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Veeco Mark II Technical Manual

Fluid cooled ion source with hces
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Mark II
Ion Source with HCES
Technical Manual
427361
Fluid Cooled

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  • Page 1 ⊕ Mark II Fluid Cooled Ion Source with HCES Technical Manual 427361...
  • Page 2 Mark II Fluid Cooled Ion Source with HCES Technical Manual...
  • Page 3 No warranties are granted or extended by this document. It is the policy of Veeco Instruments Inc. to improve products as new technology, components and materials become available.

  • Page 4: Table Of Contents

    Table of Contents Safety Overview Theory of Operation Installation Operation Disassembly and Reassembly Maintenance Service Support Specifications Source Performance Drawings...

  • Page 5: Safety

    Chapter 1: Safety Understanding the correct installation, operation, and maintenance pro- cedure is necessary for safe and successful operation. This symbol pre- cedes safety messages in this manual, along with one of the three signal words explained below. Obey the messages that follow these words to avoid possible injury or death.
  • Page 6 Keep all guards and panels in place during routine system WARNING operation. Complete ion beam systems from Veeco Instruments Inc. are supplied with hardware interlocks and software safeguards at various points in the system. Whenever components or retrofits are added to existing systems,...

  • Page 7: Overview

    (HCES) • fluid cooling and fittings • gold plated fasteners. The source and feedthroughs have been engineered for straightforward “Service Sup- installation and ease of use. If you do need help, Veeco’s port” team is available to assist you.

  • Page 8: Theory Of Operation

    Chapter 3: Theory of Operation The Mark series gridless ion source operates by producing a low pres- sure gas discharge or plasma (typically 0.13 to 1.33x10 Pa/0.1 to 1.0 Torr) near a cusped magnetic field that lies between an electron emitter (either a filament or a hollow cathode) and an angled anode.
  • Page 9 Mark series ion source’s fundamen- tal operating principles; FIGURE 3.2 illustrates fluid cooled source opera- tion, together with its HCES, the Veeco Mark series Controller and both input mass flow controllers (MFC). The ion source and HCES require separate MFCs. These components are all provided when this model is ordered as a package.
  • Page 10 Recall that the mean ion beam current energy is typically 60 to 80% of the anode voltage setting. Total output ion beam currents are similarly 20 to 30% of the anode current; this beam current is generally less at low gas flows (high anode voltages) and greater at high gas flows (low anode voltages).

