent opening when you install the transducer. -
Page 16: Figure 2 Pin Description
D14750880_A - Installation Figure 2 Pin description Socket Type Sub-D, 15-pole, male Pin 1: Identification: 160 kΩ Pin 2: Signal output 0-10 V d.c. Pin 3: AGND Pin 4: Voltage supply 24V d.c. Pin 5: Supply common Pin 6: Relay 1, N.O. Pin 7: Relay 1, common Pin 8: Relay 1, N.C. -
Page 17: Operation
D14750880_A - Operation Operation General Measurement principle The transducer has a Pirani/hot cathode internal combination sensor. The Pirani principle uses the heat conduction of gases to measure vacuum. A sensor filament in a Wheatstone bridge circuit is heated to a constant temperature, so the bridge voltage is a measure for total gas pressure. -
Page 18: Operate The Transducer
D14750880_A - Operation Operate the transducer Figure 3 General arangement 1. Address switch 2. Status LED 3. Pushbutton 4. Switch-point LEDs The transducer has a status LED which indicates the following operational states: Normal operation/hot cathode on (green LED continuously on) Normal operation/hot cathode off (green LED flashes slowly) Initialize input (green LED flashes quickly) Error (red LED continuously on) -
Page 19: Degas
D14750880_A - Operation Degas Deposition or adsorbed gas molecules on the electrodes of the hot cathode sensor may lead to increased degassing in ultra-high vacuum or even cause instabilities of the measurement signal. If this occurs, clean the sensor anode from the deposited material and adsorbed gas molecules by degassing. -
Page 20: Degas Control By External Voltage Signal
D14750880_A - Operation To do this: 1. Remove the rubber cap above the ADJ pushbutton (1). 2. Press the button several times with a small screwdriver or similar tool (2) until the red status LED starts flashing quickly. 3. After 3 seconds, the degas process starts, red status LED flashes slowly. 4. -
Page 21: Readjustment
D14750880_A - Operation Readjustment The transducer is adjusted and works with a 24 V d.c. voltage supply in the upright position, with the flange to the bottom. Re-adjustment of the Pirani sensor can be necessary if orientation changes, operation under different climatic conditions, extreme temperature changes, ageing or contamination occurs. -
Page 22: Communication
1 and 16 with a small screwdriver or a similar tool (2). Reinsert the rubber cap. Figure 6 Set the address Communication telegrams are transmitted as ASCII text according to the Edwards DX protocols. Detailed information is given in the instruction manual D02691880. Note: The analogue output signal, 0 to 10 V d.c., is available with the RS485. -
Page 23: Survey Of Commands
D14750880_A - Communication Survey of commands Table 2 Survey of commands Command Code Gauge type Serial number Run hours Baud rate Gauge control Relay 1 Relay 2 Adjust DeGas Transition mode Filament control Gas type Page 21... -
Page 24: Device Parameters And Information
D14750880_A - Communication Device parameters and information Gauge type (0): Query of device type Serial Number (790): Query of device serial number Run hours (769): Read out hours operated counter The counter starts when the gauge is connected to the voltage supply, 15 minute increments Baud rate (780): Set the baud rate for data transmission Value range: 9600, 14400, 19200, 28800, 38400, 57600, 115200 baud... -
Page 25: Readjustment (761)
D14750880_A - Communication Setting W: Relay closes if one of the BA-filaments is defective. Setting !W: Relay opens if one of the BA-filaments is defective. Note: The control LEDs on top of the transducer will be illuminated if the related relay is activated. Readjustment (761) The transducer is adjusted and works with a 24 V d.c. -
Page 26: Sensor Transition (763)
D14750880_A - Communication Sensor Transition (763) By default the transducer performs a continuous transition between a Pirani and a hot cathode range where an assimilation of the sensor signals is carried out. In order to adapt the performance of the transducer to the requirements of the vacuum process, the RS485 Sensor Transition parameter can be configured to: "0": No transition, but direct switch-over between the Pirani and the hot cathode... -
Page 27: Vacugraphtm Software
0.41 VacuGraph Software VacuGraph™ software has been developed for use with Edwards WRH and P3 gauges and is available for Windows and Android operating systems. VacuGraph™ can plot and save the measurement data as well as configure all device parameters. -
Page 28: Maintenance And Service
The unit requires no maintenance. External dirt and soiling can be removed by a damp cloth. If a defect or damage occur on the transducer, return the instrument to us for repair along with a Return of Edwards Equipment Declaration (HS2 Form). CAUTION: DAMAGE TO EQUIPMENT The unit is not a customer repair item. - Page 29 This page has been intentionally left blank.
- Page 30 This page has been intentionally left blank.
- Page 32 edwardsvacuum.com...
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