MJ400259A1 Table of Contents Page 1.Foreword・・・・・・・・・・・・・・・・・・・・・・・・・・・ 2 2.Switching to “control by digital communications”・・・・・・・・・・・2 3.Basic Specifications・・・・・・・・・・・・・・・・・・・・・・・ 4 4.Message Structure・・・・・・・・・・・・・・・・・・・・・・・ 5 5.Details of Commands・・・・・・・・・・・・・・・・・・・・・・ 7 1) RCFS:Acquisition of the full scale flow rate [significand]・・・・・・・ 2) RDPP:Acquisition of the flow rate decimal point position [number of decimal places]・・・・・・・・・...
2. Switching to “control by digital communications” (Mass flow controller only) EX-550 has been set to “control by analog input” in the factory. When you require “control by digital communications”, first change the flow rate setting method to “digital (0)” in accordance with the procedure described below. To return to “control by analog input”, change it to “analog (1)”...
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MJ400259A1 Valve open/close input (analog signal) Fully close ( -15V ) Control ( OPEN ) Fully open ( +15V ) Controlled by flow rate setting Fully close Fully open voltage/current inputs (analog signals) Flow rate setting method “Analog (1)” Valve open/close input (analog signal) Fully close ( -15V ) Control ( OPEN ) Fully open ( +15V )
MJ400259A1 3. Basic Specifications Synchronization Start-stop Transmission speed 38400 bps Start bit 1 bit Data length 8 bits Stop bit 1 bit Parity None Transmission system 3-wire half-duplex Communication – control circuit: Uninsulated Insulation Communication – power supply: Uninsulated Communication ID setting By use of rotary switch SW2 on top of equipment Using the switch SW2 on the top of the equipment, set a communication ID (1 –...
MJ400259A1 4. Message Structure ・Command message The command message from the communication controller to the equipment should be structured as shown in the following example: Communication ID Command Data Check sum This equipment recognizes “STX” as the head of the message unconditionally.
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MJ400259A1 ・Response message When the communication ID that has been set to the equipment matches the communication ID specified by the command message, the equipment returns a response message as shown in the following example. Communication ID Command Exit code Data Check sum “%(25H)”...
5. Details of Commands The commands that can be executed for the equipment will be described below. Please note that KOFLOC will bear no responsibility for motions resulting from the use of commands other than those specified here. 1) RCFS:Acquisition of the full scale flow rate [significand] The full scale flow rate [significand] is acquired.
MJ400259A1 4) RFRC:Acquisition of the flow rate reference temperature condition The flow rate reference temperature condition is acquired. Data Command: None Response: Decimal 2 digits (fixed length 2 bytes) 00:0℃, 20:20℃, 25:25℃ 5) WFRC:Setting of the flow rate reference temperature condition Set the flow rate reference temperature condition.
MJ400259A1 8) RCGT:Acquisition of the gas type The present gas type that has been set is acquired. Selected by the switch SW1 on the top of the equipment. Data Command: None Response: Decimal 1 digit (fixed length 1 byte) 1:N (Nitrogen) 2:AIR (Air) 3:H...
MJ400259A1 11) RLFD:Acquisition of the display cut setting (0 shown if within ±1%F.S.) The display cut setting (0 shown if within ±1%F.S.) is acquired. Data Command: None Response: Decimal 1 digit (fixed length 1 byte) 0:Disable (No display cut) 1:Enabled (Forced indication of “0”) 12) WLFD:Setting of the display cut setting (0 shown if within ±1%F.S.) Set the display cut setting (0 shown if within ±1%F.S.) Data Command: Decimal 1 digit (fixed length 1 byte)
MJ400259A1 The following are commands used by the mass flow controller only. 15) RCVS:Acquisition of the valve status The present valve status is acquired regardless of analog input or digital setting. Data Command: None Response: Decimal 1 digit (fixed length 1 byte) 0:Fully open, 1:Control, 2:Fully close 16) RCVO:Acquisition of the valve opening The present valve opening is acquired.
MJ400259A1 24) RSFD:Acquisition of the set flow rate [significand] (digital) The set flow rate [significand] (digital) that has been set is acquired. This is used to calculate the set flow rate (digital) together with the flow rate decimal point position [number of decimal places] and flow rate unit. Data Command: None Response: Decimal 4 digits (fixed length 4 bytes) Range: 0000 -...
MJ400259A1 28) RAZS:Acquisition of the sensor auto zero The sensor auto zero is acquired. Data Command: None Response: Decimal 1 digit (fixed length 1 byte) 0:Disabled 1:Enabled 29) WAZS:Setting of the senor auto zero Set the sensor auto zero. Data Command: Decimal 1 digit (fixed length 1 byte) 0:Disabled 1:Enabled Response: None...
MJ400259A1 6. Flow Rate Expression The maximum full scale flow rate, full scale flow rate, instantaneous flow rate, set flow rate (digital) and set flow rate are expressed by a combination of the significand and flow rate decimal point position [number of decimal places] and flow rate unit. Note that flow rate decimal point position [number of decimal places] and flow rate unit are used commonly for each flow rate and cannot be changed.
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