  • Page 11: Installation

    Chapter 4: Installation Inspection Unpack the Mark series fluid cooled ion source and inspect it carefully for any visible damage. If damage is found, notify the shipping company “Service Support” on page 62 and contact immediately. Check that all accessories and options have been included with the source package. The Mark anode assembly is shipped separately from the source body.
  • Page 12 64 for detailed information. Each source and HCES requires a separate MFC, which is provided by Veeco when the source is purchased as a part of a package. It is recom- mended that the customer install a two stage regulator upstream of the MFC and a positive shut off valve down- stream for each MFC.The HCES is designed for inert gas...
  • Page 13 Refer to for source envelope dimen- sions. The ion source may be installed in any orientation. Veeco recom- mends positioning the source so that the operator may readily remove the anode assembly and HCES for maintenance while leaving the base assem- bly, with its electrical, gas and coolant connections in place.
  • Page 14 1. Attach the ion source base assembly to the process chamber, using clean hardware and bracketry (provided by others) via the four slot- “Drawings” on page ted bosses on the base assembly. Refer to FIGURE 4.1 Mark II Grid- less Ion Source with HCES. 2. Verify the following before continuing: •...
  • Page 15 Feedthrough Installation These steps describe the installation of a 1 in. O-ring feedthrough, but are also applicable for installing a feedthrough using a 2¾ in. metal seal “Drawings” on page 73 flange. Refer to when following these steps. 1. Remove any blanking plates or plugs installed in the chamber pene- trations intended for feedthrough use.
  • Page 16 7. Replace the atmosphere side electrical connector: a. Align the connector’s keyway with the feedthrough’s keyway. Refer to FIGURE 4.2. FIGURE 4.2 Align the Con- nector and Feedthrough Key- ways. b. Secure the connector to the feedthrough by tightening the three pan head screws.
  • Page 17 Vacuum Side Connections ® Swagelok brand unions used inside the process chamber should be assembled finger tight, after initially seating the ferrules with open NOTE end wrenches. This prevents galling and makes equipment servicing easier. 1. Measure the distance between the in.
  • Page 18 6. The HCES, anode assembly and base assembly are separated for ship- ”FIGURE 4.1” on page 10. Remove the anode assembly ment; refer to from the package, as well as any protective caps or covers. ”FIGURE 7. Install the anode assembly in the source body; refer to 6.16”...
  • Page 19 (gas and coolant) before attaching them to the process chamber. 2. Install the ion source and HCES mass flow controllers near the two pin gas feedthrough provided with the source. For best results, Veeco recommends locating the MFCs no more than 0.5m (19 in.) from the input gas feedthrough.
  • Page 20 the steps in “Electrical Continuity” before connecting this cable to the controller’s rear panel. To avoid possible source and/or controller damage, perform all con- tinuity checks after source installation, but before connecting the CAUTION source cable to the controller. After installation, the source may be serviced without the need to discon- nect the base assembly from required facilities.
  • Page 21 CAUTION attaching the controller and operating the source. Controller Interlocks Veeco strongly recommends that the customer provide field interlocks to indicate when critical facilities that are required for safe operation are present. Refer to the Installation chapter of the Mark series Controller technical manual for additional information.
  • Page 22 Post Installation 1. After installation is complete, inspect all gas and coolant connections for leaks after pressurizing lines. Repair any leaks before continuing. 2. Make certain that the source and HCES MFCs are properly installed and connected. Refer to the Operation chapter of the Mark series Controller technical manual for manual MFC operation instructions.

  • Page 23: Operation

