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Detects Transparent Glass Wafers with a
Trans-parency
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. Furthermore, the F3M-S ac-
curately detects inexpensive opaque dummy wafers used for
process checks, thus contributing to cost reductions.
Note: Operating conditions are restricted for the detection of transparent wa-
fers. Contact your OMRON representatives for details.
Ordering Information
Applicable wafer size
6 inches (5 inches)
(4.76-mm pitch)
8 inches (6.35-mm pitch)
12 inches (10-mm pitch)
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No. of tiers Functions
Model
25
F3M-S625
Self diagnostic
26
---
F3M-S626
25
F3M-S825
Self diagnostic
26
---
F3M-S826
13
F3M-S1213
Self diagnostic
25
F3M-S1225
Self diagnostic
Features
Automatic Teaching Saves Setting Time Re-
mote Teaching Available
The F3M-S has an automatic teaching function that ensures
easy output adjustments within a minimal time.
Furthermore, the F3M-S has a remote teaching function that
ensures easy output readjustments.
Answerback function during setup and self-
diagnostic function during operation issue
warnings when errors occur!
These alarms contribute to the minimization of system down-
time.
Note: The self-diagnostic output function is not incorporated by the F3M-S826/
-S626.
Prevents Sensor Malfunction and Damage by
OMRON's original optical system, including an emitter and re-
ceiver, is built into the F3M-S. This system prevents Sensor
malfunction and damage by protecting the Sensor from static
electricity that may be charged on semiconductor wafers at
the time of mapping.
AB-288
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