Page 1 LCR METER ZM2371 / ZM2372 Instruction Manual NF Corporation...
Page 3 DA00026021-007 LCR METER ZM2371 / ZM2372 Instruction Manual...
Page 4 Registered Trademarks National Instruments and LabVIEW are registered trademarks of National Instruments Corporation in the United States. Other company names and product names used in this Instruction Manual may be trademarks or registered trademarks of respective companies.
Page 5 CE marking on the rear panel. The ZM2371/ZM2372 with the version 1.00, 1.10, or 1.20 has no function fixing the output impedance to 100 , and the minimum output impedance setting is either 5 or 25 .
Page 6 7. TROUBLESHOOTING This chapter describes how to deal with error messages and troubles. 8. MAINTENANCE This chapter describes storage, repacking transportation as well as performance testing. 9. SPECIFICATIONS This chapter describes the product’s specifications (functions and performance). ZM2371/ZM2372...
Page 7 ──── Safety Precautions ──── To ensure safe use, be sure to observe the following warnings and cautions. NF Corporation shall not be held liable for damages that arise from a failure to observe these warnings and cautions. This product is a Class I product (with protective conductor terminal) that conforms to the JIS and IEC insulation standards.
Page 8  Do not expose this product to water. When this product is used in wet condition, it may cause an electric shock and a fire. If this product is exposed to water, unplug the power cord immediately, and contact NF Corporation or one of our representatives.
Page 9: Table Of Contents
3.5.6.3 Measurement Range ··············································································· 3-35 3.5.6.4 Trigger ·································································································· 3-38 3.5.6.5 Measurement Speed ················································································ 3-42 3.5.6.6 Correction of Measurement Error ································································ 3-44 3.5.6.7 OPEN Correction ···················································································· 3-45 3.5.6.8 SHORT Correction ·················································································· 3-50 3.5.6.9 LOAD Correction ····················································································· 3-53 3.5.6.10 Cable Length Correction ··········································································· 3-57 ZM2371/ZM2372...
Page 10 5.1.1 Remote Control Interface Selection ····························································· 5-2 5.1.2 Outline of USB ························································································ 5-3 5.1.2.1 Preparation of Controller ············································································· 5-3 5.1.2.2 Preparation of ZM2371 / ZM2372 ································································· 5-4 5.1.2.3 USB Device Identification ············································································ 5-4 5.1.3 Outline of RS-232 ···················································································· 5-5 5.1.3.1 Preparation of Controller ············································································· 5-5 5.1.3.2 Preparation of ZM2371 / ZM2372 ·································································...
Page 11 8.7.3 Voltage Monitor Accuracy ·········································································· 8-5 8.7.4 DC Bias Voltage Accuracy ········································································· 8-6 8.7.5 AC Impedance Measurement Accuracy ························································ 8-7 8.7.6 DC Resistance Measurement Accuracy ······················································· 8-11 8.8 Calibration································································································· 8-12 9. SPECIFICATIONS ·············································································· 9-1 9.1 Specifications ······························································································ 9-2 9.2 External Dimensions ··················································································· 9-12 ZM2371/ZM2372...
Page 12 Figure 5-4 Operation status structure ········································································ 5-79 Figure 5-5 Trigger system ······················································································ 5-82 Figure 9-1 Range of error ························································································ 9-7 Figure 9-2 LC - Z conversion graph ··········································································· 9-8 Figure 9-3 ZM2371 External dimensions ··································································· 9-12 Figure 9-4 ZM2372 External dimensions ··································································· 9-13 viii ZM2371/ZM2372...
Page 13 Status byte register definitions ··································································· 5-76 Table 5-5 Standard event status register contents ······················································· 5-77 Table 5-6 Contents of operation condition register and event register ······························ 5-80 Table 7-1 When the device appears to be a problem ···················································· 7-8 ZM2371/ZM2372...
Page 14: Outline
1. OUTLINE OUTLINER ............... 1-1 1.1 Features ................1-2 1.2 Applications..............1-2 1.3 List of Functions ............... 1-3 1.4 Principle of Operation ............1-4 ZM2371/ZM2372...
Page 15: Features
1.1 Features 1.1 Features The “ZM2371 / ZM2372 LCR Meter” is a high speed LCR meter with the maximum frequency 100kHz and maximum signal level 5V. It has high basic accuracy of 0.08% and is capable of measuring the impedance in a wide application range from manufacturing and inspection lines of electronic parts up to the research of materials.
Page 16: List Of Functions
1.3 List of Functions 1.3 List of Functions The following shows the outline of functional tree of ZM2371 / ZM2372. Measurement range (Manual, Auto) Measurement conditions Signal source Measurement frequency Measurement signal level ALC (constant voltage, constant current) DC bias...
Page 17: Principle Of Operation
1.4 Principle of Operation 1.4 Principle of Operation The ZM2371 / ZM2372 gives sine-wave signal from an internal oscillator to the DUT (Device Under Test). The impedance bridge detects the current I flowing in DUT and the voltage V applied to DUT, and then the main processor obtains the impedance Z (= V / I). The parameters such as inductance L, capacitance C, resistance R, etc.
Page 18 The voltage applied to the DUT is detected by the differential amplifier. After that, the voltage signal and current signal are converted into digital values by the A/D converter, and sent to the main processor. ZM2371/ZM2372...
Page 19 2.2 Installation ................ 2-4 2.2.1 General Precautions for Installation ........2-4 2.2.2 Installation Conditions ............2-4 2.2.3 Rack Mounting ..............2-5 2.3 Grounding and Power Supply Connection ...... 2-10 2.4 Simplified Operation Check ..........2-11 2.5 Calibration ..............2-12 ZM2371/ZM2372...
Page 20: Checking Before Use
• Sample programs An example of control of ZM2371 / ZM2372 is shown using each interface of USB, GPIB, and RS-232 in each programming language of C# , VB.NET and others. This chapter describes the outline only. For detailed contents and handling method, refer to the instructions stored in the CD-ROM.
Page 21 100 or less, an additional error should be evaluated before use of the product. If you need the bias voltage over 2.5V, please use the next adapter. But the ZM2371 / ZM2372 firmware version must be 1.20 or more.
Page 22: Installation
 Handling of the panel and case The front panel of ZM2371 / ZM2372 is made of plastic. It can be damaged by sharp or hot tools. When the case/panel surface needs cleaning, wipe with a soft cloth. To remove persistent contamination, wipe with a soft cloth soaked with neutral detergent and wrung out.
Page 23: Rack Mounting
2.2 Installation 2.2.3 Rack Mounting ZM2371 / ZM2372 can be mounted on a 19-inch IEC rack, an EIA specification rack or a JIS standard rack by the use of a rack-mount adapter (optional). The rack-mount adapter is available with metric type and inch type.
Page 24 2.2 Installation Figure 2–1 Rack-mount assembly (mm-rack) ZM2371/ZM2372...
Page 25 2.2 Installation Figure 2–2 Rack-mount assembly (inch-rack) ZM2371/ZM2372...
Page 26 2.2 Installation Figure 2–3 Size and dimensions of the rack-mount (mm-rack) ZM2371/ZM2372...
Page 27 2.2 Installation Figure 2–4 Size and dimensions of the rack-mount (inch-rack) ZM2371/ZM2372...
Page 28: Grounding And Power Supply Connection
Before connecting the device for measurement, make sure the protective grounding terminal is grounded. The protective grounding terminal for ZM2371 / ZM2372 is the grounding pin of the three-pole power cord. Make sure you insert the power cord’s plug into a three-pole power outlet with a protective grounding contact.
Page 29: Simplified Operation Check
2.4 Simplified Operation Check Before an important measurement or after a long unused time of device, it is recommended to check the ZM2371 / ZM2372 operation by the following procedure. Check it within an application range. 1. Plug the power cord in the AC outlet and turn on the power switch on the rear panel.
Page 30: Calibration
2.5 Calibration 2.5 Calibration Ensure that ZM2371 / ZM2372 undergoes the test described in “8.7 Performance Testing” at least once a year, depending on the use environment and use frequency. It is recommended to conduct a performance test before using it for an important measurement or test.
Page 31: Panel Features And Basic Operations
3.5.6.3 Measurement Range ..........3-35 3.5.6.4 Trigger ..............3-38 3.5.6.5 Measurement Speed ..........3-42 3.5.6.6 Correction of Measurement Error ......3-44 3.5.6.7 OPEN Correction ............ 3-45 3.5.6.8 SHORT Correction ..........3-50 3.5.6.9 LOAD Correction ............ 3-53 3.5.6.10 Cable Length Correction ........3-57 ZM2371/ZM2372...
Page 32: Panel Component Names And Functions
3.1 Panel Component Names and Functions 3.1 Panel Component Names and Functions This section describes the names and functions of the components on the front and rear panel of ZM2371 / ZM2372. Register keys Correction Status indication lamps OPEN, SHORT, LOAD, CABLE Light up when: 0 ..
Page 33 Figure 3–2 Rear panel Note: This chapter shows the front panel and rear panel of the ZM2372. The ZM2371 does not have the handler interface, GPIB, and contact check function. Accordingly, the connectors, labels on the panel, and indication lamps related to these features are not provided.
Page 34: Display At Power "On" And Initial Settings
・ Insert the power cord’s plug to a three-pole power socket. ・ By switching the power switch upward the ZM2371 / ZM2372 is turned on. When the power switch is turned on, a starting message is displayed and then the device becomes ready for measurement.
