Veeco K465i GaN Operation And Maintenance

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K465i GaN

Operations and Maintenance

P/N 1212831 Rev C

June 2012

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Summary of Contents for Veeco K465i GaN

Page 1 K465i GaN Operations and Maintenance P/N 1212831 Rev C June 2012...
Page 2 Veeco Technical Publications has carefully reviewed this document to ensure its reliability and completeness. If you discover any errors or omissions, please contact: Veeco Technical Publications mailto:techpubsnj@veeco.com...
Page 3: Table Of Contents
Interlock Override Safety Notice ................1-9 Safety Switches ....................1-10 1.2........1-13 ECTION NSTRUCTIONS AND ROCEDURE Type and Magnitude of Energy ................1-13 CHAPTER 2. TURBODISC K465I GAN MOCVD SYSTEM SPECIFICATIONS ................. 2-17 2.1..............2-17 ECTION ENERAL PECIFICATIONS Company Address .................... 2-17 System Specifications ..................
Page 4 Over-Temperature Control ................4-33 Selecting Temperature Control Modes ..............4-35 Temperature Settings ..................4-36 4.7..............4-38 ECTION ONTROL PERATION Procedures in this Section ................. 4-38 Associated Procedures:..................4-38 Page ii © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 5 K465i Operations and Maintenance P/N 1212831 Rev C Pyrocontrol Introduction ................... 4-39 Description of PyroControl ................4-40 Using PyroControl for Temperature Control On K465i GaN Systems ....... 4-41 4.8.............. 4-41 ECTION OBOT ETUP AND DJUSTMENT Procedures in this Section ................. 4-42 Reference Drawings ..................
Page 6 Helpful Hints in Leak-Checking ................ 5-161 Initial Steps of Leak Checking ................. 5-163 Recommended Methodology for Leak Checking ..........5-163 Plumbing Lines ....................5-164 VCR Fittings ....................5-164 Valves ......................5-166 Page iv © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 7 CHAPTER 6. APPENDIX: OPTIONAL FEATURES ......6-1 6.1..................6-1 ECTION LOVEBOX Glovebox Controls in Nexus Software ..............6-1 Pump Down ...................... 6-3 Vent Sequence ....................6-4 Veeco/Fluens Glovebox Setup and Test ..............6-5 Page v © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 8 Figure 2-1. K465i GaN Cabinet ..................2-18 Figure 3-1. K465i GaN MOCVD ..................3-1 Figure 3-2. K465i GaN System Controls Architecture ............3-2 Figure 3-3. K465i GaN System Assembly ..............3-3 Figure 3-4. THA Top View Illustration (Optional GloveBox on Right) ........3-25 Figure 3-5.
Page 9 Figure 5-60. Cleaning of O-Ring Grooves on Flow Flange ........... 5-65 Figure 5-61. Preparing O-Rings ................5-66 Figure 5-62. Fomblin on O-Rings ................5-66 Figure 5-63. Application of O-Rings ................ 5-67 Figure 5-64. Viewport Adapter Cleaning ..............5-67 Page vii © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 10 Figure 5-110. Heater Baseplate Assembly Bottom View ........... 5-108 Figure 5-111. Installations of Insulation Blocks............5-109 Figure 5-112. Coated (A) and Uncoated (B) Filament Sides ........5-110 Page viii © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 11 Figure 5-156. Installations of Insulation Blocks and filaments........5-190 Figure 5-157. Clamps and Screws for the Outer Filament Installed......5-192 Figure 5-158. Heater Assembly................5-193 Page ix © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 12 Figure 5-164. Water Lines Connected to Monitors/Regulators ........5-200 Figure 5-165. Castor Mounting ................5-203 Figure 5-166. LFA/GB ..................5-205 Figure A-1. Glove Box Window (with Extension Icon) ............6-1 Page x © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 13 About This Document This documentation set includes the operating and maintenance manual for a Veeco TurboDisc K465i GaN MOCVD System (referred to as K465i within the text of this document). Within this manual are operating instructions to start-up and shut-down the system under various conditions, loading and unloading of wafers from the wafer carrier and transport of the wafer carrier into and out of the growth chamber.
Page 14 Procedure Sample: 1. Sample text. 2. Sample text. Note: Note sample text. Safety Precautions and Hazard Management Safety information sample text. Page xii © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 15: Chapter 1. Safety Summary
SAFETY SUMMARY This section contains important safety information regarding the operation and maintenance of the K465i GaN system. Topics covered include general safety, warning, caution and note usage, symbol usage, general precautions, hazardous materials, safety interlocks and alarms, safety switches, and lockout/tagout instructions. These general safety notices supplement the specific warnings and cautions appearing at the start of each section.
Page 16 Personnel working with, or near, high voltage should be familiar with approved methods of resuscitation. If someone is injured or stops breathing, initiate resuscitation immediately. A delay could cost a victim’s life. Page 1-2 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 17: Section Warning , Caution And Note Usage
Warnings and cautions appearing throughout this manual are of paramount importance to personnel and equipment safety. Prior to attempting to operate, maintain, troubleshoot, or repair any part of the K465i GaN system or related equipment, all warnings and cautions should be thoroughly reviewed and understood. The following paragraphs define warnings, cautions, and notes as they are used in this manual.
Page 19: General Precautions
 when they are performing maintenance on equipment containing static-sensitive integrated circuitry. Veeco recommends, as a two-person task, removal of the plastic cover of the main  electrical cabinet. Assume, until verified otherwise, that the reactor is too hot to be opened. Do not ...
Page 20: Additional Safety Precautions
The batteries used in the APC uninterruptible power supply (UPS) contain Lithium. Dispose of replaced cells or old units in accordance with local regulations for disposal of Lithium. Fluorescent lights bulbs used on the K465i GaN system may contain mercury. Dispose of used and old lightbulbs in accordance with local regulations.
Page 21 Table 1-1 below. The list is based upon general system usage. Customized or special applications may utilize or generate additional chemicals not included in this list. Table 1-1. List of chemicals anticipated to be used or generated by K465i GaN . CHEMICAL SOURCE...
Page 22: Safety Interlocks And Alarms
P/N 1212831 Rev C SAFETY INTERLOCKS AND ALARMS The following safety interlocks and alarms (Table 1-2) are present in the K465i GaN. Most system sensors generate a software alarm condition that shuts the system down. For some critical systems there is a hardware shutdown (EMO), independent of the software shutdown that is initiated upon an alarm condition.
Page 23: Interlock Override Safety Notice
(customer-controlled) gas supply when the system is in shutdown mode. If the above-mentioned interlock is added, a method of overriding the interlock must be provided to allow pressurization of the inlet manifold. Page 1-9 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 24: Safety Switches
K465i Operations and Maintenance P/N 1212831 Rev C SAFETY SWITCHES A description, including the location, of safety switches on the K465i GaN is listed in Error! Reference source not found.. The Electronics Control Assembly shows the location of these safety switches, as well as the location of the main power breakers and other energy isolation devices.
Page 25 To enable process or recipe operation, the activated process pushbutton must be pulled out and then enabled from the control computer. Page 1-11 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 26 Hardware Alarm Reset Required 1. Push Alarm Reset If lights remain on, the Hardware Alarm Input is Lights ON still on. 2. Check Nexus, from the Alarm that is LOW. Page 1-12 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 27: Type And Magnitude Of Energy
This procedure establishes the minimum requirements for the lockout of energy isolating devices whenever maintenance or servicing is done on a K465i GaN system. It is used to ensure that the system, or components, are stopped, isolated from all potentially hazardous energy sources, and secured before technicians perform any servicing or maintenance.
Page 28 3. Obtaining Lockout/Tagout device: Select the proper lockout / tagout device for the hazardous energy source being controlled. 4. System shutdown: The machine or equipment shall be turned off or shut down using the K465i GaN System Shutdown procedures. Warning: An orderly shutdown must be utilized to avoid any additional or increased hazard(s) to employees as a result of the equipment stoppage.
Page 29 Each lockout or tagout device shall be removed from each energy isolating device by the technician who applied the device.  Energize isolating device. 13. Restore normal operating control(s) to ON position. Page 1-15 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 31: Chapter 2. Turbodisc K465I Gan Mocvd System
K465i Operations and Maintenance P/N 1212831 Rev C CHAPTER 2. TURBODISC K465I GAN MOCVD SYSTEM SPECIFICATIONS This chapter includes general system and seismic specifications for the TurboDisc K465i GaN MOCVD System. Refer to the System Footprint drawing for additional information regarding system specifications and installation.
Page 32: Section 2.2. Seismic Specifications
K465i Operations and Maintenance P/N 1212831 Rev C Figure 2-1. K465i GaN Cabinet Section 2.2. Seismic Specifications Note: The calculations below are not a complete seismic analysis. A complete analysis might also include such factors as: stress distribution through a multiple-fastener connection;...
Page 33 Overturning force derived from the sum of the moments of the reactions on the system about the line through the legs on Y= 0.00 coordinate.       2534 1198    Page 2-19 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 34: Weight Of The Major Sub-Assemblies
The following drawings are provided to assist in the performance of the procedures contained in this section. Click on the drawing name to access the detailed (pdf) version. System Footprint  Seismic Anchorage Information  Page 2-20 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 35: Section 2.3. Certifications
Equipment. F47-0706 / IEC 61000-4-34 Voltage Sag Immunity. ROHS COMPLIANCE China RoHs Restriction of Hazardous Substances - Management Methods for Controlling Pollution Caused by Electronic Information Products Regulation. Page 2-21 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 37: Chapter 3. System Overview
Doc 1100481 Rev C CHAPTER 3. SYSTEM OVERVIEW This chapter includes a high-level view of the system components and the K465i GaN system’s function. Figure 3-1. K465i GaN MOCVD At the core of the Veeco TurboDisc™ MOCVD products is a process for fabricating microelectronic devices based on engineering developments and principles.
Page 38: Figure 3-2. K465I Gan System Controls Architecture
K465i Operations and Maintenance P/N 1212831 Rev C Figure 3-2. K465i GaN System Controls Architecture Page 3-2 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 39: Section 3.1. System Function And Usage
Figure 3-3. K465i GaN System Assembly The K465i GaN depicted in Figure 3-3 above can be used for blue, green and ultraviolet (UV) LEDs, solar cells, FETs and blue spectrum laser production. The K465i GAN is divided into separate modules, assembled separately on separate wheeled frames, then mounted together, placed on metal feet and the casters are removed.
