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Summary of Contents for Kofloc EX-700R
- Page 1 MJ400271F1 Mass Flow Meter with indicator EX-700R Instruction Manual...
- Page 2 MJ400271F1 Ignoring this symbol and handling the product incorrectly may result in loss of life or serious injury. Ignoring this symbol and handling the product incorrectly may result in personal injury or damage to property. Ԃ 〇 ● - 1 -...
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Page 3: Table Of Contents
MJ400271F1 Table of Contents 1.Foreword ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 2.Precautions for Handling ・・・・・・・・・・・・・・・・・・・ 3.Overview ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 4.Standard Specifications ・・・・・・・・・・・・・・・・・・・・ 5.ExternalView ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 6.Applicable Connectors and Pin Assignment・・・・・・ 7.Operation ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 8.Troubleshooting ・・・・・・・・・・・・・・・・・・・・・・・・・・ 9.Precautions for maintenance ・・・・・・・・・・・・・・・・・ 10. After-sale Service・・・・・・・・・・・・・・・・・・・・・・・・ 11.Warranty ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ - 2 -... -
Page 4: Foreword
MJ400271F1 1. Foreword Thank you for your selection of the Digital Mass Flow Meter EX-700R. Prior to using your new equipment, please read this manual thoroughly to ensure it is used in a safe manner. Please keep in mind that this instruction manual may be revised without notice. - Page 5 MJ400271F1 ◆ ） ◆ ◆ ① ② ③ ④ ⑤ ⑥ ℃ ⑦ µ Ԃ 「 」 〜 - 4 -...
- Page 6 MJ400271F1 ̀ ℃ - 5 -...
- Page 7 MJ400271F1 ◆ Attension：EX-700R and EX-700(old model) are different adapter inputs. ◆ ① ② ③ ℃ ④ ⑤ ⑥ - 6 -...
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Page 8: Overview
MJ400271F1 3. Overview EX-700R is a mass flow meter equipped with an indicator that employs a proven flow sensor. It has a function to indicate the integrated flow rate, in addition to the existing instantaneous flow rate indication. A type with a flow sensor and precision needle valve in one unit is also available. -
Page 9: Standard Specifications
MJ400271F1 4. Standard Specifications EX-700R Flow range (N conversion) F.S.10SCCM〜20SLM F.S.50, 100, 200SLM F.S.300, 400, 500SLM Accuracy*1 ±1％F.S. ±1.5％F.S. (Air, H , He, Ar, O ,(Air, Ar/ ,(Air,/ Applicable gas *2 /By N conversion) By N conversion) By N conversion) Accuracy guarantee 15〜35℃... -
Page 10: Externalview
MJ400271F1 〜 ◆ ◆ - 9 -... - Page 11 MJ400271F1 ◆ - 10 -...
- Page 12 MJ400271F1 〜 ◆ ◆ - 11 -...
- Page 13 MJ400271F1 ◆ - 12 -...
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Page 14: Applicable Connectors And Pin Assignment
MJ400271F1 ：EX-700R and EX-700(old model) are different adapter inputs. ︓ （ ） ︓ （ ） - 13 -... -
Page 15: Operation
MJ400271F1 ◆ ◆ ◆ ◆ ◆ □ 【 】 〇 Ă Ă Ă Ă 〇 ・ ・ - 14 -... - Page 16 MJ400271F1 【 】 〇 〇 ︓【 】 【 】 【 】 ◆ ／ 【 】 〇 〇 【 】︓ 〈 〉 〈 〉 【 】︓ 〈 〉 〈 〉 【 】 □ □ □ - 15 -...
- Page 17 MJ400271F1 ① □ → → Ă ②【 】 □ □ □ - 16 -...
- Page 18 MJ400271F1 7-5. 【Parameter setting mode】 When an instantaneous flow rate is being indicated, pressing and holding DISP key [□] sets the parameter setting mode. Each time DISP key [□] is pressed, the indication changes in the order of mode No. → set value → mode No.
- Page 19 MJ400271F1 ②Setting mode No. and description of set values Default Description of set values M ode No. Set Item Value Indication of max. ※ F-00 value (Full scale) The value of the full scale is indicated. Unchangeable. M ax value :2000 Reference condition on flow rate 20 ℃...
- Page 20 MJ400271F1 Default Parameter Description of set values Set Item setting No. Value 00:No 10: Instantaneous flow rate upper limit : ON 11: Instantaneous flow rate upper limit : OFF 20:Instantaneous flow rate lower limit : ON 21:Instantaneous flow rate lower limit : OFF 30:Instantaneous flow rate upper/lower limit : ON 31:Instantaneous flow rate upper/lower limit : OFF 40:Integrated flow rate reach : ON...
- Page 21 MJ400271F1 Default Parameter Description of set values Set Item setting No. Value 00:No 10: Instantaneous flow rate upper limit : ON 11: Instantaneous flow rate upper limit : OFF 20:Instantaneous flow rate lower limit : ON 21:Instantaneous flow rate lower limit : OFF 30:Instantaneous flow rate upper/lower limit : ON 31:Instantaneous flow rate upper/lower limit : OFF 40:Integrated flow rate reach : ON...
- Page 22 MJ400271F1 Default Parameter Description of set values Set Item setting No. Value Applicable gas and CF value setting CF value setting P-30 Applicable gas selection ※ Default:N2. FS.50 ～ 200SLM : [0]or[1]or[2]or[5], FS.300 ～ 500SLM :[0]or[1] P-31 CF value 1.000 0.500 〜...
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Page 23: Troubleshooting
MJ400271F1 8.Troubleshooting Problem Probable Cause Check Item and Corrective Action 1. The indicator shows a. The power is not on. 1. Check to see if the power has been turned on. nothing. b. The connector has not been connected to the 1. -
Page 24: Precautions For Maintenance
KOFLOC will, at its option and expense, provide a replacement product or repair the failed product at the KOFLOC factory. The scope of warranty is limited to the product itself and KOFLOC shall not be held liable whatsoever for damages suffered by the customer due to a failure of the KOFLOC product regardless of significance and kind of such damages. - Page 25 MJ400271F1 ： - 24 -...
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