Page 35: Displays And Indications At Power "On
BEFORE USE”. When the power switch is turned on, a test pattern is displayed, and then a starting message including the model name “ZM2371” or “ZM2372” and firmware version is displayed (see below). Example: Z M 2 3 7 2 V 1 .
Page 36: Initialization
3.2 Display at Power “ON” and Initial Setting 3.2.3 Initialization ZM2371 / ZM2372 is reset to the factory default settings in the following cases:  At the time of shipment from factory All settings and correction values including operation modes and memory contents are set to the initial values.
Page 37  Secondary parameters) Standard value (Primary & ±9.99999E+11 1, 0 ← ←   Secondary parameters) 0|1|2|4 m ← ←   <Cable length> <Averaging> ON/OFF OFF|ON ← ←   Count 1 to 256 ← ←   ZM2371/ZM2372...
Page 38   comparison Secondary parameter limit OFF|ON ← ←   comparison (Fixed to initial <Handler interface>  value for ZM2371) (ZM2372 only) AUX BIN function OFF|ON OFF (Include) ← ←   Bin extension BIN10..14 OFF|ON ← ← ...
Page 39 It cannot be set/query by the remote control. The followings are out of the resume target: ・ Measured data saved in the measured data buffer ・ Latest measured data ・ Range selected automatically ・ Measurement parameters selected automatically ・ Equivalent circuit selected automatically ZM2371/ZM2372...
Page 40: Operation Tree
3.3 Operation Tree 3.3 Operation Tree An operation tree when ZM2371 / ZM2372 is operated from the panel is shown below. For the expression of operations, see “3.5.2 Basic Key Operations”. Operation Tree (1/3) : { Measurement frequency setting menu }...
Page 41 + [NO LIMIT] : Disabled setting (Don't care) _SHIFT_ + [Pri/Sec] : Movement between Primary and Secondary _SHIFT_ [PREV] : Movement between all upper and lower limit value (forward direction) [NEXT] : Movement between all upper and lower limit value (reverse direction) Continued 3-11 ZM2371/ZM2372...
Page 42 { Beeper setting menu } { Fully initialization menu } Self diagnosis Version display { Operation mode setting menu } : Shifts from remote to the local _LOCAL_ + [KEY LOCK] : Key operation disabled / enabled _SHIFT_ 3-12 ZM2371/ZM2372...
Page 43: Connection Of Dut
WARNING The measurement category of measurement terminals L the ZM2371 / ZM2372 is CAT I. Do not connect them directly to the power lines of power outlet, distribution board, or inside a device. Also, do not apply voltage exceeding 42Vpk to the grounding. Otherwise, you may get a shock or the ZM2371 / ZM2372 may be damaged.
Page 44: Connection To Dut
In a simplified method, place an insulating plate on the top surface of ZM2371 / ZM2372, and measure the DUT on it. The ZM2371 / ZM2372 cannot measure the grounded DUT. Both ends of DUT must be both insulated from the grounding.
Page 45: Precautions On Connection
DUT to earth capacitance, the error can be reduced by the LOAD correction only in a narrow measurement range. Using the cables exceeding substantially the specified length makes the ZM2371 / ZM2372 operation unstable due to the influence of resistance value or capacitance of cable inner conductor, causing the measurement to be failed.
Page 46 Provide an electrostatic shield or keep peripheral potential constant. Be sure to connect the ZM2371 / ZM2372 case to the ground. Using 3-pole power cord, connect ZM2371 / ZM2372 to the 3-ple power socket having a protective grounding contact, so that the device is connected to the ground.
Page 47: Basic Operations
{Int | Man | Ext | Bus} 4) CORRECTION Op OPEN (Op, Sh, Ld are displayed when enabled) SHORT LOAD Xm Cable lengh {0m | 1m | 2m | 4m} { } indicates that either one of options delimited with | is displayed. 3-17 ZM2371/ZM2372...
Page 48: Basic Key Operations
Indicates the key with TTT written on the key top and BBB written _TTT_ above or under the key. ZM2372 SHIFT T T T SHIFT  Tertiary function The tertiary function (BBB) written under the key operates according to the operation flow or situations at that time. T T T 3-18 ZM2371/ZM2372...
Page 49 For the menu that sets multiple parameters, the parameters to be set can be switched with | [PREV] key and | [NEXT] key. _BS_ _EXP_ Parameter name and current setting Parameter_name: Value1 (Value2) Range of value Comments Settable range 3-19 ZM2371/ZM2372...
Page 50 An error message may be displayed when, for instance, the input value exceeds the setting range. The error message can be reset by pressing any key. After confirming the contents of an error, press the | [EXIT] key at the lower right for instance to reset the error ENTR message. 3-20 ZM2371/ZM2372...
Page 51: Simplified Operating Method When You Use Instrument For The First Time
_SHIFT_ return to the initial setting state. When you use the ZM2371 / ZM2372 that has already been set variously, performing the initialization makes later operations easy. The contents saved in the settings and correction value memories are not initialized by this operation.
Page 52 “ 3.5.5.3 Setting the Secondary Parameter ” Current setting S e c o n d a r y pa r a m e t e r : D  Options (First page) 5)Rs >NEXT Options (Second page) 6)Rp 8)Lp 9)Rdc <PREV _CKT_ _Pri_ _Sec_ 3-22 ZM2371/ZM2372...
Page 53 _LEVEL_ voltage.  Measurement speed Press the key to display the measurement speed setting menu, and select the _SPEED_ measurement speed with a numeric key. _FREQ_ _LEVEL_ _SPEED_ 3-23 ZM2371/ZM2372...
Page 54 Referring to “3.4 Connection of DUT”, connect the LCR meter to the DUT.  Manual trigger Set the trigger source to “Manual”, and press the key, so that the trigger signal is _TRIG_ applied and the measurement is executed once. 3-24 ZM2371/ZM2372...
Page 55: Initialization
| [INIT]  Full initialization To reset all settings except operation modes to the factory default values, perform full initialization. The contents of settings and correction value memories are also initialized.  For details “4.10 Initializing all Settings” 3-25 ZM2371/ZM2372...
Page 56: Setting Of Measurement Parameters
3.5 Basic Operations 3.5.5 Setting of Measurement Parameters The ZM2371 / ZM2372 can display two parameters (primary parameter and secondary parameter) at the same time. In general, L, C, R values are different between series equivalent circuit and parallel equivalent circuit, and therefore select appropriate equivalent circuit according to the nature and circuits used of the DUT.
Page 57 (Rs or Gp. Either one is displayed as measured value) MLIN Magnitude of immittance (|Z| or |Y|. Either one is displayed as measured value) Immittance is generic name of impedance and admittance. If these are selected, automatic selection of measurement parameter and equivalent circuit is disabled. 3-27 ZM2371/ZM2372...
Page 58: Setting Of Equivalent Circuit
Last value Last value Z、Y (Don't care) retained retained Rs, Cs, Ls (Don't care) Series Disable Rp, Cp, Lp, G (Don't care) Disable Parallel REAL, MLIN FIMPedance Disable Series FADMittance Parallel Disable AUTO CKT lamp _CKT_ 3-28 ZM2371/ZM2372...
Page 59: Setting Of Secondary Parameters
A display range of each secondary parameter is as follows: Q, D ±(0.00000 to 99999.9)  ±(0.000° to 180.000°) Rs, Rp, X, Rdc ±(0.000m to 999.999M) G, B ±(0.00nS to 9.99999kS) ±(0.000nH to 99.9999GH) The display range is limited by the measurement range. 3-29 ZM2371/ZM2372...
Page 60  For details Chapter 5 :CALCulate2: FORMat command IMAG I maginary part of immittance (X or B) REAL Real part of immittance (either of Rs, G, or Rdc) Immittance is generic name of impedance and admittance. 3-30 ZM2371/ZM2372...
Page 61: Setting Of Basic Measurement Conditions
0 . 0 0 1 H z t o 1 0 0 . 0 0 k H z The setting resolution is 5 digits (1mHz when < 10Hz). If a setting is made or the EXIT operation is performed, one-previous menu comes back. _FREQ_ 3-31 ZM2371/ZM2372...
Page 62: Measurement Signal Level
_LEVEL_ For the direct-current resistance Rdc, the voltage and current are measured with two measurement signals of about +1.4V and -1.4V, and Rdc is obtained from a difference of them, regardless of a setting of measurement signal level. 3-32 ZM2371/ZM2372...
Page 63 0 . 0 0 1 0 m A t o 2 0 0 m A The setting resolution is 3 digits (0.1A when < 10A). If a setting is made or the EXIT operation is performed, one-previous menu comes back. _SHIFT_ _LEVEL_ | [ALC] 3-33 ZM2371/ZM2372...
Page 64 25. 3) Due to the characteristic variations of LCR meter, the voltage or current may not be adjusted to settable maximum voltage or maximum current. 3-34 ZM2371/ZM2372...
Page 65 The values in ( ) are when the minimum output impedance is 5, and the conditions for 5 are fulfilled. Allowable current peak value (instantaneous value) including DC bias current is about 1.4 times the current value given in table (root-mean-square value). 3-35 ZM2371/ZM2372...