Page 40 K465i GAN. There is an efficient and easily-manageable upper exhaust system for all modules. The bottom level of the entire K465i GAN includes separated lines for high power, with lines for low and digital power lines along the upper area of each module, under the mezzanine level.
Page 42 Electrical/Circuit Breaker Assembly (CBA) Module The CBA houses incoming power into the other modules, and separates power into lower/Utility level and upper/Low Power and Digital signals for each. Page 3-6 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 43: Section 3.3. Electric Rack (Eca)/Power Supply Module
P/N 1212831 Rev C Section 3.3. Electric Rack (ECA)/Power Supply Module The Electric Circuit Assembly (ECA)/Power Supply Module houses common controls for the entire system while providing power supply controls. Page 3-7 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 44 K465i Operations and Maintenance P/N 1212831 Rev C EMO and control switches are near the vented door of this module. Page 3-8 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 45 K465i Operations and Maintenance P/N 1212831 Rev C The well-ventilated modular control electronics area (ECA, rear view) has sufficient space for additional components. Page 3-9 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 46: Section 3.4. Source Delivery Assembly And Flow Module
HV portion of the system. The System N flow is shown below. Alkyl Bubblers control gas flow shown below (Idle, Vent and Run):  Page 3-10 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 49 K465i Operations and Maintenance P/N 1212831 Rev C The Source Delivery Assembly (SDA) delivers precise amounts of gases in a leak-tight environment, providing gas switching for abrupt interface control. Page 3-13 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 50 Vaccum/Vent Leak Check Assembly  Supply Gas Assembly  Hydride / Shroud Assembly  Flow Panel with Injector Block  Phantom Line option  Temperature Regulating Liquid (refrigeration) Baths  Page 3-14 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 52 Mezzanine level are not exposed to hydrogen gas at this level; gas leakages are contained in the main module only) The metalorganic section of the SDA is the Bubbler Network, which controls temperature, pressure and flow for the reactor. Page 3-16 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 53 InSitu monitoring is provided within the Reactor module. The RHA houses the Reactor Cart, which can move independently of the system frame. Page 3-17 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 55 One side vents to the back of the unit and the other side vents to the chamber. Hydrides and gas flow into the flow flange and into the vent. Page 3-19 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 56 K465i Operations and Maintenance P/N 1212831 Rev C Reactor with InSitu Monitoring installed Flow Flange illustration,including the upper ports and mounted shutter assembly. Page 3-20 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 57 It has a water cooled assembly with separate inputs for alkyls and hydrides to eliminate pre- reactions, and Viewports, which allow for optical monitoring of the wafer surface Page 3-21 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 58 K465i Operations and Maintenance P/N 1212831 Rev C Temperature-  controlled baseplate, dual o-ring seals and spindle rotation delivered by a high- speed servo drive motor Page 3-22 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 59 A view of the exterior wall of the RHA shows the Water Facility Interface (and regulators), where incoming flows from the Heat Exchanger and Water Facility Interface supply the reactor’s water. Page 3-23 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 60 The reactor is not connected to other areas of the system frame/modules aside from that of the Gate Valve. This isolation makes the reactor assembly easy to remove and maintain. Page 3-24 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 61: Section 3.6. Transfer Housing Assembly /Tha
Two-shelf Loadport  Glovebox (optional)  Laminar flowhood and pedestal (optional)  Slit Valves for isolation at separate atmospheres  Turbo (turbomolecular) Pump (optional)  Dry Pump  Page 3-25 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 62 Storage Module. In a non-glovebox configuration, with an exterior port and Laminar Flow Assembly, the Wafer Carrier Transfer Chamber may be referred to as the LoadPort. Page 3-26 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 63 P/N 1212831 Rev C Transfer Hub, housed above the Particle Filters The THA Gas Flow Panel regulates the gas flow for the THA, (with or without the Optional Turbomolecular Pump). Page 3-27 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 64 The Dry Pump (shown in a configuration below the Robot Control Computer) is used for THA pumping during routines, and for maintaining constant static vacuum on the THA. Page 3-28 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 65 K465i Operations and Maintenance P/N 1212831 Rev C Optional Glovebox Unit or Laminar Flow Assembly (illustrated here) Page 3-29 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 66: Section 3.7. Exhaust Module (Pea)
Timing gears synchronize the non-contact rotors  Manual and pneumatic ball valves  Replaceable high temperature particle filter  Page 3-30 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 67 Transfer Process and removes contaminants Housing Exhaust from the exhaust gas Assembly Assembly stream. Module Module Exhaust Throttling Valve, Baratron, Isolation Valve and Main Process Pump. Page 3-31 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 68 Pressure Regulator, into the pump and out to the facility board. Note that dual particle filters may be in use (this is the location of particle filter maintenance). Page 3-32 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 69: Section 3.8. System Electronics
DEVICENET NETWORK See DeviceNet Vendor documentation The DeviceNet ToolBox enables setup, configuration and troubleshooting of Veeco TurboDisc MOCVD control systems, based upon PLC controllers and DeviceNet communication protocols. DeviceNet operates through the use of and internal Ethernet/IP common industrial protocol (CIP) over Ethernet. The DeviceNet ToolBox is designed to work as a standalone application, and does not require any additional software.
Page 70: Figure 3-6. Devicenet Diagnostics Window
9 DC power supplies for heater power MFCs: metal sealed, used for source, carrier push and gas dilution, direct input Control Modules (ECA/CBP) GenMark: Robots handle Location, Servos and Vacuum Control Codes Page 3-34 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 71 Pyrometer Temperature Control System Sekidenko three sensor, single color, optical fiber pyrometer for temperature  measurements Two RealTemp units for additional temperature measurements  Integrated temperature control scheme  Page 3-35 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 72: Section 3.9. Control Software
Process Control  HMI – Human Made Interface  The NEXUS Main Operation Window displays a gas flow diagram of the K465i GaN and serves as a Graphical User Interface (GUI). From this window, users can: set valve positions ...
Page 73 On line help  Advance trouble shooting and diagnostic tools, automated maintenance  Event recording (Data Log) of system status and alarms  Definable levels for system security  Page 3-37 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 74: Figure 3-8. Common Drt Configuration
Section 3.10. In-Situ Monitoring The In-Situ Monitoring device for the K465i GaN is mounted above the reactor, within the Reactor Module. The DRT-210 is an integrated real-time in-situ process monitoring system of epitaxial growth on TurboDisc GaN MOCVD reactors. The acronym, DRT, is derived from...
Page 75: Section 3.11. Water -Cooling System
The Heat Exchanger unit cools facility water, circulates it through the reactor’s Heat Exchanger channel and out to facility (used) water. Facility water also flows Page 3-39 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 76: Section 3.12. Alarms And Interlocks
(used) water. Section 3.12. Alarms and Interlocks The K465i GaN Alarms function on three levels, each level connected to others while functioning independently (see Chapter 1, Safety Summary): Software Alarms  PLC (Primary Logic Controller) Alarms ...
Page 77: System Processes
K465i Operations and Maintenance P/N 1212831 Rev C Section 3.13. system Processes For operations and maintenance of Veeco Turbodisc systems, we provide detailed process descriptions within the user documentation. The documented system processes include the following: System Setups – System Readiness Checklist ...
Page 78: Figure 3-10. Generic System Process Diagram
K465i Operations and Maintenance P/N 1212831 Rev C Figure 3-10. Generic System Process Diagram Page 3-42 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 79: Chapter 4. Operations
Nexus User Manual where needed. Section 4.1. K465i GaN System Startup This section describes the system startup of the K465i GaN system following a shutdown. The procedures included in this section apply to: a daily system startup establishing system readiness ...
Page 80: Figure 4-1. Front View Assembly
K465i Operations and Maintenance P/N 1212831 Rev C Figure 4-1. Front View Assembly Page 4-2 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 81: Procedures In This Section
Reference Drawings List  System Footprint  Gas Schematic Diagram (GSD)  ASSOCIATED PROCEDURES IN THIS SECTION K465i GaN System Shutdown  Palladium Cell Operation  Vacuum Pump Operation  Robot Setup and Adjustment  Page 4-3 ©...
Page 82: Daily Startup And System Readiness
DAILY STARTUP AND SYSTEM READINESS Although every manufacturing location must prepare for equipment shutdown and restart, the ideal working schedule for the K465i GaN system is a non-stop production arrangement, with cyclical scheduling of system readiness preparation and testing. Such an arrangement allows for consistent production with enough time between runs for adequate system checks, for resupply of chemicals and replacement parts and for safety tests.
Page 83: Startup Following A Maintenance Shutdown
16. Open the pneumatic valve (c) in the Alkyl line between the Alkyl Injector MFCs and the Alkyl Injector Block. Wait one minute. 17. When the MFCs reads zero flow, close pneumatic valve (c) in the Alkyl line. Page 4-5 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 84 5. Pressurize the reactor by opening the N Push line isolation valve (b) to 50 torr. When the reactor reaches 50 torr, close the isolation valve (b). Refer to Figure 4-2 for valve locations. Page 4-6 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 85 Nexus Alarm diagram. Warning! You must proceed through the System Readiness List. Catastrophic conditions could occur if you fail to ensure that these procedures have been carried out. Page 4-7 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 86: Figure 4-2. Generic System Diagram
VALVES PARTICLE FILTER (d1) ISOLATION VALVES ALKYL INJECTOR BLOCK PNEUMATIC BALL VALVE (V2) THROTTLE GATE VALVE MANUAL VALVE (V1) FROM BUBBLERS PROCESS PUMPS Figure 4-2. Generic System Diagram Page 4-8 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 87: Startup Following A Facilities Maintenance Power Shutdown Or Emergency Electrical Stop
6. Verify that the toxic gas monitor is on and that there are no toxic gas monitor alarms. 7. Turn on and re-boot the system computers (Nexus, InSitu Monitoring) as necessary. Page 4-9 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 88 27. Ensure that the Heat Exchanger liquid level is normal and operational, at proper temperature, and that its reservoir is full. 28. Verify that the cooling water is flowing to all cooled components by checking the flowmeters and/or Nexus Alarm display. Page 4-10 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 89: Vacuum Pump Operation
This section contains a summary of basic operating procedures for the pumps used with the K465i GaN. The procedures are a synopsis of each pump’s operating manual. For a complete description of pump operation and maintenance procedures, please refer to the pump’s operating manual, located in the Vendor documents section of the documentation...
