Page 1 Dimension 3100 Manual Version 4.43C 004-320-000 (standard) 004-320-100 (cleanroom) Copyright © 2003 Digital Instruments Veeco Metrology Group All rights reserved. Document Revision History: Dimension 3100 Manual Ref. Revision Date Section(s) Affected Approval 05/15/03 Fluid Cell L. Burrows 06/01/00 All. A. Varbel 08/25/97 Released.
Page 2: Table Of Contents
1.1 Overview......1-1 1.2 How to Reach Digital Instruments Veeco .1-2 1.3 System Overview ....1-3 1.3.1 Dimension 3100 SPM Features .
Page 3 Safety 2-1 Chapter 2 2.1 Overview ......2-1 2.2 Safety Requirements ....2-2 2.3 Safety Precautions .
Page 4 3.2.2 Axiom VT-102 ..... 3-3 3.2.3 Axiom IS3K-2..... . 3-4 3.3 Facilities Requirements.
Page 5 5.2.2 Magnetic Pucks ....5-2 5.2.3 Axis Orientation—Motorized X-Y Stages 5-3 5.3 Stage Menu Commands ....5-4 5.3.1 Load New Sample .
Page 6 7.3.9 Align Laser ..... . . 7-9 7.3.10 Adjust Photodetector ....7-14 7.3.11 Locate Tip .
Page 7 9.3 Fluid Operation Hardware ... . 9-2 9.3.1 Fluid Tip Holder ....9-2 9.3.2 Tip Suggestions .
Page 8 10.5.1 Resonating Techniques ... 10-14 10.5.2 Cantilever Oscillation ... . 10-14 10.5.3 Decreasing the Cantilever Drive Frequency10- 10.5.4 Optimization of Scanning Parameters 10-17 10.5.5 Data Type.
Page 9 11.4.21 Cantilever Tune ....11-18 11.4.22 Adjust the Drive amplitude ..11-19 11.4.23 Re-center the Photodiode ..11-19 11.4.24 Engage .
Page 10 13.4.2 Main Controls (Display) ..13-12 13.4.3 Channel 1, 2, 3 Panels ... . 13-12 13.4.4 Feedback Controls ....13-13 13.4.5 Scan Mode .
Page 11 14.3.6 Locate Tip ..... . 14-3 14.3.7 Focus Surface....14-4 14.3.8 Set Initial Scan Parameters .
Page 12 Electric Techniques 16-1 Chapter 16 16.1 Overview ..... . . 16-1 16.2 Electric Techniques Overview..16-2 16.2.1 Electric Force Microscopy Overview.
Page 13 17.8 Calibrating Z ....17-35 17.8.1 Engage ......17-35 17.8.2 Capture and Correct an Image .
Page 14: System Overview
This manual details facility requirements, installation requirements and procedures, maintenance requirements and procedures, and applications used with the Dimension 3100 Scanning Probe Microscope. This chapter discusses the following: • How to Reach Digital Instruments Veeco: Section 1.2 • System Overview: Section 1.3 •...
Page 15: How To Reach Digital Instruments Veeco
Fax: (805) 967-7717 (805) 967-1400 E-mail: help@di.com bugs@di.com If you have a Priority Service Agreement, contact Digital Instruments Veeco at: 24hrs Priority Service Mailbox: (805) 882-2075 Fax: (805) 967-7717 For assistance in other than technical support, please contact the appropriate department.
Page 16: System Overview
System Overview System Overview There are three typical conﬁgurations of the Dimension 3100 Scanning Probe Microscope (See Chapter 3 for detailed information). • Axiom VT-103-3K with ELCON • Axiom VT-102 • Axiom IS3K-2 The conﬁgurations provide options for acoustic and mechanical vibration isolation, as well as various options for positioning control station components.
Page 17 System Overview Dimension 3100 SPM Features continued... Video Image Capture Capability Video image capture capability allows the user to easily incorporate video images into reports and publications. Computer System The Dimension 3100 ships with a high quality tower-style Pentium PCI computer system.
Page 18: Control Station Overview
System Overview Control Station Overview The Dimension 3100 SPM control station consists of four components: input and display devices (keyboard, trackball, monitors), computer, NanoScope controller and Dimension 3100 controller. 1.4.1 Input and Display Devices Input and display devices include two monitors, a keyboard, mouse, and trackball (See Figure 1.4a).
Page 19: Computer
System Overview Control Station Overview continued... 1.4.2 Computer The computer is the main control unit of the Dimension 3100 SPM system; it supports a 100MB Zip® disc drive, CD-ROM drive and 1.44MB floppy disc drive (See Figure 1.4b). The computer receives data from the input devices, and controls external hardware via the standard ports and the input/output (I/ O) bus.
Page 20: Nanoscope Iiia Controller
System Overview Control Station Overview continued... 1.4.3 NanoScope IIIa Controller The NanoScope IIIa controller controls the microscope head and scanning. The NanoScope IIIa controller is controlled via a 25-pin D cable connection between it and the computer (See Figure 1.4c). Figure 1.4c NanoScope IIIa Controller (front view) NanoScope®...
Page 21: Dimension 3100 Controller
System Overview Control Station Overview continued... 1.4.4 Dimension 3100 Controller The Dimension 3100 controller controls the vacuum and air supply and optics illumination. The Dimension 3100 controller is controlled via a serial cable connection between it and the computer (See Figure 1.4d).
Page 22 System Overview Dimension 3100 Controller continued... CAUTION: The Dimension controller features a special thermostat that sets off an alarm if the controller overheats (> 40° C). The Dimension controller will overheat if the controller ventilation holes are blocked or if the controller is exposed to heat from an outside source.
Page 23: Dimension 3100 Spm Overview
System Overview Dimension 3100 SPM Overview 1.5.1 Dimension 3100 Microscope Electronics Box The Dimension 3100 Microscope Electronics Box moderates all functions of the microscope, including vacuum and air supply, motor power, optic image signals, microscope control, and stage motor control (See Figure 1.5a).
Page 24: Optics And Motors Overview
For more information, contact Digital Instruments Veeco. 1.5.2 Optics and Motors Overview The optic system assists you in locating the cantilever and tip relative to the sample. The NanoScope software uses this information to engage the tip on the sample surface at the desired location.
Page 25: Stage System
System Overview Dimension 3100 SPM Overview continued... 1.5.3 Stage System The improved Dimension 3100 X-Y stage provides substantially better positioning repeatability (3µm unidirectional and 4-6µm bidirectional). The stage is more than twice as fast for moving from one location to another. The improved trackball response also makes it easier to locate features of interest for imaging.
Page 26 System Overview Dimension SPM Head continued... Figure 1.5b Dimension SPM Head La ser Spot Dete ctor Screen (dark red) Lase r aim adj ustmen ts Po sition Sen si tive Detecto r (special photod iod e) Laser di ode Collimator Beamspl itter (behin d scr ee n) Focusing lens...
Page 27: Figure 1.5C
System Overview Dimension SPM Head continued... Laser Diode Stage A kinematic tilt stage positions the laser beam on the cantilever. The tilt stage consists of the laser diode, collimator, focusing lens, base plate, and the X and Y laser diode adjustment knobs. The X laser diode adjustment knob moves the beam parallel to the major axis of the cantilever substrate.
Page 28: Figure 1.5D
System Overview Dimension SPM Head continued... Beamsplitter and Laser Spot Detector Screen The beamsplitter diverts some of the laser light directed towards the photodetector toward the Laser Spot Detector Screen. This screen provides visual indication of the condition of the reﬂected spot and its orientation relative to the photodetector.
Page 29: Cantilever Holder
System Overview Scanner Piezo Tube continued... Table 1.5a: Scanner Piezo Tube Specifications Travel (approximate scan size) 90 µm x-axis 90 µm y-axis 6 µm z-axis Electronic Resolution 16-bit (all axes) Accuracy typical maximum Orthogonality 2 degrees Uncorrected Z bow 90 µm scan size 50 nm 10 µm scan size 2 nm...
Page 30: Figure 1.5F
System Overview Cantilever Holder continued... Figure 1.5e Standard Cantilever Holder SIDE VIEW tip is installed Cantilever Probe Tip ( tip faces down ) Spring Loaded Probe Clip Electrical Mounting Sockets ( 4 plcs) Cantilever Mounting BOTTOM VIEW Groove ( TIP SIDE ) ( no tip installed ) no tip installed...
Page 31: Video Zoom Microscope
System Overview Cantilever Holder continued... Figure 1.5f Fluid Cell Cantilever Holder Probe Clip Spring Lever SIDE VIEW tip installed sockets not shown!! Cantilever Probe Tip ( tip faces down ) Spring Loaded Probe Clip Mounting Sockets ( 4 plcs.) ( Top Side ) BOTTOM VIEW Cantilever Mounting...
Page 32: Sample Size & Handling
System Overview Sample Size & Handling Samples may be up to 8 inches in diameter and 0.5-inch thick using a multipurpose, 8-inch chuck. Table 1.6a: Sample Specifications Speciﬁcations Wafers and disk media: 8-inch dia. x 0.5" Max Sample Size thick. 100mm x 125mm typical Includes interchangeable adapters for center- Inspectable Area...
Page 33: Applications
System Overview Applications Several applications can be applied using the Dimension 3100 SPM. For speciﬁc information regarding these applications, please refer to the appropriate chapters in this manual. The following is a list of common applications used with the Dimension 3100 SPM: •...
Page 34: Safety
Chapter 2 Safety Overview This chapter details the safety requirements involved in installation of the Dimension 3100 Scanning Probe Microscope. Speciﬁcally, these safety requirements include safety precautions, non-physical conditions, and equipment safety applications. Training and compliance with all safety requirements is essential during installation and operation of the Dimension 3100 SPM.
Page 35: Safety Requirements
Safety Safety Requirements Figure 2.2a Safety Symbols Key Symbol Definition This symbol identifies conditions or practices that could result in damage to the equipment or other property, and in extreme cases, possible personal injury. Ce symbole indique des conditions d'emploi ou des actions pouvant endommager les équipements ou accessoires, et qui, dans les cas extrêmes, peuvent conduire à...
Page 36: Safety Precautions
Safety Safety Precautions Because the Dimension 3100 SPM features independently motorized components, it is crucial that operators become familiar with precautions to avoid injury to themselves and/or damage to samples. This section of the manual should be read by ALL persons working with or around the system. 2.3.1 General Operator Safety WARNING: Service and adjustments should be performed only by...
Page 37 CAUTION: Please contact Digital Instruments Veeco before attempting to move the Dimension 3100 SPM system. ATTENTION: Il est impératif de contacter Digital Instruments Veeco avant de déplacer le Dimension 3100 SPM. VORSICHT: Bitte kontaktieren Sie Digital Instruments Veeco bevor Sie das Dimension 3100 SPM System transportieren.
Page 38 Safety Safety Precautions continued... WARNING: Never alter pneumatics or wiring on the Dimension 3100 SPM. ATTENTION: Ne jamais toucher les cables et l'installation pneumatique sur le boîtier accoustique du Dimension 3100. WARNUNG: Ändern Sie niemals etwas am pneumatischen System oder der Verdrahtung der Schallschutzhaube.
Page 39 Safety Safety Precautions continued... WARNING: The Dimension 3100 SPM uses a halogen lamp to illuminate samples. Exposure to non-ionizing radiation from this lamp is well within the current exposure guidelines published by the American Conference of Governmental Industrial Hygienists (ACGIH). Typical IR exposure to the user from the sample illuminator is less than 3 mW/cm .
Page 40: Microscope
Safety Safety Precautions continued... 2.3.2 Microscope To avoid operator injury and equipment damage, observe the following cautions regarding the Dimension 3100 microscope. CAUTION: Stage microscopes feature an automated X-Y stage and Z-axis capable of programmed movement. The movements of all axes are slow, but are capable of exerting high forces.
Page 41 Because there are no user-serviceable parts, do not attempt system repairs. Disconnect faulty components and ship them to Digital Instruments Veeco for repair or replacement. ATTENTION: Les parties électroniques du microscope, du controleur et des équipements périphériques comportent des équipements...
Page 42: Sample Safeguards
Safety Microscope Safety Precautions continued... ATTENTION: Avoid spilling ﬂuids onto the microscope stage or into electrical assemblies, particularly the SPM head. If it is necessary to use ﬂuids, apply only small amounts as needed. ATTENTION: Eviter d’éclabousser la platine du microscope et les assemblages électriques, en particulier la tête du microscope.
Page 43 Safety Sample Safeguards continued... ATTENTION: All interlocks are provided to ensure operator and sample safety. Do not attempt to bypass interlocks. ATTENTION: Tous les intelocks sont fournis pour assurer toute sécurité à l’utilisateur. Ne pas essayer de ne pas les employer. ACHTUNG: Alle Sperrvorrichtungen des Systems sind dazu vorgesehen, Personal und Probe zu schützen.
Page 44: Ergonomics
Safety Ergonomics The Dimension 3100 SPM design promotes compatibility in the integration of user personnel and equipment within a semiconductor manufacturing environment. Speciﬁcally, the ergonomics of the Dimension 3100 SPM design prevent personal injury, equipment damage, and minimizes procedural errors. Non-Physical Conditions Non-physical conditions that may affect the performance of the Dimension 3100 SPM are vibration and noise.
Page 45: Power-Up Sequence
Safety Power-up Sequence (Installation and Service Only) The following section is required only during installation or after servicing and should NOT be used by untrained personnel. For a description of normal power-up procedures, see Section 2.8. 2.7.1 Pre Power-up Checklist ATTENTION: You must complete the pre power-up checklist before proceeding with facilities connections and the power-up...
Page 46 Safety Pre Power-up Checklist continued... Module Installation _______ 1. Uncrate the Dimension 3100 SPM system components. _______ 2. Verify all facilities requirements outlined in Chapter 3 are met. _______ 3. Install the Dimension 3100 SPM by completing the following: ______ Set the vibration isolation table or microscope platform in place.
Page 47 Safety Pre Power-up Checklist continued... Connections ATTENTION: Make sure to power-down all systems at this point to ensure that there is no risk of electrical shock. ATTENTION: Vériﬁez que tous les systèmes ne soient plus sous tension à ce moment, et assurez vous qu’il n’y a pas de risque de choc électrique.
Page 48 Safety Pre Power-up Checklist continued... _______ 2. Connect the Dimension 3100 SPM unit extensions. ______ Serial cable (12’) from computer to Dimension 3100 SPM back panel ______ BNC cable from computer to Dimension 3100 SPM back panel ______ RJ45 LAN cable from computer to host ______ Serial cable (6’) from computer to Dimension 3100 controller...
Page 49 Safety Pre Power-up Checklist continued... Final Installation ATTENTION: The objective, Dimension head, and vacuum sample chuck should be the ﬁnal equipment installed due to the sensitive nature of these components. ATTENTION: L’objectif, la tête du Dimension and la platine porte- échantillon devraient être installés en dernier, à...
Page 50: Power-Up The Dimension 3100 Spm (Service And Installation Only)
Safety Power-up Sequence (Installation and Service Only) continued... 2.7.2 Power-up the Dimension 3100 SPM (Service and Installation Only) Note: Refer to Figure regarding the following power-up instructions. 1. Verify that all system components are plugged into AC power with the correct voltage. 2.
Page 51: Power-Up Checklist (Service And Installation Only)
Safety Power-up Sequence (Installation and Service Only) continued... 2.7.3 Power-up Checklist (Service and Installation Only) Power-up (Installation Only) ______ Connect the facilities. _______ Vacuum (VAC): ≥24”Hg (IS3K only) _______ Clean dry air (CDA): 60-100psi ______ Verify that all system components are plugged into AC power with the correct voltage.
Page 52: Power-Up Sequence (Normal Usage)
Safety Power-Up Sequence (Normal Usage) 2.8.1 Prepare the System for Power-up (Normal Usage) 1. Verify that all system components are plugged into AC power with the correct voltage. 2. Verify that all moving parts are free of obstructions. 3. Verify that all cables are connected properly. 4.
Page 53: Software Power-Up
Safety Software Power-up ATTENTION: At this time, all pre power-up and power-up instructions must be completed before continuing. ATTENTION: A ce moment, toutes les étapes avant la mise en tension et de mise en tension doivent être effectuées avant de continuer. ACHTUNG: An dieser Stelle müssen die „Pre Power-up”...
Page 54: Press Ctrl - Alt - Delete
Safety Software Power-up continued... 2.9.2 Press CTRL DELETE 1. Press to log into Windows NT (See Figure CTRL DELETE 2.9b). Note: The screen begins with the panel split across both screens. 2. Drag the panel to one screen for use (See Figure 2.9b).
Page 55: Log On
Safety Software Power-up continued... 2.9.3 Log On 1. In the Logon Information window, enter the default settings into the User Name and Password fields (See Figure 2.9c). a. User Name: N ANOSCOPE b. Password: Leave blank Note: If you are unable to log on, verify with the process engineer that the password has not been changed.
Page 56: Select Real-Time
Safety Software Power-up continued... 2.9.5 Select Real-Time 1. Click the Real-time icon, or select Real-time from the menu (See Figure 2.9e). The system automatically initializes for approximately one minute. Figure 2.9e Select the Real-time Icon Real-time Icon The stage may need to be initialized any time the system or one of its components has been powered-down.
Page 57: Software Power-Up Checklist
Safety Figure 2.9f Status Panel 2.9.7 Software Power-up Checklist Software Power-up Checklist ______ Select the Windows NT workstation 4.00. ______ Press CTRL DELETE ______ Log on using your user name and password. ______ Start the NanoScope software. ______ Select Real-time. ______ Begin stage initialization if necessary.
Page 58: Hazard Labels
Safety 2.10 Hazard Labels The Dimension 3100 SPM hazard labeling system identiﬁes possible hazard areas. Caution must be taken according to the label warnings when working with associated areas. The following labels appear on the Dimension 3100 SPM: 2.10.1 Laser Warning Labels Laser Explanatory Label The Laser Explanatory Label (See Figure...
Page 59: Figure 2.10C Noninterlocked Protective Housing Label
Safety Laser Warning Labels continued... Noninterlocked Protective Housing Label The Noninterlocked Protective Housing Label (See Figure 2.10c) indicates that the area to which the label is afﬁxed is affected by a laser. The Noninterlocked Protective Housing Label is afﬁxed to the manual access door.
Page 60: Facilities Requirements
Chapter 3 Facilities Requirements Overview This chapter details facility site requirements, safety requirements, and conﬁguration options for the Dimension 3100 Scanning Probe Microscope. Speciﬁcally, this chapter details environmental requirements and equipment facilities drawings. Compliance with the following requirements and speciﬁcations is essential before beginning installation. •...
