Chapter 2. Turbodisc K465I Gan Mocvd System; Specifications; Section 2.1. General Specifications; Company Address - Veeco K465i GaN Operation And Maintenance

K465i Operations and Maintenance
CHAPTER 2.

SYSTEM SPECIFICATIONS

This chapter includes general system and seismic specifications for the TurboDisc K465i
GaN MOCVD System. Refer to the System
regarding system specifications and installation.
Section 2.1.

COMPANY ADDRESS

Veeco Instruments - TurboDisc Operations
394 Elizabeth Ave
Somerset, NJ 08873
SYSTEM SPECIFICATIONS
Model #
Serial #
Rated Voltage / Current / Frequency
Year Constructed
Noise level:
Weight of the machine crated:
Air supply pressure:
Copyright
TURBODISC K465I GAN MOCVD
Footprint
GENERAL SPECIFICATIONS
©
Veeco Instruments, Inc.
2012
All Rights Reserved
P/N 1212831 Rev C
drawing for additional information
TurboDisc K465i GaN MOCVD
System
26895
380V / 280A / 50-60Hz
2008
76 dB(A)
15740 lbs (TBD kg)
100 psi (690 kPa)
Confidential
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