Page 90: Reference Drawings
The following drawings are provided to assist in the performance of the procedures contained in this section: Reference Drawings List  System Footprint  Gas Schematic Diagram (GSD)   ASSOCIATED PROCEDURES Leak Checking  Page 4-12 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 91: Process Pump
Caution: Supply a sufficient amount of cooling water to prevent rotor contact due  to a rise in temperature. Typical running temperatures should be 120 - 130 Page 4-13 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 92: Pre-Operation Of The Ebara Process Pump
10. After setting the regulator pressure, lock it by pushing the red stopper on the regulator knob. Note: The N dilution mode option is not normally used with K465i GaN tools. The N Selector valve should be closed. 11. Turn on external power to the pump.
Page 93: Figure 4-3. Ebara Pump, Front View
K465i Operations and Maintenance P/N 1212831 Rev C Figure 4-3. Ebara Pump, Front View Figure 4-4. Ebara ESA25 Pump, Side View Page 4-15 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 94 Indicates Booster Pump running when lit M.P. RUN Indicates Main Pump running when lit LOCAL Indicates LOCAL mode when lit ALARM Indicates ALARM condition when lit TRIP Indicates TRIP condition when lit Page 4-16 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 95: Ebara Process Pump
Warning! Do not touch the pump casing and exhaust piping during operation, or for a period of time after operation ceases; do not remove the pump cover during operation. Page 4-17 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 96 8. Close the manual valve in the reactor exhaust line (running from the reactor to the pump) closest to the pump inlet. 9. To stop the pump, press the Stop key on the LCD controller. Page 4-18 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 98: Turbo Pump
P/N 1212831 Rev C TURBO PUMP The (optional) Turbo Pump provides a high vacuum Transfer Hub option for the K465i GaN. This option consists of a turbomolecular pump, ion gauge, and associated plumbing to pump down the Transfer Hub with a standard vacuum pump, and then switch over to the Turbo Pump to achieve 10-7 torr.
Page 99: Section 4.3. Wafer Loading And Unloading
Robot Setup for K- Systems  Nexus Manual  TOOLS AND MATERIALS CHECKLIST Substrates  Wafer Carriers  Vacuum Wand  Wafer Tweezers  Face Shield (optional)  Page 4-21 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 100: Loading Substrates Onto A Wafer Carrier
Caution: Do not let the substrate handling tool come in contact with the wafer carrier. Excessive contact of the handling tool with the wafer carrier can damage the wafer carrier coating. Page 4-22 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 101: Unloading Substrates From A Wafer Carrier
3. Visually inspect the wafers as required by the product quality plan. 4. Repeat steps 1 - 3 until all of the wafers have been unloaded and transferred into the appropriate container(s). Page 4-23 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 102 3. Roll the tweezers 180 and slide under wafer. 4. After sliding the tweezers under the wafer, close the tweezers, grab the wafer and lift. 5. Place wafer in applicable storage container. Page 4-24 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 103: Section 4.4. Palladium Cell Operation
The followings drawings are provided to assist in the performance of the procedures contained in this section. Reference Drawings List  System Footprint  Generic System Diagram (GSD)  Page 4-25 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 104: Operating Precautions
1,000 ppm, an Oxygen-Removing Purifier can be installed in the feed line to the Hydrogen Purifier. Page 4-26 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 105: Cell Installation
If the actual temperature reaches or exceeds 400°C during the 15 minute ramp  period, the ramp function ends immediately. Page 4-27 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 106: Normal Operation
The purifier has three operating modes as shown in Table 4-3. During normal operation, no manual adjustments to operating valves or the temperature controller is required. The K465i GaN control system provides the required combination of pneumatic control signals to activate the required mode of operation base on the state of the system.
Page 108: Cell Removal
9. Transfer the Palladium Cell to the appropriate storage location. Timely disposition of the cell is required, because those under warranty require immediate return to the vendor for repair. Page 4-30 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 109: Section 4.5. Temperature Controllers
System Footprint  Gas Schematic Diagram (GSD)  RHA Wiring Diagram  Temperature Control Plan  REFERENCE DOCUMENTS Eurotherm Manual  Eurotherm Handbook  Itools Program Manual  Page 4-31 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 110: Configuration Of Temperature Controller
Caution: Do not adjust the overtemperature alarms in the PID controller for the Eurotherm devices. It is essential that these settings remain as preset. The K465i GaN utilizes a customized version of the Eurotherm displays, not shown in Figure 4-6.
Page 111: Section 4.6. Temp Control Communication
The requirements of three hardwired interlocks must be met to enable power supplies. Those requirements are: a. The PLC monitors the system’s upper-level software and disables the power supplies through processing systems software. Page 4-33 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 112 PLC via a digital input where the the PLC will disable the PSs and the Nexus computer will initiate a controlled shutdown of the tool. Page 4-34 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 113: Selecting Temperature Control Modes
6. Select the Mode cell in the layer to be set up. 7. Click the down arrow in the cell and select desired PID mode. 8. Verify that the cell reflects the desired PID mode. Page 4-35 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 114: Temperature Settings
PyroControl temperature setting. Note that these settings may not be the same and may require several calibration growth runs to determine. Page 4-36 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 115: Figure 4-9. Sample Control Mode Switch Routine
K465i Operations and Maintenance P/N 1212831 Rev C Figure 4-9. Sample Control Mode Switch Routine Page 4-37 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 116 Section 4.7. PyroControl Operation This section covers pyrometer temperature control of the K465i GaN system. Included is a description of pyrometer control, and the benefits of using this temperature control scheme. The procedure also details how to switch between different temperature control modes.
Page 117: Pyrocontrol Introduction
Precise control of temperature during the deposition process is key to maintaining material quality and repeatability of results. Due to the inherent difficulties associated with K465i GaN MOCVD growth, determining a reliable method for controlling process temperatures is a significant challenge. Because of the transparent nature of the sapphire substrates commonly used for the growth of high-brightness LEDs, thermo-radiance from the wafer surface cannot be directly measured.
Page 118: Description Of Pyrocontrol
P/N 1212831 Rev C DESCRIPTION OF PYROCONTROL To accommodate the 21 x 2” wafer carrier configuration used in the K465i GaN reactor, three pyrometers are attached to viewports on the flow flange. As shown in Figure 4-10, this configuration provides the pyrometers with a direct, unobstructed view of the carrier surface.
Page 119: Using Pyrocontrol For Temperature Control On K465I Gan Systems
Robot Setup and Adjustment This section discusses the set up, operation, and maintenance for the robot wafer carrier transfer system used with the K465i GaN. Topics include set up, adjustment, and troubleshooting of the robot. Basic and advanced command sets are also included.
Page 120: Procedures In This Section
 Setting the Safe Positions  Troubleshooting  REFERENCE DRAWINGS There are no following drawings provided to assist in the performance of the procedures contained in this section. Page 4-42 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 121: Associated Procedures
Combination Wrenches or Crescent Wrench  Screwdrivers  Aluminum Foil  Container for Loose Small Parts  Cleanroom Compatible Gloves  System Maintenance Logbook  Step Stool  Page 4-43 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 122: Identifying Stations For The Transfer System
Failure to follow this order can result in broken carriers or damage to the transfer robot. Read this entire set-up procedure before trying to manually move the robot. Page 4-44 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 123: Figure 4-12. Stop Robot Button
V (and v) is in the glovebox carrier antechamber. This is the point where grown  wafers are unloaded and new wafers are loaded. Page 4-45 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 124: Robot Axis Identification
T-Axis - 1 deg = 1,000 units R-Axis - 1 inch = 10,000 units Z-Axis - 1 inch = 10,000 units Figure 4-14. Top View Z Axis Elevator Motor Locations Page 4-46 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 125: Basic Command Overview
0 cancels teaching and deletes the station and ENT 1 Option # of 1 confirms teaching. SST Station, Value This command sets the stroke for the specified station. SST H, 0 Page 4-47 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 126 If no axis is specified, then all servomotors stop. This command moves the robot directly to the taught MTP Station position of the given station. The robot will not retract MTP H first. Page 4-48 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 127: K-Series Tools And Robot Stations
To put down a platter, a sequence such as the following is used: MTS g PUT g,1,2 MTP G MTS G To pick up a platter, the sequence is reversed: MTS G GET G,1,2 MTP g MTS g Page 4-49 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 128: Setting Up Stations For The Transfer Robot
If one side or the tip of the fork are too high or low, the tilt can be adjusted by moving a specific Z motor elevator. The location of the Z1, Z2, and Z3 elevators in (Figure 4-14) should enable an anticipated move. Page 4-50 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 129 SVN to restart the robot. The robot remembers its position even if the servos shut down, but the alignment may have shifted due to crashing so all stations will need to be rechecked. Page 4-51 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 130: Troubleshooting
K465i Operations and Maintenance P/N 1212831 Rev C TROUBLESHOOTING Note: If you cannot determine why the robot transfer system is operating incorrectly, call Veeco TurboDisc Operations at 1-8TURBODISC. Symptom: Loss of power to robot controller. Actions: 1. Re-energize the robot controller.
Page 131: Section K465 I G A N System Shutdown
Section 4.9. K465i GaN System Shutdown This section covers shutting down the K465i GaN system. Procedures are included describing techniques for shutting down the system overnight and for routine maintenance. The Maintenance Shutdown Procedure is the first step for all subsequent system maintenance procedures.
Page 132: End-Shift Idle Procedure
4. Verify that all toxic gas monitors have sufficient tape to provide continuous monitoring throughout the shutdown period. 5. Using the front breaker switch, turn off the heater filament power supplies. Page 4-54 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 133: Maintenance Shutdown Procedure
P/N 1212831 Rev C MAINTENANCE SHUTDOWN PROCEDURE The following procedure should be used to prepare the K465i GaN for maintenance. Because the system will be opened to outside air, all potentially hazardous gas must be removed from the reactor and from any feed lines that will be opened. Each feed line will first be evacuated of all gas.