Page 61: Optional Configurations
Facilities Requirements Optional Conﬁgurations The following are typical conﬁgurations for the Dimension 3100 Scanning Probe Microscope, detailing options for acoustic and mechanical vibration isolation, as well as various options for positioning the control station (computer, control electronics, and accessories). Facilities requirements depend on what type of conﬁguration is used.
Page 62 Facilities Requirements Optional Conﬁgurations continued... 3.2.2 Axiom VT-102 This configuration consists of two basic elements: the VT-102 which is an air table for vibration isolation, and a typical "table top" version of the control station (computer, control electronics, and accessories). The VT-102 is a compact air table on which the Dimension 3100 microscope rests and does not include an acoustic hood.
Page 63: Axiom Is3K-2
Facilities Requirements Optional Conﬁgurations continued... 3.2.3 Axiom IS3K-2 This configuration is comprised of one basic element, the IS3K-2. The IS3K-2 is an ultra compact/small footprint console containing the control station, the microscope, and an integrated vibration isolation and acoustic enclosure (See Figure 3.2c).
Page 64: Facilities Requirements
Facilities Requirements Facilities Requirements Figure 3.3a Dimension 3100 SPM Facility Requirements 14.2" 361 mm Air and Vacuum 18.7" 475 mm Air and 13.5" Vacuum 343 mm 4005 Top View Front View Side View Weight: 150 lbs. for Dimension 3100 SPM assembly only. Note: Vibration and acoustic isolation is strongly recommended Rev.
Page 65: Acoustic/Vibration Isolation Systems
Facilities Requirements Acoustic/Vibration Isolation Systems 3.4.1 Axiom IS3K-2 Dimensions, Utilities, and Clearance The IS3K-2 is painted with cardinal paint 6400 series. The system does not outgas. An all stainless version of the IS3K-2 is available as a special order for an additional cost. An appropriate seat should be used which brings the user’s knees to within 3-4 inches (76-102mm) of the bottom of the keyboard tray.
Page 66: Figure 3.4B Axiom Is3K-2
Facilities Requirements Acoustic/Vibration Isolation Systems continued... Figure 3.4b Axiom IS3K-2 48.0" Open 127 mm 42.0" Closed 106 mm 4010 30.0" Electical 765 mm and Vacuum Hook-up Figure 3.4c Axiom IS3K-2 30.5" 775 mm 42.0" 1066 mm 9.0" 228.6 mm External Vacuum Supply 4011...
Page 67 Facilities Requirements Acoustic/Vibration Isolation Systems continued... Figure 3.4d IS3K-2 Leveling Feet Location 2.0" 51 mm 26.5" 2.0" 673 mm 51 mm Leveling Feet, Typ. Envelope of 24.6" Swivel 625 mm Casters. Typ. É” 3.0" 76 mm 4012 Figure 3.4e IS3K-2 Footprint Requirements 6.0"...
Page 68: Axiom Vt-103-3K Dimensions, Utilities And Clearance
An isolation hood/table is required for acoustic and vibration isolation of the Dimension 3100. The table must be moved to its ﬁnal location before Digital Instruments Veeco personnel can install and train on the SPM. Figure 3.4f Axiom VT-103-3K 4006 50.0"...
Page 69: Figure 3.4G Axiom Vt-103-3K
Facilities Requirements Acoustic/Vibration Isolation Systems continued... Figure 3.4g Axiom VT-103-3K 62.0" 1575 mm 32.2" 15.0" 4007 381 mm 818 mm Figure 3.4h Axiom VT-103-3K 36" 914 mm 33.0" 35.5" 838 mm 902 mm 4008 3-56 Dimension 3100 Manual Rev. C...
Page 70: Axiom Vt-102 Dimensions And Utilities
IS3K-2 for selected applications that do not require acoustic isolation for the desired performance level.The table must be moved to its ﬁnal location before Digital Instruments Veeco personnel can install and train on the SPM. Figure 287.3i: Axiom VT-102 Vibration Isolation Table 24.0"...
Page 71: Computer/Controller Facility Requirements3-12
Facilities Requirements Acoustic/Vibration Isolation Systems continued... 3.4.4 Computer/Controller Facility Requirements The IS3K-2 allows placement of the computer/controller within the framework of the unit. No additional footprint is required. Customer must supply computer and controller table or order the optional Elcon console for enclosure. Figure 3.4j Axiom VT-103-3K and Axiom VT-102 AC Power Supply Here 6"...
Page 72: Elcon Console
Facilities Requirements Acoustic/Vibration Isolation Systems continued... 3.4.5 ELCON Console The ELCON Console is available as an option for the computer/controller enclosure Figure 3.4k Optional ELCON Console AC POWER SUPPLY HERE 6" CLR. REQUIRED FOR CABLES DISPLAY CONTROL Elcon: MONITOR MONITOR Weight: 400 lbs.
Page 73: Facilities Requirements Summary
Facilities Requirements Facilities Requirements Summary If the Dimension 3100 system is used in a clean room with raised ﬂoors a pedestal must be provided to support leveling feet on the IS3K-2 acoustic hood. House vacuum is optional in all cases. If used, connections should accept a 1/8"...
Page 74: Environmental Acoustic/Vibration Specifications
Facilities Requirements Environmental Acoustic/Vibration Speciﬁcations The following conditions must be met in order to achieve 0.5 angtrom RMS noise specifications: • Acoustic: Acoustic noise should not exceed 75dBC (Note "C" weighting). • Vibration: Vibration of the SPM mounting surface should not exceed VC-D in any direction, vertical or horizontal.
Page 75: General Facilities Guidelines
Facilities Requirements General Facilities Guidelines The following list contains general facilities recommendations for the Dimension 3100 system: • Do not mount PA/Paging speakers near the AFM. If a speaker is required use a local volume control instead. • Keep the telephone ringer on low and install the telephone away from the AFM.
Page 76: Installation
Section 4.4 • Connecting the Dimension 3100 System: Section 4.5 • System Power-up: Section 4.6 CAUTION: Installation should be completed by trained Digital Instruments Veeco personnel only. Installation instructions are provided for customer reference only. Rev. C Dimension 3100 Manual 4-63...
Page 77: Shipping And Receiving
Installation Shipping and Receiving 4.2.1 Equipment Requirements The following equipment is necessary for successful installation of the Dimension 3100 SPM system. Verify the following is on-hand before beginning installation: Equipment Received • Dimension 3100 Manual • Dimension 3100 Controller • Dimension 3100 Microscope •...
Page 78 Installation Shipping and Receiving continued... Cables Received • Controller-to-Dimension 3100 Cable, 37-pin D • Dimension 3100 DC Power Cable • Fiber Optic Cable • Frame Grabber Video Cable (BNC to BNC) • Power Cords (2) • Serial Cable, 9-pin D, 12’ •...
Page 79: Uncrating The System
Installation Uncrating the System 4.3.1 Uncrate the Dimension 3100 SPM System 1. Using scissors, cut and remove the plastic shipping band encircling the Dimension 3100 shipping crate. 2. Lift the cardboard shipping box off of the Dimension 3100 microscope. 3. Unscrew the 2 shipping bolts holding the shipping brackets in place at either side of the Dimension 3100 microscope.
Page 80: Installing The Dimension 3100 System
Installation Installing the Dimension 3100 System 4.4.1 Install the Dimension 3100 SPM Unit 1. Place the vibration isolation table, or the microscope platform, at the desired location. 2. Place the Dimension 3100 microscope in the operating location on the vibration isolation table or other platform. CAUTION: The Dimension 3100 microscope unit exceeds the two-person lift weight limit and should be lifted with a mechanical assist.
Page 81 Installation Installing the Dimension 3100 System continued... 5. Carefully slide the chuck base off the X-Y stage. Note: Do not stretch or bend the vacuum lines. Do not remove the vacuum lines from the chuck base. 6. Wipe down the granite and underside of the chuck base with isopropyl alcohol.
Page 82: Install The Control Station
Installation Figure 4.4b Secure the Chuck to the Stage Chuck Base Clamp Flexure Installing the Dimension 3100 System continued... 4.4.2 Install the Control Station 1. Set up a table to be used as the control station next to the Dimension 3100 microscope. Note: Keep the control station in close proximity to the Dimension 3100 unit without touching the vibration isolation table.
Page 83 Installation Figure 4.4c Dimension 3100 Input and Display Equipment 3919 Trackball Keyboard Mouse 3. Place the computer on the side of the input and display devices closest to the Dimension 3100 microscope. 4. Place the NanoScope IIIa controller and Dimension 3100 controller next to the computer.
Page 84: Connecting The Dimension 3100 System
Installation Connecting the Dimension 3100 System CAUTION: Verify that the machine is powered-down and locked-out before attempting to make any connections. 4.5.1 Connect the Dimension 3100 Control Station Extensions Connect the Display and Input Devices 1. Connect the monitor power cords (2) to the power strip, but do not power-up.
Page 85: Figure 4.5A Computer (Rear View)
Installation Connect the Dimension 3100 Control Station Extensions continued... Connect the Computer ATTENTION: Boards may shift during the course of shipment. Improperly seated boards may cause equipment damage. Remove the computer cover and verify that all the boards are properly seated before powering-up the computer.
Page 86 Installation Connect the Computer continued... Note: The computer ships with the network board disabled to avoid error messages for computers not used on a network. 1. To use the computer on a network, select My Computer\Control\Panel\System\Hardware Profiles\Properties\Network and click to uncheck the box. Click twice to exit.
Page 87 Installation Connect the Dimension 3100 Control Station Extensions continued... Connect the NanoScope IIIa Controller 1. Connect extensions to the NanoScope IIIa Controller. See Table 4.5b, Figure 4.5b, and Figure 4.5c for list of extensions, connection information and connection location. Table 4.5b: NanoScope IIIA Controller Connections Part Cable Function...
Page 88 Installation Connect the NanoScope IIIa Controller continued... Note: Be sure to tighten the cable connectors' locking screws at both ends to prevent accidental removal of the cable while the NanoScope IIIa Controller operates. ATTENTION: Do not remove or install the cable while the NanoScope IIIa Controller is powered-up or in operation.
Page 89: Figure 4.5D Dimension 3100 Controller
Installation Connect the Dimension 3100 Controller continued... Figure 4.5d Dimension 3100 Controller (rear view) POWER MICROSCOPE AIR & VACUUM SERIAL PORT Lightbulb is the only user serviceable part POWER ETL STICKER HERE SERIAL NO. STICKER HERE 3903 Figure 4.5e Dimension 3100 Controller (front view) NanoScope®...
Page 90: Connect The Dimension 3100 Microscope Extensions
Installation Connecting the Dimension 3100 System continued... 4.5.2 Connect the Dimension 3100 Microscope Extensions Connect the Dimension 3100 Microscope Electronics Box 1. Connect extensions to the Dimension 3100 Microscope Electronics Box. See Table 4.5d Figure 4.5f for list of extensions, connection information and connection location. Table 4.5d: Dimension 3100 Microscope Electronics Box Connections Part Cable...
Page 91: Figure 4.5G Vacuum Power Switch
Installation Connect the Dimension 3100 Microscope Electronics Box continued... 2. Toggle the vacuum power switch, located on the front of the microscope unit, to OFF (See Figure 4.5g). Figure 4.5g Vacuum Power Switch Vacuum Power Switch VACUUM 3918 Route the VT103 Air Table Cabling Figure 4.5h Cable Clamp NanoScope IIIa Controller to Dimension 3100 Microscope...
Page 92 Installation Route the VT103 Air Table Cabling continued... 3. Mark the cables with a marker to reference each cable’s position in the cable clamp (See Figure 4.5h). Note: When secured in place, the cable clamp is located underneath the vibration isolation table, near the aforementioned slot.
Page 93: System Power-Up
Installation System Power-up ATTENTION: The following section is required only during installation or after servicing and should NOT be used by untrained personnel. Prepare the System for Power-up 1. Verify that the power cord is plugged into a power receptacle with the correct voltage.
Page 94: Stage System
Chapter 5 Stage System Overview The Dimension 3100 Scanning Probe Microscope (SPM) features a large sample stage capable of positioning large samples such as silicon wafers and computer hard drive media, as well as small samples. The X-Y stage consists of a pair of stacked, perpendicular slides and uses an open loop (unencoded) architecture with stepper motors to drive the stage to user-speciﬁed coordinates.
Page 95: Mounting Of Samples
Stage System Mounting of Samples There are two methods widely used for mounting samples: vacuum chucks and magnetic pucks. Regardless of the method used, verify that samples are mounted flat and parallel to the stage. This is especially important for larger samples inspected over more than one site.
Page 96: Axis Orientation-Motorized X-Y Stages
Stage System Mounting of Samples continued... 5.2.3 Axis Orientation—Motorized X-Y Stages When viewing the Dimension 3100 SPM from the front, stage movements are defined over two axes of motion: X (left-right), and Y (front-back). For X-axis movements, lesser (decreasing) coordinates are located to the left. For Y-axis movements, positive (increasing) coordinates are located toward the rear of the machine, decreasing values are located forward (See Figure...
Page 97: Stage Menu Commands
Stage System Stage Menu Commands Important stage menu commands are discussed in detail in the following sections: • Load New Sample: Section 5.3.1 • Locate Tip: Section 5.3.2 • Align Laser: Section 5.3.3 • Focus Surface: Section 5.3.4 • Move To (X,Y): Section 5.3.5 •...
Page 98: Locate Tip
Stage System Load New Sample continued... 2. To load a new sample, click . The head raises to the Load/ Unload height, and the stage indexes to the front-center position. Note: Verify that the tip is still usable. If the tip has been used for a lengthy period, or if damage is suspected, change the tip now per instructions provided in...
Page 99: Figure 5.3C Locate Tip Prompt
Stage System Locate Tip continued... Note: As the objective moves positions, the tip should begin to come into focus. When the focus position is attained, the screen displays trackball instructions for achieving a focus (See Figure 5.3c). Figure 5.3c Locate Tip Prompt Locate Tip Hold down the left button to focus Hold down the right button to zoom.
Page 100: Align Laser
Stage System Stage Menu Commands continued... 5.3.3 Align Laser This option offers a menu-driven method for aligning lasers onto cantilevers, and is especially useful for beginners. This alignment procedure requires approximately 10 minutes. 1. Verify that the tip is withdrawn from the surface of the sample and raised as high as possible.
Page 101: Focus Surface
Stage System Stage Menu Commands continued... 5.3.4 Focus Surface This function focuses the sample surface. The operator may choose to manually focus on the surface using the trackball or allow the optics to focus automatically by choosing the Autofocus feature. When the surface is already partially in focus (or close to it), use the Autofocus feature.
Page 102: Move To (X,Y)
Stage System Focus Surface continued... 5. If the surface is partially in focus, use the Autofocus option to complete the focusing process. 6. To focus on the sample "surface" (normal operation) or the "tip reflection" (for extremely clean samples), change the Focus On parameter accordingly.
Page 103: Figure 5.3G Move To Prompt
Stage System Move To (X,Y) continued... To move the X-Y stage to a specified X-Y coordinate, complete the following: 1. Verify that the stage origin (position 0, 0) is either: • At the default, or, • Reset to a new position using the Set Reference panel under the Stage pop-down menu.
Page 104 Stage System Move To (X,Y) continued... CAUTION: Always verify that the tip is off the surface before attempting stage movements. If manual stage movements are attempted during engagement (by turning the leadscrew knobs on the stage’s X-Y slide assemblies) the tip and/or sample may be damaged.
Page 105: Set Reference
Stage System Stage Menu Commands continued... 5.3.6 Set Reference The Set Reference panel is used to set the origin point on the sample surface to be used for all subsequent Move To and Programmed Move operations. It is important to verify the reference point (0,0) with programmed move sequences, since all moves are relative to the current origin.
Page 106: Figure 5.3J Defining The X-Axis
Stage System Set Reference continued... Move Stage Right a. Move the stage to the right to a second point on the linear feature. (This second point, along with the point of origin, defines the X-axis.) b. Quit the Focus Surface option, and return to the Set Reference option under the Stage pop-down menu.
Page 107 Stage System Set Reference continued... Figure 5.3k Resultant Reference Line Reference Line Reference Line 5-94 Dimension 3100 Manual Rev. C...
Page 108: Programmed Move
Stage System Stage Menu Commands continued... 5.3.7 Programmed Move The Programmed Move function allows the stage to be automatically positioned using a series of memorized positions. These positions are programmed into the controller’s computer, then executed automatically in sequence. This function is particularly useful for statistical quality assurance runs on large numbers of identical samples, and as a basic inspection aid.
Page 109: Figure 5.3M Editing Or Creating New Program
Stage System Programmed Move continued... 3. From the Programmed Move panel, click on . The screen TEACH prompts with (See Figure 5.3m): Figure 5.3m Editing or Creating New Program Prompts Programmed Move Programmed Move Editing existing program Creating new program If the program name already exists If the program name is new (not on the computer.
Page 110: Figure 5.3O Teach Mode Prompt
Stage System Programmed Move continued... 7. Click on in the Teach Mode panel when the stage has0 moved to a desired position (See Figure 5.3o). Figure 5.3o Teach Mode Prompt Teach Mode Hold down the left button to move the SPM Hold down the right button to zoom.
Page 111 Stage System Other Information Regarding the Teach Program Option continued... 3. Enter the step number to be removed or drag the mouse to index to the step number. The stage simultaneously moves to the new step position. 4. Select the Remove Step option. Note: When individual program steps are removed, all subsequent steps are “moved up”...
Page 112 Stage System Programmed Move continued... Origin Points Programmed Move positions are memorized relative to the current origin at the time of programming. If the origin has been shifted from its original position since the time of programming, it is necessary to reestablish the original origin point to locate the same positions on the sample.
Page 113: Initialize
Stage System Running a Programmed Move continued... Figure 5.3p Initial Focus Prompt Stage Do you want to set the initial focus? Note: If the program was previously run without ﬁnishing (aborted), the screen requests whether to begin the program sequence at the aborted step.
Page 114 Stage System Stage Menu Commands continued... 2. Select Initialize from under the Stage pop-down menu. The dialog box offers two options (See Figure 5.3r). Figure 5.3r Stage Initialize/Cancel Prompt Stage Initialize Cancel 3. To begin initialization, click . As the stage begins a INITIALIZE series of motorized movements, the screen indicates operating status (See...
Page 115: Spm Parameters
Stage System Figure 5.3u Optics Move to End of Travel Prompt Stage Optics should move to end of travel 6. Next, the camera zoom optics assembly zooms. When the camera zooms in to the limit of its travel, click to continue (See Figure 5.3v).
Page 116: Cantilever Preparation
Chapter 6 Cantilever Preparation Overview The Dimension 3100 Scanning Probe Microscope comes furnished with etched silicon cantilever substrates for TappingMode AFM and silicon nitride cantilevers for Contact AFM modes. The cantilever probes should be inspected under the microscope when used for the ﬁrst time to gain a better understanding of how the probes and substrates are connected and separated.