Page 66 (manual selection). Note that the measurement range of impedance should be lowered when measuring larger capacitance C or admittance |Y|. Perform the EXIT operation to return to the measurement screen. _SHIFT_ _AUTO/HOLD_ | [RANGE] 3-36 ZM2371/ZM2372...
Page 67: Measurement Range ≦ 10
To return to automatic selection by the panel operation, initialize it with the initialize menu. DC resistance measurement range R A N G E : M a n u a l 1 0 0 k  D C 1 0 0 m  R d : 2 5  - 3-37 ZM2371/ZM2372...
Page 68: Trigger
3.5 Basic Operations 3.5.6.4 Trigger The ZM2371 / ZM2372 receive a trigger signal to start the measurement. With the trigger setting menu, set the trigger source and measurement sequence. Trigger delay time Trigger delay time Trigger delay time Trigger signal...
Page 69 1Hz, or the number of averaging count is large. Note that the last measured value is displayed during the measurement. BUSY lamp During measurement, the BUSY lamp lights up or blinks. 3-39 ZM2371/ZM2372...
Page 70 The measurement will be incorrect if the trigger delay time is set to zero when the triggered drive is enabled. When the triggered drive is enabled, it will take time for the drive signal to settle in the ZM2371 / ZM2372. Also, the settling time is required when the frequency or signal level is changed.
Page 71 (particularly large capacitance) or inductor may damage the measurement contact. Since the triggered drive signal drives the DUT only a period of time when ZM2371 / ZM2372 is connected with the DUT, the damage to the contact caused by connecting or disconnecting the DUT can be reduced.
Page 72: Measurement Speed
However, the signal acquisition time of direct-current resistance Rdc is obtained by subtracting about 83ms from the time given in table.  For details of signal acquisition time ”Figure 3-6 Signal acquisition time” After the signal acquisition, the DUT can be replaced. 3-42 ZM2371/ZM2372...
Page 73 ・ Automatic range selection time of DC resistance is extended by about maximum amount of trigger delay time. ・ Measurement time of DC resistance is extended by about (trigger delay time  40ms)  2 when trigger delay time > 40ms. 3-43 ZM2371/ZM2372...
Page 74: Correction Of Measurement Error
3.5 Basic Operations 3.5.6.6 Correction of Measurement Error The ZM2371 / ZM2372 can correct the following errors that will occur by a measurement fixture or connection cable.  Zero correction OPEN correction Error due to the stray admittance that remains when measurement...
Page 75: Open Correction
This can prohibit the correction with low frequencies requiring long measurement time. FRMT Displays the format setting menu for spot OPEN correction value. Entry Displays the spot OPEN correction value input menu. Perform the EXIT operation to return to the measurement screen. _SHIFT_ | [OPEN] 3-45 ZM2371/ZM2372...
Page 76 Same warning message is also displayed when the measurement failed by any reason. Even if this warning message is displayed, the ZM2371 / ZM2372 use the obtained measured value as OPEN correction value. However, the previous OPEN correction value is held for the frequency at which the measurement failed.
Page 77 If Low FREQ is selected with the SHORT correction menu, same correction lower limit frequency setting menu as that of OPEN correction is displayed. Also, the correction lower limit frequency is displayed in the SHORT correction menu, too. 3-47 ZM2371/ZM2372...
Page 78 The setting whether the spot correction is enabled or disabled is common to the OPEN correction and SHORT correction. The spot correction can be set from the SHORT correction menu in the same manner. When the spot correction is enabled, “SPOT” is displayed on the first line of SHORT correction menu. 3-48 ZM2371/ZM2372...
Page 79 Though the warning message will be displayed for the input of correction value of impedance ≦1k, it is set as it is as the spot OPEN correction value. If both previous and next values are zero, it is equivalent to the setting that the spot OPEN correction is disabled. 3-49 ZM2371/ZM2372...
Page 80: Short Correction
The spot correction menu and the lower limit frequency setting menu are common to the OPEN correction and SHORT correction. Same results can be obtained if making  a setting on either side. For details “3.5.6.7 OPEN Correction”. Perform the EXIT operation to return to the measurement screen. _SHIFT_ | [SHORT] 3-50 ZM2371/ZM2372...
Page 81 Same warning message is also displayed when the measurement failed by any reason. Even if this warning message is displayed, the ZM2371 / ZM2372 use the obtained measured value as SHORT correction value. However, the previous SHORT correction value is held for the frequency at which the measurement failed.
Page 82 Though the warning message will be displayed for the input of correction value of impedance ≧900, it is set as it is as the spot SHORT correction value. If both previous and next values are zero, it is equivalent to the setting that the spot SHORT correction is disabled. 3-52 ZM2371/ZM2372...
Page 83: Load Correction
3.5.6.9 LOAD Correction Based on exact standard, the LOAD correction gives a correction value to the ZM2371 / ZM2372 so that more correct measured value can be obtained under specific measurement conditions. The LOAD correction value can be given with a numeric value, besides acquisition by measuring exact standard.
Page 84 _ENTR_ value can be input The cursor can be moved between previous and next by pressing the | [PREV] or _BS_ | [NEXT] key. _EXP_ Perform the EXIT operation to return to one-previous menu. 3-54 ZM2371/ZM2372...
Page 85 LOAD correction value is out of range, the LOAD correction is executed based on the obtained value. However, when the measurement failed, the last LOAD correction value is held. This warning will disappear automatically. It also can be reset by operating any key. 3-55 ZM2371/ZM2372...
Page 86 | [NEXT] key. _EXP_ Giving a value which cannot be handled by ZM2371 / ZM2372 such that the impedance or admittance cannot be calculated causes an error, resulting in a setting failure. If the spot LOAD correction value is set, the LOAD correction is disabled. Set the LOAD correction to ON (enabled) when the set LOAD correction value is used.
Page 87: Cable Length Correction
The cable length correction corrects an additional error due to the connection cable between ZM2371 / ZM2372 and DUT. The ZM2371 / ZM2372 use coaxial cables of impedance 50 (cable capacitance = about 100pF/m) and the length of four cables must be same. Using the cables having different characteristics may increase a correction error.
Page 88 4.7 Setting the Contact Check ..........4-26 4.8 Using the DC Bias ............. 4-30 4.9 Disabling the Key-Operation of Panel ....... 4-35 4.10 Initializing of All Settings ..........4-36 4.11 Self-Diagnosis ..............4-39 4.12 Checking the Version ............4-40 ZM2371/ZM2372...
Page 89: Restricting The Variation Of Measured Values (Averaging)
Even if the measurement speed is RAP or FAST, increase the averaging count, so that the measurement accuracy achieved when measurement speed is MED can be used when the signal acquisition time of MED is exceeding. ZM2371/ZM2372...
Page 90: Displaying The Deviation From The Reference Value
When the deviation or deviation% is selected, the “Δ” displayed in front of measured value of primary parameter.  C p : + 2 3 . 4 5 6 % D : + 0 . 1 2 3 4 5 1 . 0 0 0 0 k | [Pri] _SHIFT_ _Pri_ ZM2371/ZM2372...
Page 91 When the deviation or deviation% is selected, the “Δ” displayed in front of measured value of secondary parameter. C p : + 1 2 . 3 4 5 6 µ F  D : + 0 . 1 2 3 4 5 1 . 0 0 0 0 k _SHIFT_ _Sec_ | [Sec] ZM2371/ZM2372...
Page 92 Also the reference value for obtaining the deviation is common for both display and comparator. For both primary and secondary parameters, even if either display or comparator is set up, the same display format or comparison format or reference value is obtained. ZM2371/ZM2372...
Page 93: Sorting The Part (Comparator)
4.3 Sorting the Part (Comparator) 4.3 Sorting the Part (Comparator) For ZM2371 / ZM2372, up to 14 bins for primary parameter and one set range for secondary parameter can be set to sort the comparator results. However, comparison of BIN10-BIN14 is not conducted for ZM2371, so that the classified number of primary parameter is up to 9.
Page 94 The comparator result are displayed on the front panel and also outputted from the Handler interface of rear panel (ZM2371 does not have the handler interface). The relation between measured values of primary/secondary parameters, setting of upper/lower limit values and comparator result is as follows.
Page 95 COMPRTR lamp When the comparator function is enabled, the COMPRTR lamp on front panel lights up. It also lights up when the limit comparison function is enabled. COMPRTR lamp _SHIFT_ | [COMPRTR] | [Pri/Sec] | [NO LIMIT] _EXP_ | [SYSTEM] ZM2371/ZM2372...
Page 96 ± ( 0 . 0 0 0 0 p t o 9 9 9 9 9 9 M ) Enter the numeric value, and press the input of exponential part + [µ] keys for _EXP_ instance. If a setting is made or the EXIT operation is performed, the measurement screen comes back. ZM2371/ZM2372...
Page 97 Sorting for BIN1 (Value, ON/OFF) (No Limit) All lower limit values 0,OFF Sorting for BIN2 to BIN14 (Value, ON/OFF) (No Limit) Comparison for secondary − − − − parameter The display format and comparison format are not initialized. 4-10 ZM2371/ZM2372...
Page 98 "OUT OF BINS”. Measured value Measured value BIN1 BIN2 BIN3 OUT OF BINS Small Large Small Large (a) When overlapped (b) When there is a clearance Figure 4–2 Range setting and comparison when sorting into bins 4-11 ZM2371/ZM2372...
