Kofloc 3810DSII Instruction Manual

Kofloc 3810DSII Instruction Manual

Mass flow meter with indicator

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MJ400173C1
Mass Flow Meter with indicator
MODEL 3810DSⅡ
Instruction Manual

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Summary of Contents for Kofloc 3810DSII

  • Page 1 MJ400173C1 Mass Flow Meter with indicator MODEL 3810DSⅡ Instruction Manual...
  • Page 2 MJ400173C1 Please read this manual thoroughly prior to installing and using the product. This way it is possible to ensure the performance and safety of the product and prevent possible accidents and damage to the product due to incorrect use. When the product has failed or is considered to require readjustment, please contact our sales office or the dealer which you purchased the product from.
  • Page 3: Table Of Contents

    MJ400173C1 Table of Contents 1. Foreword ・・・・・・・・・・・・・・・・・・・・・・・・・・ 3 2. Precautions for Handling ・・・・・・・・・・・・・・・・・・・ 3 3. Overview ・・・・・・・・・・・・・・・・・・・・・・・・・・ 4 4. Specifications ・・・・・・・・・・・・・・・・・・・・・・・・ 6 5. Nomenclature ・・・・・・・・・・・・・・・・・・・・・・・・ 7 6. Installation ・・・・・・・・・・・・・・・・・・・・・・・・・ 8 7. Operation ・・・・・・・・・・・・・・・・・・・・・・・・・ 11 8. Troubleshooting ・・・・・・・・・・・・・・・・・・・・・・・ 23 9. Warranty ・・・・・・・・・・・・・・・・・・・・・・・・・・ 25 - 2 -...
  • Page 4: Foreword

    *The normal state for the units of flow rate is as a rule 0℃ and 1 atm. However, in order to meet the customer’s request that the normal state be 20℃ and 1 atm, KOFLOC indi- cates the units of flow rate together with the calibrating temperature and atmosphere.
  • Page 5: Overview

    MJ400173C1 3) To store the product that has been used, purge with clean air or N so that measuring gas will not remain in the flow meter. Cover the inlet and outlet of measuring gas with caps to prevent intrusion of dust and dirt. 3.
  • Page 6 MJ400173C1 Indicated 表示流量 flow rate Indication 表示上限 upper limit Inversion phenomenon 反転現象 Full scale flow rate フルスケール Flow rate 流量 流量 Saturated inversion phenomenon 飽和反転現象 CAUTION: When a gas not listed in the specifications is let flow or when the thermal mass flow meter calibrated with one type of gas is used for other gases, the indicated value and the actual flow rate are different.
  • Page 7: Specifications

    MJ400173C1 4. Specifications 3810DSⅡ-0 / V-I / V Flow range (N2 conversion) F.S.10SCCM 20SLM F.S.30 100SLM - - Accuracy ±2%F.S. (25℃ normal) ±3%F.S. (25℃ normal) Operating temperature 50℃ - Temp. change effect ±0.20%F.S. / ℃(15 35℃) - Operating humidity 80%RH (no condensation) -...
  • Page 8: Nomenclature

    MJ400173C1 5. Nomenclature Needle valve (3810DSⅡ-V only) Indicator panel Connector Cover Piping connection Body Wiring Product side connector: Hirose Electric HR10A‐7R‐6P Matching connector: Hirose Electric HR10A‐7P‐6S(AWG30 – 26) Signal table Pin No. Signal Name Description +24V Power input +24 VDC P_COM Power input, analog output COM Alarm output 1 or integrating pulse...
  • Page 9: Installation

    MJ400173C1 6. Installation 6-1 Installation place ① This equipment is designed for indoor use. Never install the equipment in a place where it is likely to be wetted by water or rain. The quipment may fail. Install the quipment in a place where sufficient ventilation is provided and changes in temperature and humidity are minimal.
  • Page 10 MJ400173C1 6-4 Piping and filter When using commercially available pipes and joints for piping, be sure that they have been cleaned completely or they are clean. Install a line filter (finer than 100 m) on the inlet side of gas. A standard filter has been installed on the inlet side of the meter, but if a large amount of impurities sticks to it, gas will not flow smoothly, disabling accurate measurement and control.
  • Page 11 MJ400173C1 6-5 Wiring Connect wiring referring to the diagram below. Use connectors dedicated for connection. Firmly insert connectors to the designated places. Load Load Load max. Wiring Product side connector: Hirose Electric HR10A‐7R‐6P Matching connector: Hirose Electric HR10A‐7P‐6S(AWG30 – 26) Signal table Pin No.
  • Page 12: Operation