    Refer to the Operation chapter of the Mark series Controller technical manual for information and examples. The operating procedures outlined here are based on Veeco's best recommended practice. Actual source operation may differ, due to NOTE...
  • Page 24 Pre-start Checks and Chamber Pumpdown Perform these checks to assure that the process chamber and all source package components are operating properly, before beginning routine operation. 1. Check that the all electrical connections, coolant, input gas lines, MFCs, P.S.O. valves and other facilities are operational and engaged “Verify Facilities”...
  • Page 25 2. Once the controller has started, the status indicators (left of the STA- TUS EVENTS window) will flash yellow if the interlock state is not satisfied. This is illustrated in FIGURE 5.2. FIGURE 5.2 Status Indica- tors - AUTO Operation, Interlock Not Satisfied.
  • Page 26 “Controller Interlocks” on page 17 Refer to for detailed informa- tion. Press any of the status indicators to open the MODULE STATUS NOTE INFORMATION window. This window provides module activity details, including interlock status. To avoid possible source-controller damage, installation of process chamber vacuum interlocks is strongly recommended.
  • Page 27 • EMISSION CURRENT CONTROL MODE – Neutraliza- tion Setpoint. Once this information is entered, the Auto Mode Configuration list will appear as shown in FIGURE 5.5. FIGURE 5.5 UTILITIES - Auto Mode Configuration List. Refer to the Auto Mode Configuration section of the Operation chapter in the Mark series Controller technical manual for addi- NOTE...
  • Page 28 FIGURE 5.6 Enter Adjustable Parameters. Table 5.1: Initial Mark Source-Controller Settings Adjustable Parameter Value Remarks Anode Voltage 150 to 200V user adjustable recommended for Keeper Current 1500mA nearly all applications argon, oxygen, nitro- Source Gas Start Flow 10 to 20sccm HCES Run Gas 5 to 10sccm argon only...
  • Page 29 Basic Sequence of Operation Before initiating automatic source-controller operation, it is helpful to review the sequence of events used to start the source and sustain its steady state operation. The following descriptions help to explain the stages of source-controller activity from ignition to routine operation: 1.
  • Page 30 Performance” on page 65 ating curves presented argon and oxygen for the original Mark II ion source design. The operator or process developer is encouraged to use these reference IVF curves to select initial anode and source input flow settings within the envelope of viable operation.
  • Page 31 Automatic Operation The operating values shown in the following figures are typical of NOTE the original Mark II ion source design. These values may be pro- cess and installation dependent, and will differ for the source’s low voltage option.
  • Page 32 FIGURE 5.7 HCES Ignition. Once ignited, the HCES gas flows and keeper voltage will adjust to their running values, as illustrated in FIGURE 5.8. FIGURE 5.8 HCES Sustained Operation.
  • Page 33 b. After the HCES starts, gas will flow to the source and the anode voltage will be applied to start the ion source, as shown in FIG- URE 5.9. FIGURE 5.9 Source Gas Flow Starts. c. When an anode current is detected by the controller, the unit will attempt to regulate the source’s input gas flow in order to obtain the set-point anode current.
  • Page 34 FIGURE 5.10 Sustained, Controlled Operation. 3. The operator may make sequential changes to settings without turn- ing-off the source. When switching set points or changing gases, broad excursions in process conditions may cause source-controller instabilities that can lead to a loss of the discharge. To avoid this condition, process devel- opers are encouraged to •...
  • Page 35 Venting and Cooling Once the source is turned off, the source body and anode typically take at least 20 minutes to cool down (under vacuum) with the coolant running. However, radiation cooled bodies like the HCES, fixturing and work- pieces will take considerably longer to cool (whether in vacuum or at atmospheric pressure) as they have very limited thermal transfer means for cooling.

