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Summary of Contents for LEYBOLD COMBIVAC CM 51
- Page 1 COMBIVAC CM 51 COMBIVAC CM 51 Vacuum Gauge Controller Instruction Manual GA130001441_002_C0 Catalog No. 230110 230111...
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Page 3: Table Of Contents
Responsibility and Warranty Shipping Damage Safety General Information Key to the Symbols Basic Safety Information General Equipment Description COMBIVAC CM 51 THERMOVAC (Pirani) Method of Measurement PENNINGVAC (cold cathode) Method of Measurement Connectable Gauge Heads Technical Data General Data 4.1.1 Mechanical Data 4.1.2... - Page 4 Outputs and Inputs 4.5.1 Analog Output 4.5.2 External Control 4.5.3 Serial Interfaces 4.5.3.1 RS232 4.5.3.2 RS485 4.5.4 Profibus-DP Installation Supplied Equipment Mechanical Installation 5.2.1 Rack Installation 5.2.2 Front Panel Installation 5.2.3 Benchtop Instrument Connections 5.3.1 Rear Side of the Instrument 5.3.2 Mains Connection 5.3.3...
- Page 5 Sensor Parameters (PArA SEn) 7.2.1 Filament Material THERMOVAC (FIL) 7.2.2 Type of Gas Correction THERMOVAC (GAS 7.2.3 Type of Gas Correction PENNINGVAC (GAS 7.2.4 Sensor Switch-on Type (S-on) 7.2.5 Sensor Switch-on Value ( t-on) 7.2.6 Sensor Switch-off Type (S-oFF) 7.2.7 Sensor Switch-off Value (t-off) General Parameters (PArA GEn) 7.3.1...
- Page 6 Storing and Waste Disposal 10.1 Packaging 10.2 Shelving 10.3 Waste Disposal Annex 1 - EU Declaration of Conformity Annex 2 - Declaration of Contamination GA130001441_002_C0 – 09/2016...
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Page 7: Table Of Figures
Table of Figures Figure 1 – Nameplate (Examble) Figure 2 – COMBIVAC CM 51 dimensions (in mm) Figure 3 – Rack installation Figure 4 – Front panel cutout dimensions (in mm) Figure 5 – Preparing the top side of the instrument for utilisation as a benchtop unit Figure 6 –... -
Page 8: Description
Figure 1 – Nameplate (Examble) Conforming Utilisation The COMBIVAC CM 51 is a universal vacuum gauge which owing to the combination of two principles of measurement - Pirani (Thermovac) and Penning (cold cathode) - permits measurements and checks within the entire vacuum pressure range between1·10-9 mbar and atmospheric pressure. -
Page 9: Responsibility And Warranty
Responsibility and Warranty The Leybold Vacuum GmbH will not assume any responsibility or warranty in case the operator or third persons do not observe the information given in this document. do not use the product as intended. ... -
Page 10: Safety
Safety General Information The COMBIVAC CM 51 is delivered ready for operation. Even so, we recommend that you carefully read these Operating Instructions so as to ensure optimum operating conditions right from the start. This manual contains important information for understanding, installing, commissioning, operating and troubleshooting the COMBIVAC CM 51. -
Page 11: General Equipment Description
1·10 to atmospheric pressure is possible. Six switching thresholds permit the integration of the COMBIVAC CM 51 within complex vacuum control facilities. The two THERMOVAC channels are immediately active upon powering up. The PENNINGVAC channel may be switched on and off by one of the two THERMOVAC channels or externally or manually. -
Page 12: Technical Data
128.4 mm (3 HE) Tiefe: 174.5 mm ≤ 1.4 kg Wight: ≤ 230 mm approx. (including connected plugs) Installation depth: Usage: Rack installation Front panel installation Benchtop instrument Figure 2 – COMBIVAC CM 51 dimensions (in mm) GA130001441_002_C0 – 09/2016... -
Page 13: Standard Parameters (Factory Defaults)
4.1.2 Standard Parameters (factory defaults) 4.1.2.1 Sensor-dependent Parameters THERMOVAC PENNINGVAC Parameter Parameter description setting setting Switching thresold 1 – lower threshold . . Switching thresold 1 – upper threshold . . Switching thresold 2 –... -
Page 14: Standards
4.1.4 Standards Conformity with respect to Low Voltage Directive 2014/35/EU Conformity with respect to EMC Directive 2014/30/EU Conformity with respect to RoHS Directive 2011/65/EU International/national standards as well as specifications: DIN EN 61010-1 (2011) (Safety requirements for electrical equipment for measurement, control and laboratory use). -
Page 15: Switching Functions / Relay Outputs