Page 117: Silicon Cantilever Substrates
Cantilever Preparation Silicon Cantilever Substrates ATTENTION: The cantilevers are stored tip-side-up and that the silicon is very brittle. Contacting the cantilever during this operation will break it off of the substrate. 6.2.1 Wafer Tool Kit A wafer tool kit for working with silicon cantilever substrates is included with the Dimension 3100 SPM system.
Page 118 Cantilever Preparation Cantilever Preparation continued... Note: The supporting arms connecting the substrate to the bulk of the wafer shatter when pressure is applied. It may be convenient to break several substrates from the wafer at one time. Extras may be safely stored in a specially prepared petri dish.
Page 119: Tip Shape Of Etched Silicon Probes
Cantilever Preparation Silicon Cantilever Substrates continued... ATTENTION: Silicon is extremely brittle.Be very careful to avoid any contact with the probe lever because it will immediately snap 6.2.3 Tip Shape of Etched Silicon Probes Etched silicon probes provide the most consistent tip sharpness of the probes presently available.
Page 120 Cantilever Preparation Tip Shape of Etched Silicon Probes continued... The present process creates a tip which is symmetric from side-to-side with a 17+ 2 ° half cone angle (See A of Figure 6.2b) and asymmetric from front- to-back, along the length of the lever (See C of Figure 6.2b).
Page 121 Cantilever Preparation Tip Shape of Etched Silicon Probes continued... To measure sidewall angles, the best orientation of the sample uses the back edge of the tip (that which faces back towards the cantilever substrate) to measure step angles (See Figure 6.2c).
Page 122 Cantilever Preparation Tip Shape of Etched Silicon Probes continued... Measurements of line pitch are often best measured using the side-to-side faces of the tip, which exhibits symmetry. Because of the approximate 17° half angle of the tip, the line or space measurement is best done at the top of the line for simplification of the measurement artifacts (See Figure 6.2e).
Page 123: Silicon Nitride Cantilever Substrates
Cantilever Preparation Silicon Nitride Cantilever Substrates When using the Dimension 3100 microscope for the ﬁrst time, begin with the provided strip of cantilevers and skip to Step 5 of the following instructions. Step 5 provides instructions on how to separate substrates from strips. 1.
Page 124 Cantilever Preparation Silicon Nitride Cantilever Substrates continued... CAUTION: Be careful to avoid pushing strips together as the cantilevers are between the strips. All cantilevers on one side of both strips could break off if the strips are inadvertently pushed together. 5.
Page 125 Cantilever Preparation Silicon Nitride Cantilever Substrates continued... Figure 6.3b Substrate Break-off Note: Extra substrates are easily stored in a covered petri dish. The shipped substrates are secured with X0-grade, GEL-PAK™ adhesive strips. The strips are used to permit easy removal of the substrates. If GEL-PAK adhesive strips cannot be found, a simple substitute is the adhesive area from a Post-it note.
Page 126: Tip Shape Of Silicon Nitride Probes
Cantilever Preparation Silicon Nitride Cantilever Substrates continued... 6.3.1 Tip Shape of Silicon Nitride Probes Silicon nitride probes provide low cost and durable probes suitable for contact mode imaging. There are some subtleties in general shape that should be understood to gain the best advantage from the silicon nitride tips when imaging samples with steps of 0.1 to several microns in height.
Page 127 Cantilever Preparation Tip Shape of Silicon Nitride Probes continued... Because the Silicon Nitride probe tips have lower aspect ratios than single- crystal etched silicon probes, the steepest measurable step wall angle is appreciably lower. The highest measurable angle using silicon nitride probes is approximately 65°...
Page 128: Chapter 7 Head, Probe, & Sample Preparation
Chapter 7 Head, Probe, & Sample Preparation Overview This chapter includes information regarding the Dimension 3100 Scanning Probe Microscope (SPM) setup and operation procedures for Contact Mode and Tapping Mode. Speciﬁcally, this chapter details removal and installation of the microscope head, mounting the cantilever, changing the tip, loading and positioning samples, focusing the optics, and general information regarding engaging and withdrawing the tip.
Page 129: System Information
Head, Probe, & Sample Preparation System Information 7.2.1 Mouse versus Trackball The mouse exclusively operates the NanoScope software with the exception of functions related to direct control of the stage. These commands are only initiated with the trackball. Operator-initiated movement of motors via the Zoom, Focus, Move SPM (Z-stage) and Move XY (in motorized version) commands are controlled by the trackball and its buttons.
Page 130 Head, Probe, & Sample Preparation Laser Requirements continued... WARNING: During and prior to set up of the laser, it is important to avoid looking directly at the laser beam or at the laser spot. Never plug the laser head should never be plugged into the microscope control electronics unless the head is installed in the Z-stage mount.
Page 131: Basic Afm Operation
Head, Probe, & Sample Preparation Basic AFM Operation 7.3.1 Select the Microscope Head 1. Set the microscope head configuration by selecting the Microscope Select panel from the Di pop-down menu (See Figure 7.3a). 2. Click to close the Microscope / Select dialog box. When enabled, the selected buttons are black.
Page 132: Load The Cantilever Holder
Head, Probe, & Sample Preparation Basic AFM Operation continued... The cantilever holder stand has three stations: 1) standard AFM, 2) fluid imaging AFM and 3) STM. A small block in the center of the gold connector identifies the standard AFM load station. The center block helps to support the cantilever holder you place the holder on the cantilever holder stand.
Page 133 Head, Probe, & Sample Preparation Basic AFM Operation continued... Note: Install silicon nitride substrates face-up so the tip points away from the AFM cantilever holder. This ensures that the cantilever and tip face toward the sample once the cantilever holder is mounted on the head. To install a silicon nitride substrate on the AFM cantilever holder, complete the following: 1.
Page 134: Remove The Dimension Spm Head
Head, Probe, & Sample Preparation Load the Cantilever Holder continued... 4. Place the substrate on the AFM cantilever holder groove. 5. Carefully maneuver the substrate until the substrate is flush against one side and laying flat in the cantilever holder groove. 6.
Page 135: Install The Cantilever Holder
Head, Probe, & Sample Preparation Load the Cantilever Holder continued... Figure 7.3d SPM Head Dovetail and Signal Connector Connector Dovetail Release Note: Dovetail engagement actuates with a spring. Failing to engage the spring-loaded dovetail causes a large increase in image noise due to reduced rigidity of the mechanical support of the SPM head.
Page 136: Replace The Dimension Spm Head
Head, Probe, & Sample Preparation Basic AFM Operation continued... 7.3.7 Replace the Dimension SPM Head 1. Carefully slide the Dimension SPM head down into the dovetail groove of the Z-stage SPM. 2. Loosen the screw located on the right side of the Dimension SPM head dovetail to lock the head in place (See Figure 7.3d).
Page 137 Head, Probe, & Sample Preparation Align Laser continued... Figure 7.3e Dimension Head Laser Control Knobs Rear-Right Laser Control Knob (X Direction) Knob Adjustment Diagram Front-Left Laser Control Knob (Y Direction) The X direction runs along the major axis of the substrate (parallel to the length of the cantilever).
Page 138 Head, Probe, & Sample Preparation Align Laser continued... 2. Verify the laser beam is visible on the surface below. If it is not, turn the rear-right laser control knob counter-clockwise until the laser spot appears on the surface below. 3. Turn the rear-right laser control knob clockwise to move the laser in the X positive direction until the laser spot disappears from the surface below.
Page 139 Head, Probe, & Sample Preparation Etched Silicon Tips (Tapping Mode) continued... 8. Verify that a laser spot appears in the Dimension head filter screen. If there is not laser spot, adjust the photodetector mirror using the photodetector adjustment knobs located on the left side of the SPM head (See Figure 7.3g).
Page 140 Head, Probe, & Sample Preparation Silicon Nitride Tips (Contact Mode AFM) continued... 3. Turn the rear-right laser control knob clockwise to move the laser in the X positive direction until the laser spot disappears from the surface below. Turn the right-rear laser control knob counter- clockwise until the laser spot just reappears and stop turning the knob.
Page 141: Adjust Photodetector
Head, Probe, & Sample Preparation Silicon Nitride Tips (Contact Mode AFM) continued... 6. Verify the laser is located on the portion of the cantilever connecting the two lever arms near the tip location (See Figure 7.3h). 7. Turn the rear-right laser control knob counter-clockwise to move the laser in the X negative direction on the cantilever until the laser crosses the tip-end of the cantilever and falls on the surface below (See...
Page 142 Head, Probe, & Sample Preparation Basic AFM Operation continued... Figure 7.3i Vision System Window Laser Signal Values Detector Schematic Laser Sum Signal 4. Center the laser detector signal using the photodetector adjustment knobs located on the left side of the Dimension head. Note: The image monitor displays the laser signal values and a schematic of the detector quadrants labeled Detector.
Page 143: Locate Tip
Head, Probe, & Sample Preparation Adjust Photodetector continued... Figure 7.3j Photodetector Mirror Adjustment Knobs (Vertical) AFM / TM Detector Mirror Adjustment (Horizontal) LFM Detector Mirror Adjustment 5. For Contact Mode AFM only, offset the vertical deflection value to -2 volts using the photodetector adjustment knobs. 7.3.11 Locate Tip For initial start-up where the Z-stage and optics have been almost fully retracted, use the Focus Surface command to move the tip closer to the...
Page 144: Load The Sample
Head, Probe, & Sample Preparation Basic AFM Operation continued... 3. Once you locate the tip, use the optic adjustment knobs (lower-left corner of the zoom optics assembly) to align the optical microscope lens so the tip is centered in the video display window. 4.
Page 145 Head, Probe, & Sample Preparation Basic AFM Operation continued... 4. Place the small sample disk on the magnetic small sample holder. Note: The small sample holder provided with the Dimension 3100 is not optimal for imaging soft, magnetic materials due to the magnetic hold-down properties.
Page 146: Focus Surface
Head, Probe, & Sample Preparation Basic AFM Operation continued... 7.3.13 Focus Surface 1. Select the Focus Surface option under the Stage pop-down menu, or click on the Focus Surface icon. 2. Focus on the sample surface by rolling the trackball up or down while pressing the bottom-left button.
Page 147: Engage
Head, Probe, & Sample Preparation 2. In Tapping Mode, under the Feedback Controls panel, set the following: • Integral Gain is set to 0.5. • Proportional Gain is set to 0.7. • Scan Rate is set to 2Hz. 3. In Contact Mode AFM, under the Feedback Controls panel, set the following: •...
Page 148: Advanced Afm Operation
Head, Probe, & Sample Preparation Advanced AFM Operation 7.4.1 Stage Parameters The system ships with the following default stage parameters (See Figure 7.4a). Once you have become familiar with using the system, you may want to adjust the stage parameters to speed up the engage sequence. 1.
Page 149 Head, Probe, & Sample Preparation Stage Parameters continued... SPM engage step Deﬁnes the step size of the Z-stage during engage. The default parameter is 1µm. Increasing this increases the speed of the approach. CAUTION: Do not change this parameter by more than 0.5-1 µm because the step size must be some modest fraction of the total Z range of the scanner (i.e.
Page 150: Contact Afm
Chapter 8 Contact AFM Overview This chapter covers procedures for operating the Dimension 3100 Scanning Probe Microscope (SPM) in Contact Mode AFM. It is assumed that the operator has previously prepared a Contact Mode tip and aligned the laser per instructions provided in Chapter 7 of this manual.
Page 151: Basic Contact Mode Afm Operation
Contact AFM Basic Contact Mode AFM Operation The following is a general outline of basic operational procedures involved in Contact Mode AFM. For more detailed instructions, refer to Chapter 7 of this manual. 8.2.1 Select the Microscope Head 1. Set the microscope head configuration by selecting the Microscope / Select panel from the Di pop-down menu.
Page 152: Adjust Photodetector
Contact AFM Basic Contact Mode AFM Operation continued... 8.2.5 Adjust Photodetector 1. Adjust the photodetector so that the red dot moves toward the center of the Dimension head filter screen using the two photodetector adjustment knobs located on the side of the Dimension head.
Page 153 Contact AFM Basic Contact Mode AFM Operation continued... Figure 8.2a Suggested Scan Controls Settings Other Controls Panel Keep the Z limit at its maximum value. Figure 8.2b Suggested Other Controls Settings Feedback Controls Panel 1. Set the Integral gain to 2.0 and the Proportional gain to 4.0 (See Figure 2.
Page 154 Contact AFM Set Initial Scan Parameters continued... Figure 8.2c Suggested Feedback Controls Settings Channel Panels 1 and 2 1. In the Channel 1 panel, set Data type to Height (See Figure 8.2d). 2. Set Z range to a reasonable value for the sample. Note: For example, for a 200 µm step height calibration sample, a reasonable Z range setting is 300 µm initially.
Page 155: Engage
Contact AFM Basic Contact Mode AFM Operation continued... 8.2.9 Engage 1. Select Motor/Engage. A pre-engage check begins, followed by Z- stage motor motion. 2. To move to another area of the sample, execute a Withdraw command to avoid damaging the tip and scanner. 3.
Page 156: Advanced Atomic Force Operation
(Model ESP). Note: There are a wide variety of tips available for Contact Mode AFM. Check the tip buying guide on the Digital Instruments Veeco website (www.di.com) for more information. Silicon Nitride Cantilevers Silicon nitride cantilevers for the Dimension 3100 SPM are available in two process variations: standard and sharpened.
Page 157 Contact AFM Silicon Nitride Cantilevers continued... Each silicon nitride cantilever substrate includes four cantilever tips with different size and spring-constants. Two of the cantilevers on each substrate measure 115µm from the substrate to the apex of the triangular cantilever (referred to as 100µm cantilevers) while the remaining two cantilevers measure 193µm from the substrate to the apex of the triangular cantilever (referred to as 200µm cantilevers).
Page 158 Contact AFM Cantilever Selection continued... Figure 8.3a Force Curve CAUTION: Large offsets are not recommended between engage and disengage (2 volts) with etched silicon cantilevers in Contact Mode AFM (450µm long only) because breakage is likely. ATTENTION: Il est recommandé de ne pas utiliser de forts décentrements pendant l’engagement et le désengagement des céramiques piézo-électriques (2 V) avec des pointes en silicium (longueur: 450 µm) sous peine de destruction de celles-ci.
Page 159: Optimization Of Scanning Parameters
Contact AFM Optimization of Scanning Parameters Careful selection of scan parameters is important in the successful application of Contact Mode AFM. In most cases, optimal parameter selection depends on the sample. It is beneﬁcial to experiment with a range of values within each parameter, however, please review discussions of the scan parameters in the Real-time control panels in the NanoScope III Command Reference Manual before making bold changes.
Page 160: Gain Settings
Contact AFM Data Type continued... Deflection data collected with high feedback gains essentially equals the derivative of the height. This is commonly referred to as the error-signal. The error-signal provides a sensitive edge-detection technique and can be very helpful in visualizing fine details in topography that are difficult to see in regular height data.
Page 161: Scan Size And Scan Rate
LookAhead gain controls are not included on some software releases. For more information, contact Digital Instruments Veeco. 8.4.3 Scan Size and Scan Rate In general, decrease the Scan rate as the Scan size increases. Use scan rates of 1.5-2.5 Hz for large scans on samples with tall features.
Page 162: Lowpass Filter
Contact AFM Optimization of Scanning Parameters continued... 8.4.5 Lowpass Filter The Lowpass filter invokes a digital, one-pole, lowpass filter to remove high-frequency noise from Real-time data. The filter operates on the collected digital data regardless of the scan direction. Settings for this item range from Off through 9.
Page 163: Force Calibration Mode
Contact AFM Force Calibration Mode The Force Calibration command in the View / Force Mode / Calibration menu allows you to check the interaction between the cantilever and the sample surface. For detailed information regarding Force Calibration, see Chapter 8-150 Dimension 3100 Manual Rev.
Page 164: Contact Afm In Fluids
Chapter 9 Contact AFM in Fluids Overview The imaging of samples under ﬂuid is an ever-increasing realm for SPM technology. Imaging samples under ﬂuid minimizes surface forces on delicate samples, allows observation of biological specimens in their natural, ﬂuid environments, and allows real-time observations of samples undergoing electrochemical reactions (ECAFM).
Page 165: Basic Principles Of Contact Afm In Fluids9-2
Contact AFM in Fluids Basic Principles of Contact AFM in Fluids Attractive forces due to surface tension effects are eliminated when imaging samples under ﬂuid. This enables the sample surface to be imaged with minimal cantilever tip force—a decided advantage when imaging biological specimens and delicate materials.
Page 166: Tip Suggestions
Note: For additional information on selecting a cantilever, please refer to the Digital Instruments Veeco website (www.di.com). Removing Organic Contamination Contaminants on the cantilever tip may limit the AFM’s resolution. Use ultraviolet light to remove contaminants as follows: 1.
Page 167: Rubber Protective Skirt
Note: For a list of articles describing biological applications of AFM, including sample preparation techniques, contact Digital Instruments Veeco. A special sample container for ﬂuid operation is provided for wet samples. 9-154 Dimension 3100 Manual Rev. C...
Page 168: Larger Samples
Contact AFM in Fluids CAUTION: Do not attempt to operate the standard air tip holder in a fluid environment. The standard tip holder has exposed electrical signal lines that could short circuit if exposed to a conducting fluid. ATTENTION: En milieu liquide, ne pas utiliser le support de pointe standard prévu pour une utilisation à...
Page 169 1. Place the sample in the plastic petri dish supplied with the unit. Note: If you wish to construct a custom sample holder, please feel free to contact Digital Instruments Veeco for more information. 2. Secure the sample to the bottom of the petri dish lid or other sample holder with epoxy or other non water-soluble adhesive.
Page 170 Contact AFM in Fluids CAUTION: When imaging fluid samples, use extraordinary precautions against spillage. Fluids must NOT be spilled on or around the sample stage, electronics boxes, or other components containing electronic parts. Avoid spilling all corrosive fluids on exposed surfaces;...
Page 171: Fluid Operation Procedure
Contact AFM in Fluids Fluid Operation Procedure 9.5.1 Load the Cantilever Substrate The cantilever substrate is held in a small pocket on the bottom side of the tip holder by a gold-plated stainless steel wire. The cantilever installation fixture has three docking stations where different tip holders may be mounted.
Page 172: Install The Cantilever Holder
Contact AFM in Fluids 9.5.2 Install the Cantilever Holder CAUTION: When cleaning the cantilever holder, take care to avoid scratching the glass surfaces in the center of the cantilever holder. Be careful to prevent dripping any liquid onto the Dimension 3100 system, especially onto the SPM head.
Page 173: Install The Protective Skirt
Contact AFM in Fluids 9.5.3 Install the Protective Skirt The protective skirt is a rubber seal used to protect the SPM scanner tube from liquids. Install it by sliding it over the fluid tip holder and onto the shoulder on the SPM tube. Make sure that the seal is tight on both the tip holder and the SPM tube.