  • Page 36: Disassembly And Reassembly

    To avoid galling and seizing of threaded parts, do not over tighten or use high torque values. CAUTION The assembled source and neutralizer are shown in FIGURE 6.1. FIGURE 6.1 Assembled Mark II Gridless Ion Source with HCES.
  • Page 37 Disassembly Ion source surfaces may exceed 300°C (570°F) after use and venting. Avoid burns during servicing by using appropriate personal protec- CAUTION tive equipment and allowing for a sufficient cool down interval.Fol- low these steps to remove the anode assembly from the process chamber and disassemble it.
  • Page 38 2. Lift the anode assembly from the base assembly by the captive hard- ware, and carefully place it on a clean work surface nearby. FIGURE 6.3 Lift the Anode Assembly from the Base Fixture. To avoid base assembly contamination and shorts, perform all anode assembly maintenance outside the process chamber, away from the CAUTION base assembly.
  • Page 39 The base assembly contains the source’s magnet and connections for power, gas and coolant. FIGURE 6.5 Ion Source Base Fixture. The power leads and the HCES are removed for clarity. The base assembly stays in the process chamber during routine source NOTE maintenance.
  • Page 40 4. Loosen and remove the four 10–32 screws that hold the thermal transfer plate to the anode assembly pole piece, using a in. hex ball driver. FIGURE 6.6 Loosen and Remove the Hardware to Reach the Gas Distributor Plate. 5. Remove the cooling plate side thermal transfer sheet from the ther- mal transfer plate.
  • Page 41 6. Remove the thermal transfer plate and sheet from the anode. FIGURE 6.8 Remove the Thermal Transfer Plate and Sheet. The thermal transfer sheets tear easily. The thermal transfer plate breaks easily if dropped or shocked. Handle them carefully to avoid CAUTION part damage.
  • Page 42 7. Loosen and remove the anode power connector; use an adjustable wrench on the connector’s flats to initially loosen it, if necessary. FIGURE 6.9 Remove the Anode Power Connector. To avoid connector breakage, apply tools only to the anode connec- tor’s tooling flat as provided.
  • Page 43 8. Separate the anode from the pole piece for cleaning or replacement. FIGURE 6.10 Separate the Anode from the Pole Piece.
  • Page 44 9. Remove the anode side thermal transfer sheet from the thermal trans- fer plate. FIGURE 6.11 Remove the Anode Side Thermal Trans- fer Sheet. 10. Loosen and remove the hardware that holds the gas distributor plate to the thermal transfer plate, using a in.
  • Page 45 11. Remove the gas distributor plate; inspect it for erosion. Replace if defects are found or whenever the working gas changes. Refer to “Anode Assembly Maintenance” on page 52. FIGURE 6.13 Remove the Gas Distributor Plate.
  • Page 46 Reassembly Reassemble the source by reversing the steps followed to disassemble it. “Drawings” on page 73 Refer to for hardware torque specifications. Pay special attention to the following: 1. When reversing step ”10.” on page 40, remove any fibers or parti- cles that may be held on the thermal transfer plate by static attraction.
  • Page 47 3. When reversing step ”8.” on page 39, make certain to install the anode so that the power connector’s threaded hole lines up with the mark on the pole piece. FIGURE 6.15 Align the Power Connector with the Pole PieceMark. 4.
  • Page 48 To avoid damaging the thermal transfer plate and/or sheets, use the specified torque values. CAUTION 6. When reversing step ”2.” on page 34, check that the body is fully seated on the base assembly and that the body’s mark aligns with the one on the anode assembly.

