Inficon Sensistor ILS500 F Operating Manual
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Inficon Sensistor ILS500 F Operating Manual

Inficon Sensistor ILS500 F Operating Manual

Tracer gas filler
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Operating Manual
Tracer Gas Filler
Sensistor ILS500 F/FHP
Catalog No.
590-580, 590-581
Type No. ILS.210.307
From software version
4.00.00
ninp69en1-02-(2201)

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Summary of Contents for Inficon Sensistor ILS500 F

  • Page 1 Operating Manual Tracer Gas Filler Sensistor ILS500 F/FHP Catalog No. 590-580, 590-581 Type No. ILS.210.307 From software version 4.00.00 ninp69en1-02-(2201)
  • Page 2 INFICON AB Wahlbecksgatan 25A SE-58216 Linköping Sweden...

  • Page 3: Table Of Contents

    INFICON Table of Contents Table of Contents 1 About this manual ............................ 7 1.1 Target groups ............................ 7 2 Safety................................ 8 2.1 Duties of the operator .......................... 8 2.2 Intended use ............................. 8 2.3 Owner requirements .......................... 8 2.4 Dangers .............................. 9 3 Description.............................. 11 3.1 Intended Use ............................ 11 3.2 Available Configurations ......................... 11...
  • Page 4 Table of Contents INFICON 5 Setup................................ 30 5.1 Placement of the ILS500 F/FHP ...................... 30 5.2 Electrical Connections .......................... 31 5.2.1 Setting Up an Emergency Stop.................... 31 5.2.2 Connecting to Mains ........................ 31 5.2.3 Connecting Extra Features ...................... 32 5.3 Pneumatic Connections.......................... 32 5.3.1 Connecting Compressed Air .......................  32 5.3.2 Connecting Tracer Gas.......................
  • Page 5 10.2.6 Replacing Pilot Valves ........................  82 10.2.7 Replacing Sensors........................ 83 10.3 Functional Verification .......................... 83 11 Service................................ 84 12 Spare Parts and Accessories ........................ 85 13 Support from INFICON .......................... 86 13.1 How to Contact INFICON ........................ 86 13.2 Returning Components to INFICON ....................... 86 14 Disposal................................. 87 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)
  • Page 6 Table of Contents INFICON 15 EU Declaration of Conformity ........................ 88 16 EC Declaration of Incorporation ......................... 89 17 UK Declaration of Conformity ........................ 90 18 Appendix A.............................. 91 18.1 Parameter Index ............................. 91 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 7: About This Manual

    INFICON About this manual | 1 1 About this manual The purpose of this manual is to: • Describe the working principles of the ILS500 F/FHP and its different parts • Show examples of different types of test stations • Teach the reader how to set up the ILS500 F/FHP for different test purposes...

  • Page 8: Safety

    2 | Safety INFICON 2 Safety 2.1 Duties of the operator • Read, observe, and follow the information in this manual and in the work instructions provided by the owner. This concerns in particular the safety and warning instructions. • Always observe the complete operating instructions for all work.

  • Page 9: Dangers

    • Make sure not to confound compressed air and tracer gas. • INFICON can not take any responsibility for the consequences arising from inappropriate use of certain test pressures.
  • Page 10 • If the tracer gas filler suffers external damage, it must be checked and repaired by a service organization authorized by INFICON. • Always switch power off before connecting or disconnecting any cable. • Before connecting the tracer gas, confirm that the connectors or test object is designed for operating at the test pressure to be used.

  • Page 11: Description

    Description | 3 3 Description The Sensistor ILS500 F/FHP is a stand alone tracer gas filler with all necessary functions integrated in one very compact housing. The purpose of the ILS500 F/FHP is to make it possible to set up a fully automatic leak test system quickly, to a low cost.

  • Page 12: Front View

    3 | Description INFICON 3.3 Front View Fig. 1: ILS500 F/FHP Front View Red lamp Green lamp ILS500 F/FHP Touch panel START button STOP button 12 / 94 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 13: Rear View (Electrical)

    INFICON Description | 3 3.4 Rear View (Electrical) Fig. 2: Rear View (Electrical) (not used) USB Port Safety Interface Fuses Power Switch Power Input Control Output Tooling Interface Status Output Inputs 1 and 2 (optional) Ethernet RS232 For more information, refer to Technical Data [} 16].