    MJ400173C1 7. Operation 7-1 Warming-up Warm up the equipment at least 30 minutes after it was powered on. 7-2 Operating procedure ・Indicator panel Alarm lamps Indicator Shift key Up key Flow rate indicating lamps Mode key ・Indicator Indicates an instantaneous flow rate or integrated flow rate. When lower 4 digits of the inte- grated flow rate are indicated, the decimal point is shown.
  • Page 13 MJ400173C1 ・Up key [∧] Measurement: When an instantaneous flow rate is being indicated, pressing and holding this key for approx. 2 seconds sets up the zero adjustment mode. When an integrated flow rate is being indicated, pressing and holding this key for approx.
  • Page 14 MJ400173C1 Pressed & held Pressed & held Zero adjustment executed (During adjustment: LED flashes) Pressed & held Zero adjustment reset executed (During resetting: LED flashes) *1. If the value deviates from zero more than 5% F.S., nothing is shown and the zero adjustment cannot be executed. Transition of modes when instantaneous flow rate is being indicated 7-4 Flow rate indication ①...
  • Page 15 MJ400173C1 In the state of integrated flow rate indication setting, press and hold the up key [△] for ap- prox. 2 seconds. Then the indicator will show Intg. Next, pressing the mode key [M] once shows rSEt. When rSEt is being shown, pressing and holding the shift key [>] causes rSEt to flash. When the key is pressed and held for approx.
  • Page 16 MJ400173C1 7-5 Parameter setting When an instantaneous flow rate/integrated flow rate is being indicated, pressing and holding the mode key [M] for approx. 2 seconds sets the parameter setting mode. Each time the mode key [M] is pressed, the indication changes in the order of mode No. → set value → mode No. → set value.
  • Page 17 MJ400173C1 Setting mode No. and description of set values Mode No. Indication of max. value (Full scale) F-00 A B C D 1. 0 0 0 [Max. value] The value of the full scale is indicated. Unchangeable. Mode No. Instantaneous flow rate indication update cycle, low cut function, integrated flow rate value hold setting P-00 A B C D...
  • Page 18 MJ400173C1 Mode No. Alarm output 1 motion function selection and output setting (OUT1) P-10 A B C D 0 0 0 │ │ │ │ │ └→ Alarm output motion function setting 0: Steady judgment output | | 1: Output non-judgment, judgment prohibit time output |...
  • Page 19 MJ400173C1 [Output inversion setting] Set the output of alarm output 1. 0: Normal Output by the condition set in [Output setting]. 1: Inverted Reverse motion of the above. CAUTION: The lighting of the LED on the indicator panel will not be inverted. [Alarm output motion function] Select the overall motion of alarm outputs.
  • Page 20 MJ400173C1 <Output non-judgment, judgment prohibit time output> Indication Alarm output preset Indication 0 (Flow rate out- (Time) put below 1%) (When power is turned on) Alarm output (Upper limit) Alarm output (Lower limit) 1.6 sec: Alarm output state judgment time Output 1.6 sec.
  • Page 21 MJ400173C1 Mode No. Alarm output 1: Instantaneous flow rate lower limit preset (when instantaneous flow rate lower limit, upper/lower limit output set) P-12 A B C D 0 0 0 0 └――――┘ │ └→ Setting of output 1 preset value: 0000 – 9999 *Output according to results of comparison with a 4-digit value.
  • Page 22 MJ400173C1 3: Instantaneous flow rate upper/lower limit 4: Integrated flow rate reach Set this according to the description of P-10. *”Integrating pulse” cannot be selected in output 2 setting. Mode No. Alarm output 2: Instantaneous flow rate upper limit preset (when instantaneous flow rate upper limit, upper/lower limit output set) P-21 A B C D...
  • Page 23 MJ400173C1 Mode No. Alarm output 2: Integrated flow rate reach preset (when integrated flow rate reach set) P-23 A B C D 9 9 9 9 -(Upper 4 digits) 9 9 9 9. -(Lower 4 digits) └――――┘ │ └→ Setting of output 2 preset value: 0000 0000 – 9999 9999 *The decimal point is shown in lower 4 digits.
  • Page 24: Troubleshooting

    MJ400173C1 8. Troubleshooting Problem Probable Cause Check Item and Corrective Action 1. The indicator shows a. The power is not on. 1. Check to see if the power has been turned on. nothing. b. The connector has not been connected 1.
  • Page 25 MJ400173C1 Problem Probable Cause Check Item and Corrective Action 5. The flow is obviously a. The piping line is leaking. 1. Check leak from the piping line due to failure to less than the indicated tighten nuts, insufficient tightening or other causes flow rate.
  • Page 26: Warranty

    The warranty period is one (1) year after ex-factory date of KOFLOC. ② Scope of warranty If the KOFLOC product fails during the warranty period due to a cause attributable to KOFLOC, KOFLOC will, at its option and expense, provide a replacement product or repair the failed product at the KOFLOC factory.
  • Page 27 MJ400173C1 URL:http://www.kofloc.co.jp - 26 -...

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