  • Page 49: Maintenance

    To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before performing any mainte- WARNING nance. Veeco strongly recommends servicing the source’s anode assembly out- side the process chamber. This minimizes chamber contamination and possible base assembly damage. A spare anode assembly (available sepa-...
  • Page 50 rately) may be kept on hand to change out with the anode assembly to be serviced, greatly reducing process down time. Ion source surfaces may exceed 300°C (570°F) after use and venting. Avoid burns during servicing by using appropriate personal protec- CAUTION tive equipment and allowing for a sufficient cool down interval.
  • Page 51 advantage of the source's modular design features. During a routine maintenance cycle, it is suggested that the used components (the anode assembly or cathode tip, for example) be removed and directly replaced with either a reconditioned or new component (available separately). This approach allows the system to be promptly returned to service, while component inspection and maintenance is performed outside the process chamber, independently from source operation.
  • Page 52 Reinstall cathode assembly to service and pump down process chamber For best results, Veeco recommends allowing argon gas flow to the HCES during venting and cool-down, to keep the tip surface well NOTE purged of reactive gases and oxidizing moisture.
  • Page 53 To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing. WARNING 2. Inspect process shields, tooling, fixtures or liners for excess accumula- tion of coatings and films. Remove and clean as necessary. 3. Inspect the ion source face for particles and flakes that may have delaminated from process surfaces or fixturing.
  • Page 54 Base assembly discoloration or other appearance/finish changes (including surface oxidation and minor deposition) are likely to occur over time. This is due to thermal cycling of the interface between anode assembly and the fluid cooled copper base assembly during routine operation. Schedule any inspection and long term preventive maintenance for the base assembly (including its input fittings and electrical leads) to coincide with major process chamber maintenance or re-tooling.
  • Page 55 “Service Support” on page 62 manner. Contact for information on the availability of spare parts, assemblies and rebuild kits. FIGURE 7.3 Anode Assembly Disassemble the anode. Maintenance. Extensive wear or Replace Inspect the anode. damage present? anode component. Bead blast and ultrasonic clean Inspect the front pole piece Extensive wear or...
  • Page 56 FIGURE 7.4 Anode Assem- bly Maintenance (contin- Inspect the thermal transfer plate. ued). Extensive wear or Replace thermal transfer damage present? plate. Clean. Inspect the thermal transfer sheet. Extensive wear or Replace thermal transfer damage present? sheet(s). Clean. Reassemble. Anode Assembly Maintenance ”FIGURE 7.3”...
  • Page 57 2. Follow steps ”4.” on page 36 through ”8.” on page 39 to disassem- ble the anode assembly. Leave the gas distributor attached to the thermal transfer plate at this time. 3. Inspect the anode assembly for excessive build up of coatings and films, arc damage or excessive wear from extended use and/or bead blast reconditioning.
  • Page 58 To avoid damage to the thermal transfer plate and the base assembly, replace the gas distributor before it reaches the recommended mini- CAUTION mum thickness, and well before wear and sputter erosion perforate c. If the gas distributor is still usable, clean with an alcohol moist- ened, lint-free task wipe;...
  • Page 59 “Reassembly” on page 42 10. Follow the first 5. steps under put the anode assembly together. Source Body and Base Assembly Maintenance Refer to FIGURE 7.5 and FIGURE 7.6 when performing the following inspection and maintenance steps. FIGURE 7.5 Source Body Maintenance.
  • Page 60 To avoid source and anode assembly damage, Veeco strongly recom- mends replacing the gas distributor on or before the interval shown. CAUTION...
  • Page 61 To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing. WARNING Table 7.1: Recommended Preventive Maintenance Component/Sub Early Warning Operating Condition or Recommended Preventive Maintenance Period Component Inspection Measurement Cathode (HCES) Visually inspect components after each run. n.a.
  • Page 62 To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing. Disconnect the controller’s main power before troubleshooting any electrical connection. WARNING Table 7.1: Recommended Preventive Maintenance (Continued) Component/Sub Early Warning Operating Condition or Recommended Preventive Maintenance Period Component Inspection Measurement Remove and inspect during anode assembly preventive main-...
  • Page 63 To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing. Disconnect the controller’s main power before troubleshooting any electrical connection. WARNING Table 7.1: Recommended Preventive Maintenance (Continued) Component/Sub Early Warning Operating Condition or Recommended Preventive Maintenance Period Component Inspection Measurement Visually inspect and replace as needed when the gold plating...
  • Page 64 Bead Blast and Ultrasonic Cleaning Follow these steps to clean metallic source components and the anode assembly’s insulators. The frequency of such cleaning processes will be process dependent. Use only the media type and grit recommended. Certain ion source parts are subject to irreparable damage when they are bead blasted.
  • Page 65 It may be necessary to adjust the pressure, depending on nozzle size. NOTE 3. Inspect the parts to confirm that all coatings and films have been removed from all treated surfaces, including all assembly holes and counter bores. Make certain that the central rings and/or apertures of the anode and front pole pieces are thoroughly cleaned.