Switching Functions / Relay Outputs 4.4.1 Switching Function Relay Number: Assignment: 2 per channel Response time: < 50 ms – 1·10 Adjustment range: PENNINGVAC 1·10 mbar – 5·10 THERMOVAC 5·10 mbar Hysteresis: adjustable > 10 % of measured value Contact type: changeover contact, floating Load (resistive): switched current:... -
Page 16: External Control
4.5.2 External Control PLC compatible logic level: (Low) < 7 VDC; 0 A (High) > 13 VDC; 7 mA (at 24 VDC) Contact via relay: 24 VDC approx., is provided by the instrument via a self-resetting fuse (100 mA) Connection: SUB-D, 15-way, plug (jointly used with the analog output connection) 4.5.3... -
Page 17: Installation
Plastic sleeves Edge protection Adhesive feet Table 6 – Supplied equipment Mechanical Installation The COMBIVAC CM 51 gauge can be used as follows: Rack installation Front panel installation Benchtop instrument WARNING: Powering down Install the instrument or place it so that you are in a position to operate the mains power switch at any time or ensure that the instrument can be deenergised at any time. -
Page 18: Rack Installation
5.2.1 Rack Installation The COMBIVAC CM 51 has been designed for installation within a sub-rack (19", 3 U) in accordance with DIN EN 60297 (IEC 60297) ( Figure 3, page 18). For this purpose the supplied equipment includes four neck collar screws and four plastic sleeves. -
Page 19: Benchtop Instrument
5.2.3 Benchtop Instrument When intending to use the COMBIVAC CM 51 as a benchtop instrument, then proceed as follows: Push one of the two edge protection rubber pieces included in the delivery over the top edge of the front panel (... -
Page 20: Connections
5.3.1 Rear Side of the Instrument The Figure 7, page 20 shows the rear panel of the COMBIVAC CM 51. The way in which the individual connections have been wired is described in the following sections. Figure 7 – Rear panel of the instrument... -
Page 21: Earthing
CAUTION: Impermissible Sensors. Gauge heads which have not been designed to be operated in connection with the COMBIVAC CM 51 or which do not comply with current EMC guidelines can impair operation of the instrument or even damage it. Always ... -
Page 22: Analog Output And External Control (Analog Output / Extern Control)
Connecting: Connect the PENNINGVAC gauge head through the corresponding connecting cable to the connection PM on the rear of the COMBIVAC CM 51. Lock the plug using the knurled nut provided at the plug. WARNING: For utilising the connection PM, a special cable from the company Leybold Vacuum GmbH must be used. -
Page 23: Rs232 / Rs485 Interface (Interface Rs232 / Rs485)
Connecting: Connect the serial interface of the computer using a shielded cable to the connection RS232/RS485 on the rear of the COMBIVAC CM 51. WARNING: When using the serial interface RS232 use a serial extension cable with a 9- way plug and a 9-way socket. -
Page 24: Relay Output (Relay Output)
5.3.9 Relay Output (Relay Output) Through the connection Relay Output ( Figure 7, H, page 20 and Figure 11, page 24) you can utilise the floating relay contacts for switching purposes and ready signals. Figure 11 – Connection plug for relay output (SUB-D, 25-way) DANGER: Dangerous voltage Voltages exceeding 60 VDC or 30 VAC are dangerous when touched. -
Page 25: Operation
Operation Front Panel Figure 12, page 25 depicts the front panel of the COMBIVAC CM 51. Figure 12 – Front panel Display of channel 1 with two corresponding switching thresholds Display of channel 2 with two corresponding switching thresholds Display of channel 3 with two... -
Page 26: Control Pushbuttons
Switching on and off 6.2.1 Switching on Switch the instrument on through its mains switch. After switching on, the COMBIVAC CM 51 runs the following: Self test Display test Display of the software version used Re-establishing the parameters set up last ... -
Page 27: Operating Modes
Operating Modes The COMBIVAC CM 51 may be operated in one of the following operating modes: Measurement Mode The measurement mode is the standard operating mode. Here the measured values or status messages are displayed. Chapter 6.4 Measurement Mode, page 27 Parameter Mode In the parameter mode you have access to different parameters. -
Page 28: Pushbutton Functions
6.4.3 Pushbutton Functions 6.4.3.1 Measurement Channel Selection Press the pushbutton CH. o The instrument selects the next measurement channel. The display of Para for the selected measurement channel will flash for 10 seconds. Figure 13 – Operating the pushbutton CHANNEL 6.4.3.2 Parameter Mode Selection ... -