  • Page 14: Rear View (Pneumatical)

    3 | Description INFICON Port/Interface Connect (if ISH2000 Leak Detector is connected). Ethernet Ethernet (remote view and control of touch panel) RS232 Serial Printer Logging Device (e.g. PC). Remote Control (START, STOP etc.). The USB port can be used to connect a mouse, an external keyboard, or a flash drive (for download and upload of recipes or to save screen dumps).

  • Page 15: Configuring Ports And Interfaces (Pneumatical)

    INFICON Description | 3 3.7 Configuring Ports and Interfaces (Pneumatical) Port/Interface Port Thread Exhaust Barb Fitting: ID 25 mm (1 in.) Tracer Gas Input BSP 3/8" (NPT 3/8" adaptor included) Test Port 1 BSP 3/8" (NPT 3/8" adaptor included) Test Port 2 BSP 3/8"...

  • Page 16: Technical Data

    3 | Description INFICON Fig. 6: Pneumatical label (left) and electrical label (right) 3.9 Technical Data 275 mm (10.8 in.) 364 mm (14.3 in.) 3.9.1 Electrical Specifications Electrical Supply Mains Voltage Single Phase 16 / 94 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 17: Pneumatic Specifications

    INFICON Description | 3 Electrical Supply 110-240VAC 50/60 Hz Current 1.0 A at 100 VAC 0.45 A at 230 VAC Power Rating 120 W max 33 W typical average Inrush Current Max 40 A Mains Connector IEC/EN 60320-1/C14 Recommended Fuse...

  • Page 18: Other Data

    3 | Description INFICON Tracer Gas Supply Quality Industrial grade purity (>95% purity) Exhaust Capacity in Exhaust Duct Min 30 m /h (1000 SCFH) Dimensions of Hose ID 25 mm (1 in.) Leading to Duct Pneumatic Valve bore* 7 mm (0.28 in.) *: Capacity is given for 500 mm (20 in.) of ID 10 mm (0.4 in.) hose between ILS500 F/...

  • Page 19: Interfaces And Connectors

    INFICON Description | 3 3.9.4 Interfaces and Connectors All interfaces signals except the serial. Communication interfaces are discrete 24 VDC logic signals. Output signals (OUT) are sourcing transistor outputs. Input signals (IN) are transistor inputs. Max current of each signal is given in the tables below. Total current (sum) must, however, be within instrument specification.
  • Page 20 3 | Description INFICON Printing of results The printer port prints the result of every test. In hand probe mode the result printed is “ACCEPT” or “REJECT” followed by date & time and recipe name (if used) and end Char New Line (0A, LF).<09> (Char Tab, 09) is used as a separator.

  • Page 21: Input 1 (Optional)

    INFICON Description | 3 Command Action M<0A> Start measurement Q<0A> Stop measurement S<0A> Statistics (see table below) RS<0A> Reset statistics R<09> Factory Default <0A> loads a recipe. For example “R<09>Factory Default” loads the recipe Factory Default. When the recipe is loaded the recipe name is echoed back.

  • Page 22: Input 2 (Optional)

    3 | Description INFICON Pin Signal Type Load Comment +24 VDC SUPPLY 250 mA Option supply. VIN1 -60 mA Voltage input: Digital 24 VDC or analogue 0-10 VDC. IIN1 +/-30 mA Current input: 0-20 mA. COM1 -250 mA Signal common (GND).

  • Page 23: Tooling Interface

    INFICON Description | 3 Connector: 6 pin male Weidmüller, Omnimate BL3.5. Mating screw terminal included. Purpose: Test Status Outputs. Sourcing 24 VDC transistor outputs. Pin Signal Type Load Comment RUNNING 0.5 A Cycle running. ACCEPT 0.5 A Tested part accepted.

  • Page 24: Control Output

    3 | Description INFICON Pin Signal Type Load Comment -1.0 A Common GND. *: MARKER output (Tooling Connector, pin 6) can be used to send a start pulse to marking equipment such as an engraving machine or a valve controlling a simple pneumatic stamp.