Page 174: Lower Tip Holder Into Fluid
Contact AFM in Fluids Fluid Operation Procedure continued... Figure 9.5b False Reﬂections from Fluid Tip Holder false reflection laser beam laser reflects off glass Once the fluid tip holder is plugged into the bottom of the AFM scanner, note the faint laser reflection visible on the glass in the tip holder (in the laser viewing window).
Page 175: Readjust Laser Alignment
Contact AFM in Fluids Fluid Operation Procedure continued... 9.5.7 Readjust Laser Alignment Lowering the tip holder into fluid causes the laser spot to move towards the fixed end of the cantilever by roughly 25 microns. To compensate for this shift, proceed with the following: 1.
Page 176: Locate Tip
Contact AFM in Fluids Fluid Operation Procedure continued... 9.5.9 Locate Tip 1. Using the mouse, select Locate Tip from under the Stage pop- down menu or click on the Locate Tip icon. 2. Center the tip on the cantilever under the cross hairs using the two adjustment screws located to the left of the optical objective on the microscope.
Page 177 Contact AFM in Fluids Fluid Operation Procedure continued... When focusing on the sample surface directly in fluid, the following procedure is necessary: a. Align Laser (in air) b. Locate Tip (in fluid) c. Focus Surface (hit engage several times) Focus Surface (beyond surface by another 300um) d.
Page 178: Check Scan Parameters
Contact AFM in Fluids WARNHINWEIS: Seien Sie extrem vorsichtig mit XY-Bewegungen des Probentisches, wenn der Rand Ihrer Probenbefestigung über die Probenﬂäche hinausragt (wie zum Beispiel bei einer Petrischale). Der SPM-Kopf kann zerstört werden, falls der Probentisch derart bewegt wird, daß der Spitzenhalter seitlich gegen den Rand der Probenbefestigung schlägt.
Page 179: Clean Fluid Cell And Protective Skirt
Contact AFM in Fluids Fluid Operation Procedure continued... Note: The cantilever will typically adhere to the sample surface much less in ﬂuid; therefore, it is often possible to image at much smaller contact forces in liquid than in air. 9.5.14 Clean Fluid Cell and Protective Skirt To reduce contamination problems and to obtain high quality images, clean the fluid cell and protective skirt as follows: 1.
Page 180: Tapping Mode Afm
Chapter 10 Tapping Mode AFM 10.1 Overview This chapter details procedures for operating the Dimension 3100 SPM in Tapping Mode in air. For information regarding Tapping Mode in ﬂuids, see Chapter 11. For information regarding loading a Tapping Mode tip and aligning the SPM laser see Chapter 7 of this manual.
Page 181: Principles Of Tapping Mode
Tapping Mode AFM 10.2 Principles of Tapping Mode Figure 10.2a depicts a cantilever oscillating in free air at its resonant frequency. A piezo stack excites the cantilever substrate vertically, causing the cantilever to move up and down. As the cantilever moves vertically, the reﬂected laser beam, or "return signal,"...
Page 182 Tapping Mode AFM Principles of Tapping Mode continued... Figure 10.2b represents the same cantilever at the sample surface. Although the piezo stack continues to excite the cantilever substrate with the same energy, the tip deﬂects in its encounter with the surface. The reﬂected laser beam reveals information about the vertical height of the sample surface and characteristics of the sample material itself.
Page 183: Basic Tapping Mode Afm Operation
Tapping Mode AFM 10.3 Basic Tapping Mode AFM Operation The following is a general outline of basic operational procedures involved in Tapping Mode AFM. For more detailed instructions, refer to Chapter 7 of this manual. 10.3.1 Select the Microscope Head 1.
Page 184: Adjust Photodetector
Tapping Mode AFM Basic Tapping Mode AFM Operation continued... 10.3.5 Adjust Photodetector 1. Adjust the photodetector so that the red dot moves toward the center of the Dimension head filter screen using the two photodetector adjustment knobs located on the side of the Dimension head.
Page 185: Cantilever Tune
Tapping Mode AFM Basic Tapping Mode AFM Operation continued... 10.3.8 Cantilever Tune This section describes the steps required to find the resonance peak of the cantilever and adjust the oscillation voltage so the cantilever vibrates at an appropriate amplitude. A range of oscillation frequencies are applied to the cantilever to determine the frequency which produces the largest response (the resonance frequency).
Page 186 Tapping Mode AFM Cantilever Tune continued... Manual Cantilever Tuning With Force Modulation or Fluid Tapping applications, it may be useful to tune the cantilever manually. Note: More than one type of cantilever exists. Cantilevers can have different dimensions and different resonance frequencies. Certain parameter values, particularly the center frequency and the sweep width used in the following example, apply to a particular...
Page 187 Tapping Mode AFM Manual Cantilever Tuning continued... 7. Increase the Setpoint until the peak appears. 8. Continue to Zoom In and center the peak until the peak coincides with the vertical center line within 10 Hz. The value displayed for center frequency is now used as the resonant frequency of the cantilever.
Page 188 Tapping Mode AFM Manual Cantilever Tuning continued... 9. Specify the RMS amplitude after tuning the cantilever to its resonant frequency. The desired operating amplitude depends on the sample and other scanning conditions. Figure 10.3d Cantilever Tune Frequency Sweep Frequency Sweep Cantilever Response 0.50 V/div...
Page 189: Set Initial Scan Parameters
Tapping Mode AFM Basic Tapping Mode AFM Operation continued... 10.3.9 Set Initial Scan Parameters Scan Controls Panel In the Scan Controls panel, set the following initial scan parameters (See Figure 10.3e). 1. Set the Scan Rate to 2 Hz. 2. Set the Scan Size to 1µm. 3.
Page 190 Tapping Mode AFM Basic Tapping Mode AFM Operation continued... Other Controls Panel Figure 10.3f Suggested Other Controls Settings Feedback Controls Panel 1. Set the Integral gain to 0.5 and the Proportional gain to 0.7 (See Figure 10.3g). 2. Set the Look Ahead gain to zero. Figure 10.3g Suggested Feedback Controls Settings Rev.
Page 191: Engage
Tapping Mode AFM Basic Tapping Mode AFM Operation continued... 10.3.10Engage 1. Select Motor/Engage. A pre-engage check begins, followed by Z- stage motor motion. 2. To move to another area of the sample, execute a Withdraw command to avoid damaging the tip and scanner. 3.
Page 192: Withdraw The Tip
Tapping Mode AFM 10.4 Withdraw the Tip 1. Select Withdraw from the Motor menu. The SPM stops scanning, and ascends to the sample clearance height defined in the SPM Parameters menu. 2. Select the Stage / Load New Sample option to replace or move the the sample.
Page 193: Resonating Techniques
Tapping Mode AFM 10.5 Advanced Tapping Mode AFM Operation This section discusses the more subtle aspects involved in operating the Dimension 3100 in Tapping Mode. 10.5.1 Resonating Techniques Without a thorough understanding of principles associated with cantilever resonating techniques, you may generate distorted data. Understanding the Cantilever Tune process and the effects of real-time scan parameters is critical for effective operation of the microscope.
Page 194 Tapping Mode AFM Cantilever Oscillation continued... At Setpoint 1 the operating point is only slightly lower than the free oscillation amplitude. This has the advantage of dissipating very little energy to the sample surface. The disadvantage is that the system takes longer to recover from a given perturbation in the amplitude.
Page 195: Decreasing The Cantilever Drive Frequency10
Tapping Mode AFM Cantilever Oscillation continued... Figure 10.5b Scope Trace with High Scan Rate Trace Retrace Z Range 50.00 nm/div Scan Size - 2.50 µm/div Figure 10.5c depicts the same sample with a slight increase in the Integral gain and a twofold decrease in the Scan rate. The tip now tracks the surface when it descends into the pit as well as when it exits.
Page 196: Optimization Of Scanning Parameters
Tapping Mode AFM Decreasing the Cantilever Drive Frequency continued... The microscope produces better data in Tapping Mode when the Drive frequency is set lower than the resonance peak of the cantilever. The Drive frequency is set such that it coincides with a 1-10 percent decrease in the oscillation amplitude by setting Peak offset in the Auto Tune controls to the desired percent.
Page 197: Gain Settings
Tapping Mode AFM Data Type continued... The scan parameters required to collect good Height data are different than the optimal parameters for Amplitude data. To collect Height data while tracking the sample surface with minimal change in the tip’s oscillation amplitude, the feedback gains must be high.
Page 198 Tapping Mode AFM Scan Size, Scan Rate, and Setpoint continued... The Setpoint parameter defines the desired voltage for the feedback loop. The Setpoint voltage is constantly compared to the present RMS amplitude voltage to calculate the desired change in the piezo position. When the gain values are high, as they should be when the Data type is set to Height, the Z piezo position changes to keep the amplitude voltage close to the Setpoint;...
Page 199: Troubleshooting
Tapping Mode AFM 10.6 Troubleshooting 10.6.1 Frequency Response Plot If a peak in the frequency response plot does not appear, perform the following steps: 1. Increase Sweep width to the maximum value. 2. Increase the Drive amplitude in intervals of 200-300mV until you have reached 2-3V.
Page 200 Chapter 11 TappingMode AFM in Fluids 11.1 Overview Tapping Mode also functions in ﬂuid. This technique is available on the Dimension 3100 Scanning Probe Microscope using a ﬂuid cell tip holder in conjunction with the NanoScope IIIa controller, or with a modiﬁed NanoScope III controller with a “Fluid Tapping Mode”...
Page 201: Tappingmode Afm In Fluids
ﬂuid (See Chapter 11.2.1 Acknowledgments Digital Instruments Veeco wishes to express its appreciation to the following individuals for their assistance in preparing the following sections: Monika Fritz, Manfred Radmacher, Magdalena Benzanilla, Helen G. Hansma, Jan H. Ho, Craig B. Prater.
Page 202: Precautions
TappingMode AFM in Fluids 11.3 Precautions 11.3.1 Spillage Precautions Throughout all procedures outlined in the following sections, you will work with fluids on and around the Dimension 3100 SPM. When handling fluids, keep a quantity of filter paper and/or paper towels nearby for wicking away any spilled fluid.
Page 203 TappingMode AFM in Fluids Precautions continued... CAUTION: When imaging fluid samples, use extraordinary precautions against spillage. Fluids must not be spilled on or around the sample stage, electronics boxes, or other components containing electronic parts. Avoid spilling all corrosive fluids on exposed surfaces;...
Page 204: Basic Tapping Mode Afm In Fluids Operation
TappingMode AFM in Fluids 11.4 Basic Tapping Mode AFM in Fluids Operation The following is a general outline of basic operational procedures involved in Tapping Mode AFM in ﬂuids. For information on Tapping Mode AFM in air, Chapter 10. For more detailed instructions on head, cantilever, and sample preparation, refer to Chapter 7 of this manual.
Page 205: Adjust Photodetector
TappingMode AFM in Fluids Basic Tapping Mode in Fluids Operation continued... 11.4.5 Adjust Photodetector 1. Adjust the photodetector so that the red dot moves toward the center of the laser alignment window using the two photodetector adjustment knobs located on the side of the Dimension head. 2.
Page 206: Cantilever Tune
TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.8 Cantilever Tune This section describes the steps required to find the resonance peak of the cantilever and adjust the oscillation voltage so the cantilever vibrates at an appropriate amplitude. A range of oscillation frequencies are applied to the cantilever to determine the frequency which produces the largest response (the resonance frequency).
Page 207 TappingMode AFM in Fluids Cantilever Tune continued... Manual Cantilever Tuning With Force Modulation or Fluid Tapping applications, it may be useful to tune the cantilever manually. Note: More than one type of cantilever exists. Cantilevers can have different dimensions and different resonance frequencies.
Page 208 TappingMode AFM in Fluids Manual Cantilever Tuning continued... 7. Increase the Setpoint until the peak appears. 8. Continue to Zoom In and center the peak until the peak coincides with the vertical center line within 10 Hz. The value displayed for center frequency is now used as the resonant frequency of the cantilever.
Page 209 TappingMode AFM in Fluids Manual Cantilever Tuning continued... Figure 11.4c Cantilever Tune Control Panels for Interleave Controls 9. Specify the RMS amplitude after tuning the cantilever to its resonant frequency. The desired operating amplitude depends on the sample and other scanning conditions. Figure 11.4d Cantilever Tune Frequency Sweep Frequency Sweep Cantilever...
Page 210: Set Initial Scan Parameters
TappingMode AFM in Fluids Manual Cantilever Tuning continued... 10. Click . The parameters set in the Cantilever Tune control panel appear in the Real-time control panel. 11. Click on to exit the Cantilever Tune command and leave CANCEL the parameters unchanged. 11.4.9 Set Initial Scan Parameters Scan Controls Panel In the Scan Controls panel, set the following initial scan parameters...
Page 211 TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... Other Controls Panel 1. Set the Amplitude Setpoint to 2.5 volts on the Other Controls panel before imaging (See Figure 11.4f). Figure 11.4f Suggested Other Controls Settings during Tapping Mode Feedback Controls Panel 1.
Page 212: Engage
TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.10Engage 1. Select Motor/Engage. A pre-engage check begins, followed by Z- stage motor motion. 2. To move to another area of the sample, execute a Withdraw command to avoid damaging the tip and scanner. 3.
Page 213: Attach Protective Skirt
TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.13Attach Protective Skirt 1. Attach the protective skirt to the fluid cell by gently sliding it over the periphery of the cell. 11.4.14Plug Fluid Cell in Dimension Head 1. Plug the fluid cell into the end of the (unplugged) Dimension head. 2.
Page 214: Prepare The Sample For Imaging
TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.16Prepare the Sample for Imaging Set the sample on the microscope’s stage. For Tapping Mode in fluid, use a petri dish, or if the sample is hydrophobic, image the surface within a drop of fluid.
Page 215 TappingMode AFM in Fluids Remount the Dimension Head continued... Ideally, the Dimension head should come to rest in its mount at a level where the tip is just above the level of the fluid. If the head rests too low in its mount, use either of the following methods to raise the mount: •...
Page 216: Verify That The Microscope Is Dry
TappingMode AFM in Fluids Remount the Dimension Head continued... At this point, the ﬂuid cell should be prepared for Tapping Mode imaging: the cantilever is aligned with the laser, the sample is prepared and the tip is immersed in ﬂuid and positioned one millimeter above the sample surface.
Page 217 TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.21Cantilever Tune Cantilever Tune is the counterpart to the step used in standard (air) Tapping Mode to find the resonant frequency of the cantilever. In liquid, however, the cantilever resonance is largely damped. Instead, this step is used to find an oscillating frequency specific to the fluid and cantilever holder where the cantilever can be driven into oscillation.
Page 218 TappingMode AFM in Fluids Basic Tapping Mode AFM Operation continued... 11.4.22Adjust the Drive amplitude Adjust the Drive amplitude until obtaining an RMS Amplitude of 0.3-0.6 volts. This value has produced good results for protein samples like RNA polymerase and lysozyme. In general, larger RMS amplitudes (approximately 2 volts) work better for taller samples such as cells.
Page 219 TappingMode AFM in Fluids Adjust the Setpoint continued... Note: The slope of the Force Calibration curve shows the sensitivity of the ﬂuid Tapping Mode measurement. In general higher sensitivities will give better image quality. If the sensitivity is very poor, consider changing to a different drive frequency or check the mounting of the sample and ﬂuid cell.
Page 220 TappingMode AFM in Fluids 11.5 Troubleshooting 11.5.1 Cantilever Tune Plot Looks Bad Become familiar with the characteristics of the Cantilever Tune plot when you successfully obtain good images. You may use the Cantilever Tune plot as a diagnostic tool. If the plot looks substantially different from previous successful experiments, there may be a problem with the fluid cell or the cantilever may be loose in its holder.
Page 221 TappingMode AFM in Fluids Troubleshooting continued... 11.5.4 Unable to Locate Particulate Samples Some particulate samples (i.e., proteins) may prove difficult to find directly beneath a cantilever if the cantilever remains stationary during a diffusion or settling period. This may be due to the fact that some types of particulates are more attracted to the cantilever than to the substrate intended to support them.
Page 222 Chapter 12 Lateral Force Mode 12.1 Overview The Dimension 3100 Scanning Probe Microscope (SPM) is capable of measuring frictional forces on sample surfaces using a special feature known as Lateral Force Microscopy (LFM). With LFM, the cantilever scans laterally (perpendicular to their lengths). The cantilever torques more while transiting high-friction sites while low-friction sites tend to torque the cantilever less.
Page 223 Lateral Force Mode 12.2 Basic LFM Operation The following is a general outline of basic operational procedures involved in Lateral Force Mode (LFM). For more detailed instructions, refer to Chapter 7 of this manual. To run the microscope in LFM, set up the system as you would for Contact Mode AFM with the following exceptions: assign the Channel 1 image to Data Type: Height, set the Channel 2 image to Data Type: Friction, and set the Scan angle to 90 degrees.
Page 224 Lateral Force Mode Basic LFM Operation continued... 12.2.5 Adjust Photodetector 1. Adjust the photodetector so that the red dot moves toward the center of the Dimension head filter screen using the two photodetector adjustment knobs located on the side of the Dimension head.
Page 225: Set Initial Scan Parameters
Lateral Force Mode Basic LFM Operation continued... 12.2.8 Set Initial Scan Parameters Scan Controls Panel In the Scan Controls panel, set the following initial scan parameters (See Figure 12.2a). 1. Set the Scan Rate to 2 Hz. 2. Set the Scan Size to 1µm. 3.
Page 226 Lateral Force Mode Set Initial Scan Parameters continued... Other Controls Panel Figure 12.2b Suggested Other Controls Settings Feedback Controls Panel 1. Set the Integral gain to 2.0 and the Proportional gain to 4.0 (See Figure 12.2c). Figure 12.2c Suggested Feedback Controls Settings Rev.
Page 227 Lateral Force Mode Set Initial Scan Parameters continued... Channel Panels 1 and 2 1. In the Channel 1 panel, set Data type to Height (See Figure 12.2d). 2. Set Z range to a reasonable value for the sample. Note: For example, for a 200 µm step height calibration sample, a reasonable Z range setting is 300 µm initially.
Page 228 Lateral Force Mode Basic LFM Operation continued... 12.2.9 Engage 1. Select Motor/Engage. A pre-engage check begins, followed by Z- stage motor motion. 2. To move to another area of the sample, execute a Withdraw command to avoid damaging the tip and scanner. 3.
Page 229: Advanced Lfm Operation
Lateral Force Mode 12.3 Advanced LFM Operation The following sections provide more detailed information concerning the operation of LFM in friction mode. 12.3.1 Optimal Setup for Frictional Measurements Scan Direction The cantilever is most susceptible to frictional effects when the scan direction runs perpendicular to the major axis of the cantilever as shown Figure 12.3a.