Page 29: 6.4.3.3 Switching The Penningvac On
6.4.3.3 Switching the PENNINGVAC on The PENNINGVAC gauge head can be switched on manually. For this, sensor control must be set to Hand ( Chapter 7.2.4 Sensor Switch-on Type (S-on), page 36). Press the pushbutton CH so as to select measurement channel 3. ... -
Page 30: Thermovac Alignment
6.4.4 THERMOVAC Alignment Ageing and contamination of the sensor filament will impair the accuracy of the pressure readout. For this it is recommended to align the THERMOVAC gauge head as required. For this, the gauge head must be orientated in the same way in which it is subsequently operated. -
Page 31: Parameter Mode
Parameter Mode 6.5.1 Selection By operating the PARA pushbutton for approximately 2 seconds the instrument changes from the measurement mode to the parameter mode. The Para indicator comes on for the channel selected in each case. When the instrument is running in the parameter mode and if no pushbutton is operated for 10 seconds, then the instrument will automatically return back to the measurement mode. -
Page 32: Operating Concept
6.5.3 Operating Concept From the measurement mode, you can select and change a certain parameter as follows: Press the pushbutton CH, so as to select the desired measurement channel (only necessary when wanting to change a sensor parameter) o The Para status indicator flashes for the selected channel. ... -
Page 33: Parameters
Basic Terms Switching functions The COMBIVAC CM 51 contains in all 6 switching function relays, i.e. the switching functions 1 and 2 are available for each measurement channel. These switch depending on the measured pressure. The contacts of the relays are floating and may be used for switching purposes through the connection marked Relay Output (... -
Page 34: Configuring The Switching Functions
Figure 19 – Behaviour of a switching function in response to pressure changes Pressure Time Normally open contact COM Common contact Normally closed contact The range between the lower and the upper threshold value produces a certain amount of hysteresis between switching on and switching off of the relay. The hysterisis prevents rapid switching on and off of the switching function when the pressure is close to a switching threshold. -
Page 35: Sensor Parameters (Para Sen)
Sensor Parameters (PArA SEn) For each measurement channel there exists a separate set of sensor parameters. Depending on which transmitter is connected to the respective measurement channel, different parameters are available ( Table 10, page 35). Gauge heads ... -
Page 36: Type Of Gas Correction Penningvac
7.2.3 Type of Gas Correction PENNINGVAC (GAS The PENNINGVAC gauge heads are normally calibrated for measurements in nitrogen or air. With the aid of the parameter GAS you can set up the measurement channel to other types of gas. For this proceed as follows: ... -
Page 37: Sensor Switch-Off Type (S-Off)
7.2.6 Sensor Switch-off Type (S-oFF) This parameter defines how the PENNINGVAC gauge head is switched off. You can set up the switch-off type to the following values: HAnd Manual. The gauge head can be switched off by pressing the pushbutton DOWN (... -
Page 38: Unit Of Measurement (Unit)
7.3.1 Unit of Measurement (unit) Unit of measurement for pressure values. This unit of measurement affects the displayed pressure values, threshold values etc. Display Description Unit of measurement mbar Unit of measurement Torr Unit of measurement Pascal Table 12 –... -
Page 39: Profibus (Pb)
7.3.5 Profibus (Pb) Selection of the Profibus adress. Display Description – Adress 1 – 126 Table 16 – Values for the parameter Pb CAUTION: The changed Profibus bus address will only become effective after having restarted the instrument. 7.3.6 Baud Rate (bAud) Baud rate oft he interface Display... -
Page 40: Computer Interface
Computer Interface Basics 8.1.1 Connection The COMBIVAC CM 51 can communicate with the computer through a serial interface. The interfaces RS232 or RS485 are selectively available. The selection is made through the parameter group PArA GEn in the parameter mode (... -
Page 41: Communication
Communication 8.2.1 Protocol The following log is used for communication: 8 data bits no parity bit 1 stop bit The baud rate is selectable. 9600 19200 38400 No hardware handshake is used. The messages are transferred by way of ASCII strings. A comma (0x2C) in the string is taken as a separating character. -