  • Page 25: Power Input

    INFICON Description | 3 3.9.4.7 Power Input Specification AC mains voltage 110-240 V 50/60Hz. AC mains current Typically 1 A (2 A pulse at power on). 3.9.4.8 Safety Interface Risk assessment is the sole duty of the user of the ILS500 F/FHP.

  • Page 26: Usb Port

    3 | Description INFICON 3.9.4.9 USB Port Connector: Purpose: Used for import and export of recipes. USB is connected USB Memory connected Import from USB Export to USB An icon for USB is shown when installing the USB flash drive.
  • Page 27 INFICON Description | 3 Import Recipe from USB Importing database tables Recipe1 from csv-file... USB Memory connected Import from USB Export to USB When importing recipes all recipes are imported from a file named Recipe1.csv. Export Recipe to USB Exporting database tables Recipe1 to csv-file...

  • Page 28: Equipment And Storage

    ► When receiving the equipment, check that it has not been damaged during transport. ILS500 F Fig. 7: Supplied Equipment 1 × Sensistor ILS500 F (590-580) Sensistor ILS500 FHP (590-581) 1 × Power cables (EU, UK, US) (592-082) 1 × Screw terminal connectors for external I/O signals (591-617, 591-633, 591-634) 4 ×...

  • Page 29: Required Equipment

    INFICON Equipment and Storage | 4 1 × Operating manual Sensistor ILS500 F/FHP (this manual, 592-121) 1 × Return Product Condition Report Some pneumatic ports are plugged upon delivery. ► Store the removed plugs. They are used for future hardware testing.

  • Page 30: Setup

    5 | Setup INFICON 5 Setup CAUTION ► Check that you comply with all relevant legislation and safety standards before putting your ILS500 F/FHP into service. 5.1 Placement of the ILS500 F/FHP Place the ILS500 F/FHP on a flat surface, as close as possible to the test fixture and ventilation system.

  • Page 31: Electrical Connections

    INFICON Setup | 5 5.2 Electrical Connections 5.2.1 Setting Up an Emergency Stop NOTICE ► To short-circuit is not recommended and should only be made for preliminary testing before connecting compressed gases or test tooling with moving parts. You have the following two options to prepare the ILS500 F/FHP for start: •...

  • Page 32: Connecting Extra Features

    5 | Setup INFICON 5.2.3 Connecting Extra Features When using the ports for Options, Status, Tooling and Control, make sure to mount the connectors as shown below. Top pin is number 1 For more information about the connection ports, see Technical Data [} 16].

  • Page 33: Connecting Tracer Gas

    INFICON Setup | 5 5.3.2 Connecting Tracer Gas WARNING Pressurizing objects at too high pressures can result in a burst object. This in turn can result in serious injury or even death. ► Never pressurize objects that have not previously been burst tested or otherwise approved for the chosen test pressure.
  • Page 34 5 | Setup INFICON Connect a regular welding gas hose or similar between the Tracer Gas Port and the pressure regulator. Check that the hose is certified to withstand the maximum output pressure of the regulator. Open cylinder valve and set regulator to desired pressure. See warning banner! Open regulator outlet valve (if any).

  • Page 35: Connecting Exhaust To Air Vent

    INFICON Setup | 5 5.3.3 Connecting Exhaust to Air Vent Min. 2 m (6.5 ft.) Ø 100 mm (4 in.) Max. 10 m (30 ft.) Ø ≥ 25 mm (1 in.) Fig. 9: Exhaust Recommendation ILS500 F/FHP Exhaust Hose Bleed Air •...

  • Page 36: Connecting To Test Port 1 And 2

    5 | Setup INFICON 5.3.4 Connecting to Test Port 1 and 2 • Use both Test Ports if applicable. • Hose ø ≥ 8 mm (0.31 in.). • The hoses should be as short as possible. If the test object has 2 or more ports, connect to ports on opposite sides of object.