Page 230: Identification Of Friction
Lateral Force Mode Scan Direction continued... The Contact Mode setpoint voltage slightly adjusts the gain of the lateral force signal. By increasing the setpoint, the contact force applied will increase, and so will the frictional or torsional forces in an approximately linear fashion.
Page 231 Lateral Force Mode Identiﬁcation of Friction continued... Scope Mode The LFM user should be familiar with the Scope Mode of viewing the data. When using Scope Mode, verify that the Rounding parameter in the Scanner Parameters window (selected with the Microscope/ Calibrate / Scanner command) is set to zero.
Page 232 Lateral Force Mode Scope Mode continued... The trace and retrace signals move closer together when regions of low friction are encountered. Figure 12.3b shows a theorized example of the scope trace for a sample with two areas of relatively low friction. Note how the distance between the traces decreases over low-friction areas as the torsional deﬂection of the cantilever decreases for both trace directions.
Page 233: Identification Of Forces Other Than Friction12
Lateral Force Mode Advanced LFM Operation continued... 12.3.3 Identiﬁcation of Forces Other Than Friction There are a few phenomena that will produce false features in friction data on the auxiliary data channel. Tripping Tripping occurs when the probe encounters a step on the sample surface. The side of the probe strikes the feature, causing the cantilever to twist.
Page 234 Lateral Force Mode Identiﬁcation of Forces Other Than Friction continued... Rounding Use the Calibrate command under the Microscope pop-down menu in Real-time to set the Rounding parameter to zero before looking at frictional data. In Scope Mode, the Rounding function shifts the trace and retrace lines horizontally which makes it difﬁcult to directly compare the two lines.
Page 235: Example Of Frictional Data
Lateral Force Mode Advanced LFM Operation continued... 12.3.4 Example of Frictional Data Rarely will samples produce traces like the ones shown in Figure 12.3b Figure 12.3c. Typically, combinations of the features discussed above will be present in each trace and retrace. For example, Figure 12.3d depicts the data Scope Mode might generate for a sample with two low-friction areas...
Page 236 Chapter 13 Force Imaging 13.1 Overview Force plots measure tip-sample interactions and determine optimal setpoints. More recently, microscopists have plotted force measurements across entire surfaces to reveal new information about the sample. This area of scanning probe microscopy promises to open new chapters in materials science, biology and other investigative areas.
Page 237: Force Imaging
Force Imaging 13.2 Force Plots–An Analogy A force plot is an observation of tip-sample interactions which yields information regarding the sample and tip. By way of analogy, suppose a materials researcher must determine how powerful two different types of magnets are. One magnet is made of iron, the other is a stronger, so-called “rare earth”...
Page 238 Force Imaging Force Plots–An Analogy continued... Figure 13.2a Comparative Index of Pulling Forces H = 11 cm F = 0 kg H = 10 cm (0 N) F =.08 kg H = 9 cm (0.8 N) F =.12 kg H = 8 cm (1.2 N) F =.30 kg H = 7 cm...
Page 239 Force Imaging Force Plots–An Analogy continued... Figure 13.2b Pulling Forces Graph +10.0 N +1.0 kg Magnet #1 Magnet #2 -1.0 kg -10.0 N Height above steel plate (cm) This oversimpliﬁed model depicts activity between SPM tips and various materials. In reality, SPM force plots reveal far more. For example, by combining force curves at regularly spaced intervals across the sample, you may generate a force map of the sample’s electric properties, elastic modulus, and chemical bonding strengths.
Page 240: Force Calibration
Force Imaging 13.3 Force Calibration The Force Calibration command in the View / Force Mode / Calibration menu allows you to quickly check the interaction between the cantilever and the sample surface. In Force Calibration mode, the X and Y voltages applied to the piezo tube are held at zero and a triangular waveform similar to the one depicted in Figure 13.3a...
Page 241: Example Force Plot
Force Imaging Force Calibration continued... Figure 13.3b Piezo Travel in Force Calibration Mode Retracted Extended Z Piezo (Distance fixed by head height) -220 V +220 V Sample Travel distance defined by Z scan size parameter As the piezo moves the tip up and down, the cantilever-deﬂection signal from the photodiode is monitored.
Page 242 Force Imaging Example Force Plot continued... Figure 13.3c Anatomy of a Force Curve Piezo extension Piezo retraction Piezo extends; tip descends. No contact with surface yet. Attractive forces near surface pull tip down. As tip presses into the surface, cantilever bends upward. Piezo retracts;...
Page 243 Force Imaging Example Force Plot continued... The horizontal axis plots the tip movement relative to the sample. By extending the Z-axis piezo crystal, the tip descends toward the sample and the tip-sample distance decreases. The descent plots from right-to-left in yellow on the NanoScope display monitor.
Page 244 Force Imaging Example Force Plot continued... Material Elasticity It is possible to extract information regarding the elasticity of the material by studying force curves. In the graph above, the tip is in constant contact with the sample between points 2 and 4. As the tip presses further into the sample material, the cantilever ﬂexes.
Page 245: Force Calibration Control Panels
Force Imaging 13.4 Force Calibration Control Panels The control panel window (See Figure 13.4a) manipulates the microscope in Force Calibration mode and displays on the control monitor. The parameters control the start position and amplitude of the triangle wave applied to the Z piezo.
Page 246: Main Controls (Ramp Controls)
Force Imaging Force Calibration Control Panels continued... 13.4.1 Main Controls (Ramp Controls) Z Scan Start This parameter deﬁnes the maximum voltage applied to the Z electrodes of the piezo during force calibration operation. The triangular waveform shown in Figure 13.3a displaces up and down in relation to the value of Z scan start.
Page 247: Main Controls (Display)
Force Imaging Main Controls (Ramp Controls) continued... Average Count This parameter deﬁnes the number of Force Calibration scans taken to average the display of the Force Calibration graph. Set to 1 unless the user needs to reduce noise. Otherwise, set between 1 and 1024. 13.4.2 Main Controls (Display) Units This item selects the units, either metric lengths or volts, that deﬁne the...
Page 248: Feedback Controls
Force Imaging Channel 1, 2, 3 Panels continued... Deﬂection Sensitivity This item relates the cantilever deﬂection signal to the Z travel of the piezo. It equals the slope of the deﬂection versus Z voltage line when the tip is in contact with the sample as shown in Figure 13.3c.
Page 249 Force Imaging Feedback Controls continued... Amplitude Setpoint (Tapping Mode AFM) The RMS value of the cantilever deﬂection voltage maintained by the feedback loop in Real-time mode can be adjusted by changing Setpoint. In the TappingMode force plot mode, setpoint deﬁnes the centerline of the vertical, “Tip Amplitude”...
Page 250: Scan Mode
Force Imaging Feedback Controls continued... Drive Amplitude (Tapping Mode AFM) This parameter deﬁnes the amplitude of the voltage applied to the piezo system which drives the cantilever vibration. Changing the value of this parameter in Force Plot mode also changes the Drive amplitude parameter in the Real-time control panel.
Page 251 Force Imaging Scan Mode continued... Figure 13.4a Absolute and Relative Triggers Total Force The plots in Figure 13.4a show the effect of drift on each of the two trigger types. The plot series shown on the right side of Figure 13.4a utilizes a Relative trigger and maintains force at a constant level deﬁned by the Trig threshold parameter.
Page 252: Menu Bar Commands
Force Imaging Force Calibration Control Panels continued... 13.4.6 Menu Bar Commands Capture The Capture button stores the force plot for Off-line viewing. Probe Menu Commands These commands allow for highly controlled tip movement designed to prevent damage to the tip. Each of these commands has an icon to access directly from the menu bar.
Page 253 Force Imaging Stepper Motor continued... CAUTION: Do not use the Enable Motion Keys control to move the tip down if the tip is already located on the surface of the sample; damage will result. ATTENTION: Si la pointe est engagée sur la surface de l’échantillon, n’UTILISEZ pas la commande "Engage Motion Keys"...
Page 254: Force Calibration (Contact Mode Afm)13-19
Force Imaging 13.5 Force Calibration (Contact Mode AFM) 13.5.1 Obtaining a Good Force Curve Figure 13.5a Typical Force Calibration Curve antilever Off Surface etpoint csmin Piezo Voltage (Scan start) (Scan start - Scan size) Slope = Volts of Deflection/nanometers (or volts) of piezo travel Figure 13.5b Piezo Positions for Typical Force Curve Down Down...
Page 255 Force Imaging Obtaining a Good Force Curve continued... The basic approach to obtaining a good force curve entails adjusting the Z motion of the piezo relative to the sample (with the Z scan start and Ramp size parameters) and shifting the graph (with the Setpoint parameter) so the pull-off point of the tip displays on the graph.
Page 256 440 volts with the Setpoint at -10 volts and the pull-off cannot be seen, see Section 13.5.2 that follows. If that does not help, call Digital Instruments Veeco. Examples for 90-µm G Scanners Figure 13.5c illustrates an initial force curve for a 90-micron scanner before adjustment.
Page 257: Helpful Suggestions
Force Imaging Obtaining a Good Force Curve continued... Figure 13.5d Adjusted Force Curve for 90 µm Scanner Retracting Extending Deflection 0.48 V/div Setpoint Z Position - 10.00 V/div 13.5.2 Helpful Suggestions To minimize or calculate the contact force between the tip and sample, it is important to obtain a good force curve;...
Page 258 Force Imaging Helpful Suggestions continued... Figure 13.5e False Engagement (G Scanner) Retracting Extending Deflection 0.48 V/div Setpoint Z Position - 9.27 V/div Figure 13.5f False Engagement (J Scanner) .25V/div Rev. C Dimension 3100 Manual 13-245...
Page 259 Force Imaging Helpful Suggestions continued... Motor Control Motor Control / Tip Up and Tip Down buttons provide coarse adjustment of Z center voltage. With these buttons the SPM head moves vertically. The Z stage stepper motor causes the Z piezo to adjust according to the movement.
Page 260: Advanced Techniques
Force Imaging Force Calibration (Contact Mode AFM) continued... 13.5.3 Advanced Techniques Sensitivity Determination Sensitivity represents the cantilever deﬂection signal versus voltage applied to the piezo and is normally set from the Force Calibration mode. You must calibrate the sensitivity before you can generate accurate deﬂection data.
Page 261 Force Imaging Sensitivity Determination continued... Sensitivity can be expressed in terms of the photodiode voltage versus the distance traveled by the piezo, or the voltage applied to the piezo, depending on the setting of the Units parameter. If you calibrate Sensitivity on a material much stiffer than the cantilever, it measures the value of the AFM optical lever sensitivity (i.e., how many volts of deﬂection signal are produced by a given deﬂection of the cantilever...
Page 262 Force Imaging Force Minimization continued... In practice, V CSmin must be a little below the centerline because V CSmin is the point where the cantilever pulls off the surface and operation at this deﬂection is unstable. Changing the Setpoint option in the Feedback Controls panel changes the setting of the Setpoint parameter in its Real-time counterpart when you exit the Force Calibration routine.
Page 263 Force Imaging Contact Force continued... Figure 13.5h Computing Contact Force Deflection 1.0 V / div 7.6 div Setpoint CSmin 3532 Z Position (10.0 V / div) k ∆Z Recalling that contact force is equal to , you can calculate the contact force from the sample plot above.
Page 264 Force Imaging Contact Force continued... Force calculations are not as straightforward on images captured with the Data type set to Deﬂection. When collecting deﬂection data, the feedback gains are set low so the sample stays at a constant position relative to the cantilever holder. In this case, the cantilever deﬂection (and therefore the force applied to the sample) varies as the tip encounters features on the surface.
Page 265: Force Calibration (Tapping Mode)
Force Imaging 13.6 Force Calibration (Tapping Mode) CAUTION: Because TappingMode cantilevers are relatively stiff, Force Mode can potentially damage the tip and/or surface. Before using Force Calibration, read and understand the following section. Force Calibration allows the imaging of forces between the tip and surface, including chemical bonds, electrostatic forces, surface tension and magnetic forces.
Page 266 Force Imaging Force Plots continued... Figure 13.6a Piezo Extension Versus RMS Amplitude and Deﬂection Piezo extension Piezo retraction Tip is clear of the surface Figure 13.6a illustrates a two-channel Tapping Mode force plot. The vertical axes of the graphs represent the RMS amplitude (top) and deflection signal (bottom) of the cantilever.
Page 267 Force Imaging Force Plots continued... Dividing the change in amplitude by the change in Z piezo position gives the responsiveness of the tip-sample interaction, displayed as a Sensitivity value in the Main Controls menu. You can determine this value by using the mouse to draw a line parallel to the plot’s slope in the region between points 1 and 2 where the tip amplitude dampens.
Page 268: Obtaining A Force Plot (Tapping Mode)13-33
Force Imaging Obtaining a Force Plot (Tapping Mode) continued... 13.6.2 Obtaining a Force Plot (Tapping Mode) CAUTION: Use Force Calibration with caution or when it is important to obtain experimental information shown in Force Calibration. When using stiff TappingMode cantilevers, it is easy to blunt the tip with excess contact force during Force Calibration measurements.
Page 269 Force Imaging Obtaining a Force Plot (Tapping Mode) continued... Note: Collectively, these panels control tip- sample interactions. If any panels do not appear, pull down the Panels menu to select them. The top menu bar offers a number of tip approach options detailed in the Command Reference Manual.
Page 270: High Contact Force
Force Imaging Obtaining a Force Plot (Tapping Mode) continued... 6. Set the Data type parameter to Amplitude under the Channel 1 panel. 7. Adjust the Z scan start parameter to obtain a satisfactory force plot using the left-right arrow keys. 13.6.3 High Contact Force Figure 13.6c shows a curve produced when the tip pushes too far into the...
Page 271: Plotting Phase Versus Frequency In Tapping Mode
Precise interpretation of force plots using phase versus frequency remains under investigation. Contact Digital Instruments Veeco for more information. Tip Selection You may use virtually any Tapping Mode tip to obtain Tapping Mode force plots;...
Page 272: Force Modulation
Force Imaging 13.7 Force Modulation 13.7.1 Introduction This section describes the operation of force modulation mode, which you can use to image local sample stiffness or elasticity. This method is useful for imaging composite materials or soft samples on hard substrates where you can obtain contrast between regions of different elasticity.
Page 273: Selecting A Force Modulation Tip
It may take experimentation to ﬁnd a cantilever that matches the sample's requirements. For rubber and plastic samples Digital Instruments Veeco recommends using 225 µm long force modulation (Model # FESP) silicon cantilevers. For more delicate, biological samples, use 450 µm long silicon cantilevers or silicon nitride cantilevers.
Page 274: Operating Principle
Force Imaging Selecting a Force Modulation Tip continued... Digital Instruments Veeco offers cantilevers with a wide range of spring constants (See Table 13.7a). Choosing a tip depends upon how hard the sample is. For samples of known hardness, try using a stiffer cantilever then working toward softer cantilevers.
Page 275: Force Modulation Procedure
Force Imaging Force Modulation Procedure continued... 13.7.4 Force Modulation Procedure This section gives instructions for operating in Force Modulation mode. Choose the Force Modulation profile under Microscope/Profile. 2. Verify that the Microscope mode parameter in the Other Controls panel is set to Tapping and the SPM Feedback in the Feedback Controls panel is set to TM Deflect.
Page 276 Force Imaging Force Modulation Procedure continued... Cantilever Oscillation The cantilever oscillates by a small piezoelectric bimorph mounted in the cantilever holder. For Force Modulation, oscillate the bimorph at or near its resonant frequency. The bimorph resonance frequency is usually the largest peak in the 5-30kHz range. This ensures the cantilever moves with sufﬁcient amplitude to produce elasticity contrast.
Page 277 Force Imaging Force Modulation Procedure continued... Figure 13.7a Auto Tune Controls Panel 3. Set the Drive frequency to 15 kHz and the Sweep width to 30 kHz. 4. Set the Drive amplitude at 5 V to start. You can readjust this value later.
Page 278 Force Imaging Force Modulation Procedure continued... Figure 13.7b Typical Frequency Sweep Plot Peaks due to bimorph Peaks due to cantilever Note: The large drive amplitude is necessary because peaks are smaller than normally seen during Tapping Mode operation. This is due to the cantilever not at resonance;...
Page 279 Force Imaging Force Modulation Procedure continued... 9. When the peak centers and the zoom width is adjusted, click the right mouse button twice to automatically adjust the Drive Frequency and Sweep width, and zoom in on the selected peak. 10. Use the Offset command on the display monitor to center the peak in the graph.
Page 280 Force Imaging Force Modulation Procedure continued... Figure 13.7c Correctly Tuned Force Modulation Frequency Note: You may also change the Drive Frequency by clicking on the Drive Frequency parameter on the control monitor’s Feedback Controls panel, and entering a new value. ATTENTION: Bimorph resonance should be between 5 kHz and 30 kHz.
Page 281 Force Imaging Force Modulation Procedure continued... 14. For the Channel 1 image, select Data Type: Height. Select Data Type: Amplitude for the Channel 2 image. The multi-image capability views both the topography data and the force modulation (elasticity) data at the same time. Note: The Data Type chosen for the Channel 1 image displays when using the Browse command.
Page 282 Force Imaging Force Modulation Procedure continued... 20. Increase the Setpoint until the cantilever touches the surface, and an image appears. Note: If you adjust the Setpoint very close to the pull-off value, imaging perform with the smallest and least damaging force. However, in this condition imaging may be more unstable, as the cantilever may pull off the surface unexpectedly.
Page 283 Force Imaging Force Modulation Procedure continued... Procedure for Optimizing Drive Amplitude a. Start with a small Drive amplitude value of 100 mV. b. Increase the Drive amplitude with the right arrow keys or type in new values. The contrast of the Amplitude (force modulation) image increases.
Page 284: Notes About Artifacts
Force Imaging Force Modulation Procedure continued... Sometimes an oscillation that appears in the data will be due to “aliasing” as described in the next section. If you cannot adjust gains to eliminate unwanted oscillations without compromising the height image’s quality, see Section 13.7.5.
Page 285 Force Imaging Notes About Artifacts continued... Frictional Effects Because the cantilever is held at an angle to the sample surface, the cantilever tip will slide laterally (“skate”) as the tip pushes into the sample (See Figure 13.7d). The amplitude of cantilever motion is affected by differences in friction between two different materials.
Page 286 Force Imaging Notes About Artifacts continued... Figure 13.7d Friction on Force Modulation Images tip moves down and left substrate moves down Effect of friction on force modulation images Tip Shape The amount of indentation into a surface for a given applied force depends on the shape of the cantilever tip.