Page 99 B I N 1 L o : + 1 . 2 3 4 5 6 µ F H i : + 1 . 2 3 4 5 6 µ F _SHIFT_ | [Pri/Sec] _BS_ | [PREV] _EXP_ | [NEXT] 4-12 ZM2371/ZM2372...
Page 100 Bin is disabled. Once both of lower and upper limit values for the secondary parameter are disabled, it becomes the same state as is the case when the range comparison of secondary parameter is disabled. _SHIFT_ | [NO LIMIT] 4-13 ZM2371/ZM2372...
Page 101 IN or be regarded as “FAIL” in other cases. After setting, the results are displayed for a short time and return to one-previous menu. Perform the EXIT operation to return to one-previous menu. _SHIFT_ _EXP_ | [SYSTEM] 4-14 ZM2371/ZM2372...
Page 102: Connecting To The Part Handler (Handler Interface)
For the ZM2372, the comparator result can be output into the handler interface of rear panel. Connecting to the part handler allows auto part sorting system to be configured. The ZM2371 does not have the handler interface. Table 4–2 Handler interface signal layout Pin No.
Page 103 To operate the Handler interface with the Internal DC power source, make connection between EXT COM and 46 to 50 INT COM INT COM and also between EXT DCV and INT DCV. There is no isolation with the case. 4-16 ZM2371/ZM2372...
Page 104  Handler interface I/O equivalent circuit EXT DCV EXT DCV EXT DCV 3.3k 5k 5k 12k EXT COM EXT COM EXT COM (a) Output (b) Input other than trigger (c) Trigger input Figure 4–3 Equivalent circuit of handler interface 4-17 ZM2371/ZM2372...
Page 105 *RST command. Regardless of enabled/disabled of comparator, input of handler interface is always enabled. ・ Input: TRIG, /KEY_LOCK, /RCL0 to /RCL4, /RCL-VALID 4-18 ZM2371/ZM2372...
Page 106 4.4 Connecting to the Part handler (Handler Interface)  Adjusting the handler interface functions (Only for ZM2372, unavailable in ZM2371) _SHIFT_ + [ HANDLER ] Press the + [HANDLER] keys to display the handler interface setting menu. _SHIFT_ H a n d l e r...
Page 107 Recalls only the setting from the specified memory (initial value) Correction Recalls only the correction value from the specified memory Both Recalls both setting and correction value from the specified memory. If a setting is made or the EXIT operation is performed, one-previous menu comes back. 4-20 ZM2371/ZM2372...
Page 108 /INDEX and /EOM are operated as is the case with the measurement when trigger is applied but it may not affect on other signals. The change of signals with the times is fixed as below. Approx 10ms /INDEX /EOM Approx 1ms Approx 1ms Figure 4–5 Dummy output timing 4-21 ZM2371/ZM2372...
Page 109: Changing The Contents Displayed On The Second Line Of Measurement Screen
I m : + 1 2 3 . 4 5 6 m A V m : + 1 0 0 2 . 3 4 m V If a setting is made or the EXIT operation is performed, the measurement screen comes back. Select the parameter you need to display by the numeric key. _AUX DISP_ 4-22 ZM2371/ZM2372...
Page 110 Current setting B I N N o : 1 4 Range of settable values 1 t o 1 4 Perform the EXIT operation to return to one-previous menu. After setting, measurement screen comes back. 4-23 ZM2371/ZM2372...
Page 111: Saving/Recalling The Setting And Correction Value Into The Memory
4.6 Saving/Recalling the Setting and Correction Value into the Memory 4.6 Saving/Recalling the Setting and Correction Value into the Memory ZM2371 / ZM2372 enable save-/recalling the setting and correction value up to 32-set.  Saving the setting and correction value into the memory _SHIFT_...
Page 112 + [INIT] , It is possible to initialize the setting/correction value memory by the operation of “Fully initialization” in system setting menu. However, the setting of interface is also initialized.  For the “Fully initialization” “4.10 Initializing of All Settings”. 4-25 ZM2371/ZM2372...
Page 113: Setting The Contact Check
H and L with the DUT. This function is not available in ZM2371. The contact checking is disabled under the initial state. To avoid a wrong measurement due to the contact failure, set the contact check to “enabled".
Page 114 L and L side.  Criterion for contact failure For ZM2372, in 4-terminal contact check, if the resistance value between H terminals or between L terminals exceeds 200Ω, it should be judged as contact failure. 4-27 ZM2371/ZM2372...
Page 115 “Real time check” to enabled so as to detect the contact failure of H terminal. The contact check does not run normally during charge-/discharging of DUT by the DC bias. You should trigger only after the bias voltage is stabilized after finishing charge-/discharging. 4-28 ZM2371/ZM2372...
Page 116 It is impossible to detect the contact failure of H and L terminal in real time check. The real time check is used for the measurement of AC impedance but not applied for the measurement of DC resistance Rdc. 4-29 ZM2371/ZM2372...
Page 117: Using The Dc Bias
4.8 Using the DC Bias 4.8 Using the DC Bias ZM2371 / ZM2372 allow the measurement where DC bias voltage up to 2.5V is applied on polar capacitance, PN junction of semiconductor and etc. To apply the DC bias voltage, set the bias voltage and turn on the DC bias.
Page 118  Applying a small DC bias current through the Inductor If a bias current falls within a small range that the ZM2371 / ZM2372 can supply, the impedance may be able to measure while the DC Bias current is running by fixing the measurement range to the range where “Bias current + Peak value of AC measurement...
Page 119 H terminal and H terminal so that the AC voltage and current may not run through the LCR meter. Set the DC bias output of ZM2371 / ZM2372 to OFF. DC bias Voltage source DC blocking circuit...
Page 120 To measure while DC bias current is running through the DUT like Inductor, external power is needed. Turn off the DC bias output of ZM2371 / ZM2372. Since the external power is connected with DUT in parallel, insert the choke coil having excessively higher impedance than that of DUT through the external power in series.
Page 121 When the measurement signal level is 1Vrms, the number of series between H and L should be approx 8 pieces. Figure 4–8 External current bias circuit 4-34 ZM2371/ZM2372...
Page 122: Disabling The Key-Operation Of Panel
Also in this case, the KEY LOCK lamp lights up. Locking by the /KEY_LOCK signal cannot be canceled by the panel operation or remote control interface. Only when the /KEY_LOCK signal is set to “0” (high level), it can be canceled. 4-35 ZM2371/ZM2372...
Page 123: Initializing Of All Settings
4.10 Initializing of All Settings 4.10 Initializing of All Settings ZM2371 / ZM2372 can be initialized in some levels.  Initializing the current setting while the contents of setting and correction value memory are being left over _SHIFT_ + [ INIT ] Press the + [INIT] keys to display the initializing menu.
Page 124 2) Contents of setting and correction value memory 3) Setting of interface (GPIB, RS-232) 4) Trigger polarity of handler interface After execution, the completion message appears for a short time and measurement screen comes back. _SHIFT_ _EXP_ | [SYSTEM] 4-37 ZM2371/ZM2372...
Page 125 4.10 Initializing of All Settings  Initializing the operation mode No need to initialize the operation mode for ZM2371 where the standard operation mode (Mode 0) alone is built in. It can be extended so as to provide two operation modes for ZM2372.
Page 126: Self-Diagnosis
4.11 Self-Diagnosis 4.11 Self-Diagnosis The self-diagnosis function for analog measurement circuit is built in the ZM2371 / ZM2372. This function automatically runs when Power On, besides you can use it at your optio n. _SHIFT_ + [ SYSTEM ] Press the + [SYSTEM] keys to display the system setting menu.
Page 127: Checking The Version
4.12 Checking the Version 4.12 Checking the Version The version of ZM2371 / ZM2372 appears when power on, besides you can also check it in the system setting menu. _SHIFT_ + [ SYSTEM ] Press the + [SYSTEM] keys to display the system setting menu.
Page 128: Remote Control
5.1.1 Remote Control Interface Selection ........5-2 5.1.2 Outline of USB ..............5-3 5.1.2.1 Preparation of Controller ......... 5-3 5.1.2.2 Preparation of ZM2371 / ZM2372 ......5-4 5.1.2.3 USB Device Identification ........5-4 5.1.3 Outline of RS-232 ..............5-5 5.1.3.1 Preparation of Controller ......... 5-5 5.1.3.2 Preparation of ZM2371 / ZM2372 ......
Page 129: Preparations Before Use
ZM2372. 5.1.1 Remote Control Interface Selection The ZM2371 / ZM2372 use either one of USB, RS-232, and GPIB as a remote control interface. Plural interfaces cannot be used at the same time. The setting of remote control interface is made from the system setting menu.
Page 130: Outline Of Usb
VISA：Virtual Instrument Software Architecture Example of companies that supply the VISA library (in random order) National Instruments Corporation Agilent Technologies, Inc. Tektronix, Inc. Using the VISA driver allows you to perform the unified operations whichever interface, USB, RS-232, or GPIB, is used. ZM2371/ZM2372...
Page 131: Preparation Of Zm2371 / Zm2372
ZM2371 / ZM2372 is automatically identified by connecting it with USB to the computer on which USBTMC class driver is installed. The ZM2371 / ZM2372 in the system is identified with the Vendor ID, Product ID, and Serial Number displayed on the USB confirmation screen. Use these values when specifying the device manually due to, for instance, automatic recognition error.