  • Page 37: Set Up Test Area

    INFICON Setup | 5 5.4 Set Up Test Area Large distance Fig. 10: Test Area Recommendation Fresh Air Fan Exhaust Fan Test Area Test Building • Place fresh air intake on outer wall of building. • Place air intake far away from tracer gas exhaust, cargo bays, and other tracer gas sources.
  • Page 38 5 | Setup INFICON • Curtain should cover the entire test area (test hood or sample point) and extend at least 0.5 m outside the area. • Air speed in curtain should be rather low, typically 0.1 m/s. • Additional small fan(s) can be set up within the curtain for directional purging of test chamber etc.

  • Page 39: Menu System

    INFICON Menu System | 6 6 Menu System 6.1 ILS500 F/FHP Display – 0 + 5,00 –0,70 Ready for Start Status Bar Main Display Navigation Button Bar (varies depending on menu) 6.1.1 Menu Buttons Use the menu buttons for quick navigation.

  • Page 40: Entering Numbers And Text

    6 | Menu System INFICON Selected Deselected Save Load (only shown if USB is connected) Open switch Closed switch 6.1.3 Entering Numbers and Text To change a value: Click on the value. A numeric or alphanumeric on-screen keyboard will open.

  • Page 41: Passwords

    INFICON Menu System | 6 6.2 Passwords To access the menus, use default password "1234" for "Service". The password can be changed under Settings / Advance Settings / Passwords. Passwords Calibrate Log In Select Recipe Log Out Setup excl. Tooling Adv.
  • Page 42 6 | Menu System INFICON Settings Test Settings Tooling Connection Pre Evacuation Gross Leak Test Vacuum Decay Test Pressure Decay Test Tracer Gas Filling Blockage Test Tracer Gas Test Gas Evacuation Tooling Disconnection Advanced Settings Timers Pressures Options Service Menu...
  • Page 43 INFICON Menu System | 6 Settings Settings Test Settings Statistics Advanced Settings Region Settings Recipe Settings Info Test Settings Test Settings Tooling Connection Pre Evacuation Gross Leak Test Tracer Gas Filling For more information see Recipes [} 50]. ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201) 43 / 94...
  • Page 44 6 | Menu System INFICON Advanced Settings Advanced Settings Timers Service Menu Pressures Passwords Options IP-settings Advanced settings to fine tune the fill cycles and settings for service staff. Recipes Recipes Use Recipes Choose at startup Load Recipes Save Recipes Delete Recipes For more information, see Maintenance Instructions [} 78].
  • Page 45 INFICON Menu System | 6 Statistics Statistics Total: Accepted: Rejected: Evacuation: Print Vacuum Decay: Blockage: Reset Gas Fill: Pressure Decay: Press 3 sec Gas Test: Information about test statistics and number cycles events during a test period. For more information see Test Sequence [} 47].
  • Page 46 6 | Menu System INFICON Language Language English Swedish Japanese Italian German Language settings. Info Info Type: ILS500 F Serial number: 1500 CPU software v 3.00.08 Display version: 3.00.09 Backup Battery Level (3,0 V) Brightness display Instrument information, software versions, battery status and display light settings.

  • Page 47: Using The Ils500 F/Fhp

    INFICON Using the ILS500 F/FHP | 7 7 Using the ILS500 F/FHP NOTICE ► Ensure that the tracer gas supply pressure (feeding the ILS500 F/FHP tracer gas inlet) is set up properly. To abort a test sequence and reset to standby, press STOP for 3 s.

  • Page 48: Run A Test

    7 | Using the ILS500 F/FHP INFICON Step Comment Leak detect pressurized Perform leak detection on the test object, pressurized with tracer gas. test object Gas Evacuation For a fast removal of tracer gas after test. Can also include an efficient air purge.
  • Page 49 INFICON Using the ILS500 F/FHP | 7 Perform a tracer gas leak test. Press Stop on the ILS500 F/FHP to remove the tracer gas. ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201) 49 / 94...

  • Page 50: Recipes

    8 | Recipes INFICON 8 Recipes A recipe is a collection of settings suited for a particular test setup. This is used to have different settings for different test objects. 8.1 Recipe Overview ► Click Settings >> Recipes to enter the three Recipe Setup menus.