Page 287: Force Modulation With 'Negative Liftmode'13
Best results using negative LiftMode are obtained on relatively smooth samples (< 500 nm vertical features); however, Digital Instruments Veeco encourages experimenting with this technique on rougher surfaces as well. A general procedure for Force Modulation with "negative LiftMode" is...
Page 288: Set Interleave Controls
Force Imaging Find Resonance of the Bimorph continued... 6. Set an initial Sweep width of 10 KHz and a Drive frequency of 10 kHz. Determine the Drive frequency. 7. Verify that the Drive frequency parameter in the Interleave Controls panels is set to the bimorph’s resonant frequency. 8.
Page 289: Obtain A Negative Liftmode Force Modulation Image
Force Imaging Obtain A Tapping Mode Image continued... 6. Verify that all Scan controls and Feedback Controls parameters are set for obtaining a Tapping Mode image. 7. Set the Channel 1 panel Data type parameter to Height. 8. Set the Line direction to Retrace and enter an appropriate Data Scale value for your sample.
Page 290 Force Imaging Obtain a Negative LiftMode Force Modulation Image continued... 4. Adjust the interleaved Drive amplitude, Interleave Controls and Lift scan height until the force modulation image is optimized. This may require some experimentation. Note: If you see a lot of contrast in the amplitude image before reaching the surface, try reducing the Integral and Proportional gains.
Page 291: Force Volume
XY positions during a single image scan, correlation of surface topography to interaction force, better quantization of the interaction force, and new methods of analysis. For detailed information regarding force volume imaging, contact Digital Instruments Veeco for a copy of Support Note 240A, Force Volume. 13-278 Dimension 3100 Manual Rev.
Page 292: Overview
Chapter 14 Interleave Scanning 14.1 Overview Interleave Scanning is an advanced feature of the Nanoscope III software which allows simultaneous acquisition of two data types. To achieve this, Interleave Scanning alters the scan pattern of the piezo. After each main scan line trace and retrace (in which topography is typically measured), a second interleave trace and retrace produces an image concurrently with the main scan.
Page 293: Interleave Scanning
Interleave Scanning 14.2 Interleave Scanning Typical applications of Interleave Scanning include Magnetic Force Microscopy (MFM) and Electric Force Microscopy (EFM) measurements. During the interleave scan in Lift Mode™, feedback is disabled and the tip lifts to a user-selected height above the surface to perform far ﬁeld measurements such as MFM and EFM.
Page 294: Head, Cantilever And Sample Preparation14-3
Interleave Scanning 14.3.3 Head, Cantilever and Sample Preparation 1. Install an etched single crystal silicon tip onto an AFM cantilever holder (See Chapter 2. Load the cantilever holder with installed tip onto the scanner tube of the Dimension SPM head. 14.3.4 Align Laser 1.
Page 295: Focus Surface
Interleave Scanning Basic Interleave Scanning Operation continued... 14.3.7 Focus Surface 1. Select Stage/Focus Surface or click on the Focus Surface icon. 2. Focus on the sample surface using the trackball with the bottom left button depressed. 14.3.8 Set Initial Scan Parameters Scan Controls Panel In the Scan Controls panel, set the following initial scan parameters (See...
Page 296 Interleave Scanning Set Initial Scan Parameters continued... Other Controls Panel Figure 14.3b Suggested Other Controls Settings Feedback Controls Panel 1. Set the Integral gain to 0.5 and the Proportional gain to 0.7 (See Figure 14.3c). 2. Set the Look Ahead gain to zero. Figure 14.3c Suggested Feedback Controls Settings Rev.
Page 297: Engage
Interleave Scanning Basic Interleave Scanning Operation continued... 14.3.9 Engage 1. Select Motor/Engage. A pre-engage check begins, followed by Z- stage motor motion. 2. To move to another area of the sample, execute a Withdraw command to avoid damaging the tip and scanner. 3.
Page 298: Lift Mode
Interleave Scanning Engage continued... In Interleave mode, the system ﬁrst performs a standard trace and retrace with the Main Feedback Controls in effect. The tip moves at half the normal rate in the slow scan direction. As shown on the right in Figure 14.3d, an additional trace and retrace are then performed with the Interleave Feedback Controls...
Page 299: Basic Lift Mode Operation
Interleave Scanning 14.4 Interleave Scanning/Lift Mode Operation 14.4.1 Basic Lift Mode Operation These instructions apply to STM, Contact AFM and Tapping Mode modes. You must be familiar with using Tapping Mode or Contact AFM to obtain good images of surface topography. See Chapter 15 for speciﬁc examples using MFM.
Page 300 Interleave Scanning Basic Lift Mode Operation continued... 4. Choose the Interleave mode (Interleave, Linear or Lift) appropriate for the measurements to be performed and set the Interleave Controls accordingly. Note: When using Tapping Mode, the Drive amplitude, Drive frequency, Gains, and Setpoint can be set differently in the Interleave Controls panel than in the main Feedback Controls panel.
Page 301: Advanced Lift Mode Operation
Interleave Scanning 14.5 Advanced Lift Mode Operation 14.5.1 Lift scan height The lateral and vertical resolutions of the Lift data depend on the distance between tip and sample. The lower the tip, the higher the resolution. However, the Lift scan height must be high enough that the tip does not contact the sample during the Lift trace and retrace.
Page 302: Lift Mode With Tapping Mode
Interleave Scanning 14.6 Lift Mode with Tapping Mode There are additional considerations when using Lift Mode with Tapping Mode. 14.6.1 Main Drive Amplitude and Frequency selection As usual, these parameters are set in Cantilever Tune before engaging. It is helpful to keep in mind the measurements to be done in Lift Mode when setting these values.
Page 303 Interleave Scanning Interleave Drive Amplitude and Frequency Selection continued... CAUTION: Set this parameter to a small value before engaging to avoid possibly of striking the surface and harming the tip. ATTENTION: Lors d’un travail enmode intercalé (Interleave Mode) vériﬁer que la valeur de tension appliquée à l’oscillateur piézo- électrique est inférieure à...
Page 304: Magnetic Force Microscopy
Chapter 14. Please review those sections prior to attempting MFM. Best results will be obtained with the Digital Instruments Veeco Extender™ Electronics Module. This hardware unit allows phase detection and frequency modulation for optimal MFM imaging. Speciﬁcally, this chapter discusses the following topics: •...
Page 305: Magnetic Force Microscopy
Magnetic Force Microscopy 15.2 Magnetic Force Microscopy In MFM, a tapping cantilever equipped with a special tip ﬁrst scans over the surface of the sample to obtain topographic information. Using LiftMode as shown in Figure 15.2a, the tip then raises just above the sample surface. The surface topography is scanned and monitored for the inﬂuence of magnetic forces.
Page 306: Amplitude Detection Techniques
A more extensive discussion of force gradient detection and MFM imaging is given in the reprint Magnetic Force Microscopy: Recent Advances and Applications. Contact Digital Instruments Veeco to obtain a copy. Figure 15.2b Extender™ Electronics Module Rev.
Page 307: Basic Mfm Operation
MFM image of a standard magnetic sample (metal-evaporated video tape). Standard tape samples are provided with purchase of MFM probes, and can be obtained free of charge from Digital Instruments Veeco. Other samples can also be used; however, you will not have the benefit of comparing your results with the images shown here.
Page 308 For MFM procedures, NanoProbe™ magnetic coated tips are required. Various kinds of MFM probes are available for specific applications; contact Digital Instruments Veeco for more information. For specific information regarding Tapping Mode and Interleave Scanning please refer to Chapter 10 Chapter 14 respectively.
Page 309 Magnetic Force Microscopy Magnetic Force Microscopy Procedure continued... 3. Set up the AFM for Tapping Mode operation (See Chapter 10). 4. In all Channel panels, set the Highpass and Lowpass filters to Off. 5. Set the Rounding parameter in the Microscope / Calibrate / Scanner window to zero (0).
Page 310 Magnetic Force Microscopy Magnetic Force Microscopy Procedure continued... Setting a Drive Frequency for Phase Detection The Drive frequency should be set to the center of the cantilever resonance, as shown in Figure 15.3a. This occurs automatically if using AutoTune. Figure 15.3a Cantilever Tune for Phase Detection and Frequency Modulation To correctly track the cantilever phase, the Phase offset parameter must be adjusted.
Page 311 Magnetic Force Microscopy Setting a Drive Frequency for Phase Detection continued... Note: The Extender electronics give a measure of the phase lag of the cantilever oscillation relative to the piezo drive. This measurement is monotonic versus frequency as is the true phase lag in degrees.
Page 312 Magnetic Force Microscopy Setting a Drive Frequency for Amplitude Detection continued... Note: As the tip oscillates above the sample, a gradient in the magnetic force will shift the resonance frequency f (See Figure 15.3c). Tracking the variations in oscillation amplitude while in LiftMode yields an image of the magnetic force gradients.
Page 313 Magnetic Force Microscopy Setting a Drive Frequency for Amplitude Detection continued... 4. Select an appropriate Target Amplitude (approximately 2 volts) using Auto Tune to adjust the Drive Amplitude so that the RMS voltage response of the photodetector is approximately 2 volts before tuning.
Page 314 Magnetic Force Microscopy Setting a Drive Frequency for Amplitude Detection continued... Figure 15.3e Topographic (left) and Magnetic Force Gradient Image (right) Note: The MFM data displays in Channel 2; however, the parameter settings are different depending on whether Phase Detection or Amplitude Detection is being used Phase Detection 1.
Page 315 Magnetic Force Microscopy Magnetic Force Microscopy Procedure continued... Amplitude Detection 1. Set the Channel 2 image Data type to Amplitude, Z range to 1 nm, and Line direction to Retrace. 2. Change Interleave mode to Enable to invoke LiftMode. 3. Set the Channel 2 Scan line to Interleave to display the interleaved data.
Page 316: Advanced Mfm Operation
Magnetic Force Microscopy 15.4 Advanced MFM Operation 15.4.1 Lift Scan Height and Magnetic Imaging Resolution The most important parameter affecting imaging resolution is Lift scan height. The range of 10–200 nm is most useful. In general, MFM resolution is roughly equal to the lift height. Smaller Lift Scan heights give better resolution;...
Page 317: Linear Lift
Magnetic Force Microscopy Advanced MFM Operation continued... Figure 15.4a High-resolution Magnetic Force Gradient Image 15.4.2 Linear Lift Linear Lift works well for measuring topography on samples by fitting the scan line to the surface and lifting a user determined height above the sample to capture the image of the sample.
Page 318: Drive Amplitude
Magnetic Force Microscopy Advanced MFM Operation continued... 15.4.4 Drive Amplitude For MFM, of particular use is the Interleave Drive Amplitude. This parameter can affect a magnetic force image in a variety of ways. • Increasing the Drive Amplitude can improve the signal-to- noise ratio when using phase detection or frequency modulation.
Page 319 Drive Amplitude between main and Interleave scanning. This can interfere with very fast rates (> a few Hz). The ﬁlter can be disabled easily; contact Digital Instruments Veeco technical support for more information. 15-306 Dimension 3100 Manual...
Page 320 Magnetic Force Microscopy Drive Amplitude continued... Setpoint For the most reproducible results, it is best to use a consistent setpoint. In LiftMode, the total tip-sample distance h is the sum of the average tip-sample distance in Tapping Mode h , and the lift scan height h lift (See Figure...
Page 321: Installation Of Extender Electronics Module15
Magnetic Force Microscopy 15.5 Installation of Extender Electronics Module In Spring of 1994, Digital Instruments Veeco began making available its Extender Electronics Module (sometimes referred to as “phase box” or “phase extender”) for customers wanting phase detection and frequency modulation MFM.
Page 322 STM and AFM use, a total of six ﬁles are required. Note: Due to the many Digital Instruments Veeco microscope systems available, the variety of scanners, when the system was purchased, and the system’s history of software updates, not all systems have ﬁles with...
Page 323 Magnetic Force Microscopy Microscope Parameter Files continued... Note: When closing the SYSTEM.PAR ﬁle after viewing it, if you are asked to SAVE the ﬁle or to SAVE CHANGES, be sure to say No. To modify the ﬁles on a Dimension system, locate the proper /SPM/EQUIP ﬁle in the directory on your computer.
Page 324 1. Extender-compatible microscope electronics are required to permit operation of the phase detection extender option. Standard electronics on these microscopes require hardware upgrades. Consult your Digital Instruments Veeco sales representative for details. 2. Turn off the power to the NanoScope controller whenever connecting or disconnecting the Extender.
Page 325: Troubleshooting
Magnetic Force Microscopy 15.6 Troubleshooting 15.6.1 MFM Image Veriﬁcation The procedure described above should produce a good magnetic force gradient image of the videotape sample. If there is a problem, check that the Interleave Mode is set to Lift, that Interleave is Enabled and that the Scan Line is set to Interleave.
Page 326: Overview
Chapter 16 Electric Techniques 16.1 Overview This chapter describes how to perform two electric techniques: Electric Force Microscopy (EFM) and Surface Potential. EFM is similar to Magnetic Force Microscopy (MFM) and shares many of the same procedural techniques. Both modes utilize the Interleave and LiftMode procedures discussed in previous chapters.
Page 327: Electric Techniques Overview
Electric Techniques 16.2 Electric Techniques Overview There are two types of electric techniques used with the Dimension Series system: Electric Force Microscopy (EFM) and Surface Potential imaging. Both techniques employ a two-pass LiftMode measurement. LiftMode allows the imaging of relatively weak but long-range magnetic and electrostatic interactions while minimizing the inﬂuence of topography (See Figure 16.2a).
Page 328: Electric Force Microscopy Overview
Electric Techniques Electric Techniques Overview continued... 16.2.1 Electric Force Microscopy Overview Electric Force Microscopy measures variations in the electric field gradient above a sample. The sample may be conducting, nonconducting, or mixed. Since the surface topography (e.g. sharp points on the surface concentrate the field gradient) shapes the electric field gradient, large differences in topography make it difficult to distinguish electric field variations due to topography or due to a true variation in the field source.
Page 329: Surface Potential Imaging Overview
Electric Techniques Electric Techniques Overview continued... 16.2.2 Surface Potential Imaging Overview Surface potential imaging measures the effective surface voltage of the sample by adjusting the voltage on the tip so that it feels a minimum electric force from the sample. (In this state, the voltage on the tip and sample is the same.) Samples for surface potential measurements should have an equivalent surface voltage of less than ±10 volts, and operation is easiest for voltage ranges of ±5 volts.
Page 330: Electric Force Microscopy
Electric Techniques 16.3 Electric Force Microscopy 16.3.1 Electric Force Microscopy Theory Electric Force Microscopy is analogous to standard MFM, except that gradients being sensed are due to electrostatic forces. In this method, the cantilever is vibrated by a small piezoelectric element near its resonant frequency.
Page 331 Electric Techniques Electric Force Microscopy Theory continued... All of the above methods rely on the change in resonant frequency of the cantilever due to vertical force gradients from the sample. Figure 16.3b shows a diagram of how the Extender electronics module provides signal enhancement and feedback allowing gradient detection.
Page 332: Electric Force Microscopy Preparation
Electric Techniques Electric Force Microscopy continued... 16.3.2 Electric Force Microscopy Preparation This section explains how to apply a voltage to the tip or sample to generate electric ﬁelds. If the sample has a permanent electric ﬁeld which does not require the external application of voltage, the steps below are not required and you can proceed to Section 16.3.3.
Page 333 Electric Techniques Electric Force Microscopy Preparation continued... Instructions for Reconﬁguring Jumpers Carefully examine the jumper conﬁguration ﬁgures in the following pages and identify which jumper conﬁguration is correct for your application. If the conﬁguration you choose differs from the conﬁguration as shipped from the factory, follow the instructions below. Refer to Figure 16.3e Figure 16.3j...
Page 334 Electric Techniques Electric Force Microscopy Preparation continued... Instructions for Enabling Analog 2 in Software 1. Select Di / Microscope Select / Edit / Advanced, and set Analog 2 to User defined. 2. Click to exit both dialog boxes. Note: For software versions 4.23 and lower, select Microscope / Calibrate / Detector to display the Detectors Parameters window.
Page 335 Electric Techniques Electric Force Microscopy Preparation continued... Setting the Extender Electronics Box 1. For systems with an Extender Electronics Box, locate the two toggle switches on the backside of the Extender Electronics Box (See Figure 16.3d). 2. Verify that they are toggled as shown in Table 16.3a.
Page 336 Electric Techniques Electric Force Microscopy Preparation continued... Jumper Conﬁgurations Without Extender Electronics As shipped from the factory, the jumper conﬁguration on a Dimension Series system without the Extender Electronics Module appears as shown in Figure 16.3e below. This conﬁguration connects both tip and sample to ground.
Page 337 Electric Techniques Jumper Conﬁgurations Without Extender Electronics continued... Analog 2 Voltage Applied to the Tip (No Extender Electronics) The jumper conﬁguration in Figure 16.3f connects the Analog 2 signal from the NanoScope III controller (± 12 VDC range) to the tip. Remember to enable the Analog 2 voltage line as described in Section 16.3.2.
Page 338 Electric Techniques Jumper Conﬁgurations Without Extender Electronics continued... Analog 2 Voltage Applied to the Sample (No Extender Electronics) The jumper conﬁguration in Figure 16.3g connects the Analog 2 signal from the NanoScope III controller (± 12 VDC range) to the sample chuck.
Page 339 Electric Techniques Jumper Conﬁgurations Without Extender Electronics continued... External Voltage Source Applied to the Tip (No Extender Electronics) In some cases, it may be advantageous to use voltages greater than 12 V, or to use a pulsed power supply. If an external source of voltage is to be applied to the tip, conﬁgure jumpers as shown in Figure 16.3h.
Page 340 Electric Techniques Jumper Conﬁgurations Without Extender Electronics continued... External Voltage Source Applied to Sample (No Extender Electronics) In some cases, it may be advantageous to use voltages greater than 12 V, or to use a pulsed power supply. If an external source of voltage is to be applied to the sample, conﬁgure jumpers as shown in Figure 16.3i.
Page 341 Electric Techniques Electric Force Microscopy continued... Jumper Conﬁgurations With Extender Electronics CAUTION: Power down the NanoScope controller and unplug the power cable from the microscope electronic box before attempting to adjust jumper configurations. As shipped from the factory, systems with the Extender Electronics option should have an original backplane jumper conﬁguration as shown Figure 16.3j.
Page 342 Electric Techniques Jumper Conﬁgurations With Extender Electronics continued... Analog 2 Voltage Applied to the Tip (With Extender Electronics) Notice that the jumper conﬁguration in Figure 16.3k connects the Analog 2 signal from the NanoScope III controller (± 12 V range) to the tip, and is exactly the same as the jumper conﬁguration shown in Figure 16.3j, the standard conﬁguration as shipped from the factory.