Page 134: Figure 4-16. Generic System Diagram
VALVES PARTICLE FILTER (d1) ISOLATION VALVES ALKYL INJECTOR BLOCK PNEUMATIC BALL VALVE (V2) THROTTLE GATE VALVE MANUAL VALVE (V1) FROM BUBBLERS PROCESS PUMPS Figure 4-16. Generic System Diagram Page 4-56 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 135 21. Reset the Alkyl Injector MFCs and Alkyl Injector Block PC99 (d1) to zero/Analog 91. 22. Close the pneumatic valve (AV-133) between the N Push Injection MFCs and the reactor. Page 4-57 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 136 AV-135 and AV-136) to the reactor in the Hydride, Alkyl, Push Injection, Isolation and Port Purge lines. 46. Close the pneumatic valve (AV-145) to the Transfer Hub. 47. Close the valve between the reactor and the particle filters. Tag the valve closed. Page 4-58 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 137 (source isolation valve MV-3). 52. Verify that all toxic gas monitors have sufficient tape to provide continuous monitoring throughout the shutdown period. Turn off the heater filament power supplies. Page 4-59 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 138: Facilities Maintenance Shutdown Procedure
10. Close the manual ball valve between the reactor and the Particle Filters. Tag the valve closed. Note: Refer to Vacuum Pump Operation for specific instructions regarding pump shutdown and startup. Page 4-60 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 139 If there will be a loss of facility power or cooling water: 11. Turn off the heat exchangers. 12. Turn off the bubbler baths. 13. Exit Nexus and RealTemp and shut down the computers. Page 4-61 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 141 6. Close the manual bubbler valves by first closing the inlet valves and then by closing the outlet valves. For the series bubblers, close the valves on the upstream cylinders (closest to the hydrogen supply first) and then close valves on the downstream cylinder. Page 4-63 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 142: Chapter 5. Maintenance And Repair
Note: Follow the recommended Routine Maintenance Schedule for each major system component (including Chamber, Flow Flange, Exhaust Lines, Particle Filter and Loadlock/Hub). For the maintenance schedule, click here. Page 5-1 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 143: Section 5.1. Routine Maintenance
P/N 1212831 Rev C Section 5.1. Routine Maintenance This section covers basic maintenance procedures for the K465i GaN system. While comprehensive, these procedures can be adapted for specific applications. Final maintenance procedures and safety practices should be based upon this manual, good laboratory practices, and any and all facility and government regulations.
Page 144 In particular the K465i GaN Safety Summary section at the beginning of this manual should be reviewed. At the start of each procedure there is also a Safety Precautions and Hazards Management section that outlines specific safety issues and hazards associated with that procedure.
Page 145: Section 5.2. Basic Maintenance Steps
(step 2 of the Maintenance Preparation Outline below). The maintenance log should also be periodically reviewed as part of the general maintenance and safety procedures. Page 5-4 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 146: Maintenance Preparation
The following outline forms the basis of all maintenance procedures used at Veeco Compound Semiconductor and documented in this manual. Specific procedural details are listed within each individual section in the manual. Please consult Veeco technical support or the facility safety officer with any questions regarding these principles.
Page 147: Section K465 I G A N Reactor Chamber Maintenance
Section 5.3. K465i GaN Reactor Chamber Maintenance This section covers maintenance to the K465i GaN reactor chamber. It includes disassembly, cleaning, and reassembly procedures as well as specific steps to prepare the system for maintenance. Basic system shut down and leak checking procedures are not covered in this section.
Page 148: Associated Documents
K465i Operations and Maintenance P/N 1212831 Rev C Leak Checking  K465i GaN Flow Flange Maintenance  K465i GaN Heater Maintenance  K465i GaN System Startup  ASSOCIATED DOCUMENTS Maintenance Schedule  Page 5-7 © Veeco Instruments, Inc. Confidential Copyright...
Page 149: Recommended Tools And Materials
Two 8ft (2.4m) pieces of 1/8 tubing for shutter lowering  Ultra High Vacuum Aluminum Foil  Flow Flange Hydraulic Lift Assembly  1/4”, 1/2”,3/4” Ni VCR Gaskets (Veeco PN: 8898E01, 1000404,1094021)  Cleanroom Wipes  Cleanroom compatible Long Q Tips (cotton swab with plastic stick) ...
Page 150: Preparing The Reactor For Maintenance
2. Open the Chamber Maintenance window. Figure 5-1. Process Module 1 Window > Chamber Maintenance 3. Click Pump Purge Chamber and follow the on-screen prompts to Pump and Purge the chamber. Page 5-9 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 151: Figure 5-2. Chamber Maintenance Window
4. Ensure that all the power supplies are turned off – use the toggle switches located on the front of the power supplies. Figure 5-3. Toggle Switches on Power Supplies Page 5-10 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 152: Figure 5-4. Power Supply Breakers (Locked Out)
5. Turn off all the breakers in the CBA for the power supplies and ensure that they are locked out properly. Figure 5-4. Power Supply Breakers (Locked Out). 6. As given in the screen instructions, ensure that the tool is in N2 idle. Figure 5-5. Mandatory Instructions Page 5-11 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 153: Figure 5-6. Manual Valves For Bubblers H2, Nh3, And Sih4
K465i Operations and Maintenance P/N 1212831 Rev C 7. Close the manual valves for the bubblers H2, NH3 and SiH4. Figure 5-6. Manual Valves for Bubblers H2, NH3, and SiH4. Page 5-12 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 154: Figure 5-7. Continue>>Prepare Chamber For Maintenance
P/N 1212831 Rev C 8.Click << Continue >> Prepare Chamber for maintenance. Figure 5-7. Continue>>Prepare Chamber for Maintenance 9.When Pump/Purge is complete, click Backfill Chamber. Figure 5-8. Backfill Chamber Page 5-13 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 155: Figure 5-9. Onscreen Directions, Chamber Maintenance Window
Figure 5-9. Onscreen Directions, Chamber Maintenance Window 11. Close each manual valve (MV53 and MV54) above the Ebara pumps (see Figure 5-10). Figure 5-10. Close Manual Valves - MV53 and MV54 Page 5-14 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 156: Figure 5-11. Manual Ball Valves - Mv104 And Mv105
Figure 5-11. Manual Ball Valves - MV104 and MV105 13. Verify or open slowly the manual ball valve between the Main Process Vacuum Valve (Isolation valve) and the particle cart filter (MV106). Page 5-15 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 157: Figure 5-12. Manual Ball Valve - Mv106
15. When the backfill chamber process is completed, the message shown in Figure 5-14 appears in the log information screen. 16. Follow the remaining instructions in the log information screen. Page 5-16 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 158: Figure 5-14. (Backfill Process Is Complete) The Reactor Is At Atmosphere
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-14. (Backfill Process is Complete) The Reactor is at Atmosphere Page 5-17 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 159: Figure 5-15. Valves Mv104 And Mv105 In Closed Position
P/N 1212831 Rev C 17. Close the two manual ball valves (MV104 and MV105) between the particle cart and the reactor. Figure 5-15. Valves MV104 and MV105 in Closed Position Page 5-18 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 160: Figure 5-16. Valve Mv106 In Closed Position
The reactor and particle filter are vented. Figure 5-16. Valve MV106 in Closed Position 19. Gather all necessary parts and tools. 20. Proceed with the Flow Flange Removal. Page 5-19 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 161: Flow Flange Removal
2. Turn off the Adixen pump for the THA/Differential seal (see Figure 5-17) using the black toggle switch on the back of the pump. Figure 5-17. Power to the Adixen Pump Turned Off. Page 5-20 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 162: Figure 5-18. Pyrometer, Drt And Real Temp Cables
P/N 1212831 Rev C 3. If present, verify/label and disconnect the cables from the top of all the pyrometer/RT/DRT heads. Figure 5-18. Pyrometer, DRT and Real Temp Cables Page 5-21 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 163: Figure 5-19. Disconnecting Of Alkyl Heater Wires From Pdu
K465i Operations and Maintenance P/N 1212831 Rev C 4. Turn off and disconnect flow flange alkyl line heaters. Figure 5-19. Disconnecting of Alkyl Heater Wires from PDU. Page 5-22 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 164: Figure 5-20. T/C On Devicenet Module
5. Verify, label and disconnect the numerous T/C water connections on the flow flange. Remove these connections from the DeviceNet T/C module on the reactor cart. Figure 5-20. T/C on DeviceNet Module Page 5-23 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 165: Figure 5-21. Power For Lytron Heat Exchangers
K465i Operations and Maintenance P/N 1212831 Rev C 6. Turn off the heat exchangers supplying cooling water to the flow flange (see Figure 5-21). Figure 5-21. Power for Lytron Heat Exchangers Page 5-24 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 166: Figure 5-22. Flow Flange Cooling Lines
8. Disconnect the water lines at the viewport and reactor cooling band (see Figure 5-22). Use a suitable container to collect any residual water that may drip from the lines. Page 5-25 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 167: Figure 5-23. Viewport And Reactor Band Cooling Lines
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-23. Viewport and Reactor Band Cooling Lines. Page 5-26 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 168: Figure 5-24. Cda Lines For The Shutter
9. Disconnect the two CDA lines at the SMC double check block for the shutter, ensuring that the lines are properly labeled prior to removal. Figure 5-24. CDA Lines for the Shutter Page 5-27 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 169: Figure 5-25. Molex Connector For The Shutter Sensor
K465i Operations and Maintenance P/N 1212831 Rev C 10. Disconnect the Molex connector for the shutter sensor (see Figure 5-25). Figure 5-25. Molex connector for the Shutter Sensor. Page 5-28 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 170: Figure 5-26. Flow Fange Assembly Gas Lines
11. Disconnect the alkyl, main hydride, center purge, viewport purge and reactor isolation feed gas lines to the flow flange assembly VCR (see Figure 5-26). Figure 5-26. Flow Fange Assembly Gas Lines Page 5-29 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 171: Figure 5-27. Clamp Removal
K465i Operations and Maintenance P/N 1212831 Rev C 12. Remove the clamps securing the flow flange assembly to the reactor (see Figure 5-27). Figure 5-27. Clamp Removal Page 5-30 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 172: Figure 5-28. Lift Attached To The Flow Flange Assembly
Figure 5-28. Lift Attached to the Flow Flange Assembly Caution: Prior to lifting the flow flange from the reactor, verify that there are no remaining connections that would prevent safe removal of the flow flange assembly. Page 5-31 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 173: Figure 5-29. Manual Isolation Valves And Connections
Warning! To avoid having the flow flange strike the top of the system frame, do not raise the flow flange too high. 16. Carefully pull the lift assembly away from the reactor chamber. Figure 5-29. Manual Isolation Valves and Connections Page 5-32 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 174: Figure 5-30. Insitu Monitor Over Flow Flange
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-30. InSitu Monitor Over Flow Flange Page 5-33 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 175: Heater Removal
5. Drain all water from the heater’s lines and assembly. 6. Loosen and remove the cap screws on the o-ring retainers for the heater assembly cooling tube (see Figure 5-105). Page 5-34 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 176: Figure 5-32. Heater Baseplate Assembly
8. Raise the heater assembly from the holes of the electrode bushings and baseplate water lines (see Figure 5-106) on the reactor cart frame, and place it on a clean, flat surface. Figure 5-32. Heater Baseplate Assembly Page 5-35 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 177: Reactor Chamber Cleaning
Uneven deposition on the reactor wall usually indicates an imbalance in the gas flow. Veeco TurboDisc recommends the taking of photographs of the chamber condition each time the reactor is opened, to support system maintenance records.