  • Page 51: Create A Recipe

    INFICON Recipes | 8 Recipe Setup USB Memory connected Import from USB Export to USB Use Recipes Select the box to activate the recipe handling. Choose at Startup When power is switched on, the ILS500 F/FHP prompts the operator to choose recipe.

  • Page 52: Modify A Recipe

    8 | Recipes INFICON Click Settings >> Recipes to enter the three Recipe Setup menus. Click Save Recipe. Enter a name for the recipe. Click Save. 8.2.2 Modify a Recipe Click Settings >> Recipes >> Load Recipe. Select the recipe to modify from the list and click Load.

  • Page 53: Tooling Connection

    INFICON Recipes | 8 Test Settings Setup Blockage Test Tracer Gas Test Gas Evacuation Tooling Disconnection Set which steps to include in the test sequence by selecting the ON boxes. Click Setup to the right of each selected step to enter the Setup menus.
  • Page 54 8 | Recipes INFICON Stand-By STAND-BY Tooling Outputs Go to next step with Start Button and Tooling Inputs Delay Click on the Tooling Outputs to be activated in stand-by (between tests). Choose how to move on to the next step.

  • Page 55: Pre Evacuation

    INFICON Recipes | 8 Choose how to move on to the next step. Set action in drop-down-list. Select the appropriate check box(es) for the Tooling Inputs. Then set “Open” or “Closed” status for each switch symbol. Enter a text to describe the step (click the Info field to activate the on-screen keyboard).

  • Page 56: Gross Leak Tests

    8 | Recipes INFICON Pre Evacuation Setpoint A value of -0.70 barg (-0.07 MPag, -10 psig) is adequate for most applications. This creates 70% vacuum. Extended Pre Evacuation To ensure a complete filling. Evacuation will continue for the set time after Evacuation Level has been attained.
  • Page 57 INFICON Recipes | 8 Vacuum Decay Test Vacuum Decay Test Vacuum Stabilisation Time Vacuum Decay Test Time Vacuum Decay Limit 0.10 Vacuum Stabilisation Time Delay time before Vacuum Decay test begins. Vacuum Decay Test Time Time during which pressure rise is recorded.

  • Page 58: Tracer Gas Filling

    8 | Recipes INFICON 8.3.4 Tracer Gas Filling WARNING The ILS500 F/FHP must never be introduced to pressures higher than that approved for the object to be tested and never beyond the ILS500 F/FHP specification. NOTICE Ensure that the test object has time to become filled before Fill Time Out expires. In particular long narrow objects, as pipes, may need long filling time.

  • Page 59: Blockage Test

    INFICON Recipes | 8 8.3.5 Blockage Test NOTICE This test can only be performed if both test ports are used and connected on either side of the possible blockage. Blockage Test Blockage Test Pressure 0,30 bar Blockage Test Time 2,0 s...

  • Page 60: Tooling Disconnection

    8 | Recipes INFICON Gas Evacuation Setpoint Set desired level of Gas Evacuation. -30 kPag (-0.3 barg, -4.4 psig) creates 30% vacuum, which is adequate for most applications. Extended Gas Evacuation Extends time for gas evacuation, after Gas Evacuation Setpoint has been reached.

  • Page 61: Optimizing The Pre Evacuation Step

    INFICON Recipes | 8 8.4.1 Optimizing the Pre Evacuation Step NOTICE The fastest way to fill a pipe like object is to use push-through filling. That does not require pre evacuation. Begin to determine how deep the pre evacuation needs to be, or if it can be skipped altogether.

  • Page 62: Example - Calculate Tracer Gas Filling

    8 | Recipes INFICON A + D A + B 0,05 + 0,07 = 0,8 0,05 + 0,1 The average tracer gas concentration in this example will be 0.8 (80%). When using a tracer gas mix of 5% the result will be: 0.8 x 5% = 4%...

  • Page 63: Optimizing The Tracer Gas Filling

    INFICON Recipes | 8 of air left in the pipe. This is equivalent to 0.57 m (1.9 ft.). This air volume is normally small enough to be mixed into the tracer gas by turbulence and diffusion. 8.4.2 Optimizing the Tracer Gas Filling Regulation of the tracer gas pressure can either be controlled by: •...

