Table of Contents
Advertisement
Instruction Manual
CVG101 Worker Bee
Coatings: Some gases can condense on sensor surfaces, forming a solid coating, which changes the rate at
which heat is removed from the sensor. Some of these coatings may be removed by cleaning the gauge.
Particles: Particles generated by the process may enter the gauge during the process cycle or during the venting
cycle. The result is interference with heat removal from the sensor. In this case cleaning may be able to remove
particles from the gauge. However, particulate contamination is the most difficult to remove as particles can
become stubbornly trapped inside the gauge. In some processes, solid particles are created during the process
throughout the chamber including inside the gauge. Particles tend to form on cooler surfaces such as in a gauge
at room temperature. You may slow down the build-up of particles in the gauge by keeping the gauge warm
(within specified limits) during the process cycle.
Particles in the process chamber may be swept into the gauge during the vent cycle. The CVG101 has a screen
built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where
particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong
the gauge life further.
In some vacuum processes, desorbed and sputtered materials from the process may enter vacuum components
connected to the process vacuum chamber by line-of-sight transport especially under high vacuum conditions,
i.e., in the molecular flow regime. To prevent materials that may be transported via line-of-sight momentum
from entering your vacuum gauge or other components, it is advisable to install some form of apparatus that
o
will block the line-of-sight. In many cases a simple 90
elbow may help prevent or reduce the transport of
particles from entering your vacuum gauge.
In the event of gauge contamination please contact the factory to return the gauge for possible cleaning if the
gauge has not been exposed to hazardous materials.
5.5 Gauge Replacement
If the CVG101 gauge fails for any reason, and cleaning does not resolve the issue, the CVG101 gauge should be
replaced.
InstruTech, Inc.
Page 11
Advertisement
Table of Contents