Page 178 Deposition should be even around the chamber wall, and primarily it occurs below the plane of the wafer carrier. Uneven deposition on the reactor wall usually indicates an imbalance in the gas flow. Page 5-37 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 179: Figure 5-34. A: Vacuuming The Chamber B: Hepa Filtered Toxic Materials, Esd-Grounded
Fireproof Vacuum Cleaner. Ensure that the top of the exhaust ring has been vacuumed thoroughly. Figure 5-34. A: Vacuuming the chamber B: HEPA Filtered Toxic Materials, ESD- Grounded Fireproof Vaccum Cleaner Page 5-38 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 180: Figure 5-35. Removal Of Exhaust Ring Following Removal Of Ring Mounting Screws
K465i Operations and Maintenance P/N 1212831 Rev C 7. Remove the exhaust ring cover and vacuum this area thoroughly. Figure 5-35. Removal of Exhaust Ring Following Removal of Ring Mounting Screws Page 5-39 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 181: Figure 5-36. Liner For Heater Assembly (After Removal From Reactor)
10.Vacuum out the square exhaust ports using a smaller vacuum line which allows access to this smaller area. 11.Use DRY cleanroom wipes to slowly wipe the walls of the chamber (no IPA is to be used). Page 5-40 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 182: Figure 5-37. Wiping Of Front Viewport
12.Vacuum both the front and rear view ports of the chamber, slowly wipe the viewports with dry Cleanroom wipes and then vacuum once again. Figure 5-37. Wiping of Front Viewport Page 5-41 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 183: Figure 5-38. Wiping Of The Pass-Thru Area
Figure 5-38. Wiping of the Pass-Thru Area 14.Vacuum the bottom of the chamber. 15. Use DRY Cleanroom wipes to slowly wipe the liner for the heater assembly (IPA is not to be used). Page 5-42 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 184: Figure 5-39. Vacuuming Of The Shutter
18. Vacuum the bottom of the flow flange, ensuring that the vacuum nozzle does not come in direct contact with the flow flange (keep ~ ¼ inch distance between vacuum nozzle and flange). Page 5-43 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 185: Figure 5-40. Wiping Of Flow Flange Bottom
22. Vacuum and then slowly wipe the liner for the heater assembly using dry Cleanroom wipes(No IPA). 23. Reinstall the liner for heater assembly ensuring that it is seated correctly in the groove. Page 5-44 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 186: Heater Reinstallation
26. Vacuum the entire reactor chamber again. 27. Ensure that no tools and wipes have been left in or around the chamber. 28. If scheduled, proceed with flow flange disassembly and maintenance as described in K465i GaN Flow Flange Maintenance.
Page 187 4. Align the copper electrodes with the ceramic bushings. 5. Slowly lower the heater assembly (including the inner filament, shown in red) into the holes of the electrode bushings and baseplate water lines (see Figure 5-109). Page 5-46 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 188: Figure 5-42. Heater Baseplate Assembly
10 ft-lbs. Finish assembling the copper electrode assembly by installing the tee fitting assembly (see Figure 5-110). Page 5-47 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 189: Figure 5-43. Heater Baseplate Assembly Bottom View
Figure 5-43. Heater Baseplate Assembly Bottom View 7. After ensuring that the o-ring is in place, tighten the cap screws on the o-ring retainers for each heater assembly cooling tube (see Figure 5-110). Page 5-48 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 190: Flow Flange Reinstallation
The following procedure describes the steps necessary to return the system to operational status after maintenance. Subsections include preparing the system for leak checking, leak checking the system, and returning the system to run status. Page 5-49 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 191: Preparing For Leak Checking
MFCs referenced in this section. Also, refer to the system drawing to determine where the nearest leak checking port is located. See Section 5.9, Leak Checking. Figure 5-44. Generic System Diagram Page 5-50 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 192 19. When leak checking is finished, retighten the flow flange clamps until they are just snug. Do not over tighten. 20. Start up the system following the System Startup Following a Maintenance Shutdown procedure outlined in the K465i GaN System Startup section. 21. Perform a bakeout on the reactor. Note: It is recommended that a second leak check is performed after the bakeout, following the same proceedures used for the first leak check.
Page 193: Section K465 I G A N Flow Flange Maintenance
Section 5.4. K465i GaN Flow Flange Maintenance This section covers maintenance to the K465i GaN flow flange. It includes disassembly, cleaning and reassembly procedures. It assumes that the flow flange has been removed following the steps outlined in the previous section, Reactor Chamber Maintenance.
Page 194  Container for Loose Small Parts  Container to Catch any Residual Water in Cooling Lines  Waste Container for Used Wipes, etc.  System Maintenance Logbook  Page 5-53 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 195: Flow Flange Disassembly Guide
P/N 1212831 Rev C FLOW FLANGE DISASSEMBLY GUIDE Prepare the Flow Flange for disassembly by following the steps given in the Flow Flange Removal Procedure in the previous section, K465i GaN Reactor Chamber Maintenance. Procedure 5-7: Flow Flange and Shutter Disassembly Notes:...
Page 196: Figure 5-45. Flow Flange Tubing And Water Connections
Valves 104, 105, 106, 53, and 54 are all closed (see Figure 5-46)  The Reactor Chamber is at atmosphere.  The Particle Filter is at atmospheric pressure. Page 5-55 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 197: Figure 5-46. Exhaust Line Flow Diagram
P/N 1212831 Rev C Figure 5-46. Exhaust Line Flow Diagram 1. From the Chamber Maintenance screen, select the Vacuum chamber for leak check option. The Chamber Maintenance Leak Check window appears. Page 5-56 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 198: Figure 5-47. Chamber Maintenance - Vacuum Chamber For Leak Check
Figure 5-47. Chamber Maintenance - Vacuum Chamber for Leak Check The log information windows appear (Figure 5-48 and Figure 5-49). Figure 5-48. Chamber Maintenance - Vacuum Chamber for Leak Check (First View) Page 5-57 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 199: Figure 5-49. Chamber Maintenance - Vacuum Chamber For Leak Check (Second View, Scrolling)
3. Open each manual valve above the Ebara pumps (see Figure 5-50 - MV53 and MV54). Figure 5-50. Opening of Manual Valves - MV53 and MV54. 4. Open the outlet manual valve (MV-106) of the particle filter slowly. Page 5-58 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 200: Figure 5-51. Opening Of Mv106
5. Slowly open the two manual ball valves between the particle cart and the reactor (MV104 and MV105). Figure 5-52. Manual Ball Valves - MV104 and MV105. 6. After completing through step 6, click on Continue. The Log Information window (see ) appears. Page 5-59 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 201: Figure 5-53. Continue Vacuum Chamber For Leak Check
Figure 5-54. Log Information Visible After Clicking on Continue 7. The chamber automatically pumps down and the screen shown in Figure 5-55 appears, indicating that the chamber is ready to be leak-checked. Page 5-60 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 202: Figure 5-55. Chamber Ready For Leak Checking
Figure 5-55. Chamber Ready for Leak Checking 8. Close each manual valve (MV53 and MV54)above the Ebara pumps (see Figure 5-56). The system is ready to be leak checked. Follow sections 5-74 and 5-109 in the K465i GaN Operations and Maintenance CD for leak checking procedures.