  • Page 66: Service Support

    Phone: 1.888.221.1892 Fax: 970.493.1439 ftcsupport@veeco.com When contacting Veeco Instruments Inc. for parts or service: Provide the ion source model number and serial number; the ion source power supply model and serial number; a list of all operating parameters and/or error messages displayed by the power supply; gas flow rate; and...

  • Page 67: Specifications

    ~40 to 300V oxygen: ~75 to 300V Mean ion beam current energy: 30 to 180eV (~60% of anode voltage set point) Mark II HO Controller: ~1.0 to 10A @V =300V Discharge (anode) current, I Mark III Controller: ~1.0 to 15A @V...
  • Page 68 Facilities Requirements These are the minimum facilities required for successful source start-up and continued operation within the values shown. Process specific conditions may require more stringent material spec- ifications. NOTE Process gas – • pressure: refer to the supplier MFC technical manual for maximum inlet pressure.

  • Page 69: Source Performance

    Pa (0.1 to 1.0 x10 Torr). Low Voltage Option The low voltage option is a special configuration of the Mark II ion source that is occasionally recommended for the following situations: • source operation at lower net ion energies (anode voltages) and lower beam current power when processing at or near a material’s sputtering threshold...
  • Page 70 Operating Curves - (Anode Voltage, Current and Input Flow) FIGURE B.1 and FIGURE B.2 provide operating curves for the original Mark II source design for argon and oxygen. These curves may be used to anticipate the typical input gas flows when attempting to power the...
  • Page 71 Angular Ion Beam Current Density Profiles FIGURE B.3 and FIGURE B.4 show exemplary ion beam current density profiles for the original source design as taken by a Faraday cup that was angularly swept at a fixed distance of R=30cm from the ion source face. Source profiles for argon and oxygen are shown for an anode current of 7.5A and at various anode potentials.
  • Page 72 Total Output Ion Beam Current It is possible to obtain a estimate of the total ion beam current (I ) by integrating the beam current density over the half sphere in front of the ion source, using the angular ion beam current density profiles similar to FIGURE B.3 and”FIGURE B.4”...
  • Page 73 Operating Curves, Low Voltage Option – (Anode Voltage, Current and Input Flow) The Mark II source’s low voltage option is configured for reliable oper- ation at reduced working anode potentials. This option may be better suited to delicate processes whose substrate surfaces are highly sensitive to ion energies at or just above their sputtering threshold.
  • Page 74 ”FIGURE B.10” on page 71 show exemplary ion beam current density profiles for the Mark II source’s low voltage option, as taken by a Faraday cup that was angularly swept at a fixed distance of R=30cm from the ion source face. Source profiles for argon and oxygen are shown for an anode current of 7.5A and at various anode potentials.
  • Page 75 ”FIGURE B.12” on page 72 show total output ion beam currents for the for the Mark II source’s low voltage option in a normal range of operation of interest for most applications in argon and oxygen. This source option’s total current of accelerated ions is about 15 to 25% of the anode-to-cathode current used to sustain the ion source discharge.
  • Page 76 Total Beam Current for Oxygen at R=30 cm FIGURE B.12 Total Ion Beam Current vs. Anode Voltage at R=30cm.- Low Voltage Option (Oxygen). 7.5A Anode Potential (V)

  • Page 77: Drawings

    Appendix C: Drawings Table C.1: Drawings Drawing Description Number “Mark II⊕ Anode Assembly –HCES” 426667-1 “Mark II⊕ Source Assembly –HCES” 427073 “Mark II⊕–HCES Fluid Cooled Wiring Diagram” 427073 DIAG...
  • Page 78 VEECO 426663-9 POLE PIECE INSULATOR VEECO 426871 SCREW,SS, 10-32 X 1.938 SHCS, AU VEECO 0201-SS-718 WASH,FLT,.205 I.D. X .440 O.D. X .030 THK,SS VEECO 426663-10 SCREW, 1/4-20 X 2.25 CAPTIVE PANEL SCREW,AU VEECO 0110-358 WASHER, SS, .375 O.D. X .250 I.D. X .031 PREC.
  • Page 79 VEECO B17490-7 SCREW,SS, 10-32 X .375 SHCS AU PLTD BODY REMOVED FOR CLARITY VEECO 0201-SS-718 WASH,FLT,.205 I.D. X .440 O.D. X .030 THK,SS VEECO 0110-167 2 PIECE SS CLAMP COLLAR, .375 I.D. X .875 O.D. X .343 THK. VEECO 426663-20...
  • Page 80 TOL [mm] SURFACE FINISH VEECO INSTRUMENTS FLUID COOLED .X .1 ENGR DATE .XX .02 THIS DRAWING IS THE PROPERTY OF .XXX VEECO INSTRUMENTS AND MAY NOT .005 SOURCE ASSEMBLY 11-2-05 .XXXX .XXX .013 BE USED, REPRODUCED, PUBLISHED .0005 ANGLE MFG ENGR DATE ±...
  • Page 81 SURFACE FINISH VEECO INSTRUMENTS FLUID COOLED .X .1 ENGR DATE .XX .02 THIS DRAWING IS THE PROPERTY OF .XXX SOURCE ASSEMBLY VEECO INSTRUMENTS AND MAY NOT .005 11-2-05 BE USED, REPRODUCED, PUBLISHED .XXXX .XXX .013 .0005 ANGLE MFG ENGR DATE ±...
  • Page 82 MIN. 185 degs F (85 degs C) THE FEEDTHROUGH IS 5psi (34kPa) 426847: 1 IN 610005: 2.75 IN -THIS DIAGRAM SHOWS THE MARK II + SOURCE. THE FACILITIES OPTIONAL MOUNT CONNECTIONS ALSO APPLY TO THE MARK II SOURCE USER SUPPLIED ASSY C17519 .25 SWAGELOK...

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