Veeco K465i GaN Manuals

Manuals and User Guides for Veeco K465i GaN. We have 1 Veeco K465i GaN manual available for free PDF download: Operation And Maintenance

Veeco K465i GaN Operation And Maintenance

Veeco K465i GaN Operation And Maintenance (352 pages)

Brand: Veeco | Category: Industrial Equipment | Size: 12.43 MB

Table of Contents

Table of Contents
3
Chapter 1. Safety Summary

15
- General Safety Notices
  15
- Section Warning , Caution and Note Usage
  17
- Symbol Usage
  17
- General Precautions
  19
- Additional Safety Precautions
  20
- Hazardous Materials
  20
- Safety Interlocks and Alarms
  22
- Interlock Override Safety Notice
  23
- Safety Switches
  24
- Type and Magnitude of Energy
  27
Chapter 2. Turbodisc K465I Gan Mocvd System

31
- Specifications
  31
- Section 2.1. General Specifications
  31
- Company Address
  31
- System Specifications
  31
- Section 2.2. Seismic Specifications
  32
- Design Considerations
  32
- Figure 2-1. K465I Gan Cabinet
  32
- Weight of the Major Sub-Assemblies
  34
- Reference Drawings
  34
- Section 2.3. Certifications
  35
- CE Certifications
  35
- EMC Certifications
  35
- SEMI Certifications
  35
- Rohs Compliance
  35
Chapter 3. System Overview

37
Chapter 4. Operations

79
- Section K465 I G a N System Startup
  79
- Figure 4-1. Front View Assembly
  80
- Procedures in this Section
  81
- Reference Drawings
  81
- Associated Procedures in this Section
  81
- Daily Startup and System Readiness
  82
- Startup Following a Maintenance Shutdown
  83
- Figure 4-2. Generic System Diagram
  86
- Startup Following a Facilities Maintenance Power Shutdown or Emergency Electrical Stop
  87
- Vacuum Pump Operation
  89
- Reference Drawings
  90
- Associated Procedures
  90
- Process Pump
  91
- Pre-Operation of the Ebara Process Pump
  92
- Figure 4-3. Ebara Pump, Front View
  93
- Figure 4-4. Ebara ESA25 Pump, Side View
  93
- Ebara Process Pump
  95
- Vacuum Pump
  97
- Standard Operation
  97
- Turbo Pump
  98
- Section 4.3. Wafer Loading and Unloading
  99
- Procedures in this Section
  99
- Reference Drawings
  99
- Associated Procedures
  99
- Tools and Materials Checklist
  99
- Loading Substrates Onto a Wafer Carrier
  100
- Unloading Substrates from a Wafer Carrier
  101
- Section 4.4. Palladium Cell Operation
  103
- Procedures in this Section
  103
- Reference Drawings
  103
- Operating Precautions
  104
- Cell Installation
  105
- Cell Operation
  105
- Normal Operation
  106
- Shutdown
  107
- Power Failure Shutdown
  107
- Cell Removal
  108
- Section 4.5. Temperature Controllers
  109
- Procedures in this Section
  109
- Reference Drawings
  109
- Reference Documents
  109
- Configuration of Temperature Controller
  110
- Figure 4-6. Standard (Not Customized) Eurotherm Displays: Actual/Left and through
  110
- Section 4.6. Temp Control Communication
  111
- Temperature Control
  111
- Over-Temperature Control
  111
- Figure 4-7. Temperature Control Architecture
  111
- Selecting Temperature Control Modes
  113
- Temperature Settings
  114
- Figure 4-8. Temperature Control Mode Selection Screen
  114
- Figure 4-9. Sample Control Mode Switch Routine
  115
- Pyrocontrol Introduction
  117
- Description of Pyrocontrol
  118
- Figure 4-10. Pyrometer Locations on Wafer Carrier
  118
- Using Pyrocontrol for Temperature Control on K465I Gan Systems
  119
- Section 4.8. Robot Setup and Adjustment
  119
- Procedures in this Section
  120
- Reference Drawings
  120
- Associated Procedures
  121
- Identifying Stations for the Transfer System
  122
- Figure 4-11. Robot Transfer System Stations (Glovebox Configuration)
  122
- Figure 4-12. Stop Robot Button
  123
- Robot Axis Identification
  124
- Figure 4-13. Robot Station Labels
  124
- Figure 4-14. Top View Z Axis Elevator Motor Locations
  124
- Basic Command Overview
  125
- K-Series Tools and Robot Stations
  127
- Setting up Stations for the Transfer Robot
  128
- Troubleshooting
  130
- Section K465 I G a N System Shutdown
  131
- Procedures in this Section
  131
- Reference Drawings
  131
- Associated Procedures
  131
- End-Shift Idle Procedure
  132
- Maintenance Shutdown Procedure
  133
- Figure 4-16. Generic System Diagram
  134
- Facilities Maintenance Shutdown Procedure
  138
- Emergency Electrical Shutdown
  140
- Figure 4-17. EMO Button
  140
Chapter 5. Maintenance and Repair

142
Chapter 6. Appendix: Optional Features

347
- Section 6.1. Glovebox
  347
- Glovebox Controls in Nexus Software
  347
- Pump down
  349
- Vent Sequence
  350
- Veeco/Fluens Glovebox Setup and Test
  351

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