1. Product Description .......................................................................................... 4
1.1 Product View ........................................................................................................................................................................... 4
1.2 Technical parameters ........................................................................................................................................................... 5
1.3 Meaning of LED indicator .....................................................................................................................................................6
2. Gas interface ...................................................................................................... 7
4. Electrical Interface ............................................................................................ 9
4.1 Bus system ............................................................................................................................................................................. 10
5.1 Preparation before operation ...........................................................................................................................................11
5.2 Specific operation process .........................................................................................................................................................12
5.2.1 Preparation of clean bench ................................................................................................................................... 12
5.2.7 Wrap and seal ........................................................................................................................................................... 14
5.2.10 Beam centering .......................................................................................................................................................17
BLT6102H Product Manual
Table of Contents
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