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Branson IPC 3000 Operating Manual

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NANOSYSTEM FABRICATION FACILITY (NFF), HKUST
Standard Operating Manual
___________________________________________________________
Branson IPC 3000 O
Asher
2
Version 1.0
Page 1 of 14

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Summary of Contents for Branson IPC 3000

  • Page 1 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Standard Operating Manual ___________________________________________________________ Branson IPC 3000 O Asher Version 1.0 Page 1 of 14...

  • Page 2: Table Of Contents

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Contents Picture and Location Process Capabilities Cleanliness Standard Recipes Performance of Branson IPC 3000 O Asher Contact List and How to Become a Qualified User Emergency Responses and Communications Training to Become a Qualified User Operating Procedures...

  • Page 3: Picture And Location

    Chamber Door This tool is located at NFF Enterprise Center Cleanroom Room 4162 Mechnical Pump RF Generator Process Capabilities Fig.1 Branson IPC 3000 O Asher 2. Process Capabilities 2.1 Cleanliness Standard Asher is an “Non-Standard” equipment for Photo Resist Branson IPC 3000 O etching.
  • Page 4 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST descum. Recipes’ parameters are shown below. Plasma Descum (DESCUM.RCP) Ramp ambient N flow rate (slpm) 0.45 Temperature at the end of ramp ( Power during ramp (W) pressure (Torr) Process O flow rate (slpm) 0.45 Temperature at the end of ash ( Power during ash (W) pressure (Torr)

  • Page 5: Performance Of Branson Ipc 3000 O Asher

    1. Read the operation manual of Branson IPC 3000 O asher which can be found at NFF web site. 2. Send an e-mail to NFF requesting Branson IPC 3000 O asher operation training. Scheduling can take up to several weeks due to the many requests coming in for this tool.

  • Page 6: Operating Procedures

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4. Operating Procedures 4.1 System Description Branson IPC 3000 O Asher can generate a low pressure, low temperature gaseous plasma. Ashing, etching and polymer surface modification can be performed quickly and reproducibly. It consists of a quartz process chamber, main unit, touch screen panel, RF generator, pressure gauge, thermal couple and power supply.
  • Page 7 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Fig4. Mechanical Pump Fig5. Main unit including chamber Version 1.0 Page 7 of 14...

  • Page 8: Safety Warnings

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4.2 Safety Warnings This equipment can cause injury if it is not being used under a cautious manner. 1. The quartz chamber, wafer boats (see Fig.7) are very brittle. Please handle them carefully. 2. Load the wafers or specimens into the chamber carefully to avoid damage of thermal couple which is isolated in a quartz tube (see Fig 6).

  • Page 9: Operation Rules

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4.3 Operation Rules 1. If the equipment alarms during operation, do not try to fix the problem by yourself and should report to NFF staff immediately. 2. Do not operate the equipment unless you are properly trained and approved by NFF staff.

  • Page 10: Status Checks

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 5. The quartz boats, thermal couple and chamber are under good conditions and without cracks. 6. The sealing surface and the sealing rubber of the door are under good conditions without damage. 4.5 Status Checks No reservation is needed for this equipment.
  • Page 11 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 2. Four columns can be found in this menu. Go to the last column “Recipe File”, select the correct recipe and click “Recipe Edit”. All recipes should be in *.RCP format. 3. Check the recipe parameters to make sure the parameters are correct. The tables below show the recipe parameters of “DESCUM.RCP”...

  • Page 12: Pump Down And Start The Process

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST numbers and click “Enter”. To save the new settings, click “RECIPE VALIDATE” first. Click “Yes” on Popup massage “Congratulation! Validation Success!” and then click “Save”. After that, click “Exit” to exit this page and click “START PROCESS” to start the process. 4.6.3 Pump down and start the process 1.
  • Page 13 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Fig9. Process running with real time feedback data Fig 9. X-axis: Time (Sec), Y-axis: Green line: O flow rate; Blue line: N flow rate; Pink line: RF power; purple line: Pressure; Thin blue line: Temperature Bars: N2 flow rate, O2 flow rate, RF power, pressure 3.

  • Page 14: Vent And Unload The Samples

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4.6.4 Vent and unload the samples 1. After venting to atmosphere, pull the knob and turn it in clockwise direction. Open the chamber door and take out the quartz boats by metal fork. Don’t touch the quartz boats or chamber by hands because they might be still hot.

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