Page 203: Figure 5-57. Bottom Of Flow Flange
(Figure 5-57). Figure 5-57. Bottom of Flow Flange 4. Loosen and remove the vented screws (16 total), securing the confined inlet (donut) to the flow flange weldment. Page 5-62 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 204 11. To remove the gas screen from the coldplate, loosen and remove the vented screws securing the screen. 12. Remove the screen from the coldplate. 13. Rotate the Flow Flange assembly 180 degrees. 14. Remove the baffled section. Page 5-63 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 205: Flow Flange Reassembly
Then secure the Cover to the Adaptor using 16 pcs. of #8- 32 x5/8” Silver plated SHCS using a torque wrench set at 55 in-lbs. Follow the installation sequence below. Page 5-64 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 206: Figure 5-59. Viewport Cover Mounting Holes
Figure 5-60. Cleaning of O-Ring Grooves on Flow Flange 9. Lay out all o-rings to be used on a large piece of clean UHV aluminum foil, then clean each one with a Tex-wipe and propanol. Page 5-65 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 207: Figure 5-61. Preparing O-Rings
The seams must not be in a position to run along the top nor bottom surfaces, as this would increase the risk of leakage. Install o-ring in the inside groove and install o-ring in the outside groove. Page 5-66 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 208: Figure 5-63. Application Of O-Rings
13. Take note of the direction of the two glands on the side of the Viewport Adapter and position them so that they face the same side as the front of the Flow Flange (marked F on top of the FF). Page 5-67 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 209: Figure 5-65. Flow Flange Positioning And Glands
15. Prepare the FF forklift by ensuring that the retaining pins are in the outside position and align the retaining pins on the fork arms with the retaining holes on the FF lifting brackets. Page 5-68 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 210: Figure 5-67. Forklift Preparation
Figure 5-68. Retaining Rings and Forklift 17. Lift FF to approximately 3’ from the floor and install leak check fitting on the VCR gland as shown below on the Viewport Adapter. Page 5-69 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 211: Figure 5-69. Leak Check Fitting
FF upside down. Secure the FF by reinserting the retaining pins back into the brackets. Page 5-70 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 212: Figure 5-71. Releasing Of Pins, Inverting Of Flow Flange
Figure 5-71. Releasing of Pins, Inverting of Flow Flange 20. Wipe all bottom surfaces with Tex-wipe and propanol, then install 10 spacers within the counterbored holes indicated below. Page 5-71 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 213: Figure 5-72. Placement Of Manifolds
1. Carefully place the two Hydride Manifolds on the FF, taking care not to topple the spacers underneath. 2. Screw down the Hydride Manifolds using 10 SHCS #8-32 x 3/8” and 10 SHCS #8-32 x ½”. Page 5-72 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 214: Figure 5-73. Manifolds Placement
4. Prepare the Cold Plate assembly by placing the Cold Plate on a clean room approved surface, such as UHV foil or Tex-wipes, with the aid of another person. Clean the top surfaces using a Tex-wipe and propanol. Page 5-73 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 215: Figure 5-74. Tin Foil Preparation
Figure 5-74. Tin Foil Preparation Figure 5-75. Wiping Surface Clean 5. For Cold Plate designs that require Alkyl Plugs, follow MI-1201582, for installation of the Alkyl Plugs into the Cold Plate. Page 5-74 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 216: Figure 5-76. Scraping Of Metal Surface
There are Four installation guide screws (2-56 set screws) used to align the screen, spring spacer, and retainer. 6. Install the guide screw in each of the four outer screws, closest to the viewport cutout. Page 5-75 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 217: Figure 5-77. Installation Of Guide Screws As Per Viewport Cutout
Always hold screen at the left and right of the viewport cutout. Do not allow the screen to fold in parallel with the cutouts, as creases/folds may form in the screen. Page 5-76 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 218: Figure 5-78. Screen, Showing Viewport Cutout (Black Ovals Indicate Part Number Locations)
The screen DOES NOT always sit flat on the cold plate. Spring Spacers 9. Install the spring spacer on top of the screen with the springs protruding up. Page 5-77 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 219: Figure 5-79. Springs Protruding Upward
Remove the four guide screws and replace with 2-56 socket head screw. Pattern for tightening the 2-56 screen screws: -Always start from center and work outward. Spring Retainers Page 5-78 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 220 16. Remove the four guide screws and replace with 2-56 socket head screw. Note: Use the following pattern to tighten the 2-56 screen screws: Always start from center and work outward. Page 5-79 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 221: Figure 5-81. Screw Application Pattern
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-81. Screw Application Pattern Page 5-80 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 222: Figure 5-82. Applying Pressure Close To Center
In installation, the spring spacer will keep positive pressure on the screen even if the retainer is not sitting flat. It is common to see the retainer raised at the edges and along the two shortest rows. Page 5-81 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 223: Figure 5-83. Retainer And Spring Contact
-The gasket does not sit flat when placed on a flat surface. A crease is located approximately midway between the outer and inner diameter of the gasket. Page 5-82 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 224: Figure 5-84. Gasket Crease
19. Using two people, lift the gasket above cold plate, align the shutter cutouts on the gasket and cold plate, check that the cold plate’s water tubes are aligned with the gasket’s holes, and lower the gasket onto the cold plate. Page 5-83 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 225: Figure 5-85. Leveling And Support Of Gasket During Lowering
20. With completion of the screen and gasket installation, flip the CP upside down. 21. Install a ¼-20 lifting loop on each side of the CP as shown. Page 5-84 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 226: Figure 5-86. Cold Plate Lifting Loops
CP assembly by the lifting hooks, match the notches and the tubes on the CP with the holes on the FF assembly and slowly lower the CP assembly on the FF assembly. Once the CP has been fully lowered onto the FF assembly, remove the two lifting loops. Page 5-85 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 227: Figure 5-87. Lowering Of Cold Plate Onto Flow Flange
23. Match the four tubes on the CFI Weldment tubes with the four largest holes on the CP, and the c’bored holes on the CFI Weldment with the thru holes on the CP, then slowly lower the CFI Weldment onto the CP. Page 5-86 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 228: Figure 5-88. Cfi Weldment Into Cold Plate
25. Wipe down the CFI and the Shutter with Tex-wipe and Propanol, then flip the FF Assembly right side up. Next position the FF Assembly over the Shutter, taking care to match the Shutter tubes to the holes on the FF Assembly. Page 5-87 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 229: Figure 5-90. Lowering Flow Flange Assembly Onto Shutter
Figure 5-90. Lowering Flow Flange Assembly onto Shutter 26. Slowly lower the FF Assembly on the Shutter until the FF Assembly rests on the Shutter, then remove the forklift attachments. Page 5-88 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 230: Figure 5-91. Flow Flange Assembly Lowered Onto The Shutter
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-91. Flow Flange Assembly Lowered onto the Shutter Page 5-89 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 231: Figure 5-92. Shutter Tube Spacer
28. Wipe down the surfaces around the o-ring with Tex-wipe, and then using a screwdriver that is protected by a Tex-wipe, align the Shutter tubes with the holes on the FF. Figure 5-93. Wiping O-Ring Surfaces/Aligning Shutter Tubes with FF Holes Page 5-90 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 232: Figure 5-94. Cleaning And Assembling Lower Bellows Flange
30. Next lower the base on each of the Shutter tubes, making sure that the thru holes line match the tapped holes. Secure the base using six #10-32 x 1-1/2” SHCS. Page 5-91 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 233: Figure 5-95. Aligning/Securing The Shutter Base
32. Place air cylinder on each of the bases with the air ports facing on the left, then using four #10-32 x 7/8 SHCS and anti-seize on the threads, secure the air cylinders on the base. Page 5-92 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 234: Figure 5-97. Air Cylinder Assembly
Figure 5-97. Air Cylinder Assembly 33. Using a 3/8-24 SHCS, insert into the air cylinder rod, then pull the rod into its full extension. Figure 5-98. O-ring and O-ring Cap Assembly Page 5-93 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 235: Figure 5-99. O-Ring And O-Ring Caps
Figure 5-99. O-Ring and O-Ring Caps 35. Install O-ring Press Shutter Lift over each Shutter tube, then tighten with adjustable wrench, taking care not to twist the bellows below. Page 5-94 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 236: Figure 5-100. O-Ring Press Shutter Lift And Tightening
Figure 5-100. O-Ring Press Shutter Lift and Tightening 36. Place washer over the cylinder piston, then place bar. Secure using a 3/8-24 x 1.75” SHCS, and another washer. Page 5-95 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 237: Figure 5-101. Washer And Block Assembly
K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-101. Washer and Block Assembly Page 5-96 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 238: Figure 5-102. Air Hoses Installed Into Quick-Connect Ports
Figure 5-102. Air Hoses Installed into Quick-Connect Ports 38. Install the air hoses into quick-connect ports. Figure 5-103. Flow Flange Assembly Placed Aside, Prepared for RCA Assembly Page 5-97 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 239: Section K465 I G A N Heater Maintenance
Section 5.5. K465i GaN Heater Maintenance This section covers the removal and replacement of the K465i GaN heater assembly. All steps preceding the start of heater maintenance are covered in other procedures and are not covered in this section. Please refer to appropriate sections for the applicable procedures.
Page 240: Reference Drawings
Reference Drawings List  System Footprint  Gas Schematic Diagram (GSD)  Heater Assembly  ASSOCIATED PROCEDURES K465i GaN Reactor Chamber Maintenance  Leak Checking  K465i GaN Flow Flange Maintenance  ASSOCIATED DOCUMENTS Maintenance Schedule  Page 5-99 ©...
Page 241: Recommended Tools And Materials
Boron Nitride Replacement Parts  Waste Container for Used Wipes, etc.  System Maintenance Logbook  0 in-lbs – 50 in-lbs torque wrench  Torque screwdrivers  5/8” crowsfoot wrench  Page 5-100 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 242: Heater Assembly Removal
Removal and replacement of all outer filament supports, and damaged middle wire  supports Installation of Middle and Outer filaments and ceramic spacers  Filament Calibration with Algorithm  Page 5-101 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 243: Figure 5-104. Heater Assembly
Boron nitride/ceramic parts cannot be cleaned; therefore wear latex gloves when performing the following procedures and when handling the parts, and avoid exposing the parts to dust and debris. Page 5-102 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 244: Figure 5-105. Heater Baseplate Assembly Bottom View
5. Drain all water from the heater’s lines and assembly. 6. Loosen and remove the cap screws on the o-ring retainers for the heater assembly cooling tube (see Figure 5-105). Page 5-103 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 245: Figure 5-106. Heater Baseplate Assembly
10. Remove the Tungsten screws and remove the clamps from the connector ends (see Figure 5-107). 11. Reaching under it with two hands, gently lift the Outer Filament and place it onto protective material away from the heater assembly. Page 5-104 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 246: Figure 5-107. Outer Filament (Shown In Red) Supported On Support Pins Over Spacer
15. Remove the Tungsten screws and remove the clamps from the connector ends (see Figure 5-106). 16. Supporting the middle filament with both hands, gently (release and) raise the filament from the wire supports, placing the filament onto protective material. Page 5-105 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 247: Preparation For Filament Replacement
23. Align the copper electrodes with the ceramic bushings. 24. Slowly lower the heater assembly (including the inner filament, shown in red) into the holes of the electrode bushings and baseplate water lines (see Figure 5-109). Page 5-106 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 248: Figure 5-109. Heater Baseplate Assembly
10 ft-lbs. Finish assembling the copper electrode assembly by installing the tee fitting assembly (see Figure 5-110). Page 5-107 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 249: Figure 5-110. Heater Baseplate Assembly Bottom View
Place it on the heat shield surface, spanning the hole in the shield, with the tube between the middle electrodes, and the two holes aligned with the ceramic cups (see Figure 5-111B). Page 5-108 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 250: Figure 5-111. Installations Of Insulation Blocks
Install insulation blocks on the heat shield surface; Figure 5-111) block is placed near the outer electrodes; Figure 5-111) insulation blocks and insulation tube are assembled and placed about the middle electrodes. Page 5-109 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 251: Middle And Outer Filament Replacements/Installations
Prior to installation of middle and outer filaments, ensure that the filaments are placed with their coated (darker) sides facing up (see Figure 5-112). Figure 5-112. Coated (A) and Uncoated (B) Filament Sides Page 5-110 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 252 Figure 5-113B, insulation blocks and insulation tube are assembled and placed about the middle electrodes. Figure 5-113. Installations of Insulation Blocks and Filaments. Page 5-111 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 253 Outer filament (first to the non-flexible electrode and then to flexible electrode, preventing it from twisting) until a torque value of 10 in-lbs is reached for each screw. Page 5-112 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 254 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-114. Clamps and Screws for the Outer Filament Installed. Page 5-113 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 255 K465i Operations and Maintenance P/N 1212831 Rev C Note: The final assembly resembles that shown in Figure 5-115. Figure 5-115. Heater Assembly. Page 5-114 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 256: Reactor Chamber Reassembly/ System Restoration
MFCs referenced in this section. Also, refer to the system drawing to determine where the nearest leak checking port is located. See Section 5.9, Leak Checking. Figure 5-116. Generic System Diagram Page 5-115 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 257 19. When leak checking is finished, retighten the flow flange clamps until they are just snug. Do not over tighten. 20. Start up the system following the System Startup Following a Maintenance Shutdown procedure outlined in the K465i GaN System Startup section. 21. Perform a bakeout on the reactor. Note: It is recommended that a second leak check is performed after the bakeout, following the same proceedures used for the first leak check.
