Related Manuals for Agilent Technologies UHV-24
Summary of Contents for Agilent Technologies UHV-24
- Page 1 Vacuum Products Division UHV-24/UHV-24p INSTRUCTION MANUAL Ionization Gauge Manual No. 699905505 Revision F January 2014...
- Page 2 UHV-24/UHV-24p Ionization Gauge Copyright 2014 Agilent, Inc.
- Page 3 UHV-24/UHV-24p Ionization Gauge Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replace, or refund an equitable portion of the purchase price of the Product.
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Page 5: Table Of Contents
UHV-24/UHV-24p Ionization Gauge Contents Preface .............................. 7 Hazard and Safety Information ...................... 7 Contacting Agilent ........................9 UHV-24/UHV-24p Ionization Gauge ....................11 Principles of Operation ........................ 11 Installation ........................... 12 Operating Specifications ......................13 Maintenance: Filament Replacement ................... 17 Appendix A. Gas Correction Factor Table ................... 19... - Page 6 UHV-24/UHV-24p Ionization Gauge This page intentionally left blank.
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Page 7: Preface
UHV-24/UHV-24p Ionization Gauge Preface Hazard and Safety Information This product must only be operated and maintained by trained personnel. This manual uses the following standard safety protocols: WARNING Warnings indicate a particular procedure or practice, which if not followed correctly, could lead to serious injury. - Page 8 UHV-24/UHV-24p Ionization Gauge Grounding the Multi-Gauge and senTorr Controllers Be certain that your UHV-24/UHV-24p Ion Gauge Controller and vacuum system are separately grounded to a common ground. ❑ WARNING Do not place a ground wire between the vacuum chamber and the controller chassis; large continuous currents could flow through it.
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Page 9: Contacting Agilent
UHV-24/UHV-24p Ionization Gauge Vacuum Equipment and Cleanliness Cleanliness is vital when servicing any vacuum equipment. CAUTION Do not use silicone oil or silicone grease. Use powder-free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces. Do not clean any aluminum parts with Alconox. AIconox is not compatible with aluminum and will cause damage. - Page 10 UHV-24/UHV-24p Ionization Gauge This page intentionally left blank.
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Page 11: Uhv-24/Uhv-24P Ionization Gauge
UHV-24/UHV-24p Ionization Gauge UHV-24/UHV-24p Ionization Gauge The UHV-24 Nude Ionization Gauge, with an x-ray limit of 2x10 Torr, provides reliable pressure measurement from 1 mTorr down to 2x10 Torr, with reduced performance at pressures lower than 2x10 Torr. The UHV-24p Nude Ionization Gauge utilizes an extremely thin collector which lowers its x-ray limit to 5x10 Torr. -
Page 12: Installation
For UHV-24 gauges, S for air (nitrogen) is 25 (Torr) . For the UHV-24p, S for air (Nitrogen) is 20 (Torr) . The normal operating electron current is 4 mA. For the UHV-24, the ion current at a pressure of 10 Torr is 10... -
Page 13: Operating Specifications
10 mA for pressures lower than 5x10-10 Torr 0.1 mA ❑ for pressure over 1x10 Torr Materials Filament: Tungsten or thoria-coated Iridium Filament Supports: SST Collector - tungsten: ❑ 0.007" diameter for UHV-24 ❑ 0.002" for UHV-24p Grid: SST Feedthrough: SST, Alumina, Nickel Alloy... - Page 14 UHV-24/UHV-24p Ionization Gauge Figure 2 Typical Gauge Characteristics Graphs Application Notes Measurement of ultra-high vacuum is not a trivial undertaking. There are many factors that contribute to measurement problems. Some other concerns include that: ❑ The gauge sensitivity factor is based on nitrogen and very little, if any, nitrogen is present in UHV systems that are leak tight ❑...
- Page 15 UHV-24/UHV-24p Ionization Gauge Pumping speed for a nude ion gauge is typically around 0.5 litres/sec. The pumping speed is affected by the emission current. The higher the emission current the higher the pumping speed. ❑ Ion gauge out-gassing occurs by virtue of operating the filament. Even after the gauge is degassed the filaments continue to generate gas when on.
- Page 16 Degas All UHV-24 and UHV24p gauges are operated and degassed at the factory before shipment. Whether to degas the gauge after installation depends upon the application. In large systems that take a long time to pump down, such as several days, or will be baked for an extended period of time, degassing the gauge has a negligible affect.
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Page 17: Maintenance: Filament Replacement
UHV-24/UHV-24p Ionization Gauge Maintenance: Filament Replacement Agilent’s nude gauges are equipped with dual filaments. The filament assembly is easily replaced if it is damaged or broken. The replacement filament kit contains two filament assemblies and an Allen wrench. Tungsten Filament Replacement This procedure replace the tungsten filament (Part No. - Page 18 UHV-24/UHV-24p Ionization Gauge Thoria-Coated Iridium Filament Replacement This replacement filament kit (Part No. 9710028) contains two thoria-coated iridium filaments stapled to a cardboard backing and packed in a foam-lined plastic box. Each filament also has a stabilizing bar soldered to the base of the filament for rigidity.
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Page 19: Appendix A. Gas Correction Factor Table
Lewis Research Center, NASA Technical Note TND-5285, National Aeronautics and Space Administration, Washington, DC, June 1969. To automatically convert the UHV-24/UHV-24p readings (normally calibrated for nitrogen): ❑ Enter the relative gas correction constant through the front panel key function F GAS CORR. - Page 20 UHV-24/UHV-24p Ionization Gauge Table 2 Gas Correction Factor Table...
- Page 21 UHV-24/UHV-24p Ionization Gauge Table B-0 Gas Correction Factor Table (Continued)
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- Page 23 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
- Page 24 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
- Page 25 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
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- Page 28 Service & Support North America India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2, Lexington, MA 02421 USA 230/231, Sahar Road, 2 Jalan SS21/37, Damansara Uptown Tel.: +1 781 861 7200...