Page 132: Preparation Of Controller
ZM2371 / ZM2372. Handshake Displays the handshake setting menu. Perform the EXIT operation to return to one-previous menu. The following parameters are fixed on the ZM2371 / ZM2372. Adjust the settings on the controller side. • Data length 8 bits •...
Page 133 Select the rate at which the communication can be made stably within the data rate range provided by both ZM2371 / ZM2372 and controller. Even if a selection is made, when the data rate exceeds 19200 bps, stable communication may not be performed due to the restri ctions of cable.
Page 134 If the handshake is set, the result is displayed for a moment, and one-previous menu comes back. If the handshake is enabled, the transmission is suspended when the reception buffer becomes almost full, and it restarts when a space is made in the reception buffer. ZM2371/ZM2372...
Page 135: Connection
With this type, the communication can be made, but it cannot be used for the hardware handshake. 1 2 3 4 5 Inch screw （♯4-40） 6 7 8 9 (a) RS-232 connector on rear panel Personal computer ZM2371/ZM2372 (PC/AT, etc.) Signal Signal Pin No. Pin No. name name －...
Page 136: Difference Between Rs-232 And Usb/Gpib, And Precautions
END message (EOI signal as a message terminator)  Remote/Local switching operation is different. When the ZM2371 / ZM2372 receives a command via RS-232, it goes in the remote state and the operation from the panel is disabled. Press the...
Page 137: Outline Of Gpib
− Length of one cable ≦ 4m • For GPIB address, set a different value for each device. If plural devices having same address exist on one bus, the devices may be damaged due to the conflict of output. 5-10 ZM2371/ZM2372...
Page 138: Basic Specifications Of Gpib
Basic Listener function and listener cancel function by talker-addressed provided Listen-Only function not provided Service Request full functions provided Remote Local full functions provided Parallel Poll function not provided Device Clear full functions provided Device Trigger full functions provided Controller function not provided Open collector drive 5-11 ZM2371/ZM2372...
Page 139: Precautions On Communication
Though a new line (NL) may be expressed in place of line feed (LF), the binary code is same. The RS-232 does not have the concept of END message and therefore it does not need EOI to be added. 5-12 ZM2371/ZM2372...
Page 140: Switching Between Remote State And Local State
5.2 Switching between Remote State and Local State 5.2 Switching between Remote State and Local State In relation to the remote control, ZM2371 / ZM2372 has the remote state and the local state. In the local state, all panel operations are enabled.
Page 141: Response To Interface Message
< Group Execute Trigger > Executes the trigger. Same function as *TRG command. How to send an interface message from the controller is different depending on the device driver. For details, see the instruction manual of each driver. 5-14 ZM2371/ZM2372...
Page 142: Command List
This section describes standard operation mode. For other operation modes, see “6. Change of Operation Mode”. Common commands that ZM2371 / ZM2372 provides are listed in Table 5-2. Also, subsystem commands of ZM2371 / ZM2372 are listed in Table 5-3.
Page 143 Supplement: The command that makes inquiry is called “query” and it terminates with a question mark. In this table, the query is omitted in the functions capable of making both setting and query.  1: Only for ZM2372. Unusable for ZM2371. 5-16 ZM2371/ZM2372...
Page 144 Measurement of correction value [:SENSe]:CORRection:COLLect[:ACQuire] Correction operating target [:SENSe]:CORRection:COLLect:METHod Correction value [:SENSe]:CORRection:DATA Correction lower limit frequency [:SENSe]:CORRection:LIMit:LOW Enables LOAD correction [:SENSe]:CORRection:LOAD[:STATe] Enables OPEN correction [:SENSe]:CORRection:OPEN[:STATe] Enables SHORT correction [:SENSe]:CORRection:SHORT[:STATe] Enables SPOT correction measurement [:SENSe]:CORRection:SPOT[:STATe] lump Enables correction in a [:SENSe]:CORRection[:STATe] 5-17 ZM2371/ZM2372...
Page 145 Selects settings / correction value :SYSTem:MEMory  Recalls settings / correction value :SYSTem:RCL Saves settings / correction value :SYSTem:SAVE TRIGger subsystem Trigger source :TRIGger:SOURce Trigger (measurement start) :TRIGger[:IMMediate] Trigger delay time :TRIGger:DELay  1: Only for ZM2372. Unusable for ZM2371. 5-18 ZM2371/ZM2372...
Page 146: Command Tree
5.5 Command Tree 5.5 Command Tree The subsystem command tree of the ZM2371 / ZM2372 is shown below. ＜Root＞ Command tree 1/2 ABORt CALCulate COMParator AUXBin BEEPer CONDition [STATe] CLEar  1 EXTension [STATe] MODE PRIMary BIN{1|2|..|14} STATe NOMinal SECondary...
Page 147 CURRent [STATe] [LEVel] [IMMediate] [AMPLitude] FREQuency [CW] RESistance [LIMit] VOLTage [STATe] [LEVel] [IMMediate] [AMPLitude] OFFSet STATe MODE STATus OPERation CONDition? ENABle [EVENt]? SYSTem ERRor? KLOCk  1 MEMory SAVE TRIGger DELay [IMMediate] SOURce  1: Only for ZM2372 5-20 ZM2371/ZM2372...
Page 148: Command Explanation
If a colon ( : ) is omitted in the second and subsequent command character strings, the subsystem command on the same level is accessible without changing the current path. In second command :CALC1:MATH: :CALC1:MATH:STAT ON ; EXPR:NAME PCNT is omissible In both cases, the program message terminator at the end is omitted. 5-21 ZM2371/ZM2372...
Page 149: Keywords Simplification
Use *WAI, *OPC, and *OPC? commands when you don’t want to execute the following commands or query until the execution of overlap commands finished. The commands given below are overlap commands. Other commands are all sequential commands. Overlap commands ： [:SENSe]:CORRection:COLLect[:ACQuire] 5-22 ZM2371/ZM2372...
Page 150: Command Detailed Explanations
• Character strings in quotation marks are accepted in single or double quotation marks. 【Remarks】 • Both commands and queries are called commands here. The keyword attached with “?” at the end is a query. • Response messages to commands do not come wiyh headers. 5-23 ZM2371/ZM2372...
Page 151: Common Commands
The query clears all the standard event status register bits to 0. Response: <register contents> {numeric value, format NR1, range 0 - 255}  For details • • • “5.7.3 Standard Event Status” Query example: *ESR? Response example: +128 The content of standard event status register is 128. 5-24 ZM2371/ZM2372...
Page 152 Queries the model name etc. Response: {"<name of manufacturer>， <model name>， <serial number>， <firmware version>"} format SRD Query example: *IDN? Response example: "NF Corporation,ZM2371,9033552,Ver1.00" *OPC *OPC? Description: Confirms that the execution of all the preceding commands is completed. Setting example:...
Page 153: Status System Overview
Queries the content of status byte register. Response: <register contents> {numeric value, format NR1, range 0 - 255}  For details • • • “5.7.2 Status Byte” Query example: *STB? Response example: +128 The content of status byte register is 128. 5-26 ZM2371/ZM2372...
Page 154 :FETCh? *TST? Description: Queries the self diagnosis results. ZM2371 / ZM2372 conducts self t diagnosis and returns its result. Response: {numeric value, format NR1, range 0 - 3} 0 : Pass (no abnormality is found) 1 : Hardware failed (whole measurement circuits are faulty) 2 : Oscillator failed (drive signal source is faulty) 3 : Analyzer failed (voltage &...
Page 155 OUT OF BINS includes both primary parameter out of range and secondary parameter out of range. Setting example: :CALC:COMP:AUXB Sets so that S-NG is used as auxiliary bins. Response: {1|0} Query example: :CALC:COMP:AUXB? Response example: 1 S-NG is used as auxiliary bins. 5-28 ZM2371/ZM2372...
Page 156 Enables the beeper. Response: {1|0} Query example: :CALC:COMP:BEEP? Response example: 1 The beeper is enabled. :CALCulate:COMParator:CLEar Description: Initializes the comparator setting.  For details • • • “Table 4-1 Initialization contents of comparator” Setting example: :CALC:COMP:CLE Initialize the comparator setting. 5-29 ZM2371/ZM2372...
Page 157 {1|0} Query example: :CALC:COMP:EXT? Response example: 1 The bin extended function is enabled. Remarks: This command cannot be used for ZM2371. An error will occur. :CALCulate:COMParator:MODE {ABS|DEV|PCNT} :CALCulate:COMParator:MODE? Description: Sets/queries the comparison format of primary parameters when the bin sorting is executed by the comparator function. This format is common to the display format of primary parameters.
Page 158 The unit depends on the parameter. MAX / MIN can be used. Setting example: :CALC:COMP:PRIM:NOM 12.0000E-06 Sets reference value of primary parameters to 12.0000E-06. Response: <reference value> {numeric value, format NR3} Query example: :CALC:COMP:PRIM:NOM? Response example: +1.20000E-05 Reference value of primary parameters is 1.20000E-05. 5-31 ZM2371/ZM2372...
Page 159 Parameters: {ON|1} Secondary parameters are compared. {OFF|0} Secondary parameters are not compared. Setting example: :CALC:COMP:SEC:STAT Sets so that secondary parameter comparison is executed. Response: {1|0} Query example: :CALC:COMP:SEC:STAT? Response example: 1 Secondary parameter comparison is executed. 5-32 ZM2371/ZM2372...
