Kofloc HFM-200 Series Manual

Mass flow meter, mass flow controller

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MJ400155E1
Mass Flow Meter
HFM-200series
Mass Flow Controller
HFC-202series

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Summary of Contents for Kofloc HFM-200 Series

  • Page 1 MJ400155E1 Mass Flow Meter HFM-200series Mass Flow Controller HFC-202series...
  • Page 2 MJ400155E1 The Kofloc HFM-200series mass flow meters and the HFC-202 series controller are designed to accurately measure and control mass flow over the range of 10sccm to 30slm. These instruments are intrinsically linear and have an accuracy of better than ±1%F.S.(full scale).
  • Page 3: Specifications

    MJ400155E1 1. Specifications Accuracy ±1%full scale(F.S.) Repeatable ±0.05% of F.S. 500psi [6.9Mpa] Maximum pressure Maximum pressure 1000 psig (proof tested to 1500 psig) [10.3Mpa] (with high pressure option) <-0.0067% of reading/psi(N ) Pressure coefficient Operating temperature 0-60℃ in non-condensing environment Temperature coefficient(ZERO)...
  • Page 4: Power Requirements

    MJ400155E1 2.Optional 4-20mA Current Output An option to the standard 0-5VDC output is the 4-20mA current output that is proportional to flow. The 4-20mA signal is produced from the 0-5VDC output of the flow meter. The current loop output is useful for remote applications where pickup noise could substantially affect the stability of the voltage output.
  • Page 5: Output Signal

    Kofloc power supply the output is routed to the display, and is also available at the terminal on the rear panel. If a Kofloc supply is not used, the output is available on pin 6 of the “D” connector. It is recommended that the road resistance be no less that 2kΩ. If the optional 4-20mA output is used, the load impedance must be selected in accordance with Section 1.2.
  • Page 6: Electrical Connections

    Figure 2.1 shows the schematic layout for connecting the instrument to an appropriate power supply. If a power supply from Kofloc Instruments is used with a ±15VDC version of the HFM-200/HFC-202, installation consists of connecting the HFM-200/HFC-202 series cable from the “D” connector of the power supply to the “D” connector of the flow meter / controller.
  • Page 7 MJ400155E1...
  • Page 8: Operating Conditions

    MJ400155E1 8.Operating 8.1 Operating Conditions For proper operation, the combination of ambient temperature must be such that the flow meter temperature remains between 0 and 60℃. The most accurate measurement of flow will be obtained if the flow meter is zeroed at operating temperature as temperature shifts result in some zero offset.
  • Page 9: Overall Function Description

    0-5VDC or 4-20mA. 8.5. Gas Correction Factors Most Kofloc flow meters and controllers are calibrated using nitrogen. The correction factors published by applied to these instruments. To apply the GCF’s(Gas Conversion Factors), simply multiply the gas flow reading times the GCF for the process gas in use. For example, to calculate the actual flow of argon passing through a nitrogen-calibrated meter that reads 20sccm, multiply the reading times the GCF for argon.
  • Page 10: Outside Drawing

    MJ400155E1 8.6. Outside Drawing...
  • Page 11: Product Warranty

    MJ400155E1 9. Product Warranty 9.1 Coverage The warrant period shall be one year after the shipment. If the failure of the purchased product arises from our fault, the product will be repaired at no charge. Only the body and our products are covered and no damage caused by the failure will be compensated.
  • Page 12 MJ400155E1 URL:http://www.kofloc.co.jp...

This manual is also suitable for:

Hfc-202 series

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