Page 258 The Wafer Handling Assembly (WHA) includes the frame for the THA, LFA, optional Glovebox, and the PEA. This section covers maintenance to the Transfer Hub chamber for the K465i GaN system. It includes disassembly, cleaning, and reassembly of the Transfer Hub chamber.
Page 260: Procedures In This Section
 site-qualified technician must be present in the FAB during the maintenance procedure. Whenever maintenance or other system related functions are performed on Veeco  TurboDisc systems, safety procedures must be followed, including the wearing of all required personnel protection equipment.
Page 261: Recommended Tools And Materials
Cleanroom Wipes  Container for Loose Small Parts  Waste Container for Used Wipes, etc.  System Maintenance Logbook  Step Stool  Figure 5-119. Upper THA (with LFA) Page 5-120 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 262 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-120. Transfer Hub Component Illustration (with Glovebox) Page 5-121 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 263: Cleaning Procedure
9. Wipe down the entire chamber with cleanroom wipes (lint free) and alcohol. 10. Replace Transfer Hub top and secure using removed fasteners. 11. Proceed to Leak Checking the Transfer Hub Chamber to leak check the Transfer Hub. Page 5-122 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 264: Leak-Checking The Transfer Hub Chamber
13. Open the leak check manual valve slightly to pump out the trapped air between the valve and the cap. When finished close the valve again. 14. Return the system to the Idle state by following the System Startup Following a Maintenance Shutdown procedure in the K465i GaN System Startup section. Page 5-123 ©...
Page 265: Robot Maintenance
The following material related to the Robot maintenance and adjustment is a brief introduction to the detailed steps needed for these tasks. See Robot Setup on Veeco K-Systems for additional guidance. Figure 5-121. Alignment of the Robot Procedure 5-17: Aligning the Robot 1.
Page 266 To execute a fine ajustment of the fork alignment, loosen the tensioning nut on one side, and tighten the nut on the opposite side. Page 5-125 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 267 2. While holding the stud, turn the tensioning nut to adjust the tension. 3. After the desired tension and alignment are achieved, tighten the locknut against the tensioning nut. Page 5-126 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 268: Section 5.7. Particle Filter Maintenance
P/N 1212831 Rev C Section 5.7. Particle Filter Maintenance This section covers maintenance to the particle filters for the K465i GaN system. It includes system shutdown, disassembly, cleaning, and reassembly of the particle filter housing. Note: This procedure is not applicable to As/P systems, and as such, it should not be used with As/P systems.
Page 269: Fast-Flow Prevention: Safety
6. Once the reactor is pumped down, return the TGV to pressure control. 7. When the pressure in the chamber is lower than 50Torr, set the system to Automatic mode. Page 5-128 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 271 4. Close the ball valves in the exhaust line, located before and after the particle filter body. 5. Disconnect water connections at the quick disconnections (see Figure 5-125). Page 5-130 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 272 8. Prepare the work area with fire suppressive measures and the filter disposal steel drum. 9. Secure the locking feet such that no contact can be made between a cart wheel and the floor (see Figure 5-126). Page 5-131 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 273 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-126. Particle Filter Cart Feet in Locked Position 10. Remove the strap from the housing body (see Figure 5-127). Page 5-132 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 274 Figure 5-127. Body Strap for Particle Filter (Green Highlight) 11. (This step requires two people.) With the first person holding the base to the multi-stage filter, the second person removes the neck collar (see Figure 5-128). Page 5-133 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 275 Warning! Watch for fire or flare ups. In the even of a fire or flare up, place the reducer back on the body to starve the reaction of oxygen. Repeat this process until all reactions have ceased. Page 5-134 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 276 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-129. Oxidation Valve Figure 5-130. A: Canister with Cap; B: Canister Stages/Baffle Bottom; C: Filter/Insert; D: Stage 1 Disassembly Page 5-135 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 277 13. Loosen the belly band (see Figure 5-133) until it can be removed from the filter body of the particle filter housing, and lift the housing cap piece (see Figure 5-132). Figure 5-132. Housing Cap (see Arrow) Page 5-136 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 278 14. Using the handle (see Figure 5-133), lift the filter stage out of the housing and place the assembly onto a table or maintenance area (see also Figure 5-130). Figure 5-134. Removed Filter Page 5-137 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 279 (without making contact to stainless steel). IPA may be used to remove hardened alkyl deposits. Particle Filter Assembly 21. Prepare the maintenance kit. 22. Place the filter inside the second stage housing, concentric to the raised lip. Page 5-138 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 280 35. Install the original ball-valves on the new weldment in the same orientation as in Figure 5-129. 36. Roll the new particle filter cart setup into position and integrate it to the PEA and the reactor cart ball valves (see Figure 5-136). Page 5-139 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 281 Figure 5-137. Filter and Insert 41. Install the stainless steel top plate supplied with the insert. Next, install baffle plate. The baffle plate is required in the second stage only. Page 5-140 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 282 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-138. Gen 3 Filter Assembly with Baffle Plate / Bottom View Page 5-141 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 283 48. Install the new second stage filter assembly (insert, large particle filter, and baffle plate) as shown below. 49. Verify the new filter assembly sits flush with the outer housing. Page 5-142 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 284 50. Clean the new o-ring with IPA and place the new o-ring on the outer lip of the particle filter body, immediately above the second stage outer housing. Page 5-143 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 285 54. Install the new third stage filter assembly (insert and large particle filter) as shown below. Verify the new filter assembly sits flush with the outer housing. Page 5-144 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 286 60. Install the original ball-valves on the new weldment in the same orientation. 61. Roll the new particle filter cart setup into position and integrate it to the PEA and the reactor cart ball valves. Page 5-145 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 287: Leak Checking The Housing Assembly And Chamber
74. Place the system in Idle by performing the Startup Following a Maintenance Shutdown procedure located in Operations, MaxBright GaN System Startup and K465i GaN System Startup section. Note: It is recommended that a thorough Reactor Chamber Bake-out is performed prior to utilizing the system for product growth runs after this procedure is performed.
Page 288 13. Place the system in Idle by performing the Startup Following a Maintenance Shutdown procedure located in Operations, K465i GaN System Startup section. Note: It is recommended that a thorough Reactor Chamber Bake-out is performed prior to utilizing the system for product growth runs after this procedure is performed.
Page 289: Material Disposal And Documentation
2. Dispose of the hazardous material in accordance with facility procedures and the local environmental regulations. 3. Perform any general housekeeping needed around the maintenance area. 4. Complete any required documentation (i.e. logs, reports, etc). Page 5-148 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 291: Section 5.9. Bubbler And Bath Maintenance
In addition to the technician responsible for operating the system, a second site-  qualified technician must be present in the building. Whenever maintenance or other system related functions are performed on Veeco  TurboDisc systems, safety procedures must be followed, including the wearing of all required personnel protection equipment.
Page 292: Recommended Tools And Materials
Scale to Weigh Bubblers  System Maintenance Logbook  Rubber chemical gloves (for use when handling or exposed to, while not limited to  bubblers or bath) Glycol Page 5-151 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 293: Bubbler Replacement
9. The routine will pump/purge the bubbler legs. Heating the Bubbler Legs 10. When directed to do so, heat the bubbler legs, using the heat gun, until they are hot (~50 to 60 Page 5-152 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 294 17. Make sure the Manual Bubbler Valves remain closed, and do not remove the shrink wrap on the valves until the material is to be used. Page 5-153 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 295 39. Weigh the spent bubbler to determine the amount of alkyl remaining and tag the spent bubbler. Record the relevant information on the tag (e.g., date, time, system removed from, etc.) Page 5-154 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 296 Running the system immediately after a bubbler change may result in uncontrollable material flux and is not recommended. Figure 5-144. Generic Bubbler Maintenance Diagram Page 5-155 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 298: Bath Initial Fill And Volume Adjustments
2. Turn the bath On, and set to the target temperature. 3. Allow the bath to circulate and equilibrate prior to use. It typically takes about one hour for the bath to equilibrate. Page 5-157 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 299: Bath Composition Adjustments
3. Allow the bath to circulate for at least three minutes. 4. Verify the proper bath composition by checking the freezing point with the hydrometer. 5. Allow the bath to equilibrate prior to use. Page 5-158 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 300: Section 5.10. Leak Checking
Recommended Tools and Materials  Methodology  Initial Steps of Leak Checking  Plumbing Lines  VCR Fittings  Valves  MFCs and Pressure Controllers  Joints/Weldments  Page 5-159 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 301: Reference Drawings
Solution of Soap in Water  Liquid Nitrogen for Cold Trap  Clean Room Gloves  VCR gaskets (1/4” & 1/2”)  System Maintenance Logbook  Step Stool  Page 5-160 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 302: Methodology
The following helpful hints will simplify leak checking of a system and its components: Turn off laminar flow unit if applicable.  Keep the area where you are performing the leak checking free of drafts and fans.  Page 5-161 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 303 A plastic bag can be used to cover portions of the vacuum tubing so they are less likely to see He. This is a good technique when the system has multiple leaks. Page 5-162 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 304: Initial Steps Of Leak Checking
Additionally, by leak checking the lines from top to bottom, the potential for false leak detections from other plumbing lines (because helium rises) is reduced. Page 5-163 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 305: Plumbing Lines
Although leaks in plumbing lines themselves are uncommon, it is still necessary to leak check all plumbing lines, weld points and strain points. Using the System Diagram provided by Veeco TurboDisc Operations, locate the leak detector port on the line that is being leak checked.
Page 307: Valves
If a leak is still detected after performing steps a and b then replace the VCR fitting with a new one. Note that this will require welding, and either a qualified welder should perform the work, or call Veeco Compound Semiconductor at 1- 8TURBODISC.