Page 160 A B S P r i - O N S e c - O F F Options (first page) 0 ) O F F 1 ) O N 2 ) D E V > N E X T 5-33 ZM2371/ZM2372...
Page 161 Enables the automatic selection of equivalent circuit. {OFF|0} Disables the automatic selection of equivalent circuit. Setting example: :CALC1:CKIT ON Sets to enables the automatic selection of equivalent circuit. Response: {1|0} Query example: :CALC1:CKIT? Response example: 1 The automatic selection of equivalent circuit is enabled. 5-34 ZM2371/ZM2372...
Page 162 FIMPedance (Series equivalent circuit) FADMittance (Parallel equivalent circuit) FIMPedance,FRESistance FADMittance,FRESistance <When automatic selection of equivalent circuit is enabled, (:CALC1:CKIT:AUTO ON)> For R, C, and L, the equivalent circuit automatic selecting function has priority over the setting of [:SENSe]:FUNCtion[:ON]. 5-35 ZM2371/ZM2372...
Page 163 Setting example: :CALC1:LIM:LOW:STAT Sets so that the lower limit value is compared in the primary parameter limit comparison. Response: {1|0} Query example: :CALC1:LIM:LOW:STAT? Response example: 1 The lower limit value is compared in the primary parameter limit comparison. 5-36 ZM2371/ZM2372...
Page 164 Sets the upper limit value of primary parameters used for limit comparison to 12.3456. Response: <upper limit value> {numeric value, format NR3} :CALC1:LIM:UPP? Query example: Response example: +1.23456E-05 The upper limit value of primary parameters used for limit comparison is 1.23456E-05(=12.3456). 5-37 ZM2371/ZM2372...
Page 165 If the primary parameters or secondary parameters are changed with :CALCulate{1|2}:FORMat command, the deviation display / output of both primary and secondary parameters is disabled automatically. Set the primary parameters and secondary parameters prior to the deviation display / output. 5-38 ZM2371/ZM2372...
Page 166 The setting of equivalent circuit (series/parallel) and the setting of automatic selection of equivalent circuit do not affect the secondary parameter setting. However, the secondary parameters actually measured and displayed may vary since [:SENSe]:FUNCtion[:ON] command and equivalent circuit setting are interlocked. 5-39 ZM2371/ZM2372...
Page 167 Setting example: :CALC2:LIM:LOW:STAT Sets so that the lower limit value is compared in the secondary parameter limit comparison. Response: {1|0} Query example: :CALC2:LIM:LOW:STAT? Response example: 1 The lower limit value is compared in the secondary parameter limit comparison. 5-40 ZM2371/ZM2372...
Page 168 Sets the upper limit value of secondary parameters used for limit comparison to 12.3456. <upper limit value> { numeric value, format NR3} Response: Query example: :CALC2:LIM:UPP? Response example: +1.23456E-05 The upper limit value of secondary parameters used for limit comparison is 1.23456E-05 (= 12.3456). 5-41 ZM2371/ZM2372...
Page 169 {OFF|0} Disables the deviation display / output. Setting example: :CALC2:MATH:STAT OFF Sets to disables the secondary parameter deviation display / output. Response: {1|0} Query example: :CALC2:MATH:STAT? Response example: 0 The secondary parameter deviation display / output is disabled. 5-42 ZM2371/ZM2372...
Page 170 This setting is equivalent to :DISP:TEXT3 MON. {OFF|0} Stops the display on the voltage & current monitor. :DISP:TEXT3 STAT is set, provided that :DISP:TEXT3 is set to MON. No influence for others. Setting example: :CALC4:MATH:STAT Sets auxiliary display to the voltage & current monitor. 5-43 ZM2371/ZM2372...
Page 171 {numeric value, format NR3, range 0, 1E-10 to 9.99999E-01, unit: Arms} VMON {numeric value, format NR3, range 0, 1E-05 to 9.99999E+00, unit: Vrms} Current and voltage monitored values are measured values. Normally, the output values are up to about 200mArms and 5Vrms. 5-44 ZM2371/ZM2372...
Page 172 AUX_BIN (S-NG): Output only when S-NG is used as auxiliary bin.  :CALCulate:COMParator:AUXBin command Sorting failed: Any error occurred or comparator function is disabled. When the bin extended function is enabled, the range exceeding 10 has different meaning.  :CALCulate:COMParator:EXTension[:STATe] command 5-45 ZM2371/ZM2372...
Page 173 Response example3: Only one measured data is shown here as an example, when the limit comparison function is enabled. +0,+1.23456E-06,+1.43657E-03,+1,+2 No measurement error, Primary parameter 1.23456E-06, Secondary parameter 1.43657E-03, Primary parameter limit comparison IN, Secondary parameter limit comparison HI. 5-46 ZM2371/ZM2372...
Page 174 Sets so that the measured data is recorded in the measured data buffer Response: {ALW|NEV} Query example: :DATA:FEED:CONT? BUF1 Response example: ALW The measured data buffer 1 is set so as to record the measured data. Remarks: About the measured data to be recorded  For details :DATA[:DATA]?、:DATA:FEED 5-47 ZM2371/ZM2372...
Page 175: Operation Status
This command is accepted but it does nothing. Parameters: < displayed data>{numeric value, range 1 or 2} Out of range causes an error. Setting example: :DISP:TEXT1:PAGE 2 Nothing is done. The comparator result and limit comparison result are displayed simultaneously with the measured value. 5-48 ZM2371/ZM2372...
Page 176 Remarks: To display the lower limit value and upper limit value of primary parameter used for the limit comparison function, specify the BIN1. Do not specify a bin by mistake which is not used for the limit comparison. 5-49 ZM2371/ZM2372...
Page 177 AUX_BIN (S-NG): Output only when S-NG is used as auxiliary bin.  :CALCulate:COMParator:AUXBin command Sorting failed: Any error occurred or comparator function is disabled. When the bin extended function is enabled, the range exceeding 10 has different meaning.  :CALCulate:COMParator:EXTension[:STATe] command 5-50 ZM2371/ZM2372...
Page 178 When the measurement status is other than 0 (error), the measured value of primary parameter and secondary parameter is 9.9E+37, and the comparator result is 11 (16 when bin extended function is enabled). When the measurement status is 1 or 3, the limit comparison result is 2 (HI). 5-51 ZM2371/ZM2372...
Page 179 When multiple numeric data are transferred, they are fed successively without separating them with a comma (,). At the end, a message terminator is added. Note that a message terminator is added at the end, different from the definite length arbitrary block specified by the IEEE 488.2 Standard. 5-52 ZM2371/ZM2372...
Page 180 {+|}, count value 000000 - 999999, exponential part Phase  180.000 is output as follows: sign {+|}, count value 000000 - 180000, exponential part The count value exceeding 999999 is all converted into 999999. At this time, the sign is retained. 5-53 ZM2371/ZM2372...
Page 181 BUS and an attempt is made to apply the trigger by remote control immediately after the :READ? query, causing the device to be hung up in the trigger waiting state. The trigger waiting state can be reset by the device clear. 5-54 ZM2371/ZM2372...
Page 182 If the averaging count is set to 2 or larger value by the panel operation, the averaging function is automatically enabled. If the averaging count is set to 1 by the panel operation, the averaging function is automatically disabled. 5-55 ZM2371/ZM2372...
Page 183 Ls,Rs (inductance L and R of series equivalent circuit) Setting example: :CORR:CKIT:STAN2:FORM RX Sets the format of SHORT correction value to Rs,X. Response: {RX|LSRS} Query example: :CORR:CKIT:STAN2:FORM? Response example: RX The format of SHORT correction value is Rs,X. 5-56 ZM2371/ZM2372...
Page 184 :CORR:CKIT:STAN3:FORM Sets the format of standard value for LOAD correction and LOAD correction value to Cs,D. Response: {CPD|CSD|RCP|RLS|RX|ZPH} Query example: :CORR:CKIT:STAN3:FORM? Response example: CSD The format of standard value for LOAD correction and LOAD correction value is Cs,D. 5-57 ZM2371/ZM2372...
Page 185 OPEN correction, SHORT correction, and LOAD correction are to be operated. Response: {REFL2|REFL3} Query example: :CORR:COLL:METH? Response example: REFL3 The operation targets are OPEN correction, SHORT correction, and LOAD correction. Remarks: If REFL2 is set, the LOAD correction is disabled. 5-58 ZM2371/ZM2372...
Page 186 <correction primary parameter>, <correction secondary parameter> {numeric value, format NR3} Query example: :CORR:DATA? STAN2 Response example: +1.53000E-02,+2.3500E-03 Spot SHORT correction value is Rs = 1.53000E-02  (15.3 m), X = 2.3500E-03  (2.35 m). (when the format of correction value is RX) 5-59 ZM2371/ZM2372...
Page 187 Sets so as to enable the LOAD correction. Response: {1|0} Query example: :CORR:LOAD? Response example: 1 The LOAD correction is enabled. Remarks: When the LOAD correction is enabled, the OPEN correction and SHORT correction are also enabled at the same time. 5-60 ZM2371/ZM2372...
Page 188 It will be better to enable SPOT correction when the LOAD correction is executed. If the frequency is changed when the setting has been made so that the correction is executed with current frequency only, the OPEN, SHORT, and LOAD corrections are all disabled automatically. 5-61 ZM2371/ZM2372...