Page 343 Electric Techniques Jumper Conﬁgurations With Extender Electronics continued... Analog 2 Voltage Applied to Sample (With Extender Electronics) The jumper conﬁguration in Figure 16.3l connects the Analog 2 signal from the NanoScope III controller (± 12 V range) to the sample. Remember to enable the Analog 2 voltage line as described in Section 16.3.2.
Page 344 Electric Techniques Jumper Conﬁgurations With Extender Electronics continued... External Voltage Source Applied to Tip (With Extender Electronics) In some cases, it may be advantageous to use voltages greater than 12 V, or to use a pulsed power supply. If an external source of voltage is to be applied to the tip, conﬁgure jumpers as shown in Figure 16.3m.
Page 345 Electric Techniques Jumper Conﬁgurations With Extender Electronics continued... External Voltage Source Applied to Sample (With Extender Electronics) In some cases, it may be advantageous to utilize voltages greater than 12 V, or to utilize a pulsed power supply. If an external source of voltage is to be applied to the sample, conﬁgure jumpers as shown in Figure 16.3n.
Page 346 Electric Techniques Electric Force Microscopy continued... 16.3.3 Electric Force Microscopy Procedures This section details procedures for conducting EFM for each of the three techniques: phase detection, frequency modulation, and amplitude detection. Note: Amplitude detection is the only procedure described here that can be done without the Extender Electronics Module;...
Page 347 Electric Techniques Electric Force Microscopy Procedures continued... 6. Set up the AFM as usual for Tapping Mode operation (See Chapter 10). 7. Select View / Cantilever Tune. 8. Follow the instructions below for the type of electric force imaging desired, Phase Detection, Frequency Modulation, or Amplitude Detection.
Page 348 Electric Techniques Phase Detection continued... The phase should decrease with increasing frequency and cross the center line (0° point) at the peak frequency. The phase curve then correctly reﬂects the phase lag between the drive voltage and the cantilever response. Gradients in the electric force will cause a shift ∆F in the resonance frequency.
Page 349 Electric Techniques Phase Detection continued... Note: For software versions 4.23 and lower set Interleave scan to Lift and switch Interleave mode to Enable in the Interleave Controls panel. 8. Set the Channel 2 Scan line to Interleave to display interleave data.
Page 350 Electric Techniques Phase Detection continued... Note: On very rough samples, contrast in LiftMode images may be from air damping between the tip and surface. Look at the phase data in Scope Mode while adjusting the tip or sample voltage up and down. Contrast due to electrical force gradients increases or decreases as the tip-sample voltage changes.
Page 351 Electric Techniques Amplitude Detection continued... Figure 16.3q Shift In Amplitude at Fixed Drive Frequency ∆F Drive Frequency Set the Drive frequency to the left side of the cantilever resonance curve, as shown in Figure 16.3r. Figure 16.3r Amplitude Detection Cantilever Tune For maximum sensitivity, set the Drive frequency to the steepest part of the resonance curve.
Page 352 Electric Techniques Amplitude Detection continued... When using Amplitude Detection, optical interference may appear in the lift (electric force) image when imaging highly reﬂective samples. Optical interference appears as evenly spaced, wavy lines with about 1– 2µm spacing superimposed on the lift image. This occurs when ambient laser light (i.e., light passing around or through the cantilever and reﬂecting off the sample) interferes with laser light reﬂecting from the cantilever.
Page 353: Surface Potential Detection
Electric Techniques 16.4 Surface Potential Detection 16.4.1 Surface Potential Detection Theory The Extender Electronics Module allows measurement of local sample surface potential. This is similar to techniques called Scanning Maxwell Stress Microscopy and Kelvin Probe Microscopy. Surface potential detection is a two-pass system where the first pass obtains surface topography and the second pass measures surface potential.
Page 354 Electric Techniques Surface Potential Detection Theory continued... Figure 16.4a Simpliﬁed Block Diagram of Extender Electronics Module Cantilever Deflection Signal Photodiode Signal Amplitude Signal Detector Lock-in Amplifier Reference Signals to Servo Controller Signal Laser NanoScope Beam (Feedback loop adjusts DC tip DC Voltage Photo- voltage to zero lock-...
Page 355 Electric Techniques Surface Potential Detection continued... 16.4.2 Surface Potential Detection Preparation It is often desirable to apply a voltage to one or more areas of a sample. This may be done in two ways: by connecting a voltage to the sample mounting chuck, or by making direct contact to the sample.
Page 356 Electric Techniques Surface Potential Detection Preparation continued... 3. Depending upon whether voltage is applied to the sample directly or indirectly, reconfigure jumpers on the backplane header according to either Figure 16.4c Figure 16.4e. Applying Voltage to Sample Through the Sample Chuck When you apply an external voltage to the sample via the sample chuck, conﬁgure the jumpers as shown in Figure...
Page 357 Electric Techniques Applying Voltage to Sample Through the Sample Chuck continued... 1. You must electrically connect the sample to the chuck. Attach the sample to a standard steel sample disk using conductive epoxy or silver paint (See Figure 16.4d) or hold the disk down on the sample chuck using vacuum or the magnetic mount.
Page 358 Electric Techniques Surface Potential Detection Preparation continued... Applying Voltage to the Sample Directly If you apply voltage directly to the sample, there is no need to reconﬁgure the jumpers. The jumpers remain in the same position as shipped from the factory (See Figure 16.4e).
Page 359 Electric Techniques Applying Voltage to the Sample Directly continued... Figure 16.4f Electrical Insulator >10 MΩ External Voltage Source Sample Electrical Insulator Sample Chuck 16-346 Dimension 3100 Manual Rev. C...
Page 360: Surface Potential Imaging Procedure
Electric Techniques Surface Potential Detection continued... 16.4.3 Surface Potential Imaging Procedure 1. Locate the two toggle switches on the backside of the Extender Electronics box (See Figure 16.4g). 2. Verify that they are toggled as shown in Table 16.4a. Figure 16.4g Toggle Switches on Back of Extender Electronics Module Tip or Sample Mode Voltage...
Page 361 Electric Techniques Surface Potential Detection Procedure continued... 4. Mount a metal-coated NanoProbe cantilever into the cantilever holder. Note: MFM-style cantilevers (225 micron long, with resonant frequencies around 70 kHz, Model MESP) typically work well. You may also deposit custom coatings on model FESP silicon Tapping Mode cantilevers.
Page 362 Electric Techniques Surface Potential Detection Procedure continued... 10. Under the Panels menu, select Interleave Controls to view the set of scan parameters used for measuring Surface Potential in the interleaved scan. You may enter different values from those on the main scan for any of the interleaved scan parameters.
Page 363 Electric Techniques Surface Potential Detection Procedure continued... 16. Set Interleave mode to Lift. 17. Set the Channel 2 image Data type to Potential and select Interleave for the Scan line. 18. For both data channels (height and potential) set the Scan line direction to Retrace.
Page 364: Open Loop Operation
Electric Techniques Surface Potential Detection Procedure continued... Note: As with topography gains, you can optimize the scan by increasing the gains to maximize feedback response, but not so high that oscillation sets in. 21. Optimize the Lift scan heights by choosing the smallest Lift scan height value that does not cause the tip to crash into the sample surface.
Page 365 Electric Techniques Open Loop Operation continued... For Open Loop Operation, set up the system as described above in Section 16.4.3 with the following changes: 1. Set the FM igain and FM pgain to 0. Note: Turning the FM gains to zero stops further changes to the DC voltage on the tip but does not set the tip voltage back to zero.
Page 366: Troubleshooting
Electric Techniques 16.5 Troubleshooting The Surface Potential feedback loop can be unstable. This instability may cause the Potential signal to oscillate or remain at either +10 V or -10 V. Below are suggestions for verifying that the feedback loop is working properly with no oscillation.
Page 367 Electric Techniques This page is intentionally blank. 16-354 Dimension 3100 Manual Rev. C...
Page 368 17.1 Overview This chapter provides detailed instructions for the ﬁne calibration of Digital Instruments Veeco Dimension SPMs. Additionally, the latter part of the chapter focuses on problems commonly encountered during operation of the microscope and then concludes with maintenance procedures for the Dimension SPM.
Page 369: Calibration
ﬁnest accuracy possible for a given scan size, the scanner calibration parameters can be manually ﬁne-tuned. This may prove useful in applications where measuring accuracy must be better than 1 percent. Digital Instruments Veeco recommends that you adhere to the following Calibration schedule (See Table 17.2a).
Page 370: Theory Behind Calibration
Calibration SPM Calibration Overview continued... Table 17.2a: Calibration Schedule Calibration Routine Time Frame Frequency First Year Every 3 months Fine-Tuning Calibration (or Full X-Y Calibration if required) Subsequent Years Every 6 months First Year Every 3 months Z Calibration (for General Applications) Subsequent Years Every 6 months Critical Height Measurements...
Page 371 Calibration Theory Behind Calibration continued... Plotting each point along the curve describes a second-order, exponential relationship which provides a rough approximation of scanner sensitivity. However, because piezo materials exhibit hysteresis, their response to increasing voltage is not the same as their response to decreasing voltage. That is, piezo materials exhibit “memory,”...
Page 372 Theory Behind Calibration continued... Through rigorous quality control of its scanner piezos, Digital Instruments Veeco has achieved excellent modeling of scanner characteristics. Two calibration points are typically used for fine-tuning: at 150 and 440 volts. A third point is assumed at 0 nm/volts. These three points yield a second-order sensitivity curve to ensure accurate measurements throughout a broad range of scanner movements.
Page 373: Sensitivity And Scanner Calibration
Calibration 17.3 Sensitivity and Scanner Calibration ATTENTION: Check the SPM’s measuring accuracy periodically to ensure that images are dimensionally represented within acceptable limits of error. If measuring accuracy is critical, or if environmental factors (e.g., humidity, temperature) impact the SPM signiﬁcantly, this may require a quick check at the start of each imaging session.
Page 374 Calibration Scanner Properties continued... The diagram below depicts scanner crystal voltage versus photodiode voltage (See Figure 17.3a). In this instance, detector sensitivity is given as volt per volt, a parameter provided in the Force Calibration screen. Figure 17.3a Scanner Crystal Voltage and Photodiode Voltage Photodiode voltage Laser Photodiode...
Page 375 Calibration Scanner Properties continued... The Microscope / Calibrate / Scanner function displays the Scanner Calibration dialog box, allowing users to enter the sensitivity of their scanner’s X-Y axes. Sensitivity is measured in terms of lateral displacement for a given voltage (nm/volt). In addition, other parameters measure the scanner’s X-Y coupling and other effects.
Page 376: Calibration References
Calibration 17.4 Calibration References As described above, each scanner exhibits its own unique sensitivities; therefore, it is necessary to precisely measure these sensitivities, then establish software parameters for controlling the scanner. This task is accomplished with the use of a calibration reference (See Figure 17.4a).
Page 377: Small Scan Size Calibration
Calibration 17.5 Small Scan Size Calibration If using scan sizes of 5 µm or smaller, Digital Instruments Veeco recommends calibrating the scanner for small scan sizes. Contact Digital Instruments Veeco for further instructions. 17.6 Full X-Y Calibration Routine 17.6.1 Linearity Correction...
Page 378 Calibration Linearity Correction continued... Align Calibration Reference 1. Load the silicon calibration reference into the SPM. 2. Align the reference with the microscope scanner so that the tip scans parallel to the reference’s features with the Scan angle set at 0 degrees (See Figure 17.6a).
Page 379 Calibration Linearity Correction continued... Set Real Time Parameters 1. Set parameters in the control panels to the following values: Panel Parameter Setting Scan Controls Scan Size 440 V X offset 0.00 nm Y offset 0.00 nm Scan angle 0.00 deg Scan rate 2.44 Hz Number of samples...
Page 380 Calibration Set Up Contact AFM continued... 5. If the reference requires rotation, Withdraw and rotate the sample to improve orthogonality between sample and scan line. 6. Repeat until features are oriented orthogonally with the scan frame. Check Sample Orthogonality 1. Check the sample scan for orthogonality along both the X- and Y- axes.
Page 381 Calibration Check Sample Orthogonality continued... Note: In Figure 17.6b, pits align with the vertical (slow) axis but skew with the horizontal (fast) axis. The angle should be measured with the vertex near the center of the image and the vertices in the upper-right or lower-left quadrant.
Page 382 Calibration Linearity Correction Procedure continued... Adjust Mag0 and Arg0 1. Select Microscope / Calibrate / Scanner to display the Scanner Calibration dialog box. 2. Set the mag0 and arg values while noting the scan beginning and ending. Note: When Line direction is set to Trace, the beginning of the fast scan is on the left, as indicated by the arrow base.
Page 383 Calibration Adjust Fast Mag0 continued... 7. Move and size the zoom box until the beginning third of the scan's features are exactly aligned with the zoom box. Note: The beginning third of the scan is the standard for judging almost all of the linearity values.
Page 384 Calibration Adjusting Fast Arg continued... 5. If using a one-dimensional reference, repeat the procedure for adjusting Fast mag1 before proceeding with the next step. Note: Adjusting the slow linearity requires the one-dimensional reference to be physically rotated 90 degrees. Figure 17.6c X Scan Linearization Center Compressed Center Expanded 6.
Page 385 Calibration Adjusting Slow Mag0 continued... ATTENTION: Be careful not to confuse scan top and bottom with beginning and ending, as the scan direction alternates. 4. Adjust the zoom box to fit the beginning third of the scan and check against the end third. 5.
Page 386 Calibration Linearity Correction Procedure continued... Adjust Fast Mag1 1. For initial adjustment, click to close the Scanner Calibration window. Note: Selecting Restore resets parameters to default values when the box is opened. 2. Change the Scan size to 150 volts. 3.
Page 387 Calibration Adjust Fast Mag1 continued... Initial adjustment is usually adequate; however, if more precision is desired, use the following ﬁne adjustment techniques to adjust Fast mag1. 12. Use the same procedure for adjusting Fast mag0. 13. As before, set the Zoom box for the beginning of the scan and then check the ending.
Page 388 Calibration Full X-Y Calibration Routine continued... 17.6.2 X-Y Calibration using Capture Calibration The Capture Calibration command calibrates scanners using set parameters in the NanoScope software. The basic calibration procedure using version 4.42 software and a 10-micron calibration reference (See Figure 17.4a) is described below.
Page 389 Calibration X-Y Calibration Using Capture Calibration continued... Note: The microscope begins an automatic series of scans on the reference which require approximately one hour to complete. During each scan, the scanner moves the piezo using carefully calculated movements. Many of these movements are unusual, giving rise to a variety of images which do not resemble the normal reference.
Page 390 Calibration X-Y Calibration Using Capture Calibration continued... Note: Do not click on Abort unless you want to stop the entire Capture Calibration program. 7. If portions of features are missing, or if the image is blank, click repeatedly on to adjust the scan ADJUST OFFSET DOWN...
Page 391 Calibration X-Y Calibration Using Capture Calibration continued... 12. Recapture all images unsuitable for calibration. Record the file name extensions for all unusable files (e.g., .cxy, .dyy), then delete the files. 13. Re-engage the reference surface and select Capture Calibration. 14. Verify that the file name prefix is identical to that of the usable files, then deselect all usable file name extensions from the last capture.
Page 392: Off-Line / Utility / Autocalibration
Calibration Full X-Y Calibration Routine continued... 17.6.3 Off-line / Utility / Autocalibration After the Capture Calibration routine is completed, the user measures surface features contained within each image and enters their dimensions into the software. The software compares its estimates with the actual (user- entered) dimensions to make final corrections.
Page 393 Calibration Off-line/Utility/Autocalibration continued... Note: The software sequentially presents various calibration images on the display monitor while prompting the user to draw either a vertical line or a horizontal line. The control monitor simultaneously displays various dialog boxes (one for each image), requesting the user to enter a distance.
Page 394 Calibration Off-line/Utility/Autocalibration continued... Figure 17.6j Calibration Line Distance Prompt MMAFMJ.PAR Xs-Xf coup der New distance in µm: 35.95 Cancel 6. Enter the distance covered by the white line drawn on the image. If a 10-micron reference is employed, like portions of features are spaced 10 microns apart (e.g., between bottom edges, left sides, etc.).
Page 395: Fine-Tuning For X-Y Calibration
Calibration 17.7 Fine-tuning for X-Y Calibration Fine-tuning is usually performed at two Scan size settings: 150 and 440 volts. Both horizontal and vertical measurements of sample features are made, then compared with actual distances. Based upon this comparison, computer parameters are ﬁne-tuned. To ﬁne-tune your SPM for maximum X-Y measuring accuracy, review the procedure below.
Page 396 Calibration Measure Horizontally at 440 Scan Size continued... 4. Select two widely-spaced features on the sample image of known separation. Use the mouse to draw a horizontal line between them. (For example, on a 10-micron, silicon reference, draw the line from the left side of one pit to the left side of another pit as far away as possible.) The screen will display the measured distance between pits next to the line.
Page 397: Measure Vertically At 440V Scan Size
Calibration Measure Horizontally at 440 Scan Size continued... 8. Multiply the quotient obtained above by the X fast sens value shown on the Scanner Calibration panel. 9. Enter the new value. The new value adjusts the scanner’s fast axis to more closely match calculated distances with actual feature distances.
Page 398 Calibration Measure Vertically at 440 Scan Size continued... 7. Select the Real time / Microscope / Calibrate / Scanner function to display the Scanner Calibration dialog box. 8. Select the Y slow sens parameter. 9. Record the Y slow sens value shown on the Scanner Calibration panel and multiply the quotient obtained earlier by the Y slow sens value shown on the Scanner Calibration panel.
Page 399 Calibration Measure Horizontally at 150V Scan Size continued... Trial and Error Method 1. Select the Real time / Microscope / Calibrate / Scanner function to display the Scanner Calibration dialog box. 2. Select the X fast derate parameter or Y fast derate for Y-axis adjustment.
Page 400: Measure Vertically At 150 V Scan Size
Calibration Fine-tuning for X-Y Measuring Accuracy continued... 17.7.5 Measure Vertically at 150 V Scan Size 1. Select two widely-spaced features on the sample image of known separation. 2. Use the mouse to draw a vertical line between them. Note: For example, on a 10-micron, silicon reference, draw the line from the top edge of one pit to the top edge of another pit as far away as possible.
Page 401: Change Scan Angle And Repeat Calibration Routines
Calibration Fine-tuning for X-Y Measuring Accuracy continued... 17.7.6 Change Scan angle and Repeat Calibration Routines 1. Change the Scan angle on the Scan Controls panel to 90 degrees. 2. Repeat steps above for the following parameters: Y fast sens, X slow sens, Y fast der, and X slow der to ensure the scanner is calibrated properly along both the X- and Y-axis.