Page 308 If the valve now passes the leak check, proceed to the next fixture and leak check it accordingly. 10. If a leak is still detected after performing all of the above, then replace the valve with a new one. Page 5-167 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 309: Mass Flow Controllers And Pressure Controllers
2. If a leak is detected, refer to the above VCR section for mitigating the leak. If checking the VCR fitting does not mitigate the leak, check the o-ring and replace as necessary (on elastomer sealed pressure controllers). Page 5-168 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 310: Joints/Weldments/Kf40/Iso 80/100 Lines
1. Spray helium around every welded joint on the system. 2. If a leak is detected then remove the welded pieces from the system and have a qualified person re- weld where the suspected leak is or call Veeco TurboDisc Operations at 1-8TURBODISC. Procedure 5-33: Leak-Checking KF40/ISO 80/100 Lines 1.
Page 311: Section 5.11. Gas /Hydrogen Monitoring
P/N 1212831 Rev C Section 5.10. Gas/Hydrogen Monitoring Veeco's TurboDisc systems are equipped with a hydrogen detection apparatus which warns the operator of a hydrogen leak. Safety Precautions and Hazard Management In addition to the technician responsible for performing the maintenance, a second ...
Page 312: Hydrogen Detection System
Reference Documents for this device. Reference Documents Scott Instruments Sentinel 6 7600 User Manual Figure 5-147. H Detector Display Page 5-171 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 313 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-148. Scott Instruments Sentinel 6 Front View Page 5-172 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 314: Scott Sentinel 6 Meter Basics
Scott Instruments Sentinel 6 7600 User Manual. Refer to the operating manual for details regarding development of a specific calibration routine. Page 5-173 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 315: Section 5.12. K465
Section 5.11. K465i GaN Decommissioning Instructions This section contains instructions on decommissioning (removing from use) a K465i GaN system. It includes system shutdown, cleaning, breakdown and preparation for storage and for shipment. This procedure can also be used for preparing the tool for shipment to another location.
Page 316: Procedures In This Section
Reactor Assembly   Reactor Exhaust  ASSOCIATED PROCEDURES K465i GaN System Shutdown  K465i GaN Reactor Chamber Maintenance  K465i GaN Flow Flange Maintenance  K465i GaN Heater Maintenance  Particle Filter Maintenance  Robot Setup and Adjustment ...
Page 317: Recommended Tools And Materials
System Maintenance Logbook  Step Stool  Tie Wraps  Bubble Wrap  KF-40 Blank Off Plates, O-rings and Clamps  Shipping Wedges  Leak Checker   Page 5-176 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 318: Procedures In This Section
 site-qualified technician must be present in the FAB during the maintenance procedure. Whenever maintenance or other system related functions are performed on Veeco  TurboDisc systems, safety procedures must be followed, including the wearing of all required personnel protection equipment.
Page 319: Reference Drawings
Reference Drawings List  System Footprint  Gas Schematic Diagram (GSD)  Heater Assembly  ASSOCIATED PROCEDURES K465i GaN Reactor Chamber Maintenance  Leak Checking  K465i GaN Flow Flange Maintenance  ASSOCIATED DOCUMENTS Maintenance Schedule  Page 5-178 ©...
Page 320: Recommended Tools And Materials
Boron Nitride Replacement Parts  Waste Container for Used Wipes, etc.  System Maintenance Logbook  0 in-lbs – 50 in-lbs torque wrench  Torque screwdrivers  5/8” crowsfoot wrench  Page 5-179 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 321: Heater Assembly Removal
Removal and replacement of all outer filament supports, and damaged middle wire  supports Installation of Middle and Outer filaments and ceramic spacers  Filament Calibration with Algorithm  Page 5-180 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 322 Boron nitride/ceramic parts cannot be cleaned; therefore wear latex gloves when performing the following procedures and when handling the parts, and avoid exposing the parts to dust and debris. Page 5-181 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 323 5. Drain all water from the heater’s lines and assembly. 6. Loosen and remove the cap screws on the o-ring retainers for the heater assembly cooling tube (see Figure 5-105). Page 5-182 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 324 10. Remove the Tungsten screws and remove the clamps from the connector ends (see Figure 5-107). 11. Reaching under it with two hands, gently lift the Outer Filament and place it onto protective material away from the heater assembly. Page 5-183 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 325 15. Remove the Tungsten screws and remove the clamps from the connector ends (see Figure 5-106). 16. Supporting the middle filament with both hands, gently (release and) raise the filament from the wire supports, placing the filament onto protective material. Page 5-184 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 326: Preparation For Filament Replacement
23. Align the copper electrodes with the ceramic bushings. 24. Slowly lower the heater assembly (including the inner filament, shown in red) into the holes of the electrode bushings and baseplate water lines (see Figure 5-109). Page 5-185 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 327 10 ft-lbs. Finish assembling the copper electrode assembly by installing the tee fitting assembly (see Figure 5-110). Page 5-186 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 328 Place it on the heat shield surface, spanning the hole in the shield, with the tube between the middle electrodes, and the two holes aligned with the ceramic cups (see Figure 5-111B). Page 5-187 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 329 Install insulation blocks on the heat shield surface; Figure 5-111) block is placed near the outer electrodes; Figure 5-111) insulation blocks and insulation tube are assembled and placed about the middle electrodes. Page 5-188 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 330: Middle And Outer Filament Replacements/Installations
Prior to installation of middle and outer filaments, ensure that the filaments are placed with their coated (darker) sides facing up (see Figure 5-112). Figure 5-157. Coated (A) and Uncoated (B) Filament Sides Page 5-189 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 331 Figure 5-113B, insulation blocks and insulation tube are assembled and placed about the middle electrodes. Figure 5-158. Installations of Insulation Blocks and filaments. Page 5-190 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 332 Outer filament (first to the non-flexible electrode and then to flexible electrode, preventing it from twisting) until a torque value of 10 in-lbs is reached for each screw. Page 5-191 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 333 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-159. Clamps and Screws for the Outer Filament Installed. Page 5-192 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 334 K465i Operations and Maintenance P/N 1212831 Rev C Note: The final assembly resembles that shown in Figure 5-115. Figure 5-160. Heater Assembly. Page 5-193 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 335: Core System Decommissioning Instructions
K465i Operations and Maintenance P/N 1212831 Rev C CORE SYSTEM DECOMMISSIONING INSTRUCTIONS Note: The Decommissioning Instructions herein, covering parts-cleaning and shipping, will be supplemented with release details in Veeco Method Instructions. PROCEDURES IN DECOMMISSIONING The Decommissioning Instructions include: Cleaning a Soiled System ...
Page 336 ), down to x.e-m. 4. Removal of Bubbler Source Lines: Remove bubbler legs (Figure 5-161) and replace the bubblers with jumpers (Figure 5-162). Figure 5-161. Bubbler Assembly Detail Page 5-195 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 337 P/N 1212831 Rev C Figure 5-162. Bubbler Jumper Procedure 5-37: Preliminary System Preparation 1. Shut the reactor down as described in the Maintenance Shutdown Procedure in the K465i GaN System Shutdown section. 2. Gather all necessary parts and tools. 3. Remove the flow flange following the Flow Flange Removal procedure in the K465i GaN Reactor Chamber Maintenance section.
Page 338 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-163. THA Interior and Robot Arms 13. Close the Transfer Hub Assembly following the following the K465i GaN Transfer Hub Assembly Chamber Maintenance procedure. Flushing the Water Lines 14. Turn off the heat exchangers and disconnect the power cords.
Page 339 36. Cap both ends of the exhaust outlet and inlet lines using a KF-40 blank off, gasket ring and clamp. 37. Remove the exhaust muffler (if used) on the system. 38. Cap the ends of the exhaust line with a KF-40 blank off, gasket ring and clamp. Page 5-198 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 341 K465i Operations and Maintenance P/N 1212831 Rev C Figure 5-166. Water Lines Connected to Monitors/Regulators Page 5-200 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 342 59. Shut down all sub-breakers to the CBA, one at a time. 60. Press the EMO button to turn off the system power. 61. Pull down flange handle to the off position on the CBP. Page 5-201 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 343 On the Transfer Hub Assembly, bring down the castors and lift the feet. 78. Remove all water tubing connecting from the water manifold to the reactor cart. Page 5-202 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 345 93. Coil the wires and secure the pedals for the glove box to the frame. 94. Cover the glove box arm holes with aluminum foil and bubble wrap. Secure with tie wraps. Page 5-204 © Veeco Instruments, Inc. Confidential Copyright 2012...
Page 346 96. Tie wrap the light covers to the fluorescent light fixtures. 97. Tie wrap all loose cabling to assure safe transit. 98. Install the panels and doors as required. Page 5-205 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 347: Chapter 6. Appendix: Optional Features
Glove Box and make the carrier color red, to indicate to the scheduler that new wafers are ready to be processed. Figure A-1. Glove Box Window (with Extension Icon) Page 6-1 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 348 Click to manually pump and purge the cassette chamber Cassette Chamber valves for vent and vacuum. Blue is closed, Valves green is open. Gauge Cassette chamber pressure Cassette Details Page 6-2 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 349: Pump Down
Pump Purge (config settings for High, low Pressures and number of cycles specific to carrier chamber) j) For carrier when this is done it is the Ready state for loading the wafer into the carrier chamber. Page 6-3 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 350: Vent Sequence
Procedure 6-3: Glovebox Vent Sequence 1. Pump and Purge 2. Wait 5 seconds 3. Open Vent Valve(5) 4. When at atmosphere close the Vent valve(5) 5. Unlock the door Page 6-4 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...
Page 351: Veeco/Fluens Glovebox Setup And Test
K465i Operations and Maintenance P/N 1212831 Rev C VEECO/FLUENS GLOVEBOX SETUP AND TEST Procedure 6-4: Glovebox Operation 1. Turn off pneumatics to the glove box pilot valves. 2. Check to make sure all of the cables and pneumatic lines are connected to their proper location.
Page 352 5. upper setpoint=3.5 torr. 6. If an inconsistency or failure is discovered, write a Tracker Discrepancy Report stating the finding. Assign the Tracker to either the Project Manager or Design Engineering. Page 6-6 © Veeco Instruments, Inc. Confidential Copyright 2012 All Rights Reserved...

Veeco K465i GaN Operation And Maintenance

Chapter 1. Safety Summary

Chapter 2. Turbodisc K465I Gan Mocvd System

Chapter 3. System Overview

Chapter 4. Operations

Chapter 5. Maintenance and Repair

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Summary of Contents for Veeco K465i GaN