Page 189 ), unit S can be used. Example: 25MS (= 0.025) However, actual measurement time will be different from the specified value since the measurement time is rounded to 0.025, 0.065 or 0.5 whichever nearest, and then it is converted into SHORt, MEDium, or LONG. 5-62 ZM2371/ZM2372...
Page 190 Response example: 1 The contact check is enabled. Remarks: The contact check can be used for the ZM2372 only. An error will occur for the ZM2371. [:SENSe][:FIMPedance]:CONTact:RVERify {ON|OFF|1|0} [:SENSe][:FIMPedance]:CONTact:RVERify? Description: Sets/queries whether real time check is used or not when the contact check is executed.
Page 191  10 100m < Parameter≦1 1  Parameter≦100m 100m  Setting example: :RANG 10E+3 Sets the measurement range to 10k. Response: {numeric value, format NR3} Query example: :RANG? Response example: +1.00000E+04 The measurement range is 1.00000E+04  (10k). 5-64 ZM2371/ZM2372...
Page 192 The DC resistance measurement range is 1.00000E-01 (100m). Remarks: Automatic switching of DC resistance measurement range is automatically disabled if specific DC resistance measurement range is set. The DC resistance measurement range cannot be specified or fixed from the panel. 5-65 ZM2371/ZM2372...
Page 193 Two measurement functions of impedance measurement and DC resistance measurement are specified. Remarks: The FIMPedance / FADMittance setting from the remote control and the series equivalent circuit / parallel equivalent circuit setting from the panel are interlocked (same). 5-66 ZM2371/ZM2372...
Page 194 Example: 100U (= 1E-4), 10MA (= 0.01) Setting example: :SOUR:CURR 2E-3 Sets the measurement current level to 2mArms. Response: <current> {numeric value, format NR3} Query example: :SOUR:CURR? Response example: +2.00000E-03 The measurement current level is 2.00000E-03 Arms (2mArms). 5-67 ZM2371/ZM2372...
Page 195 If an arbitrary value is given, it becomes a nearest value. Setting example: :SOUR:REG:LOW 25 Sets the minimum output impedance to 25. < resistance > Response: {numeric value, format NR3} Query example: :SOUR:REG:LOW? Response example: +2.50000E+01 The minimum output impedance is 25. 5-68 ZM2371/ZM2372...
Page 196 Example : 1000M (= 1), 500MV (= 0.5) Setting example: :SOUR:VOLT 0.5 Sets the measurement voltage level to 0.5 Vrms. < voltage > {numeric value, format NR3} Response: Query example: :SOUR:VOLT? Response example: +5.00000E-01 The measurement voltage level is 5.0000E-01 Vrms. (0.5 Vrms.). 5-69 ZM2371/ZM2372...
Page 197 DC offset is turned off. Setting example: :SOUR:VOLT:MODE SYNC Sets so as to output the measurement signal only during measurement in synchronization with the trigger. Response: {CONT|SYNC} Query example: :SOUR:VOLT:MODE? Response example: SYNC The measurement signal is output only during measurement. 5-70 ZM2371/ZM2372...
Page 198 Queries the operation event register (OPER). Response: {numeric value, format NR1, range 0 - 32767} Query example: :STAT:OPER? Response example: +0 The content of operation event register is 0 (no event). For details of operation status, see “5.7.4 Operation Status”. 5-71 ZM2371/ZM2372...
Page 199 Turns off the key lock function (key operations are enabled). Setting example: :SYST:KLOC 1 Sets so as to turn on the key lock (key operations are disabled). Response: {1|0} Query example: :SYST:KLOC? Response example: 1 The key lock is turned on (key operations are disabled). 5-72 ZM2371/ZM2372...
Page 200 Query example: :SYST:MEM? Response example: CORR The target to be recalled is correction values. Remarks: This command is not supported by ZM2371. An error will occur. :SYSTem:RCL <memory number>,{SETTing|CORRection|BOTH} Description: Recalls the settings or correction values from the specified memory. Parameters: <memory number>...
Page 201 TRIG key on the front panel EXTernal TRIG signal through handler interface *TRG command, GET message of remote control Setting example: :TRIG:SOUR EXT Sets EXT as a trigger source. Response: {INT|MAN|EXT|BUS} Query example: :TRIG:SOUR? Response example: EXT The trigger source is EXT. 5-74 ZM2371/ZM2372...
Page 202 5.7 Status System 5.7 Status System 5.7.1 Status System Overview The status system for ZM2371/ZM2372 is shown on Figure 5-2. Operation status Operation condition register Positive/negative Transition filter Standard event status Standard event status Operation event register register Standard event status...
Page 203 When a processing is progressed while checking the MAV bit, after the query was transmitted, check by serial polling that the MAV bit of status byte becomes “1”, and then read the response message, and after checking that the MAV bit becomes “0”, perform the next operation. 5-76 ZM2371/ZM2372...
Page 204: Standard Event Status
Set to 1 when a readout has been attempted on an empty response message output buffer or when the response message output buffer data has been lost. Request control Always at 0 (unused) Operation complete Set to “1” when a processing of all commands up to *OPC command completed. 5-77 ZM2371/ZM2372...
Page 205 Cannot be cleared by any other command. Cleared to 0 upon powering on. The parameter value of the setting message or response message to each register is the sum of the weight of all the bits having 1 as the value. 5-78 ZM2371/ZM2372...
Page 206: Operation Status
The transition filter detects a condition change and causes an event to occur. The filter setting of ZM2371 / ZM2372 is fixed. The operation event register retains the events that occurred. When the operation event enable register bits are set to 1, the corresponding operation event register bits become valid.
Page 207 Signal acquisition completed level) Range switching by automatic Measurement range has been RANG range selection function established Signal settling Signal has settled SETT (trigger is being delayed) (trigger delay finished) Always at 0 (unused) Always at 0 － 5-80 ZM2371/ZM2372...
Page 208 Set to 0 to clear the enable register to 0. Cannot be cleared by any other command. Cleared to 0 upon powering on. A parameter of each register setting message or response message takes a value that adds up the weight of all bits set to 1. 5-81 ZM2371/ZM2372...
Page 209: Trigger System
5.8 Trigger System 5.8 Trigger System The trigger system of ZM2371 / ZM2372 is shown below. (:INIT:CONT ON state) (:INIT:CONT OFF state) Power ON _SHIFT_ + [INIT], *RST Full initialization Operation mode setting :ABORT Idle :INIT:CONT ON state :INIT command...
Page 210 5.8 Trigger System Here shown are typical examples in which a trigger is applied to the ZM2371 / ZM2372 to execute measurement once to obtain the measured result, and this operation is repeated. Example 1 Measured value is obtained by *TRG command...
Page 211: Sample Programs
5.9 Sample Programs 5.9 Sample Programs Sample programs that control the ZM2371 / ZM2372 by combining typical program languages and respective interfaces of GPIB, USB, and RS-232 have been stored in the attached CD-ROM. For details, see the documentation of attached CD-ROM.
Page 212: Change Of Operation Mode
6． CHANGE OF OPERATION MODE CHANGE OF OPERATION MODE ........6-1 6.1 Outline and Switching of Operation Mode ......6-2 ZM2371/ZM2372...
Page 213: Outline And Switching Of Operation Mode
The ZM2371 can use the standard operation mode only. 1) Operation mode 0 This mode is the standard operation mode of ZM2371 / ZM2372. The factory default setting is the operation mode 0. The operating method and functions in the operation mode 0 are described in Chapters 3, 4, and 5.
Page 214 7.1.2 Errors at Panel Operation ............. 7-3 7.1.3 Errors During Measurement ..........7-4 7.1.4 Errors in Remote Control ............7-5 7.1.5 Measured Value Display in Case of Error ......7-7 7.2 When the Device Appears to be a Problem ...... 7-8 ZM2371/ZM2372...
Page 215: Error Messages
When the repair is required, please contact NF Corporation or one of our representatives. When you request the repair of ZM2371 / ZM2372, please let us know the content of an error message if it is displayed. An error message not listed in this instruction manual may be displayed due to a malfunction caused by strong external noise.
Page 216: Errors At Panel Operation
(about 7Vpeak) because required. DC bias voltage is output. Memory error Contents of settings or correction Re-save the contents. value memory are destroyed. Since there are other error messages and warning messages not listed here, see the description of respective operations. ZM2371/ZM2372...
Page 217: Errors During Measurement
2) Cooling fan is defective. 2) Please ask NF Corporation or one of our representatives for repair. Over ・Though over-temperature was Press ENTR | [EXIT] key to reset...
Page 218: Errors In Remote Control
Response was requested before reception of query is UNTERMINATED completed. -430 Query Processing cannot be continued because of full buffer. DEADLOCKED -440 Query Response is not correct because there is another query UNTERMINATED after the query that requests arbitrary length response. after indefinite response ZM2371/ZM2372...
Page 219 For the items that can be operated from the panel, same messages as those for panel operation are displayed. Accordingly, check the description of panel operations related to each command and query. The errors that occur in usual measurement are also displayed under the remote control. ZM2371/ZM2372...
Page 220: Measured Value Display In Case Of Error
Switch to proper measurement range. the display range. Measured value may be displayed by (OVerFlow) changing the type of parameters. In the remote control, the measured value is output within the specified range of remote control, regardless of the display. ZM2371/ZM2372...
