Available Flow Sizes; Gas Factors - Universal Flow Monitors FlowStream FD Series User Manual

Laminar mass flowmeters
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AVAILABLE FLOW SIZES

Each flow meter is offered with the full scale value specified which corresponds to the max flow
rate of the gas. The available ranges for each port size and gas are shown in the below table.
Please refer to the model code in the Ordering Information section to select the desired flow rate.
Port size
Air, N, O2, CO2,
He, Methane
(Max SCFH)
1/8" Min. F.S.
1/8" Max F.S.
1/4" Min. F.S.
1/4" Max F.S.
3/8" Min. F.S.
3/8" Max F.S.
1/2" Min. F.S.
1/2" Max. F.S.
3/4" Min F.S.
3/4" Max. F.S.

Gas Factors

Gas
Symbol
Air
Argon
Methane
Carbon Monoxide
Carbon Dioxide
Ethane
C2H6
Hydrogen
Helium
Nitrogen
Nitrous Oxide
Neon
Oxygen
Propane
C3H8
norm al-Butane
n-C4H10
Acetylene
C2H2
Ethylene
C2H4
iso-Butane
i-C4H10
Krypton
Xenon
FDMAN-1-190214
Air, N, O2, CO2,
He, Methane
(Max SLPM)
5
60
10
360
360
600
600
1400
1400
2600
Absolute
Viscosity* 25°C
Air
184.8989
Ar
226.2399
CH4
110.7595
CO
176.4933
CO2
149.3184
93.5412
H2
89.1535
He
198.4561
N2
178.0474
N2O
148.4124
Ne
311.1264
O2
205.5021
81.4631
74.0536
104.4480
103.1839
74.7846
Kr
251.3249
Xe
229.8483
Argon
(Max SCFH)
2
3
30
45
5
8
180
270
180
270
300
450
300
450
700
1050
700
1050
1300
1980
Gas
Sulfur Hexafluoride
75%Ar / 25% CO2
90% Ar / 10% CO2
92% Ar / 8% CO2
98% Ar / 2% CO2
75% CO2 / 25% Ar
75% Ar / 25% He
75% He / 25% Ar
95% Ar / 5% CH4
To use a gas from this list, first calculate the viscosity
ratio with respect to Air. For example, for N2O the
factor is: 148.4124/184.8989 = 0.803
Scroll down the User Menu until you see USRFCT
and enter the User Factor of 0.803.
Note: When applying (user) gas factors other than
those pre-programmed in the unit, the accuracy will
be further degraded by an additional 1% of full-scale.
Argon
(Max SLPM)
1.5
20
4
135
135
225
225
525
525
990
Absolute
Symbol
Viscosity* 25°C
SF6
153.5320
C-25
206.9763
C-10
218.6026
C-8
220.1352
C-2
224.7148
C-75
168.2250
HE-75
231.6056
HE-25
234.6860
P-5
223.9106
Page 19

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