  • Page 64: Troubleshooting

    9 | Troubleshooting INFICON 9 Troubleshooting 9.1 Fault Symptoms Fault Symptom Fault Measures Evacuation Failed Failed to reach vacuum within the Check the compressed air supply. specified time. Large leak on Test Object or connections. Gas Fill Failed Failed to fill to the right pressure Check the incoming gas pressure.
  • Page 65 INFICON Troubleshooting | 9 Hardware Test Press "TEST" OUTPUTS ILS500 F plugged Vacuum: 0.00 ILS500 F + Object Pressure: 0.00 TEST STOP • For troubleshooting and testing of the system, use Service menu. • For remote troubleshooting, use Service Run menu.
  • Page 66 9 | Troubleshooting INFICON Pressure and Vacuum Sensors Hardware Test Pressure and Vacuum Sensors Zero Points are OK Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP Zero points of pressure and vacuum sensors are tested. Possible results: • Zero Points are OK •...
  • Page 67 INFICON Troubleshooting | 9 Internal leakage can result in: • False vacuum decay rejects • Increased tracer gas consumption Venturi Pump Hardware Test Venturi Pump Max Vacuum OK Vacuum: –0.88 Pressure: 0.00 CONTINUE STOP Checking max vacuum of Venturi pump. Possible results: •...
  • Page 68 9 | Troubleshooting INFICON The overall tightness of the manifold is tested using the vacuum raise method. Possible results: • No Leakage from Outside • Leakage from Outside Leaks in the manifold can result in: • False vacuum decay rejects •...
  • Page 69 INFICON Troubleshooting | 9 Tracer Gas Fill Valve Hardware Test Tracer Gas Fill Valve No Internal Leakage Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP The step tests the gas fill valve for internal leakage by registering pressure rise behind the valve.
  • Page 70 9 | Troubleshooting INFICON NOTICE This test will fail if both test ports are connected to a test object. Proceed and then repeat the entire hardware test sequence with both ports plugged to perform this test step. This step tests Test Port 2 valve for internal leakage by registering pressure rise behind the valve.
  • Page 71 INFICON Troubleshooting | 9 External Gas Leaks Hardware Test Check for Leaks with Hand Probe Vacuum: 0.00 Pressure: 0.50 CONTINUE STOP The ILS500 F/FHP is now prepared for a manual test for external leakage. Use a Leak detector with hand probe to check for leakage.
  • Page 72 9 | Troubleshooting INFICON Internal leakage can result in: • False pressure and vacuum decay rejects • Increased tracer gas consumption Evacuation Valve Hardware Test Evacuation Valve Valve works! Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP This step tests that evacuation valve opens to release tracer gas to exhaust. Same test as previously but under pressure instead of vacuum.
  • Page 73 INFICON Troubleshooting | 9 Indicator Lamps Hardware Test Lamp in Start Button Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP Hardware Test Green Lamp (Top Left) Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201) 73 / 94...
  • Page 74 9 | Troubleshooting INFICON Hardware Test Red Lamp (Bottom Left) Vacuum: 0.00 Pressure: 0.00 CONTINUE STOP This is a “manual” test. The ILS500 F/FHP lights up one lamp at the time. Simply check that the right lamp comes on. ► Check function of each lamp by pressing “Continue”.

  • Page 75: Hardware Error Messages

    INFICON Troubleshooting | 9 Hardware Test Press Stop Button (Bottom Right) Vacuum: 0.00 Pressure: 0.00 STOP This is a “manual” test. The test continues when the correct button is pressed. The test checks the activated START and STOP buttons only. Use INPUT menu under Service menu to check buttons that are turned off.
  • Page 76 9 | Troubleshooting INFICON Tested Unit Tested Feature Reason for Error Action Venturi Pump Maximum vacuum Compressed air pressure Adjust compressed air too low or too high. pressure. Dirt inside Venturi. Remove and clean Venturi. Dirty or broken Venturi Replace two upper valves pilot valves.
  • Page 77 INFICON Troubleshooting | 9 Tested Unit Tested Feature Reason for Error Action Gas Valve Manifold Leaks to outside Wrongly assembled gas Remove leaking valve. valve. Clean and grease valve seal before installing again. See instructions. Wrongly installed Remove leaking unit.