Page 402: Calibrating Z
X- and Y-axes do during scanning. Furthermore, offsets affect the piezo over a period of minutes. The silicon calibration references distributed by Digital Instruments Veeco have 200 nm vertical features accurate to within ± 3 percent. The calibration reference is referred to throughout the examples provided in this section.
Page 403: Capture And Correct An Image
Calibration Z Calibration Engage continued... 4. Change the aspect ratio to 4:1, and verify that the image includes the pit along with portions of the surrounding flat area (See Figure 17.8a). Figure 17.8a Z Calibration Image 5. Verify that the Z Center Position value shown next to the image display is close to 0 volts (±5 volts).
Page 404 Calibration Capture and Correct and Image continued... 4. Go to the display screen and draw a stopband over the pit as shown Figure 17.8b. Figure 17.8b Draw a Stopband 5. Click on Execute to complete the flattening procedure. 6. Quit the dialog box. Rev.
Page 405: Measure Vertical Features
Calibration Calibrating Z continued... 17.8.3 Measure Vertical Features With the image corrected, its vertical features may now be measured. This is performed using Depth analysis to utilize more data points. 1. Select the Off-line / Analyze / Depth command. Figure 17.8c Depth Analysis Screen 2.
Page 406 Calibration Measure Vertical Features continued... 3. Click on in the display monitor’s top menu bar. EXECUTE Note: Height data within the drawn cursor box displays on the monitor, showing two, prominent peaks. These peaks correspond to two elevations on the surface: the bottom of each pit and the top surface.
Page 407: Correct Z Sensitivity
4. Click on to enter the new Z sensitivity value. Note: The numerator value above (200 nm) is for Digital Instruments Veeco 10-micron silicon reference. For other calibration references, set the numerator equal to the depth of features measured by Depth analysis.
Page 408: Recheck Z-Axis Measuring Accuracy
Note: The measured depth should read 200 nm on a Digital Instruments Veeco 10 µm silicon calibration reference. 5. Select the Real-time / Microscope / Calibrate / Z option to display the Z Calibration panel 6.
Page 409 Calibration Calculate Retracted and Extended Offset Deratings continued... 7. Perform the following calculation: 200 nm (1 + current offset der) — 1 meas. depth For example, if the current offset equals 4% and the measured depth equals 175 nm, then: 200 nm (1 + .04) —...
Page 410: Chapter 18 Maintenance And Troubleshooting
Chapter 18 Maintenance and Troubleshooting 18.1 Overview Few maintenance procedures should be necessary for the continued operation of the Dimension SPM microscope. Procedures include cleaning and adjusting angular alignment of the reﬂecting mirror for the laser beam. Speciﬁcally, this chapter details the following: •...
Page 411: Maintenance
18.2.2 Cleaning the Cantilever Holder The cantilever holder is fragile. Gently wipe the cantilever holder clean. Digital Instruments Veeco recommends a camera lens cleaning kit. The rest of the microscope requires only an occasional dry wipe. 18.2.3 Cleaning the Cantilever Holder Contacts...
Page 412: Changing The Illuminator Light Bulb
Change the illuminator light bulb when it burns out. Dimension 3100 systems ship with a spare light bulb mounted within the Dimension control box back panel. Order a new illuminator bulb from Digital Instruments Veeco when the spare bulb burns out, as availability and shipping time may vary.
Page 413 7. Plug in the light bulb cable. CAUTION: Do not touch the inside of the bulb. 8. Slide the bulb mount panel back and replace the holding screws. 9. Order another spare bulb from Digital Instruments Veeco. 18-400 Dimension 3100 Manual Rev. C...
Page 414: Troubleshooting
Maintenance and Troubleshooting 18.3 Troubleshooting 18.3.1 Software Main Menu Items This section is a general overview of various Real-time menu items. Refer to the Command Reference Manual for more information about these settings. Scan Size, X-Y Offset These controls adjust the lateral scan area and the center of the scan area.
Page 415 Maintenance and Troubleshooting Software Main Menu Items continued... Z Limit Limits the amount of drive voltage available to the Z piezo circuit. The Z control system uses a 16-bit D/A converter to drive an ampliﬁer capable of outputting voltages from +220V to -220V. The resolution of the control over the Z direction is approximately 6.7mV per bit (440V divided by 65536).
Page 416 Maintenance and Troubleshooting Software Main Menu Items continued... • Integral Gain The computer multiplies this number times an accumulated average of A/D readings. This is the low frequency feedback control. The easiest way to set the gains properly is to view the input of the feedback loop.
Page 417: Contact Mode Afm
Maintenance and Troubleshooting Troubleshooting continued... 18.3.2 Contact Mode AFM General Operating Concepts The AFM system is comprised of two main components: the scanner and the AFM detection system. The scanner houses the piezoelectric transducer. The piezo element physically moves the sample in the X, Y and Z direction.
Page 418 (more on A) when the cantilever is pushed up. The initial setup is to have the Vertical Deflection (A-B) voltage about 2-3 volts more negative than the Setpoint voltage. Digital Instruments Veeco recommends starting with the Setpoint voltage set to 0 volts and the Vertical Deflection (A-B) set to -2 volts because 0 volts designates the middle of the control range.
Page 419: Problems With Contact Mode Afm
Maintenance and Troubleshooting Problems with Contact Mode AFM continued... 18.3.3 Problems with Contact Mode AFM False engagement False engagement occurs up to 50 percent of the time. The main cause of false engagement is optical interference on the photodiodes, which causes the vertical deﬂection (A-B) voltage to slowly move toward the setpoint voltage.
Page 420 Maintenance and Troubleshooting Problems with Contact Mode AFM continued... Other sources of false engagement are: • Photodiodes are adjusted such that the Vertical Deﬂection (A-B) voltage is more positive than the setpoint voltage. Use the photodiode adjustment knobs to adjust the Vertical Deﬂection voltage to a more negative value.
Page 421 Maintenance and Troubleshooting Problems with Contact Mode AFM continued... Displacement of Material Too much tracking force typically causes displacement of material. Use the Force Calibration window after engaging for setting the correct tracking force. To operate in the attractive region of the force curve, tune the AFM. This takes advantage of the ﬂuid layer that captures and holds the tip to the sample, effectively reducing the tracking force.
Page 422 Maintenance and Troubleshooting Problems with Contact Mode AFM continued... Problems with Silicon Nitride Cantilevers Silicon nitride cantilevers may be a problem due to lateral warping or torquing of the nitride beams. This causes the reﬂected light to spill off to the side as the tip engages the sample. Warping or torquing of the cantilever is associated with older cantilever wafers.
Page 423 Maintenance and Troubleshooting Problems with Contact Mode AFM continued... Z Center Position Goes Out of Range The Z center voltage is a measure of the average voltage to the Z electrode. The image disappears when the Z center position reaches either the fully extended or the fully retracted ends of the Z center indicator.
Page 424: Tapping Mode Afm
Maintenance and Troubleshooting 3. Check for thermal stability. Do not place the SPM directly in the path of heating or air conditioning ducts. Avoid locating the SPM near large windows which trap solar heat. Note: Thermally caused drift due to thermal expansion of SPM components is the most common cause of mechanical drift.
Page 425 Maintenance and Troubleshooting Tapping Mode AFM continued... Figure 18.3b illustrates the relationship between the RMS and the setpoint voltage during the engage cycle. The computer, not the user, determines the initial setpoint voltage. The computer sets the setpoint equal to 95 percent of the RMS amplitude. The tip then lowers until the RMS matches the setpoint.
Page 426 Maintenance and Troubleshooting Tapping Mode AFM continued... Figure 18.3b Tapping Mode AFM Concepts Laser Laser Beam Photodiode Array Photodiode "A" Scanner Mirror Tube Photodiode "B" Reflected Laser Z Piezo Beam Mirror RMS Voltage Oscillating Converter 0 Volts Sample Setpoint Voltage Computer Figure A Figure B...
Page 427 Maintenance and Troubleshooting Tapping Mode AFM continued... Optimizing Tapping Mode AFM Signal After Engagement The ﬁgures on the bottom of Figure 18.3b illustrate the relationship between the RMS and the setpoint voltages. There are some basic rules to remember: • The setpoint voltage is always lower than the RMS voltage (Figure A).
Page 428: Problems With Tapping Mode Afm
Maintenance and Troubleshooting Troubleshooting continued... 18.3.5 Problems with Tapping Mode AFM Some of the problems associated with Contact Mode AFM are also relevant to Tapping Mode AFM (See Section 18.3.3). Unusual Resonance Peaks The most common problem encountered while operating in Tapping Mode is unusual resonance peaks in the Cantilever Tune window.
Page 429 Maintenance and Troubleshooting Problems with Tapping Mode AFM continued... Try the following procedures to eliminate this condition: 1. Reduce the Setpoint voltage to increase the amount of tapping force on the surface. Be careful when reducing the Setpoint voltage on soft samples. The sample surface can still be disturbed even though the forces are very small.
Page 430 Maintenance and Troubleshooting Problems with Tapping Mode AFM continued... Rings Around Features on the Surface Operating with a drive frequency too close to cantilever resonance causes rings to appear around features on the surface. 1. Use the arrow keys to increment the drive frequency a little lower while watching the Real-time scan.
Page 431: Initialize
Maintenance and Troubleshooting Troubleshooting continued... 18.3.6 Initialize If you cannot access Focus Surface or Locate Tip or if the corresponding icons are grayed out, you must re-initialize the system. To initialize the system, complete the following steps. 1. Select Initialize / Execute. Note: It is not necessary to initialize more than once unless you have turned the SPM off or moved the stage manually.
Page 432 Dimension 3100 Manual Index Symbols 1-16 Address technical support 1-2 Dimension 3100 controller 1-9 Aliasing 13-49 Amplitude 10-17 Atomic Force Microscope (AFM) operator precautions 2-7 sample precautions 2-9 Average count 13-12 Beamsplitter Dimension SPM head 1-15 Calibration 17-2–17-42 standard 17-9 Cantilever ﬂuid cell cantilever holder 1-16–1-17 standard cantilever holder 1-16–1-17...
Page 433 Index Center Frequency 10-7, 11-8 Checklists power-up (installation and service only) 2-18 power-up (normal usage) 2-19 pre power-up (installation and service only) 2-12–2-16 software power-up 2-24 Chucks vacuum 7-18 Circuitry Dimension 3100 microscope 1-10–1-11 Computer system overview 1-4, 1-6 Conﬁgurations Axiom IS3K-2 1-3 Axiom VT-102 1-3 Axiom VT-103-3K 1-3...
Page 434 Index with MFM 15-7–15-11, 16-22–16-27 ECAFM 9-1 Edge Effects 13-49 Electric Force Microscopy 14-2, 16-5–16-27 Electrical Hazard symbol 2-2 Electrochemical AFM 9-1 E-mail technical support 1-2 Enable Motion Keys 13-17 Engage 8-6, 10-12, 11-13, 12-7, 14-6 false 18-10–18-11 force modulation 13-46 Tapping Mode 11-13 Tapping Mode in ﬂuids 11-19 TappingMode 10-12...
Page 435 Index Hazards Dimension 3100 controller 1-8, 1-9 labels 2-25–2-26 symbols 2-2 voltage 1-5 Head beamsplitter 1-15 description 1-12–1-17 detector mirror 1-14 illustration 7-8 laser diode adjustment knobs 1-14 laser diode stage 1-14 laser spot detector screen 1-15 packing for shipment 4-4 photodetector 1-14 preamp board 1-13 scanner piezo tube 1-15...
Page 436 Index Labels laser warning 2-25 Laser adjustable detector mirror 1-14 beamsplitter 1-15 detector screen 1-15 diode stage 1-14 photodetector 1-14 safety hazard 2-2 symbol 2-2 Laser Aiming with ﬂuid cells 9-12 Laser Diode Adjustment Knobs Dimension SPM head 1-14 Laser Diode Stage Dimension SPM head 1-14 Laser Hazard laser warning label 2-25...
Page 437 Index Dimension SPM head 1-12–1-16 electronics 1-10–1-11 preamp board 1-13 precautions 2-7 safety precautions 2-7–2-9 stage system 1-12 vacuum power switch 1-11 video zoom 1-18 Mirrors adjustable detector mirror 1-14 Motor withdraw 10-13 Mouse 7-2 NanoScope icon 2-22 NanoScope IIIa Controller system overview 1-7 Number of samples 13-11, 18-5 Objective...
Page 438 Index international sales, product information and price quotes 1-2 pricing, delivery and order information 1-2 priority service agreement 1-2 technical support 1-2 Photodetector adjustment 7-14–7-16 description 1-14 differential signals 1-14 Dimension SPM head 1-14 sum signal 1-14 Piezo scanner 1-15 Power Dimension 3100 controller 1-9 power-up (installation and service only) 2-12–2-18...
Page 439 Index RMS Amplitude 7-15 Rounding 12-13, 15-6 Safety 7-2 labels 2-25–2-26 mechanical crushing hazard 2-7 microscope precautions 2-7 power-up (installation and service only) 2-12–2-18 power-up (normal usage) 2-19 precautions 2-3–2-10 sample safeguards 2-9 software power-up 2-20–2-24 symbols 2-2 Safety Hazards attention 2-2 electrical 2-2 general operator safety 2-3–2-6...
Page 440 Index power-up 2-12–2-18 power-up checklist 2-18 pre power-up checklist 2-12–2-16 priority service agreement 1-2 web site 1-2 Setpoint 8-12, 10-15, 10-19, 13-13, 13-14, 13-49 adjustment 13-20 deﬁned 8-12 FM 13-46, 13-48 Silicon Cantilever Substrates 6-2 Slow scan axis 18-5 Software log on 2-22 NanoScope icon 2-22 password 2-22...
Page 441 Index mechanical crushing hazard 2-2 safety 2-2 thermal hazard 2-2 System Overview 1-3–1-4 computer 1-4 conﬁgurations 1-3 Dimension 3100 controller 1-3 motorized positioning stage 1-3 optical microscope 1-3 video image capture capability 1-4 TappingMode 10-1–13-36 principles of 18-15 tip preparation 7-6 Technical Support contacts 1-2 priority service agreement 1-2...
Page 442 Index User Name 2-22 Vacuum Dimension 3100 controller 1-9 microscope vacuum power switch 1-11 Van der Waals Forces 14-12 Vibration isolation table 4-5 Video Imaging system overview 1-4 video zoom microscope 1-18 View Scope Mode 12-10 Voltage general operator safety 2-4 monitors 1-5 Web Site 1-2 Wet Samples...
Page 443 Index Rev. C Dimension 3100 Manual Index-12...
Page 444 Dimension 3100 Manual List of Figures List of Figures ......LOF-1 System Overview ......1-1 Figure 1.4a Dimension 3100 Input and Display Equipment1-5...
Page 445 List of Figures Figure 2.9b Log into Windows NT . 2-21 Figure 2.9c Logon Window..2-22 Figure 2.9d Select the NanoScope Icon2-22 Figure 2.9e Select the Real-time Icon2-23 Figure 2.9f Status Panel ..2-24 Figure 2.10a Laser Explanatory Label2-25 Figure 2.10b...
Page 446 List of Figures Figure 4.5a Computer (rear view) . . 4-10 Figure 4.5b NanoScope Controller (front view)4- Figure 4.5c NanoScope Controller (rear view)4- Figure 4.5d Dimension 3100 Controller (rear view)4-14 Figure 4.5e Dimension 3100 Controller (front view)4-14 Figure 4.5f D3100 Microscope Electronics Box (rear view)4-15 Figure 4.5g Vacuum Power Switch .
Page 447 List of Figures Figure 5.3u Optics Move to End of Travel Prompt 5-22 Figure 5.3v Stage Zoom Prompt . . . 5-22 Figure 5.3w Stage Zoom Out Prompt5-22 Cantilever Preparation..... 6-1 Figure 6.2a Silicon Cantilever Substrates in Wafer Figure 6.2b...
Page 448 List of Figures Figure 7.3k Securing Double-sided Tape to the Sample Disk7-18 Figure 7.3l Securing the Sample . . . 7-18 Figure 7.4a Default SPM Stage Parameters7-21 Contact AFM ......8-1 Figure 8.2a Suggested Scan Controls Settings8-4 Figure 8.2b...
Page 449 List of Figures Figure 10.3f Suggested Other Controls Settings10- Figure 10.3g Suggested Feedback Controls Settings 10-11 Figure 10.5a Cantilever Response Curve10-14 Figure 10.5b Scope Trace with High Scan Rate10- Figure 10.5c Scope Trace with Correct Scan Rate 10-16 Figure 10.5d Example of Cantilever Tune Frequency Sweep10-17 TappingMode AFM in Fluids .
Page 450 List of Figures Figure 12.3b Example of a Scope Trace with Low- Friction Areas12-10 Figure 12.3c Tripping Transients in Scope Mode 12-13 Figure 12.3d Scope Mode View of Example Surface12-14 Force Imaging......13-1 Figure 13.2a Comparative Index of Pulling Forces 13-3...
Page 451 List of Figures Figure 13.7a Force Modulation Cantilever Holder 13-38 Figure 13.7a Auto Tune Controls Panel13-42 Figure 13.7b Typical Frequency Sweep Plot13-43 Figure 13.7c Correctly Tuned Force Modulation Frequency13-45 Figure 13.7d Friction on Force Modulation Images 13-51 Interleave Scanning ..... . 14-1 Figure 14.3a Suggested Scan Controls Settings14- Figure 14.3b...
Page 452 List of Figures Figure 15.5a Phase Box ..15-18 Electric Techniques..... . . 16-1 Figure 16.2a LiftMode Principles .
Page 453 List of Figures Figure 16.3r Amplitude Detection Cantilever Tune 16-26 Figure 16.4a Simpliﬁed Block Diagram of Extender Electronics Module16- Figure 16.4b Normal Jumper Conﬁguration16-30 Figure 16.4c Jumper Conﬁguration for Application of Voltage to Sample16-31 Figure 16.4d Separating Sample from Piezo Cap Using Steel Sample Puck16-32 Figure 16.4e Jumper Conﬁguration for Application...
Page 454 List of Figures Figure 17.8e Z Calibration Conﬁgure Dialog Box 17-39 Figure 17.8f Z Calibration Depth Dialog Box17-40 Maintenance and Troubleshooting ... 18-1 Figure 18.2a Change the Illuminator Bulb18-3 Figure 18.3a Contact Mode AFM Concepts18-9 Figure 18.3b Tapping Mode AFM Concepts18-17...
Page 455 List of Figures This page is intentionally blank. LOF-12 Dimension 3100 Manual Rev. C...

This manual is also suitable for:

004-320-000 004-320-100

Veeco Digital Instruments Dimension 3100 Manual

Chapter 7 Head, Probe, & Sample Preparation

Quick Links

Troubleshooting

Related Manuals for Veeco Digital Instruments Dimension 3100

Summary of Contents for Veeco Digital Instruments Dimension 3100