Page 221: When The Device Appears To Be A Problem
When the device appears to be a problem, check the following table to see if a corrective action is given. When the problem persists or the device cannot be recovered though a corrective action was taken, please contact NF Corporation or one of our representatives. Table 7–1 When the device appears to be a problem 1/3...
Page 222 If discharge is made to measurement terminals, or defective connection cables the measurement signal source, voltage detector, or current detector may be damaged. Check the cables for disconnection, or the inner and outer conductors for short-circuit. ZM2371/ZM2372...
Page 223 Measurement is Refreshing of display is slow. There is no corrective action. Or, same measured value is When the measurement speed is fast, ZM2371 / slow ZM2372 thins out and displays the measured obtained repeatedly, and thus the measured value results so that the measured values can be read does not change.
Page 224 Measurement Frequency Accuracy ........8-4 8.7.2 Measurement Signal Level Accuracy ........8-4 8.7.3 Voltage Monitor Accuracy ............ 8-5 8.7.4 DC Bias Voltage Accuracy ........... 8-6 8.7.5 AC Impedance Measurement Accuracy ....... 8-7 8.7.6 DC Resistance Measurement Accuracy ......8-11 8.8 Calibration ..............8-12 ZM2371/ZM2372...
Page 225: Introduction
Check if the device operates properly.  Performance testing: Check if the device respects the rated values.  Adjustment, calibration: If the rated values are not satisfying, NF Corporation will make the necessary adjustment or calibration to restore performance.  Damage repairs:...
Page 226: Checking Version Number
8.5 Checking Isolation Remove all power cord, cable and etc of ZM2371 / ZM2372 to separate it from others. Fix the measurement range of multimeter to the range, which can be measured by the specified test current.
Page 227: Performance Testing
8.7 Performance Testing Performance testing is conducted as part of preventive maintenance to prevent performance degradation of the ZM2371/ZM2372. Besides, conduct it if needed after acceptance inspection, periodic inspection or repair. If the result of a performance testing does not meet the specifications, calibration or repair is required.
Page 228: Voltage Monitor Accuracy
Difference: Difference: Voltmeter Voltmeter mVrms mVrms Monitor Monitor Spec. ± 22 Spec. ± 37 Measurement 1Vrms Difference: Difference: signal level Voltmeter Voltmeter mVrms mVrms Monitor Monitor Spec. ± 102 Spec. ± 177 5Vrms Difference: Difference: Voltmeter Voltmeter mVrms mVrms ZM2371/ZM2372...
Page 229: Dc Bias Voltage Accuracy
Values indicated on DC voltmeter ± (5％ + 3ｍV) Spec. : 0.00V -0.0030 V to +0.0030 V 1.00V -1.0530 V to -0.9470 V DC Bias voltage 2.50V -2.628 V to -2.372 V Note: The polarity is inversed due to the connection. ZM2371/ZM2372...
Page 230: Ac Impedance Measurement Accuracy
8.7 Performance Testing 8.7.5 AC Impedance Measurement Accuracy Described here is the easy checking method. For the correct test, request NF Corporation to make test. Standard: To make correct test, prepare the standard with approx 1/3 or less in calibration accuracy against the accuracy of ZM2371 / ZM2372.
Page 231 ° 0.075 °   Z ± 0.23 % 1 1 θ θ θ θ ± ° ° ° 0.13 °   Z ± 0.39 % 100m 100m θ θ θ θ ± ° ° ° 0.22 ° ZM2371/ZM2372...
Page 232 Z ± 3.5 % 100m 100m θ θ θ θ ± ° ° ° 2.0 ° For 1kΩ, 10kΩ, or 100kΩ range, use the standard resistor calibrated by 100kHz, if available. Otherwise, use the standard capacitor. Use either one. ZM2371/ZM2372...
Page 233 D ± 0.0018 Measurement signal level 5 Vrms, Measurement frequency 1kHz, Cable length 0m Calibration value Measurement Difference Measurement Standard Specification range of standard “A” value “B” (ditto) % C ± 0.14 % 100k 1000pF D D D ± 0.0014 8-10 ZM2371/ZM2372...
Page 234: Dc Resistance Measurement Accuracy
Standard: Prepare the standard resistor having the calibration accuracy approx 1/3 or less against the accuracy of ZM2371 / ZM2372 besides the resistance value is up to ±1% of those in the following table. Unless there is standard resistor, alternately use the stable resistor that was corrected by the precise measurement instrument.
Page 235: Calibration
8.8 Calibration 8.8 Calibration If the performance test does not satisfy the specification, NF Corporation will make the necessary adjustment or calibration to recover the performance. If calibration is necessary, contact NF Corporation or one of our representatives. You will be liable for the costs of adjustment and calibration outside the warranty period.
Page 236: Specifications
9. SPECIFICATIONS SPECIFICATIONS ............9-1 9.1 Specifications ..............9-2 9.2 External Dimensions ............9-12 Supplementary value: This value implies supplementary data of the product and it does not guarantee the product performance. ZM2371/ZM2372...
Page 237 Minimum output impedance setting = 5, Measurement range≦10, Measurement signal level≦1V, ALC = invalid, Internal DC bias = Off, Secondary parameter ≠ Rdc  Internal DC bias 0V to +2.50V, Resolution 0.01V, (5% +3mV) when output is open On/Off is possible ZM2371/ZM2372...
Page 238 Recommended range: Recommended operating range for high accuracy measurement. Limitation of measurement range When frequency > 20kHz, 1M range cannot be used. When minimum output impedance setting is 100, 1 range or 100m range cannot be used.  Measurement range Auto / Manual selection ZM2371/ZM2372...
Page 239 For RAP, the coefficient of FAST when measurement frequency≦250Hz, or that of MED when measurement frequency≦40Hz is applied. The coefficient varies depending on the frequency when measurement range Zr = 100k. At all times, V = 1 for the direct-current resistance Rdc. ZM2371/ZM2372...
Page 240 0.01 0.01 0.02 100m, 1 0.05 *1: when open compensation and short compensation are performed at the conditions of internal DC bias enabled and the bias voltage 0V At all times, K = 0 for the direct-current resistance Rdc. ZM2371/ZM2372...
Page 241 0.03 0.03 0.20 0.20 0.20 0.60 0.30 0.30 0.30 0.40 0.80 100m 0.40 0.15 0.06 0.06 0.06 0.80 0.80 0.80 Same For measurement frequency > 250Hz, multiply FAST value by 1.3. − For measurement frequency≦250Hz, use FAST value. above ZM2371/ZM2372...
Page 242 x：0～180°  c ： ± 90° ± Az / cos(x) [%] ± Az / cos(x) [%]  = 2    Measurement frequency [Hz], Suffix “x” of the parameter indicates a measured value. Figure 9–1 Range of error ZM2371/ZM2372...
Page 243 |Z|[] = 2    Frequency [Hz]  L [H] |Z|[] = 1 / (2    Frequency [Hz]  C [F]) Approximate value can be read from the following graph. Frequency Hz Frequency Frequency Figure 9–2 LC - Z conversion graph ZM2371/ZM2372...
Page 244 Secondary parameters: Deviation and deviation % from reference value can be displayed.  Comparator Primary parameters: Max. 9 bins (ZM2371) / Max. 14 bins (ZM2372) Original measured value / Deviation / Deviation % can be sorted. Secondary parameters: Upper limit and lower limit comparison Original measured value / Deviation / Deviation % can be sorted.
Page 245 For the data rate exceeding 19200bps, communication may fail depending on the characteristics of cable or controller. Flow control None, Software (X-ON/X-OFF), Hardware (RTS/CTS)  GPIB (standard for ZM2372. Not provided for ZM2371) Conforms to IEEE 488.1 and IEEE 488.2 Standards 9-10 ZM2371/ZM2372...
Page 246 EN 61326-1 (Group 1, Class A)  EMC EN 61000-3-2 EN 61000-3-3  RoHS Directive 2011/65/EU  External dimensions Approx. 260 (W)  88 (H)  220 (D) mm, not including protuberances  Weight Approx. 2.0kg (ZM2371), approx. 2.1kg (ZM2372) (not including accessories) 9-11 ZM2371/ZM2372...
Page 247: External Dimensions
9.2 External Dimensions 9.2 External Dimensions Figure 9–3 ZM2371 External dimensions 9-12 ZM2371/ZM2372...
Page 248 9.2 External Dimensions Figure 9–4 ZM2372 External dimensions 9-13 ZM2371/ZM2372...
Page 249 ────── WARRANTY ────── NF Corporation certifies that the ZM2371 / ZM2372 was thoroughly tested and inspected when it was shipped from our factory. If any failures attributable to defects in material and workmanship or accidents during transportation are found, please get in touch with NF Corporation or one of our representatives.
Page 251 However, we assume no responsibility for any damage regarding the contents of the instruction manual. If you have any uncertainty or you found an error or omission, please contact NF Corporation or one of our representatives from which you purchased the product. ZM2371 / ZM2372 Instruction Manual...
Page 254 NF Corporation http://www.nfcorp.co.jp/ 6-3-20 Tsunashima Higashi, Kohoku-ku, Yokohama 223-8508 JAPAN...
Page 255 BLANK...

This manual is also suitable for:

Zm2372

NF ZM2371 Instruction Manual

Quick Links

Need help?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for NF ZM2371

Summary of Contents for NF ZM2371

This manual is also suitable for:

Table of Contents