Page 42: Command Set (Mnemonics)
Command Set (Mnemonics) 8.3.1 Command Overview Read Commands Description Read Pressure Value. Read the pressure value for a measurement channel. Read Version Number Read the instrument software version number. Read Setpoint Status Read the status of the switching thresholds for a channel. Table 21 –... -
Page 43: Rpv (Read Pressure Value)
8.3.2 RPV (Read Pressure Value) Reading a pressure value for a measurement channel. S: RPV[a]<CR> E: b[,][TAB]x.xxxxE±xx Parameter Description Channel number 1 = Channel 1 (TM1) 2 = Channel 2 (TM2) 3 = Channel 3 (PM) Status 0 = Measured value OK 1 = Measured value <... -
Page 44: Rss (Read Set Point Status)
8.3.4 RSS (Read Set Point Status) Reading the status of the switching thresholds for a channel. S: RSS[a]<CR> E: b[,][TAB]c<CR> Parameter Description Channel number 1 = Channel 1 (TM1) 2 = Channel 2 (TM2) 3 = Channel 3 (PM) Status SP1 0 = low 1 = high Status SP2... -
Page 45: Sac (Save Actual Configuration)
8.3.7 SAC (Save Actual Configuration) Saving current configuration for switching threshold, sensor and general parameters. S: SAC<CR> E: OK<CR> 8.3.8 RSA (Read Serial Adress) Read adress for RS485. S: RSA<CR> E: a<CR> Parameter Description Adress 1 – 126 (01 – 7E) (output in the HEX format) 8.3.9 SSA (Set Serial Adress) -
Page 46: Sgp (Set General Parameter)
Parameter Description (continued) Brightness 0 = hoch 1 = gering Profibus 1 – 126 Baud rate 0 = 9600 1 = 19200 2 = 38400 Serial interface 0 = RS232 1 = RS485 8.3.11 SGP (Set General Parameter) Setting instrument settings. S: SGP[a, b, c, d, e, f, g]<CR>... -
Page 47: Rgc (Read Gas Correction)
8.3.12 RGC (Read Gas Correction) Reading the type of gas correction factor for a measurement channel. S: RGC[a]<CR> E: b<CR> Parameter Description Channel number 3 = Channel 3 (PM) Gas type correction factor channel Format X.XX with a range of values 0.20 – 8.00 8.3.13 SGC (Set Gas Correction) Setting the type of gas correction factor for a measurement channel. -
Page 48: Ssc
8.3.15 SSC (Set Sensor Control Setting the type of sensor control for PENNINGVAC. S: SSC[a, b, c, x.xxxxE±xx, x.xxxxE±xx]<CR> E: OK<CR> Parameter Description Channel number 3 = Channel 3 (PM) Sensor switch-on type channel 0 = Manual 1 = External 2 = n.a. -
Page 49: Ssp (Set Set Point)
8.3.17 SSP (Set Set Point) Setting the switching thresholds for a channel. S: SSP[a, b, c, d, e]<CR> E: OK<CR> Parameter Description Channel number 1 = Channel 1 (TM1) 2 = Channel 2 (TM2) 3 = Channel 3 (PM) SP1 low (pressure value of the switching threshold in the current unit of measurement in the form of x.xxxxE±xx) SP1 high (pressure value of the switching threshold... -
Page 50: Maintenance And Service
Protect the instrument against moisture. Do not open the instrument. Troubleshooting 9.2.1 Fault Indication A malfunction affecting the COMBIVAC CM 51 is indicated by an error message on the display. ( Chapter 9.2.2 Error Messages, page 50) 9.2.2... -
Page 51: Help The Case Of Faults
Send defective products for repair to your nearest Leybold GmbH service office. The compa- ny Leybold Vacuum GmbH will not assume any responsibility or honour a warranty if the operator or third persons have attempted repair work on the COMBIVAC CM 51. - Page 52 COMBIVAC CM 51 or when returning it to the Leybold Vacuum GmbH. 10.2 Shelving The COMBIVAC CM 51 must only be stored in dry room. During storage, the following ambient conditions need to be maintained: Ambient temperature: -20 – +60 °C ...
- Page 53 Notes: GA130001441_002_C0 – 09/2016...
- Page 55 Return only: Person to contact: Factory-calibr. Phone : Fax: Calibration: Quality test certificate DIN 55350-18-4.2.1 End user: A. Description of the Leybold product: Failure description: Material description : Catalog number: Additional parts: Serial number: Application-Tool: Type of oil (ForeVacuum-Pumps) : Application- Process: B.
- Page 56 Sales and Service Germany America Great Britain Leybold Japan Co., Ltd. Tsukuba Technical Service Center 1959, Kami-yokoba Leybold UK LTD. Leybold GmbH Tsukuba-shi, Ibaraki-shi 305-0854 Unit 9 Sales, Service, Support Center (3SC) Japan Silverglade Business Park Bonner Strasse 498 Leybold USA Inc.
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