  • Page 78: Maintenance Instructions

    10 | Maintenance Instructions INFICON 10 Maintenance Instructions There are three different parts that needs regular maintenance: • Venturi Pump Needs regular cleaning. • Gas Valves Needs regular cleaning and wears out. • Pilot Valves Maintenance free if incoming compressed air is dry and filtered to 5 µm.

  • Page 79: Interior View

    INFICON Maintenance Instructions | 10 10.2.2 Interior View Pilot Valve 6 Pilot Valve 1 Venturi Pump (Ejector) Evacuation Valve Tracer Gas Fill Valve Test Port Valve 2 Vacuum Sensor Control Valve Pressure Sensor (HP model only) Vacuum Sensor Pressure Sensor Pilot Valve Ramp The pilot valves are characterized by a dual function.

  • Page 80: Removing The Cover

    10 | Maintenance Instructions INFICON 10.2.3 Removing the Cover Use a T25 key to remove the two screws holding the right hand cover (next to gas ports). Slide the cover back and lift it off. Rock the rear end of the cover up and down a few times to loosen.
  • Page 81 INFICON Maintenance Instructions | 10 Remove the hose fitting from the Venturi. Install new Venturi or use compressed air jet and a cotton bud, pipe cleaner or small brush to clean the nozzles inside the Venturi. Replace hose fitting on Venturi inlet.

  • Page 82: Replacing Gas Valves

    10 | Maintenance Instructions INFICON 10.2.5 Replacing Gas Valves Use a 3 mm Allen key to remove the four screws holding the valve to be changed. Lift the old valve out and put the new valve in. Notice the correct orientation in the picture below.

  • Page 83: Replacing Sensors

    Tighten the screw. Replace the cover. 10.2.7 Replacing Sensors CAUTION Service of the sensors may only be carried out by service organizations authorized for this purpose by INFICON. 10.3 Functional Verification See Perform Hardware Test [} 64]. ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201) 83 / 94...

  • Page 84: Service

    11 | Service INFICON 11 Service In case of a dysfunctional Sensistor ILS500 F/FHP, please send the product for service at your most convenient service facility. Please visit http://www.inficon.com for addresses. 84 / 94 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 85: Spare Parts And Accessories

    INFICON Spare Parts and Accessories | 12 12 Spare Parts and Accessories Pos. Part Type Part No. Power Cables 591-146 591-147 591-853 No-Stop Maintenance Kit, 590-680 Standard Model Part Qty. Ejector E240 591-422 Valve 3/2 10 bar 591-419 Valve to valve block VQC1000...

  • Page 86: Support From Inficon

    Customer Service Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Service Representative. If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your instrument.

  • Page 87: Disposal

    If you wish you can return this INFICON product to the manufacturer for recovery. The manufacturer has the right to refuse taking back products that are inadequately packed and thereby presents safety and/or health risks to the staff.

  • Page 88: Eu Declaration Of Conformity

    15 | EU Declaration of Conformity INFICON 15 EU Declaration of Conformity 88 / 94 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 89: Ec Declaration Of Incorporation

    INFICON EC Declaration of Incorporation | 16 16 EC Declaration of Incorporation ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201) 89 / 94...

  • Page 90: Declaration Of Conformity

    17 | UK Declaration of Conformity INFICON 17 UK Declaration of Conformity 90 / 94 ILS500 F_FHP-Operation-manual-ninp69en1-02-(2201)

  • Page 91: Parameter Index

    INFICON Appendix A | 18 18 Appendix A 18.1 Parameter Index Parameter Range Factory Default Customer Modification Abort Above Fill Setpoint 20 % Block Test Pressure 0.3 bar Blockage Test Time Blockage Test Choose at startup Demo Mode End of Test Signal Evacuation Timeout 10.0 s...
  • Page 92 18 | Appendix A INFICON Parameter Range Factory Default Customer Modification Pressure Decay Test Time Pressure Unit Pulse Fill from (%) of Setpoint Purge Level 0.001 Purge Object Refill Hysteresis 0.2 bar Refill Timeout Status - pin 5 End of Test...

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